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Characterization of Si nanoelectronic materials and interface with using synchrotron radiation microprobe

Research Project

Project/Area Number 18063019
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionJapan Synchrotron Radiation Research Institute

Principal Investigator

KIMURA Shigeru  Japan Synchrotron Radiation Research Institute, 利用研究促進部門, 副主席研究員 (50360821)

Co-Investigator(Kenkyū-buntansha) SAKATA Osami  財団法人高輝度光科学研究センター, 利用研究促進部門, 主幹研究員 (40215629)
TAJIRI Hiroo  財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 (70360831)
IMAI Yasuhiko  財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 (30416375)
Project Period (FY) 2006 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥45,600,000 (Direct Cost: ¥45,600,000)
Fiscal Year 2009: ¥10,900,000 (Direct Cost: ¥10,900,000)
Fiscal Year 2008: ¥10,900,000 (Direct Cost: ¥10,900,000)
Fiscal Year 2007: ¥11,900,000 (Direct Cost: ¥11,900,000)
Fiscal Year 2006: ¥11,900,000 (Direct Cost: ¥11,900,000)
Keywords結晶工学 / 表面・界面物性 / マイクロX線回折 / シンクロトロン放射光 / X線回折 / 界面物性 / 薄膜 / 歪み / 微小領域 / 薄膜構造 / 金属錯体 / X繰回折
Research Abstract

半導体集積回路の基本素子である金属-絶縁膜-半導体電界効果トランジスタ(MOSFET)の技術開発において、これまでの技術の延命では達成困難な超高集積度、高性能・高機能性を追求し、実現するためには、デバイス中の各パーツの結晶構造や応力分布を解析し、最適な構造にすることが必要不可欠になってきている。そこで、SPring-8の高輝度放射光を用いたマイクロプローブX線技術を発展させ、ナノデバイス材料・界面のナノメーターレベルの微小領域に存在する歪や構造の評価を可能にする高分解能マイクロX線回折システムを開発した。

Report

(6 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report   Self-evaluation Report ( PDF )
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • Research Products

    (56 results)

All 2010 2009 2008 2007 2006 Other

All Journal Article (16 results) (of which Peer Reviewed: 14 results) Presentation (35 results) Book (3 results) Remarks (2 results)

  • [Journal Article] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2010

    • Author(s)
      Y. Imai, S. Kimura, O. Sakata, A. Sakai
    • Journal Title

      AIP Conference Proceedings Vol.1221

      Pages: 30-32

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Monolithic Self-Sustaining Nanographene Sheet Grown Using Plasma-Enhanced Chemical Vapor Deposition2010

    • Author(s)
      W. Takeuchi, K. Takeda, M. Hiramatsu, Y. Tokuda, H. Kano, S. Kimura, O. Sakata, H. Tajiri, M. Hori
    • Journal Title

      Physica Status Solidi A Vol.207

      Pages: 139-143

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Structural change of direct silicon bonding substrates by interfacial oxide out-diffusion annealing2010

    • Author(s)
      T. Kato, Y. Nakamura, J. Kikkawa, A. Sakai, E. Toyoda, K. Izunome, O. Nakatsuka, S. Zaima, Y. Imai, S. Kimura, O. Sakata
    • Journal Title

      Thin Solid Films Vol.518

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Monolithic Self-Sustaining Nanographene Sheet Grown Using Plasma-Enhanced Chemical Vapor Deposition2010

    • Author(s)
      W.Takeuchi
    • Journal Title

      Physica Status Solidi A 207

      Pages: 139-143

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2010

    • Author(s)
      Y.Imai
    • Journal Title

      AIP conference proceedings 1221

      Pages: 30-33

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-situ lattice-strain analysis of a ferroelectric thin film under an applied pulse electric field2010

    • Author(s)
      O.Sakata
    • Journal Title

      AIP conference proceedings (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructures in directly bonded Si substrates2009

    • Author(s)
      Y. Ohara, T. Ueda, A. Sakai, O. Nakatsuka, M. Ogawa, S. Zaima, E. Toyoda, H. Isogai, T. Senda, K. Izunome, H. Tajiri, O. Sakata, S. Kimura, T. Sakata, H. Mori
    • Journal Title

