Development of laser-assisted wide angle three-dimensional atom probe and its application to atomic level characterization of true electronic devices

• Project/Area Number: 18GS0204
• Research Category: Grant-in-Aid for Creative Scientific Research
• Allocation Type: Single-year Grants
• Research Institution: The University of Tokyo
• Principal Investigator: OWARI Masanori The University of Tokyo, 環境安全研究センター, 教授 (70160950)
• Co-Investigator(Kenkyū-buntansha): TANIGUCHI Masahiro 金沢工業大学, バイオ・化学部応用化学科, 教授 (30250418) ; NOJIMA Masashi 東京理科大学, 総合研究機構, 講師 (50366449)
• Co-Investigator(Renkei-kenkyūsha): MAYAMA Norihito 東京工業大学, 資源化学研究所, 産学官連携研究員 (40508131) ; IWATA Tatsuo 三重大学, 極限ナノエレクトロニクスセンター, 特定事業研究員 (20119647)
• Project Period (FY): 2006 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥457,860,000 (Direct Cost: ¥352,200,000、Indirect Cost: ¥105,660,000); Fiscal Year 2010: ¥25,090,000 (Direct Cost: ¥19,300,000、Indirect Cost: ¥5,790,000); Fiscal Year 2009: ¥92,300,000 (Direct Cost: ¥71,000,000、Indirect Cost: ¥21,300,000); Fiscal Year 2008: ¥107,120,000 (Direct Cost: ¥82,400,000、Indirect Cost: ¥24,720,000); Fiscal Year 2007: ¥113,230,000 (Direct Cost: ¥87,100,000、Indirect Cost: ¥26,130,000); Fiscal Year 2006: ¥120,120,000 (Direct Cost: ¥92,400,000、Indirect Cost: ¥27,720,000)
• Keywords: ナノ構造化学 / 表面・界面ナノ構造 / アトムプローブ / 電界蒸発 / パルスレーザー / 収束イオンビーム加工 / 微小引出し電極 / 超高真空 / シミュレーション / 質量分析 / 収東イオンビーム加工

Research Abstract

We developed three-dimensional atom probe(3DAP)that could visualize three-dimensionally the elemental identity and position of atoms in hundreds of cube nanometer in a material. Metals and carbonaceous materials were analyzed by using this method, and a new knowledge about laser ionization was obtained. Basic techniques for the three-dimensional analysis of real electronic devices were also established.

