Submicron-scale selective metallization process for 3D integration technology

• Project/Area Number: 17H02769
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials
• Research Institution: National Institute for Materials Science
• Principal Investigator: MINARI Takeo 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 独立研究者 (90443035)
• Project Period (FY): 2017-04-01 – 2020-03-31
• Project Status: Completed (Fiscal Year 2019)
• Budget Amount: ¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000); Fiscal Year 2019: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000); Fiscal Year 2018: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000); Fiscal Year 2017: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
• Keywords: プリンテッドエレクトロニクス / 無電解めっき / 三次元実装 / 有機トランジスタ / 有機半導体 / 有機半導体デバイス / 表面・界面物性

Outline of Final Research Achievements

In this project, we developed "ultrahigh-resolution Printed Electronics" and "selective electroless plating" techniques for realizing a novel 3-dimentional integration technology. Printed Electronics technique using metal nanoparticle ink realized printable interconnections with the line width of 0.8 micrometer. The electroless plating techniques enabled the direct formation of metal interconnections with the line width of 1 micrometer. We also realized the 3-dimensional layer-by-layer stacking process with the connection between each layers through via holes.

Academic Significance and Societal Importance of the Research Achievements

金属のインクを塗って電子回路を描く「プリンテッドエレクトロニクス」技術と、任意の領域のみを自発的にめっきで金属化する「選択的無電解めっき」技術を開発し、これまでより微細な配線を形成した。さらに配線を三次元的に積層する技術を開発し、複雑な電子回路ができるようになった。

Research Products

• [Int'l Joint Research] 中国科学院/中山大学/鄭州大学(中国)
• [Int'l Joint Research] 中国科学院/中山大学/鄭州大学(中国)
• [Int'l Joint Research] Zhengzhou University/Sun Yat-Sen University(China)
• [Int'l Joint Research] Beijing Institute of Graphic Communicati/Tsinghua University(China)
• [Journal Article] A multidimensional scheme of characterization for performance deterioration behavior of flexible devices under bending deformation (2020)
  • Author(s): Kamiya Shoji、Izumi Hayato、Sekine Tomohito、Shishido Nobuyuki、Sugiyama Hiroko、Haga Yasuko、Minari Takeo、Koganemaru Masaaki、Tokito Shizuo
  • Journal Title: Thin Solid Films Volume: 694 Pages: 137613-137613
  • DOI: 10.1016/j.tsf.2019.137613
  • Peer Reviewed
• [Journal Article] The rise of conductive copper inks: challenges and perspectives (2020)
  • Author(s): Li Wanli、Sun Qingqing、Li Lingying、Jiu Jinting、Liu Xu-Ying、Kanehara Masayuki、Minari Takeo、Suganuma Katsuaki
  • Journal Title: Applied Materials Today Volume: 18 Pages: 100451-100451
  • DOI: 10.1016/j.apmt.2019.100451
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Fabrication of Two-Dimensional Crystalline Organic Films by Tilted Spin Coating for High-Performance Organic Field-Effect Transistors (2019)
  • Author(s): Dai Fuhua、Liu Xuying、Yang Tengzhou、Qian Jun、Li Yun、Gao Yang、Xiong Pan、Ou Hai、Wu Jin、Kanehara Masayuki、Minari Takeo、Liu Chuan
  • Journal Title: ACS Applied Materials & Interfaces Volume: 11 Issue: 7 Pages: 7226-7234
  • DOI: 10.1021/acsami.8b21298
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Analysis of Ultrahigh Apparent Mobility in Oxide Field‐Effect Transistors (2019)
  • Author(s): Chen Changdong、Yang Bo‐Ru、Li Gongtan、Zhou Hang、Huang Bolong、Wu Qian、Zhan Runze、Noh Yong‐Young、Minari Takeo、Zhang Shengdong、Deng Shaozhi、Sirringhaus Henning、Liu Chuan