      Solid-State Electronics Vol.53

      Pages: 837-840

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Microstructures in directly bonded Si substrates2009

    • Author(s)
      Y.Ohara
    • Journal Title

      Solid-State Electronics 53

      Pages: 837-840

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Microstructures in directly bonded Si substrates2009

    • Author(s)
      Y. Ohara, T. Ueda, A. Sakai, O. Nakatsuka, M. Ogawa, S. Zaima, E. Toyoda, H. Isogai, T. Senda, K. Izunome, H. Tajiri, O. Sakata, S. Kimura, T. Sakata, H. Mori
    • Journal Title

      Solid-State Electronics Vol. 53

      Pages: 837-840

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Characterization of strained Si wafers by X-ray diffraction techniques2008

    • Author(s)
      T. Shimura, K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, S. Kimura, H. Edo, S. Iida, M. Umeno
    • Journal Title

      Journal of Materials Science: Materials in Electronics Vol.19

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of strained Si wafers by X-ray diffraction techniques2008

    • Author(s)
      T. Shimura, K. Kawamura, M. Asakawa, H. Watanabe, K. Yasutake, A. Ogura, K. Fukuda, O. Sakata, S. Kimura, H. Edo, S. Iida, and M. Umeno
    • Journal Title

      J Mater Sci: Mater Electron Vol. 19

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Depth Distribution of Ge Fraction in Very-Thin-SGOI Layer Using Total-External-Reflection X-ray Diffraction2008

    • Author(s)
      T. Kawamura
    • Journal Title

      Transactions of the Materials Research Society of Japan 33

      Pages: 599-602

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Strained Si Wafers by X-ray Diffraction Techniques2008

    • Author(s)
      Takayoshi Shimura
    • Journal Title

      Journal of Materials Science: Materials in Electronics 19(印刷中)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 放射光マイクロX線回折法による歪緩和SiGeバッファー層の評価2007

    • Author(s)
      木村 滋
    • Journal Title

      機能材料 27・3

      Pages: 59-65

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Development of a High-Angular- Resolution Microdiffraction System for Reciprocal Space Map Measurements2006

    • Author(s)
      S. Takeda, S. Kimura, O. Sakata, and A. Sakai
    • Journal Title

      Jpn. J. Appl. Phys. 45

    • NAID

      10018340745

    • Related Report
      2008 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Development of a High-Angular-Resolution Micro-diffraction System for Reciprocal Space Map Measurements2006

    • Author(s)
      Shingo Takeda
    • Journal Title

      Japanese Journal of Applied Physics 45・39

    • Related Report
      2006 Annual Research Report
  • [Presentation] シンクロトロンX線回折によるカーボンナノウォールの結晶構造解析2010

    • Author(s)
      近藤博基
    • Organizer
      57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] Distribution of local strain in thick AlN layers grown on a trench-patterned AlN/sapphire template2010

    • Author(s)
      V.Soam
    • Organizer
      57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Si基板上に選択エピタキシャル成長したGe細線の歪緩和過程2010

    • Author(s)
      海老原洪平
    • Organizer
      57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] CCD型検出器を用いた高角度分解能マイクロx線回折計2010

    • Author(s)
      今井康彦, 木村滋, 坂田修身, 田尻寛男, 酒井朗, 小瀬村大亮, 小椋厚志
    • Organizer
      第23回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      イーグレ姫路
    • Year and Date
      2010-01-08
    • Related Report
      2009 Final Research Report
  • [Presentation] シングルバンチ切り出しチョッパーシステムの開発2010

    • Author(s)
      大沢仁志
    • Organizer
      第23回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      イーグレ姫路(姫路市)
    • Year and Date
      2010-01-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] CCD型検出器を用いた高角度分解能マイクロX線回折計2010

    • Author(s)
      今井康彦
    • Organizer
      第23回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      イーグレ姫路(姫路市)
    • Year and Date
      2010-01-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nanometer-scale charac-terization technique using synchrotron radiation microdiffraction2009

    • Author(s)
      S. Kimura
    • Organizer
      Japan-Taiwan Joint Symposium on New Functional Materials and Their Nano-Scale Analysis
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2009-11-25
    • Related Report
      2009 Final Research Report
  • [Presentation] Nanometer-scale characterization technique using synchrotron radiation microdiffraction (Invited)2009

