| Project/Area Number |
16K06033
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Nara National College of Technology |
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Principal Investigator |
TAMAKI Takayuki 奈良工業高等専門学校, 電子制御工学科, 准教授 (80455154)
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| Project Period (FY) |
2016-04-01 – 2019-03-31
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| Project Status |
Completed (Fiscal Year 2018)
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| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2018: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2017: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
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| Keywords | マイクロ接合 / フェムト秒レーザー / レーサー接合 / ガラス / 低真空 / マイクロ加工 / 真空 / 炭酸ガスレーザー / マイクロ接合法 / マイクロプロセッシング / 生産工学 / 材料加工・処理 / 応用光学 |
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| Outline of Final Research Achievements |
In this research, we have developed a dual wavelength laser microwelding system under low vacuum that can weld materials in large area at high speed and high quality by use of a continuous-wave laser with a wavelength at which the material linearly absorbs and an ultrashort laser pulses. In particular, the dual wavelength laser microwelding system was developed by using an ultrashort laser source currently available, a CO2 laser source for continuous wave, an automatic three-dimensional stage, and so on. Furthermore, a mechanism which was capable of changing the atmosphere pressure at the time of welding was incorporated into the welding system to develop a dual wavelength laser microwelding under low vacuum. Using this laser microwelding system, laser microprocessing inside glass and laser microwelding between glass substrates were performed.
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| Academic Significance and Societal Importance of the Research Achievements |
本研究では、高速かつ高品位に大面積を接合可能な低真空下における２波長レーザーマイクロ接合システムの開発を行った。本システムを用いれば、加工時の圧力制御、および、超短光パルス、または、連続発振光の出力制御により、従来の超短光パルスマイクロ接合法における溶融領域の大きさ、深さを、６倍以上にわたり自在に調整することができると考えられる。さらに、本接合システムを活用することで得られる、加工特性、熱的特性などの知見をもとに、製造技術のさらなる発展が期待される。
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