  • Journal Title: Advanced Science Volume: 6 Issue: 7 Pages: 1801189-1801189
  • DOI: 10.1002/advs.201801189
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] 3D cross-linking N-doped graphene framework for high sulfur nanocrystal storage (2019)
  • Author(s): Qian Binbin、Liu Chaodeng、Xu Junmin、Sun Qingqing、Yang Huige、Liu Wentao、Zhang Li、Minari Takeo、Liu Xuying、Chen Jinzhou
  • Journal Title: Journal of Physics D: Applied Physics Volume: 52 Issue: 29 Pages: 295502-295502
  • DOI: 10.1088/1361-6463/ab182e
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Rapid Laser Annealing of Silver Electrodes for Printing Organic Thin-Film Transistors on Plastic Substrates (2019)
  • Author(s): Huang Kairong、Dai Fuhua、Sun Qingqing、Yang Tengzhou、Xu Huihua、Liu Xuying、Minari Takeo、Kanehara Masayuki、Liu Chuan
  • Journal Title: IEEE Transactions on Electron Devices Volume: 66 Issue: 6 Pages: 2729-2734
  • DOI: 10.1109/ted.2019.2911310
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] A General Approach to Probe Dynamic Operation and Carrier Mobility in Field‐Effect Transistors with Nonuniform Accumulation (2019)
  • Author(s): Liu Chuan、Chen Changdong、Li Xiaojie、Hu Sujuan、Liu Chenning、Huang Kairong、Dai Fuhua、Zhang Baijun、Liu Xuying、Minari Takeo、Noh Yong‐Young、Chen Jun
  • Journal Title: Advanced Functional Materials Volume: 29 Issue: 29 Pages: 1901700-1901700
  • DOI: 10.1002/adfm.201901700
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Wafer-scale and deterministic patterned growth of monolayer MoS2 via vapor-liquid-solid method (2019)
  • Author(s): S. Li , Y-C. Lin, X-Y. Liu, Z. Hu, J. Wu, H. Nakajima, S. Liu, T. Okazaki, W. Chen, T. Minari, Y. Sakuma, K. Tsukagoshi , K. Suenaga, T. Taniguchi, M. Osada
  • Journal Title: Nanoscale Volume: 11 Issue: 34 Pages: 16122-16129
  • DOI: 10.1039/c9nr04612g
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Organic thin-film transistors with over 10?cm2/Vs mobility through low-temperature solution coating (2018)
  • Author(s): Liu Chuan、Liu Xuying、Minari Takeo、Kanehara Masayuki、Noh Yong-Young
  • Journal Title: Journal of Information Display Volume: 19 Issue: 2 Pages: 71-80
  • DOI: 10.1080/15980316.2018.1430068
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Functional biomaterials towards flexible electronics and sensors (2018)
  • Author(s): Sun Qingqing、Qian Binbin、Uto Koichiro、Chen Jinzhou、Liu Xuying、Minari Takeo
  • Journal Title: Biosensors and Bioelectronics Volume: 119 Pages: 237-251
  • DOI: 10.1016/j.bios.2018.08.018
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Recyclable Oil-Absorption Foams via Secondary Phase Separation (2018)
  • Author(s): Wang Yongtao、Yang Huige、Chen Zhihao、Chen Ning、Pang Xinchang、Zhang Li、Minari Takeo、Liu Xuying、Liu Hongzhi、Chen Jinzhou
  • Journal Title: ACS Sustainable Chemistry & Engineering Volume: 6 Issue: 11 Pages: 13834-13843
  • DOI: 10.1021/acssuschemeng.8b01950
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Essential Effects on the Mobility Extraction Reliability for Organic Transistors (2018)
  • Author(s): Xu Yong、Sun Huabin、Liu Ao、Zhu Huihui、Li Binhong、Minari Takeo、Balestra Francis、Ghibaudo Gerard、Noh Yong-Young
  • Journal Title: Advanced Functional Materials Volume: 28 Issue: 42 Pages: 1803907-1803907
  • DOI: 10.1002/adfm.201803907