    • Author(s)
      S.Kimura
    • Organizer
      Japan-Taiwan Joint Symposium on New Functional Materials and Their・Nano-Scale Analysis
    • Place of Presentation
      京都大学化学研究所(京都)
    • Year and Date
      2009-11-25
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micro-Area Strain Analysis in GaN-Based Laser Diodes Using High-Resolution Micro-Beam X-Ray Diffraction2009

    • Author(s)
      T.Yokogawa
    • Organizer
      8th International Conference on Nitride Semiconductors (ICNS 2009)
    • Place of Presentation
      International Convention Center (Jeju Island)
    • Year and Date
      2009-10-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] In-situ lattice-strain analysis of a ferroelectric thin film under an applied pulse electric field2009

    • Author(s)
      O.Sakata
    • Organizer
      10th International Conference on Synchrotron Radiation Instrumentation (SRI09)
    • Place of Presentation
      Melbourne Convention and Exhibition Centre (Melbourne)
    • Year and Date
      2009-09-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Direct Si Bonding基板の微細構造2009

    • Author(s)
      吉川純
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高輝度放射光を用いたカーボンナノウォールのバンド構造解析2009

    • Author(s)
      竹内和歌奈
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] 放射光マイクロX線回折を用いたマイクロファセット上InGaN/GaN量子井戸構造の評価2009

    • Author(s)
      榊篤史
    • Organizer
      56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(つくば市)
    • Year and Date
      2009-04-02
    • Related Report
      2009 Annual Research Report
  • [Presentation] Direct Si Bonding基板の接合界面酸化膜消滅過程における結晶性変化2009

    • Author(s)
      加藤哲司
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学, 茨城
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] カーボンナノウォールの構造及び電子状態におけるフッ素不純物の影響2009

    • Author(s)
      竹内和歌奈
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学, 茨城
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] SPring-8でのシリコンナノエレクトロニクス研究の現状2009

    • Author(s)
      木村滋
    • Organizer
      第55回応用物理学関係連合講演会シンポジウム「シリコン系材料・プロセス評価の最前線-放射光利用による新展開」
    • Place of Presentation
      日本大学船橋キャンパス
    • Year and Date
      2009-03-29
    • Related Report
      2009 Final Research Report
  • [Presentation] 高分解能マイクロx線回折装置の現状と応用研究2009

    • Author(s)
      今井康彦、木村滋、坂田修身、田尻寛男
    • Organizer
      第22回日本放射光学会年会・放射光科学合同シンポジウム
    • Year and Date
      2009-01-12
    • Related Report
      2009 Final Research Report
  • [Presentation] 高分解能マイクロX線回折装置の現状と応用研究2009

    • Author(s)
      今井康彦
    • Organizer
      第22回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      東京大学, 東京
    • Year and Date
      2009-01-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2009

    • Author(s)
      Y. Imai, S. Kimura, O. Sakata, A. Sakai
    • Organizer
      20th International Congress on X-Ray Optics and Microanalysis
    • Place of Presentation
      Karlsruhe, Germany
    • Related Report
      2009 Final Research Report
  • [Presentation] Analysis of Local Strain in Ge_<1-X>Sn_x/Ge/Si(001) Heterostructures by X-ray Microdiffraction2009

    • Author(s)
      O.Nakatsuka
    • Organizer
      6th International Conference on Silicon Epitaxy and Heterostructures (ICSI-6)
    • Place of Presentation
      Ayres Hotel (California)
    • Related Report
      2009 Annual Research Report
  • [Presentation] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2009

    • Author(s)
      Y.Imai
    • Organizer
      20th International Congress on X-Ray Optics and Microanalysis (ICXOM20)
    • Place of Presentation
      Congress Center(Karlsruhe)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Direct Si Bonding基板の微細構造2008

    • Author(s)
      大原悠司
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] Direct Silicon Bonding(DSB)基板の結晶性の評価2008

    • Author(s)
      豊田英二
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] 放射光X線マイクロビームによるSiGe酸化濃縮時における歪み緩和過程の局所領域評価2008

    • Author(s)
      井上智之
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] SPring-8 でのシリコンナノエレクトロニクス研究の現状2008

