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Nanooptoelectromechanical systems for the molecular sensing

Research Project

Project/Area Number 17H03198
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionThe University of Tokyo

Principal Investigator

Kometani Reo  東京大学, 大学院新領域創成科学研究科, 准教授 (90466780)

Co-Investigator(Kenkyū-buntansha) 前田 悦男  東京大学, 大学院工学系研究科(工学部), 助教 (60644599)
Project Period (FY) 2017-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2020: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2019: ¥6,890,000 (Direct Cost: ¥5,300,000、Indirect Cost: ¥1,590,000)
Fiscal Year 2018: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2017: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Keywordsマイクロ・ナノデバイス / 光物性 / プラズモニクス / ナノメカニカル振動子 / NEMS / ナノメカニクス / センシング / スペクトロメーター / 微小共振器 / フォトニック結晶 / 機械材料・材料力学
Outline of Final Research Achievements

In this study, a nanomechanical device were researched for the gas molecular sensing. Specifically, the nanoelectromechanical systems (NEMS)-based spectrometer device were developed using a plasmonic device and nanomechanical resonator as the nanomechanical device for the gas molecular sensing. As a result, NEMS spectrometer with a spiral bull’s eye structure and a circular membrane resonator were proposed, and optical spectrum measurement was demonstrated. Furthermore, fundamental knowledge of a light detection and a controllability of a light absorption was obtained.

Academic Significance and Societal Importance of the Research Achievements

本研究では、NEMSスペクトロメーターの基礎的原理を実証するとともに、その過程において、プラズモニック構造を利用した光吸収制御やナノメカニカル振動子を利用した光検出に関する知見を獲得した。これら獲得した知見は、プラズモニクスやナノメカニクスを深化させるものであり、その体系化において学術的意義は高い。また、創出したNEMSスペクトロメーターは、光学系不要で光スペクトル計測を実現するデバイスであり、材料科学等の研究分野を加速するとともに、生体物質をバイオマーカーとして利用するヘルスケア技術,デバイスの高度化も推し進めるデバイス技術であり、人の健康や活動の増進に貢献すると期待される。

Report

(5 results)
  • 2021 Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • Research Products

    (38 results)

All 2022 2021 2020 2019 2018 2017 Other

All Journal Article (5 results) (of which Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (31 results) (of which Int'l Joint Research: 13 results,  Invited: 8 results) Remarks (2 results)

  • [Journal Article] Highly sensitive vibration measurement method of nanomechanical resonator using convolutional neural network2022

    • Author(s)
      Kohei Tsumune, Shin'ichi Warisawa, Reo Kometani
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: -

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Operando Measurement of Dynamic Characteristics of Nanoelectromechanical Systems Using Scanning Electron Microscopy2021

    • Author(s)
      米谷 玲皇, 割澤 伸一
    • Journal Title

      Journal of The Society of Instrument and Control Engineers

      Volume: 60 Issue: 3 Pages: 213-216

    • DOI

      10.11499/sicejl.60.213

    • NAID

      130007999988

    • ISSN
      0453-4662, 1883-8170
    • Year and Date
      2021-03-10
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Miniaturization process of three-dimensional nanostructures fabricated by focused-ion-beam chemical vapor deposition2021

    • Author(s)
      Reo Kometani, Moe Katsuda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: 12 Pages: 1280021-4

    • DOI

      10.35848/1347-4065/ac3525

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quantification method of stress depth-distribution by micro-Raman spectroscopy for thin film nanomechanical resonator2020

    • Author(s)
      M. Saito, S. Warisawa and R. Kometani
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 59 Issue: SI Pages: SIII02-SIII02

    • DOI

      10.35848/1347-4065/ab79ed

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Ultra-thin Carbon Nanomechanical Resonator Fabrication and Its Dynamic Property Characterization2019

    • Author(s)
      R. Kometani, M. Sekine and S. Warisawa
    • Journal Title

      Sensors and Materials

      Volume: 31 Issue: 3 Pages: 673

    • DOI

      10.18494/SAM.2019.2153

    • ISSN
      0914-4935, 2435-0869
    • Year and Date
      2019-03-08
    • Related Report
      2018 Annual Research Report
    • Open Access
  • [Presentation] Optical force measurement by a nanomechanical resonator electrostatically coupled to a cantilever2021

