Development of robust boron-doped diamond superconducting quantum interference devices with tolerance to abrasion, heat and oxidation

• Project/Area Number: 17H07192
• Research Category: Grant-in-Aid for Research Activity Start-up
• Allocation Type: Single-year Grants
• Research Field: Electronic materials/Electric materials
• Research Institution: Waseda University
• Principal Investigator: KAGEURA Taisuke 早稲田大学, 理工学術院, 助手 (20801202)
• Project Period (FY): 2017-08-25 – 2019-03-31
• Project Status: Completed (Fiscal Year 2018)
• Budget Amount: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000); Fiscal Year 2018: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2017: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
• Keywords: SQUID / 超伝導エレクトロニクス / 超伝導ボロンドープダイヤモンド / エピタキシャル成長 / ダイヤモンド / 超伝導 / 微細加工 / ジョセフソン接合 / FIB

Outline of Final Research Achievements

We propose a fabrication process for a single-crystalline boron-doped diamond Josephson junction with two different step structure and demonstrated the first operation of a single-crystalline boron-doped diamond SQUID operating above liquid helium temperature 4.2 K. Moreover, we have established nano- and micro-size patterning processes for superconducting boron-doped diamond films with low damage using selective microwave plasma chemical vapour deposition and selective oxygen plasma etching.

Academic Significance and Societal Importance of the Research Achievements

本研究成果である微細加工技術の確立と液体ヘリウム温度4.2K以上で動作する堅牢なダイヤモンドSQUIDの実現により、従来材料を凌駕する簡便で堅牢な超伝導デバイス応用にダイヤモンドが有用であることを証明した。また、ダイヤモンドは半導体として優れた性能を有しており、半導体と超伝導体の性質を融合した新規デバイスの創出が今後期待される。