Research Products

• [Journal Article] (2010)
  • Author(s): N.Mayama, T.Iwata, M.Nojima, M.Taniguchi, M.Owari, 他10名
  • Journal Title: Surf.Interface Anal. 42 Pages: 1616-1621
  • Peer Reviewed
• [Journal Article] (2010)
  • Author(s): N.Mayama, H.Yoshida, T.Iwata, K.Sasakawa, A.Suzuki, Y.Hanaoka, Y.Morita, A.Kuroda, M.Owari
  • Journal Title: Diam.Relat.Mater. 19 Pages: 946-949
  • Peer Reviewed
• [Journal Article] (2010)
  • Author(s): M.Taniguchi, O.Nishikawa
  • Journal Title: e-JSSNT 8 Pages: 69-73
  • Peer Reviewed
• [Journal Article] Molecular Reaction Image by Scanning Atom Probe (2010)
  • Author(s): Masahiro Taniguchi, 他1名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 8 Pages: 69-73
  • NAID: 130004439212
  • Peer Reviewed
• [Journal Article] (2009)
  • Author(s): N.Mayama, Y.Kajiwara, S.Mikami, S.Ito, T.Kaneko, T.Iwata, M.Owari
  • Journal Title: e-JSSNT 7 Pages: 35-38
  • Peer Reviewed
• [Journal Article] Feasibility of a New Atom Probe Specimen Preparation Methodusing a Focused Ion Beam (2009)
  • Author(s): S.Mikami, 他7名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 7 Pages: 863-865
  • Peer Reviewed
• [Journal Article] アトムプローブ法によるメタノール中の通電により金属基材上に堆積した炭素系被膜の分析 (2009)
  • Author(s): 吉田寛之, 他5名
  • Journal Title: Journal of the Vacuum Society of Japan 52(3) Pages: 48-149
  • Peer Reviewed
• [Journal Article] メタノール中の通電により生成するダイヤモンドライクカーボン(DLC)を被覆した単ータングメテン電界放射陰極からの電子放射特性 (2009)
  • Author(s): 岩田達夫, 他6名
  • Journal Title: Journal of the Vacuum Society of Japan 52(3) Pages: 176-178
  • Peer Reviewed
• [Journal Article] Dependence of Field Evaporation Voltage on Polarization Angle of Femtosecond Laser in 3D Atom Probe (2009)
  • Author(s): N.Mayama, 他6名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 4 Pages: 70-73
  • Peer Reviewed
• [Journal Article] Improvement of Mass Resolution in Wide-Angle Laser Assisted Atom Probe by Flight Path Compensation (2009)
  • Author(s): N.Mayama, 他6名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 7 Pages: 35-38
  • Peer Reviewed
• [Journal Article] Quantitative evaluation of carbon nanotubes by the scanning atom probe (2009)
  • Author(s): O.Nishikawa, 他1名
  • Journal Title: Journal of Vacuum Science & Technology A 27(4) Pages: 1076-1079
  • Peer Reviewed
• [Journal Article] Atomic level analysis of biomolecules by the scanning atom probe (2009)
  • Author(s): O.Nishikawa, 他2名
  • Journal Title: Applied Surface Science 259 Pages: 1210-1213
  • Peer Reviewed
• [Journal Article] e-JSSNT (2009)
  • Author(s): N. Mayama, S. Mikami, S. Ito, T. Kaneko, T. Iwata, M. Taniguchi, M. Owari
  • Journal Title: 7 Pages: 70-73
  • Peer Reviewed
• [Journal Article] Dependence of Field Evaporation Voltage on Polarization Angle of Femtosecond Laser in 3D Atom Probe (2009)
  • Author(s): N. Mayama, 他6名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 7 Pages: 70-73
  • Peer Reviewed
• [Journal Article] Improvement of Mass Resolution in Wide-Angle Laser-Assisted Atom Probe by F light Path Compensation (2009)
  • Author(s): N. Mayama, 他6名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 7 Pages: 35-38
  • Peer Reviewed
• [Journal Article] Surf (2008)
  • Author(s): N. Mayama, C. Yamashita, T. Kaito, M. Nojima, M. Owari
  • Journal Title: Interface Anal. 40 Pages: 1610-1613
  • Peer Reviewed
• [Journal Article] Surf (2008)
  • Author(s): T. Kaneko, S. Ito, C. Yamashita, N. Mayama, T. Iwata, M. Nojima, M. Owari
  • Journal Title: Interface Anal. 40 Pages: 1688-1691
  • Peer Reviewed
• [Journal Article] Surf (2008)
  • Author(s): S. Ito, T. Kaneko, C. Yamashita, T. Kaito, T. Adachi, T. Iwata, N. Mayama, M. Nojima, M. Taniguchi, M. Owari
  • Journal Title: Interface Anal. 40 Pages: 1696-1700
  • Peer Reviewed
• [Journal Article] A New Approach for the Mass Analysis of Biomolecules at Atomic Level Utilizi ng the Scanning Atom Probe (2008)
  • Author(s): O. Nishikawa, M. Taniguchi
  • Journal Title: Microscopy and Microanalysis 14 Pages: 1244-1245
  • Peer Reviewed
• [Journal Article] Study of Characteristic Fragmentation of Nanocarbon by the Scanning Atom Prob (2008)
  • Author(s): O. Nishikawa, 他2名
  • Journal Title: Journal of Vacuum Science and Technology A 26(no. 4) Pages: 1074-1078
  • Peer Reviewed
• [Journal Article] Scanning Atom Probe Study of Graphite Nnofibers (2008)
  • Author(s): O. Nishikawa, 他2名
  • Journal Title: Journal of Vacuum Science and Technology B 26(no. 2) Pages: 735-737
  • Peer Reviewed
• [Journal Article] Development of preset-type sample stage in three-dimensional atom probe (2008)
  • Author(s): S. Ito, 他8名
  • Journal Title: Surface and Interface Analysis 40 Pages: 1696-1700
  • Peer Reviewed
• [Journal Article] Evaluation of the instrument for three-dimensional atom probe (3DAP) (2008)
  • Author(s): T. Kaneko, 他6名
  • Journal Title: Surface and Interface Analysis 40 Pages: 1688-1691
  • Peer Reviewed
• [Journal Article] Study on Imidazolium-based Ionic Liquids with Scanning Atom Probe and Knuds en Effusion Mass Spectrometry (2008)
  • Author(s): A. Tolstoguzov, 他3名
  • Journal Title: Surface and Interface Analysis 40 Pages: 1614-1618
  • Peer Reviewed