    • Author(s)
      Reo Kometani
    • Organizer
      The 2021 International Chemical Congress of Pacific Basin Societies
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of an optomechanical resonator with a spiral bull's eye antenna for the measurement of light wavelength2021

    • Author(s)
      Reo Kometani, Penekwong Khemnat, Shin’ichi Warisawa
    • Organizer
      34rd International Microprocesses and Nanotechnology Conference
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Highly Sensitive Vibration Measurement Method of Nanomechanical Resonator Using Convolutional Neural Network2021

    • Author(s)
      Kohei Tsumune, Shin’ichi Warisawa, Reo Kometani
    • Organizer
      34rd International Microprocesses and Nanotechnology Conference
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 畳み込みニューラルネットワークを利用したナノメカニカル振動子の高感度振動計測2021

    • Author(s)
      津旨 航平, 割澤 伸一, 米谷 玲皇
    • Organizer
      第13回集積化 MEMS シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 狭細な透過光スペクトルを有するブルズアイ構造実現のためのスパイラルブラッグリフレクタ2021

    • Author(s)
      大岩 達典, 割澤 伸一, 米谷 玲皇
    • Organizer
      第13回集積化 MEMS シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] 荷電粒子ビーム技術とナノメカニクス2021

    • Author(s)
      米谷 玲皇
    • Organizer
      高分子学会 印刷・情報・電子用材料研究会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 荷電粒子ビーム技術とNEMSセンシング2021

    • Author(s)
      米谷 玲皇
    • Organizer
      電気学会北陸支部学術講演会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] ナノメカニクスとNEMSセンシング2021

    • Author(s)
      米谷 玲皇
    • Organizer
      科学技術交流財団 新産業創出に向けたマイクロセンサデバイス研究会
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Vibration Spectrum Measurement and Phase-Resolved Image Observation of Nanomechanical Resonators by Helium Ion Microscopy2020

    • Author(s)
      Masaki Saito, Shinichi Ogawa, Yukinori Morita, Shin’ichi Warisawa, Reo Kometani
    • Organizer
      33rd International Microprocesses and Nanotechnology Conference
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation method of vibration spectra of nanomechanical resonators using Helium Ion Microscope2020

    • Author(s)
      Masaki Saito, Shinichi Ogawa, Yukinori Morita, Shin’ichi Warisawa, Reo Kometani
    • Organizer
      The 81st JSAP Autumn Meeting 2020
    • Related Report
      2020 Annual Research Report
  • [Presentation] ナノメカニクスと光センシング2020

    • Author(s)
      米谷 玲皇
    • Organizer
      分子研研究会「ナノ空間で光が織りなす分子操作・化学反応制御の新展開」
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] 酸化シリコンのチタン支援高速異方性化学エッチングの加工特性評価2019

    • Author(s)
      西田 裕信、割澤 伸一、米谷 玲皇
    • Organizer
      2019年 第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 顕微ラマン分光法による薄膜メカニカル振動子の応力分布計測手法の構築2019

    • Author(s)
      齊藤 正樹、割澤 伸一、米谷 玲皇
    • Organizer
      2019年 第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] An optomechanical resonator with a plasmonic half bull’s eye antenna and an aperture for wavelength detection2019

    • Author(s)
      R. Kometani, K. Tanaka, S. Warisawa
    • Organizer
      45th International Conference on Micro & Nano Engineering
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of etching characteristics on titanium-assisted chemical vapor etching of silicon dioxide2019

    • Author(s)
      H. Nishida, S. Warisawa, R. Kometani
    • Organizer
      45th International Conference on Micro & Nano Engineering
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Quantification Method of Stress Depth-Distribution by Micro-Raman Spectroscopy for Thin Film Nanomechanical Resonator2019

    • Author(s)
      M. Saito, S. Warisawa and R. Kometani
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of nanomechanical resonaotors elastically couppled in series for sensitive thermal stress detection2018