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Solution-processable liquid crystalline chrysene semiconductors with wide band gap: Self-organization and carrier transport properties (2018)
  • Author(s): Yang Tengzhou、Dai Fuhua、Iino Hiroaki、Kanehara Masayuki、Liu Xuying、Minari Takeo、Liu Chuan、Hanna Junichi
  • Journal Title: Organic Electronics Volume: 63 Pages: 184-193
  • DOI: 10.1016/j.orgel.2018.09.021
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Layer-by-layer printing non-volatile organic thin-film transistor memory with a planarly-oriented DNA-complex dielectric (2018)
  • Author(s): Lijuan Liang, Xuying Liu, Masayuki Kanehara, Norihisa Kobayashi, and Takeo Minari
  • Journal Title: Organic Electronics Volume: 55 Pages: 75-81
  • DOI: 10.1016/j.orgel.2018.01.008
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Generating one-dimensional micro- or nano-structures with in-plane alignment by vapor-driven wetting kinetics (2017)
  • Author(s): C. Liu, X. Liu, Y. Xu, H. Sun, Y. Li, Y. Shi, M. V. Lee, T. Yamada, T. Hasegawa, Y.-Y. Noh, T. Minari
  • Journal Title: Materials Horizons Volume: 4 Issue: 2 Pages: 259-259
  • DOI: 10.1039/c6mh00411c
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Ultra-high-resolution printing of flexible organic thin-film transistors (2017)
  • Author(s): Xuying Liu, Masayuki Kanehara, Chuan Liu, Takeo Minari
  • Journal Title: Journal of Information Display Volume: 2 Issue: 2 Pages: 1-7
  • DOI: 10.1080/15980316.2017.1298538
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] A unified understanding of charge transport in organic semiconductors: the importance of attenuated delocalization for the carriers (2017)
  • Author(s): Takeo Minari and Yong-Young Noh Chuan Liu , Kairong Huang , Won Tae Park , Minin Li , Tengzhou Yang , XUYING LIU , Lijuan Liang
  • Journal Title: Materials Horizona Volume: Accepted Manuscript Issue: 4 Pages: 1-7
  • DOI: 10.1039/c7mh00091j
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Homogeneous dewetting on large-scale microdroplet arrays for solution-processed electronics (2017)
  • Author(s): Xuying Liu, Chuan Liu, Kenji Sakamoto, Takeshi Yasuda, Pan Xiong, Lijuan Liang, Tengzhou Yang, Masayuki Kanehara, Jun Takeya, Takeo Minari
  • Journal Title: NPG Asia Materials Volume: 9 Issue: 7 Pages: e409-e409
  • DOI: 10.1038/am.2017.123
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Device Physics of Contact Issues for the Overestimation and Underestimation of Carrier Mobility in Field-Effect Transistors (2017)
  • Author(s): Chuan Liu, Gongtan Li, Riccardo Di Pietro, Jie Huang, Yong-Young Noh, Xuying Liu, Takeo Minari
  • Journal Title: Physical Review Applied Volume: 8 Issue: 3 Pages: 034020-034020
  • DOI: 10.1103/physrevapplied.8.034020
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] 表面選択塗布法による電子回路の自己形成 (2017)
  • Author(s): 三成剛生、Xuying Liu、金原正幸
  • Journal Title: 表面科学 Volume: 38 Issue: 5 Pages: 222-222
  • DOI: 10.1380/jsssj.38.222
  • NAID: 130007332068
  • Peer Reviewed
• [Journal Article] DNA as Functional Material in Organic-Based Electronics (2017)
  • Author(s): L. Liang, Y. Fu, D. Wang, Y. Wei, N. Kobayashi and T. Minari
  • Journal Title: Applied Science Volume: 8 Issue: 1 Pages: 90-100
  • DOI: 10.3390/app8010090
  • Peer Reviewed / Int'l Joint Research
• [Presentation] 真空紫外光を用いた印刷・めっきによる配線技術 (2020)
  • Author(s): 三成 剛生, 李 万里, 孫 晴晴, 李 玲頴, Xuying Liu, 金原正幸
  • Organizer: シリコン材料・デバイス研究会
  • Invited
