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Development of a method to produce glass-to-glass anodically-bonded interfaces in which conductive parts and insulating parts co-exist

Research Project

Project/Area Number 17K06860
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Material processing/Microstructural control engineering
Research InstitutionOsaka University

Principal Investigator

Takahashi Makoto  大阪大学, 接合科学研究所, 講師 (10294133)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2018: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords接合界面の機能化 / 陽極接合 / 陽極酸化 / 界面微細組織 / 電流経路形成 / 微小力学試験 / 封止構造 / 接合界面組織 / 界面反応 / 導通性 / 光透過性
Outline of Final Research Achievements

In glass-to-glass anodically-bonded joints, conductor layers that were mediated bonding between glasses remain at the joint interfaces. Because of presence of these layers, entire joint interfaces were electrically short-circuited, and do not transmit light. In this study, by controlling oxidation of intermediate conductor layers at each location, it was made to possible to separate the portions where the unoxidized conductor layers remained from the portions where the layers were completely oxidized on the joint interfaces.
Since the interface where the conductor layer is completely oxidized becomes electrically insulating and allows light to pass through, this made it possible to form electrically insulating portions and conductive portions at the same joint interface to form circuit patterns, and to separately form light transmitting portions and light shielding portions.

Academic Significance and Societal Importance of the Research Achievements

陽極接合で作製したガラスの封止体中に外部から電気回路を接続する場合、従来はガラスに穴を開けてそこに電極を通す必要があった。本研究で開発した手法を用いれば封止体の組立中に陽極接合する界面に配線パターンを通すことが可能になり、製造工程を簡略化できる。また本研究で開発した、ガラス同士の陽極接合を両側のガラスに仲立ちの導体層を施して行う方法や3枚以上のガラス板を陽極接合で貼り合わせる方法は、それぞれガラス同士の陽極接合界面の高機能化と、陽極接合による複雑なガラスの構造体の組立を可能にする。微小片持ち梁の曲げ試験による接合界面の接合強さの定量評価法は、陽極接合界面の強さの支配因子の解明に役立つ。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (13 results)

All 2020 2019 2018 2017

All Presentation (13 results) (of which Int'l Joint Research: 1 results)

  • [Presentation] 多層陽極接合2020

    • Author(s)
      高橋 誠
    • Organizer
      日本金属学会 2020年 春期(第166回)講演大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] アルミニウム層を仲立ちとしたガラス同士の陽極接合界面組織の形成と継手強さ2019

    • Author(s)
      高橋 誠
    • Organizer
      (一社)溶接学会 2019年度春季全国大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 両側の接合面に仲立ちの導体層を施して作成したガラス同士の陽極接合界面の健全性2019

    • Author(s)
      高橋 誠
    • Organizer
      (一社)溶接学会 2019年度秋季全国大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Glass-to-Glass Anodic Bonding using Conductive Intermediate Layers on Joint Surfaces of Both Glasses2019

    • Author(s)
      Makoto Takahashi
    • Organizer
      Visual-JW 2019 & WSE 2019
    • Related Report
      2019 Annual Research Report
  • [Presentation] ガラス同士の陽極接合界面の導電性の部分的制御2019

    • Author(s)
      高橋 誠
    • Organizer
      日本金属学会 2019年 秋期(第165回)講演大会
    • Related Report
      2019 Annual Research Report
  • [Presentation] アルミニウム層を仲立ちとしたソーダライムガラス同士の貼り合わせ陽極接合における接合電圧の影響2019

    • Author(s)
      高橋 誠
    • Organizer
      (公社)日本金属学会 2019年春期大会
    • Related Report
      2018 Research-status Report
  • [Presentation] 導体薄膜を仲立ちとした陽極接合界面の接合強度2018

    • Author(s)
      高橋 誠
    • Organizer
      (一社)溶接学会 平成30年度春期全国大会
    • Related Report
      2018 Research-status Report
  • [Presentation] FIB加工を用いた微小力学試験による陽極接合界面の強度評価2018

    • Author(s)
      高橋 誠
    • Organizer
      (一社)溶接学会 平成30年度秋期全国大会
    • Related Report
      2018 Research-status Report
  • [Presentation] non-blocking anode元素を用いた陽極接合中の導体材料の酸化の部分的制御2018

    • Author(s)
      高橋 誠
    • Organizer
      (公社)日本金属学会 2018年秋期大会
    • Related Report
      2018 Research-status Report
  • [Presentation] Evaluation of strength of glass-to-glass anodically-bonded interfaces by micro mechanical testing2018

    • Author(s)
      Makoto Takahashi
    • Organizer
      The 3rd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] ガラス板同士の陽極接合において、仲立ちとなる導体層を両側のガラス板に施してこれを行う方法の可能性2018

    • Author(s)
      高橋 誠
    • Organizer
      (公社)日本金属学会 2018年春期大会
    • Related Report
      2017 Research-status Report
  • [Presentation] ガラス同士の陽極接合を仲立ちする導体層の電気抵抗と界面組織2017

    • Author(s)
      高橋 誠
    • Organizer
      (公社)日本金属学会 2018年秋期大会
    • Related Report
      2017 Research-status Report
  • [Presentation] ガラス同士の貼り合わせ陽極接合界面の導通性を制御する方法2017

    • Author(s)
      高橋 誠
    • Organizer
      (一社)溶接学会 平成29年度秋季全国大会
    • Related Report
      2017 Research-status Report

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Published: 2017-04-28   Modified: 2021-02-19  

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