    • Author(s)
      木村 滋
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス,千葉
    • Year and Date
      2008-03-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] 微小領域選択MOVPEにより作製したSi(111)面上InGaAsの構造解析2008

    • Author(s)
      杉山 正和
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス,千葉
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 人口転位網を内包したSOI-MOSFETの単電子輸送特性2008

    • Author(s)
      笠井 勇希
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス,千葉
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] Development of Diffraction Techniques for Dimensionally Controned Thin Films using Synchrotron Radiation2008

    • Author(s)
      木村 滋
    • Organizer
      第21回日本放射光学会年会放射光科学合同シンポジウム
    • Place of Presentation
      立命館大学びわこ草津キャンパス,滋賀
    • Year and Date
      2008-01-14
    • Related Report
      2007 Annual Research Report
  • [Presentation] Microstructures in Directly Bonded Si Substrates2008

    • Author(s)
      Y. Ohara
    • Organizer
      Fourth International SiGe Technology and Device Meeting
    • Place of Presentation
      Hsinchu, Taiwan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Application of Synchrotron X-ray Diffraction Methods to Gate Stacks of Advanced MOS Devices2008

    • Author(s)
      T. Shimura
    • Organizer
      213th ECS Meeting
    • Place of Presentation
      Phoenix, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Characterization of Strain Relaxation Process during Ge Condensation by Synchrotron Microbeam X-ray Diffraction2008

    • Author(s)
      T. Inoue
    • Organizer
      2008 International Conference on SOLID STATE DEVICES AND MATERIALS
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Interface and defect control for group IV channel engineering2008

    • Author(s)
      A. Sakai
    • Organizer
      214th ECS Meeting
    • Place of Presentation
      Hawaii, USA
    • Related Report
      2008 Annual Research Report
  • [Presentation] Strain and interfacial defects in directly bonded Si substrates2008

    • Author(s)
      Y. Ohara
    • Organizer
      IUMRS International Conference in Asia 2008
    • Place of Presentation
      Nagoya, Japan
    • Related Report
      2008 Annual Research Report
  • [Presentation] Characterization of Local Strains in Sil-xGex Hetero-mesa Structures on Si(001) Substrates by using X-ray Micro Diffraction2007

    • Author(s)
      Osamu Nakatsuka
    • Organizer
      Fifth International Symposium on Control of Semiconductor Interfaces (ISCSI-V)
    • Place of Presentation
      首都大学東京,東京
    • Year and Date
      2007-10-13
    • Related Report
      2007 Annual Research Report
  • [Presentation] Characterization of Strained Si Wafers by Synchrotron X-ray Microbeam and Topography2007

    • Author(s)
      Takayoshi Shimura
    • Organizer
      12th International Conf. on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XII)
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2007-09-13
    • Related Report
      2007 Annual Research Report
  • [Book] 「第3版現代界面コロイド化学の基礎」, "放射光を利用した表面x線構造解析", 9章2009

    • Author(s)
      木村滋、坂田修身
    • Publisher
      丸善
    • Related Report
      2009 Final Research Report
  • [Book] 「機能物質・材料開発と放射光-SPring-8の産業利用-」, "放射光マイクロx線回折法によるひずみ緩和SiGeバッファー層の評価", 第9章2008

    • Author(s)
      木村滋、竹田晋吾、酒井朗
    • Publisher
      シーエムシー出版
    • Related Report
      2009 Final Research Report
  • [Book] 機能物質・材料開発と放射光 -SPring-8の産業利用-, 放射光マイクロX線回折法によるひずみ緩和SiGeバッファー層の評価, 第9章2008

    • Author(s)
      木村 滋、竹田晋吾、酒井 朗
    • Publisher
      シーエムシー出版, 東京
    • Related Report
      2008 Self-evaluation Report
  • [Remarks]

    • URL

      http://www.spring8.or.jp/ja/memberdata/04124

    • Related Report
      2009 Final Research Report
  • [Remarks] ホームページ

    • URL

      http://www.spring8.or.jp/ja/memberdata/04124

    • Related Report
      2008 Self-evaluation Report

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Published: 2006-04-01   Modified: 2018-03-28  

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