• [Presentation] Printing of Flexible Electronics for Wearable Applications (2019)
  • Author(s): Takeo Minari, Xuying Liu, Qingqing Sun, Wanli Li, Akitsu Shigetou, Masayuki Kanehara
  • Organizer: ICEP-IACC 2019
  • Int'l Joint Research / Invited
• [Presentation] Air-stable Cu complex inks for printed electronics with high conductivity and high reliability (2019)
  • Author(s): Wanli Li, Qingqing Sun, Xuying Liu, Katsuaki Suganuma, Takeo Minari
  • Organizer: ICEP-IACC 2019
  • Int'l Joint Research
• [Presentation] Fully-Printed Organic Thin-Film Transistors and Circuits (2019)
  • Author(s): Takeo Minari, Xuying Liu, Qingqing Sun, Wanli Li, Masayuki Kanehara
  • Organizer: M&BE 2019
  • Int'l Joint Research
• [Presentation] Alignment-induced hole mobility enhancement of pBTTT organic field-effect transistors by hydrophobic nano-grooved gate dielectric surfaces (2019)
  • Author(s): Bulgarevich Kirill, Kenji Sakamoto, Takeo Minari, Takeshi Yasuda, Kazushi Miki, Masayuki Takeuchi
  • Organizer: M&BE 2019
  • Int'l Joint Research
• [Presentation] Fabrication of 3-Dimentional Printed Electronic Circuits (2019)
  • Author(s): Takeo Minari
  • Organizer: ICPAC Yangon 2019
  • Int'l Joint Research / Invited
• [Presentation] High-performance organic thin-film transistors by printing (2019)
  • Author(s): Takeo Minari, Qingqing Sun, Wanli Li, Xuying Liu, Masayuki Kanehara
  • Organizer: SPIE 2019
• [Presentation] 疎水性ナノグルーブ表面によって配向させた液晶性高分子有機電界効果トランジスタの特性評価 (2019)
  • Author(s): 坂本 謙二, ブルガレビッチ キリル, 安田 剛, 三成 剛生, 竹内 正之
  • Organizer: 2019年日本液晶学会討論会
• [Presentation] Alignment-Induced Mobility Enhancement and Small Device-to-Device Variation of Polymer-Based Organic Field-Effect Transistors with Highly Hydrophobic Gate DIelectic Surfaces (2019)
  • Author(s): ブルガレビッチ キリル, 坂本 謙二, 安田 剛, 三成 剛生, 三木 一司, 竹内 正之
  • Organizer: 第80回応用物理学会秋季学術講演会
  • Int'l Joint Research / Invited
• [Presentation] Fabrication of flexible devices using Printed Electronics (2019)
  • Author(s): Takeo Minari
  • Organizer: NMS 2019
  • Int'l Joint Research / Invited
• [Presentation] Flexible Electronics by Room-Temperature Printing Technology (2019)
  • Author(s): Takeo Minari, Qingqing Sun, Wanli Li, Xuying Liu, Masayuki Kanehara
  • Organizer: IMPACT-IAAC 2019
  • Int'l Joint Research / Invited
• [Presentation] Fabrication of Flexible Electronics by Printing (2019)
  • Author(s): Takeo Minari, Qingqing Sun, Wanli Li, Xuying Liu, Masayuki Kanehara
  • Organizer: Flex China 2019
  • Int'l Joint Research / Invited
• [Presentation] プリンタブルデバイスの作り方 (2019)
  • Author(s): 三成 剛生
  • Organizer: プリンテッドエレクトロニクスの研究開発動向
  • Invited
• [Presentation] Spontaneous patterning of electronic circuits by solution-based printing (2018)
  • Author(s): Takeo Minari
  • Organizer: ICPAC LANGKAWI 2018
  • Int'l Joint Research / Invited
• [Presentation] Printing of Semiconductor Devices for Flexible Applications. 14th IUPAC International Conference on Novel Materials and their Synthesis (2018)
  • Author(s): Takeo Minari
  • Organizer: NMS-XIV
  • Int'l Joint Research / Invited
• [Presentation] Gold Nanoparticle Inks for Room-Temperature Printing Electronic Devices (2018)
  • Author(s): Xuying Liu, Takeo Minari
  • Organizer: International Conference on Flexible and Printed Electronics
  • Int'l Joint Research
• [Presentation] Very High Electrical Stability of Bottom-Gate/Top-Contact Type Polymer-Based Organic Field-Effect Transistors with Perfluoropolymer-Coated Gate Dielectrics (2018)