    • Author(s)
      T. Tanaka, E. Maeda, S. Warisawa and R. Kometani
    • Organizer
      62nd International Conference on Electron, Ion and Photon Beam Technology & Nanofabrication
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 光波長計測のためのスパイラル型ブルズアイアンテナを有する光機械振動子の作製2018

    • Author(s)
      ペンエークウォン ケーマナット, 割澤 伸一, 菅谷 俊夫, 橋本 将太, 河野 行雄, 米谷 玲皇
    • Organizer
      2018年第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Fabrication of optomechanical nanoresonators elastically coupled in series by focused-ion-beam for wavelength measurement2018

    • Author(s)
      K. Tanaka, S. Warisawa and R. Kometani
    • Organizer
      The 79th JSAP Autumn Meeting
    • Related Report
      2018 Annual Research Report
  • [Presentation] Ultra‐thin film carbon mechanical resonator fabrication and its characterization2018

    • Author(s)
      R. Kometani, M. Sekine and S. Warisawa
    • Organizer
      44th International Conference on Micro and Nanoengineering
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] FIB/EB複合リソグラフィーによるナノ光共振器の作製2018

    • Author(s)
      吉原 健太, 割澤 伸一, 米谷 玲皇
    • Organizer
      第9回マイクロ・ナノ工学シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 半円型ブルズアイ構造を有する直列連結型ナノメカニカル振動子によるQ値非依存波長計測2018

    • Author(s)
      田中 航大, 割澤 伸一, 米谷 玲皇
    • Organizer
      第9回マイクロ・ナノ工学シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパイラル型ブルズアイアンテナを有する光機械振動子の作製と光波長検出特性評価2018

    • Author(s)
      ペンエークウォン ケーマナット, 割澤 伸一, 菅谷 俊夫, 橋本 将太, 河野 行雄, 米谷 玲皇
    • Organizer
      第9回マイクロ・ナノ工学シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] Development of Optomechanical Nanoresonators Elastically Coupled in Series for Q Factor Independent Wavelength Measurement2018

    • Author(s)
      K. Tanaka, S. Warisawa and R. Kometani
    • Organizer
      31st International Microprocesses and Nanotechnology Conference
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Wavelength Detection by optomechanical resonator with Spiral Bull’s Eye Antenna2018

    • Author(s)
      K. Penekwong, S. Warisawa, T. Sugaya, S. Hashimoto, Y. Kawano and R. Kometani
    • Organizer
      31st International Microprocesses and Nanotechnology Conference
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 3次元ナノ構造造形技術とナノメカニクス研究2018

    • Author(s)
      米谷 玲皇
    • Organizer
      2018年日本表面真空学会学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 荷電粒子ビーム技術とナノメカニクス研究2018

    • Author(s)
      米谷 玲皇
    • Organizer
      精密工学会 2018年度春季大会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Downsizing of the three-dimensional nanostructure fabricated by focused-ion-beam chemical vapor deposition2017

    • Author(s)
      R. Kometani, K. Nishikawa, E. Maeda
    • Organizer
      43rd International Conference on Micro and Nanoengineering (MNE2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The three-dimensional nanofabrication technology using foucusd-ion-beam2017

    • Author(s)
      R. Kometani
    • Organizer
      Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Detection Characteristics of Strainof Ultra-thin Silicon Structure by Raman Spectroscopy2017

    • Author(s)
      R. Kometani, K. Okada, E. Maeda
    • Organizer
      30th International Microprocesses and Nanotechnology Conference (MNC2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] The Three-Dimensional Nano- and Microstructure Fabrications by Using Focused Ion Beam2017

    • Author(s)
      R. Kometani
    • Organizer
      2017 Materials Research Society (MRS) Fall Meeting & Exhibit
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Remarks] 研究室ホームページ

    • URL

      http://www.lhei.k.u-tokyo.ac.jp/#top

    • Related Report
      2020 Annual Research Report 2018 Annual Research Report 2017 Annual Research Report
  • [Remarks] 研究室ホームページ

    • URL

      http://www.lhei.k.u-tokyo.ac.jp/

    • Related Report
      2019 Annual Research Report

URL: 

Published: 2017-04-28   Modified: 2023-01-30  

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