Research Products

• [Journal Article] Superconductivity in nano- and micro-patterned high quality single crystalline boron-doped diamond films (2018)
  • Author(s): T. Kageura, M. Hideko, I. Tsuyuzaki, S. Amano, A. Morishita, T. Yamaguchi, Y. Takano, H. Kawarada
  • Journal Title: Diamond and Related Materials Volume: 90 Pages: 181-187
  • DOI: 10.1016/j.diamond.2018.10.013
  • Peer Reviewed
• [Presentation] Diamond Josephson Junctions and SQUID for Superconducting Q-bit (2019)
  • Author(s): T. Kageura, I. Tsuyuzaki, S. Amano, A.Morishita, M. Tachiki, S. Ooi, S. Arisawa, Y. Takano, H. Kawarada
  • Organizer: The 1st International Forum on Quantum Sensing (IFQS2019)
  • Int'l Joint Research
• [Presentation] 液体ヘリウム温度以上で動作可能なボロンドープダイヤモンド超伝導量子干渉計 (2019)
  • Author(s): 森下 葵，蔭浦 泰資，露崎 活人，天野 勝太郎，高野 義彦，立木 実, 大井 修一，有沢 俊一，川原田 洋
  • Organizer: 第66回応用物理学会春季学術講演会
• [Presentation] uperconducting Boron-doped Diamond Josephson Junction Operating up to 7.0K (2018)
  • Author(s): S. Amano, T. Kageura, I. Tsuyuzaki, M. Tachiki, S. Ooi, S. Arisawa, Y. Takano, H. Kawarada
  • Organizer: 2018 MRS Fall Meeting & Exhibit
  • Int'l Joint Research
• [Presentation] Superconductivity in fine patterned single crystalline boron-doped diamond films (2018)
  • Author(s): T. Kageura, I. Tsuyuzaki, S. Amano, A. Morishita, T. Sasagawa, H. Kawarada
  • Organizer: The 3rd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3)
  • Int'l Joint Research
• [Presentation] Superconducting Boron-doped Diamond Josephson Junction Operating above Liquid He Temperature, 4.2K (2018)
  • Author(s): S. Amano, T. Kageura, I. Tsuyuzaki, M. Tachiki, S. Ooi, K. Hirata, S. Arisawa, H. Osato, D. Tsuya, Y. Takano, H. Kawarada
  • Organizer: 2018 International Conference on Solid State Devices and Materials(SSDM2018)
  • Int'l Joint Research
• [Presentation] Superconductivity in high quality single crystal boron-doped diamond films with Tc above 10K (2018)
  • Author(s): T. Kageura, I. Tsuyuzaki, T.Yamaguchi, Y. Takano and H.Kawarada
  • Organizer: 29th International Conference on Diamond and Carbon Materials (ICDCM 2018)
  • Int'l Joint Research
• [Presentation] Superconductivity in Thin- and Micro-Structured Boron-Doped Diamond (2018)
  • Author(s): T. Kageura, M. Hideko, I. Tsuyuzaki, Y. Takano, M. Tachiki, S. Ooi and H.Kawarada
  • Organizer: The 12th New Diamond and Nano Carbons Conference (NDNC 2018)
  • Int'l Joint Research
• [Presentation] 超伝導ボロンドープダイヤモンドジョセフソン接合の液体ヘリウム温度以上での動作条件の検討 (2018)
  • Author(s): 森下葵, 蔭浦泰資, 露崎活人, 天野勝太郎, 高野義彦, 立木実, 大井修一, 有沢俊一, 川原田洋
  • Organizer: 第32回ダイヤモンドシンポジウム
• [Presentation] 液体ヘリウム温度以上で動作可能な超伝導ボロンドープダイヤモンドジョセフソン接合 (2018)
  • Author(s): 森下 葵，蔭浦 泰資，露崎 活人，天野 勝太郎，高野 義彦，立木 実, 大井 修一，有沢 俊一，川原田 洋
  • Organizer: 第79回応用物理学会秋季学術講演会
• [Presentation] (111)ボロンドープダイヤモンドの薄層での超伝導転移温度の向上 (2018)
  • Author(s): 天野 勝太郎, 日出幸 昌邦, 蔭浦 泰資, 露崎 活人, 高野 義彦, 立木 実, 大井 修一, 川原田 洋
  • Organizer: 第65回応用物理学会春季学術講演会
• [Presentation] ボロンドープダイヤモンド超伝導量子干渉計の開発 (2018)
  • Author(s): 蔭浦 泰資, 川原田 洋
  • Organizer: 早稲田大学ナノテクノロジーフォーラム 第 4 回分科会ワークショップ
• [Presentation] Effective Boron-Doping Method Using Custom-Built MPCVD System for High Tc Superconducting Diamond (2017)
  • Author(s): T. Kageura, M. Hideko, I. Tsuyuzaki, Y. Sasama, T. Yamaguchi, Y. Takano, H.Kawarada
  • Organizer: 2017 MRS Fall Meeting & Exhibit
  • Int'l Joint Research
• [Presentation] Single Crystalline Boron-Doped Diamond Superconducting Quantum Interference Devices (2017)
  • Author(s): I. Tsuyuzaki, T. Kageura, M. Hideko, Y. Sasama, T. Yamaguchi, Y. Takano, M.Tachiki, S. Ooi, K. Hirata, S. Arisawa, H. Kawarada
  • Organizer: 2017 MRS Fall Meeting Exhibit
  • Int'l Joint Research
• [Presentation] Heavily boron-doping for power electronics and superconductivity (2017)
  • Author(s): T. Kageura, Y. Takano, H. Kawarada
  • Organizer: OIST Diamond Workshop 2017
  • Int'l Joint Research
• [Presentation] Single Crystalline Boron-doped Diamond Superconducting Quantum Interference Devices (2017)
  • Author(s): T.Kageura, I.Tyuyuzaki, M.Hideko, Y.Sasama, T.Yamaguchi, Y.Takano, M.Tachiki, S.Ooi, K.HIrata, S.Arisawa, H.Kawarada
  • Organizer: International conference on Materials and Systems for Sustainability 2017
  • Int'l Joint Research
• [Presentation] Boron-doped Diamond Superconducting Quantum Interference Devices with Two Step-Edge Josephson Junctions (2017)
  • Author(s): I. Tsuyuzaki, T. Kageura, M. Hideko, Y. Sasama, T. Yamaguchi, Y. Takano, M. Tachiki, K. Hirata, S. Ooi, S. Arisawa, H. Kawarada
  • Organizer: 2017 International Conference on Solid State Devices and Materials
  • Int'l Joint Research
• [Presentation] 不連続(111)面を利用した超伝導ボロンドープ単結晶ダイヤモンドジョセフソン接合 (2017)
  • Author(s): 天野 勝太郎, 蔭浦 泰資, 日出幸 昌邦, 露崎 活人, 笹間 陽介, 山口 尚秀, 高野 義彦, 立木 実, 大井 修一, 平田 和人, 有沢 俊一, 川原田 洋
  • Organizer: 第31回ダイヤモンドシンポジウム
• [Presentation] 不連続(111)面を利用した超伝導ボロンドープ単結晶ダイヤモンドジョセフソン接合 (2017)
  • Author(s): 天野 勝太郎, 蔭浦 泰資, 日出幸 昌邦, 露崎 活人, 大里 啓孝, 津谷 大樹, 笹間 陽介, 山口 尚秀, 高野 義彦, 立木 実, 大井 修一, 平田 和人, 有沢 俊一, 川原田 洋
  • Organizer: 第78回応用物理学会秋季学術講演会