  • Author(s): Bulgarevich Kirill, 坂本謙二, 三成剛生, 安田剛, 三木一司, 竹内正之
  • Organizer: 第79回応用物理学会秋季学術講演会
• [Presentation] Fully-Printed Non-volatile Organic Thin-film Transistor Memory With DNA-Complex As a Gate Dielectric (2018)
  • Author(s): Lijuan Liang, Xuying Liu, Takeo Minari, Masayuki Kanehara
  • Organizer: SSDM 2018
  • Int'l Joint Research
• [Presentation] Printable Electronic Circuits Based on Metal Nanoparticles and Organic Semiconductors (2018)
  • Author(s): Takeo Minari, Xuying Liu, Masayuki Kanehara
  • Organizer: ICEP-IACC 2018
  • Int'l Joint Research / Invited
• [Presentation] Solution-processed electronic circuits with printable materials (2018)
  • Author(s): Takeo Minari
  • Organizer: Nanjing University Scientific Seminar
  • Int'l Joint Research / Invited
• [Presentation] 室温プリンテッドエレクトロニクスによる高精細電子回路 (2018)
  • Author(s): 三成剛生、Xuying Liu、金原正幸
  • Organizer: 有機光エレクトロニクス部会 第79回研究会
  • Invited
• [Presentation] 印刷技術を使った電子回路の形成 (2018)
  • Author(s): 三成剛生
  • Organizer: 進化するナノインクと先端デバイス技術
  • Invited
• [Presentation] ナノ材料を塗って描く電子回路 (2018)
  • Author(s): 三成剛生、Xuying Liu、金原正幸
  • Organizer: RIKEN-NIMS 第一回 マテリアルズイノベーションコア Workshop
  • Invited
• [Presentation] 印刷エレクトロニクスによる高移動度有機トランジスタ (2018)
  • Author(s): Xuying Liu、三成剛生、金原正幸
  • Organizer: RIKEN-NIMS 第一回 マテリアルズイノベーションコア Workshop
• [Presentation] High-resolution patterning of organic thin-film Transistors (2017)
  • Author(s): Xuying Liu, Takeo Minari
  • Organizer: Seminar on printed electronics in Sun Yat-sen University
  • Int'l Joint Research / Invited
• [Presentation] Solution-processed assembly of flexible electronic circuits (2017)
  • Author(s): Takeo Minari, Xuying Liu, Masayuki Kanehara
  • Organizer: FFSCI Europe 2017
  • Int'l Joint Research / Invited
• [Presentation] Fully-Printed Organic Thin-Film Transistor Array with Hole Mobility Exceeding 13 cm2 V-1 s-1 (2017)
  • Author(s): Xuying Liu, Masayuki Kanehara, Takeo Minari
  • Organizer: IMID2017
  • Int'l Joint Research
• [Presentation] Organic thin-film transistors and circuits by solution-processed selective metalization (2017)
  • Author(s): Takeo Minari, Xuying Liu, Masayuki Kanehara
  • Organizer: IMID2017
  • Int'l Joint Research / Invited
• [Presentation] Organic thin-film transistors with mobility over 10 cm2/Vs by low-temperature solution coating (2017)
  • Author(s): Chuan Liu, Xuying Liu, Takeo Minari, Masayuki Kanehara, Yong-Young Noh
  • Organizer: IMID2017
  • Int'l Joint Research
• [Presentation] Solution-Processed Electronic Circuits with Printable Metal (2017)
  • Author(s): Takeo Minari, Xuying Liu, Masayuki Kanehara
  • Organizer: NMS 2017
  • Int'l Joint Research / Invited
• [Remarks] 三成グループ -プリンテッドエレクトロニクス-
  • URL: https://www.nims.go.jp/group/minari/
• [Remarks] 株式会社プリウェイズ
  • URL: https://priways.co.jp/
• [Remarks] 三成グループ -プリンテッドエレクトロニクス-
  • URL: http://www.nims.go.jp/group/minari/
• [Patent(Industrial Property Rights)] 金属配線を形成する方法 (2019)
  • Inventor(s): 三成 剛生、リュウ シューイン、スン チンチン、李 万里
  • Industrial Property Rights Holder: 国立研究開発法人物質・材料 研究機構
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2019-034506
  • Filing Date: 2019
• [Patent(Industrial Property Rights)] 有機マイクロディスクアレイおよびその製造方法 (2018)
  • Inventor(s): 山本洋平、三成剛生、他2名
  • Industrial Property Rights Holder: 物質・材料研究機構、筑波大学
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2018-016723
  • Filing Date: 2018