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100 nm resolution X-ray imaging detector with technology of transparent composite ceramics

Research Project

Project/Area Number 17K14142
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Quantum beam science
Research InstitutionJapan Synchrotron Radiation Research Institute

Principal Investigator

Kameshima Takashi  公益財団法人高輝度光科学研究センター, XFEL利用研究推進室, 主幹研究員 (50558046)

Project Period (FY) 2017-04-01 – 2020-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2018: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2017: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
KeywordsX線 / 検出器 / シンチレーター / 空間分解能 / 固浸レンズ / 高空間分解能 / セラミックス / 対物レンズ / イメージング / 分解能 / XFEL / 放射光 / CT / X線 / 顕微鏡
Outline of Final Research Achievements

An indirect detection is one of methods of taking an X-ray image. The X-ray image is converted to a visible one on the scintillator screen, and then projected onto an image sensor by magnification optics. In this research, we have achieved the diffraction-limited-spatial resolution determined by scintillator emission wavelength and a numerical aperture. Because of this, we can try to develop a solid-immersion objective to obtain higher resolution. The refractive index dispersion is necessary for precise design of the objective. The large size prism is required for the minimum deviation technique to measure the refractive index. We have succeeded in producing transparent LuAG ceramics blocks with 30x30x8 mm3. The blocks are scheduled to be fabricated to prisms. The numerical aperture of the solid-immersion objective is estimated to become 1.6.

Academic Significance and Societal Importance of the Research Achievements

X線は高い透過力・短い波長を持つ光である。この特徴を活かし、X線顕微鏡システムを構築することで試料
の内部構造を非破壊で高い解像度で観察することが可能である。X線検出器はシステム内でX線を検出する重要装置であり、X線顕微鏡の発展にその開発は欠かせない。本成果は、X線像の画質を決めるX線画像検出器の空間分解能を物理的限界まで向上させた。また、この性能を超える技術を新たに開発するための調査・検討を行った。本成果は、X線光学・科学計測実験だけでなく産業用途への応用も可能であり、例えば電子素子の欠陥検査等への応用が期待される。

Report

(4 results)
  • 2019 Annual Research Report   Final Research Report ( PDF )
  • 2018 Research-status Report
  • 2017 Research-status Report
  • Research Products

    (8 results)

All 2020 2019 2018 2017

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (6 results) (of which Int'l Joint Research: 1 results,  Invited: 2 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Development of an X-ray imaging detector to resolve 200 nm line-and-space patterns by using transparent ceramics layers bonded by solid-state diffusion2019

    • Author(s)
      Takashi Kameshima, Akihisa Takeuchi, Kentaro Uesugi, Togo Kudo, Yoshiki Kohmura, Kenji Tamasaku, Katsuhiro Muramatsu, Takagimi Yanagitani, Makina Yabashi, and Takaki Hatsui
    • Journal Title

      Optics Letters

      Volume: 44 Issue: 6 Pages: 1403-1406

    • DOI

      10.1364/ol.44.001403

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] 間接型高空間分解能検出器の現状と将来展望2020

    • Author(s)
      亀島敬
    • Organizer
      第33回日本放射光学会年会・放射光科学合同シンポジウム
    • Related Report
      2019 Annual Research Report
    • Invited
  • [Presentation] 高解像度X線2次元検出器の性能評価とこれを用いた集積回路のX線イメージング2019

    • Author(s)
      亀島 敬,竹内晃久,上杉健太朗,工藤統吾,香村芳樹, 玉作賢治, 矢橋牧名,初井宇記
    • Organizer
      第32回日本放射光学会年会放射光科学合同シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] X-ray imaging detector resolving 200 nm line-and-space patterns by using composite transparent ceramic scintillator2019

    • Author(s)
      Takashi Kameshima, Akihisa Takeuchi, Kentaro Uesugi, Togo Kudo, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Takaki Hatsui
    • Organizer
      第2回量子線イメージング研究会
    • Related Report
      2019 Annual Research Report
  • [Presentation] An X-ray imaging detector resolving 200 nm line-and-space patterns by using a composite transparent ceramics scintillator2019

    • Author(s)
      Takashi Kameshima
    • Organizer
      The 15th Symposium of Japanese Research Community on X-ray Imaging Optics
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 高解像度X線2次元検出器の性能評価とこれを用いた集積回路のX線イメージング2018

    • Author(s)
      亀島敬,竹内晃久,上杉健太朗,工藤統吾,香村芳樹, 玉作賢治, 矢橋牧名,初井宇記
    • Organizer
      日本放射光学会
    • Related Report
      2018 Research-status Report
  • [Presentation] 透明セラミックスの固相拡散接合技術を用いた薄膜シンチレーターの開発及びこれを用いたX線イメージング2017

    • Author(s)
      ○亀島 敬1, 2,竹内晃久1,上杉健太朗1,工藤統吾1, 2,矢橋牧名1, 2,初井宇記1, 2
    • Organizer
      精密工学会2017年度秋季大会
    • Related Report
      2017 Research-status Report
  • [Patent(Industrial Property Rights)] 放射線イメージング装置用光学素子、放射線イメージング装置及びX線イ メージング装置2017

    • Inventor(s)
      亀島 敬
    • Industrial Property Rights Holder
      理化学研究所
    • Industrial Property Rights Type
      特許
    • Filing Date
      2017
    • Related Report
      2017 Research-status Report

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Published: 2017-04-28   Modified: 2021-02-19  

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