• [Journal Article] The stress of the needle specimen on the three-dimensional atom probe (3DAP) (2008)
  • Author(s): N. Mayama, 他4名
  • Journal Title: Surface and Interface Analysis 40 Pages: 1610-1613
  • Peer Reviewed
• [Journal Article] Study of Graphite Nanofibers by the Scanning Atom Probe (2008)
  • Author(s): M. Taniguchi, 他3名
  • Journal Title: e-Journal of Surface Science and Nanotechnology 6 Pages: 41-44
  • NAID: 130004933975
  • Peer Reviewed
• [Journal Article] Improvement of a method for reconstructing the three-dimensional atom probe (3DAP) data (2006)
  • Author(s): T.Chiba, M.Nojima, M.Owari
  • Journal Title: Surface and interface analysis 38・12-13 Pages: 1751-1755
• [Journal Article] Pin point depth profiling for unit device or several nano-devices (2006)
  • Author(s): A.Maekawa, T.Yamamoto, Y.Ishizaki, R.Tanaka, M.Owari, M.Nojima, Y.Nihei
  • Journal Title: Surface and interface analysis 38・12-13 Pages: 1747-1750
• [Journal Article] Handling of the ice protective film for potential use in the 3D microscale analysis of biological samples (2006)
  • Author(s): T.Iwanami, Yujing Liu, M.Okazaki, M.Nojima, T.Sakamoto, M.Owari
  • Journal Title: Surface and interface analysis 38・12-13 Pages: 1658-1661
• [Journal Article] Shave-off depth profiling of dendritic short-circuit growth caused by ion migration (2006)
  • Author(s): T.Yamamoto, A.Maekawa, Y.Ishizaki, R.Tanaka, M.Owari, M.Nojima, Y.Nihei
  • Journal Title: Surface and interface analysis 38・12-13 Pages: 1662-1665
• [Journal Article] Scanning Atom Probe Study of Dissociation of Organic Molecules on Titanium Oxides (2006)
  • Author(s): O.Nishikawa, M.Taniguchi, S.Watanabe, A.Yamagishi, T.Sasaki
  • Journal Title: Jpn. J. Appl. Phys. 45・3B Pages: 1892-1896
• [Journal Article] Study of Molecular Reaction on Titanium Oxide by the Scanning Atom Probe (2006)
  • Author(s): M.Taniguchi, O.Nishikawa, S.Komata, S.Watanabe, A.Yamagishi, T.Sasaki
  • Journal Title: e-J. of Surf. Sci. and Nanotech. 4 Pages: 521-527
  • NAID: 130004933939
• [Presentation] アトムプローブにおけるアルミニウムの電界蒸発特性 (2010)
  • Author(s): 梶原靖子, 他3名
  • Organizer: 第57回 応肋理学関係連合講演会
  • Place of Presentation: 神奈川県平塚市
  • Year and Date: 2010-03-18
• [Presentation] Development of Laser-Assisted Wide Angle Three-Dimensional Atom Probe (2009)
  • Author(s): N.Mayama, 他9名
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2009-12-10
• [Presentation] Effects of the Laser Condition on the Field Evaporation in the Laser-Assisted Atom Probe (2009)
  • Author(s): 梶原靖子, 他5名
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2009-12-10
• [Presentation] A New Specimen Preparation Method for Three-Dimensional Atom Probe (2009)
  • Author(s): Y.Hanaoka, 他8名
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2009-12-10
• [Presentation] Nanoscale Three-Dimensional Element Imaging-Introductory Talk (2009)
  • Author(s): M.Owari
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2009-12-10
• [Presentation] Molecular Reaction Imaged by Scanning Atom Probe (2009)
  • Author(s): M.Taniguchi, 他1名
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2009-12-10
• [Presentation] (2009)
  • Author(s): M.Owari
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices(招待講演)
  • Place of Presentation: Hawaii, USA.
  • Year and Date: 2009-12-09
• [Presentation] Characterization of Diamond-like Carbon Deposited on Metal Substrates by Liquid-phase Electrodeposition (2009)
  • Author(s): N.Mayama, 他8名
  • Organizer: 20th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Athens, Greece
  • Year and Date: 2009-09-09
• [Presentation] Field ion emission microscopy of diamond-like carbon films prepared in methanol solution (2009)
  • Author(s): T.Iwata, 他4名
  • Organizer: 20th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
  • Place of Presentation: Athens, Greece
  • Year and Date: 2009-09-09
• [Presentation] Atom-by-atom analysis of layered inorganic material and mole cular reaction on titania surface studied by the scanning atom probe (2009)
  • Author(s): M.Taniguchi, 他4名
  • Organizer: 26th.European conference on surface science
  • Place of Presentation: Parma, Italy
  • Year and Date: 2009-08-30
• [Presentation] 走査型アトムプローブによるポリチオフェンの原子レベルの分析 (2009)
  • Author(s): 西川治, 他7名
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 茨城県つくば市
  • Year and Date: 2009-03-30
• [Presentation] メタノール中の通電により生成するDLCを被覆した単一タングステン電界放射陰極からの電子放射特性 (2008)
  • Author(s): 岩田達夫, 他6名
  • Organizer: 第49回真空に関する連合講演会
  • Place of Presentation: 島根県松江市
  • Year and Date: 2008-10-30
• [Presentation] 二次イオン質量分析器を用いたメタノール中の通電により金属基材上に堆積した炭素系被膜の分析 (2008)
  • Author(s): 吉田寛之, 他5名
  • Organizer: 第49回真空に関する連合講演会
  • Place of Presentation: 島根県松江市
  • Year and Date: 2008-10-29
• [Presentation] Atomic Level Analysis of Non-metallic Specimens by the Scanning Atom Probe (2008)
  • Author(s): O. Nishikawa, M. Taniguchi
  • Organizer: 4th Vacuum and Surface Science Conference of Asia and Australia
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2008-10-28
• [Presentation] 走査型アトムプローブによるカーボンナノチューブの原子レベルでの組成評価 (2008)
  • Author(s): 谷口昌宏, 他3名
  • Organizer: 第2回分子科学討論会
  • Place of Presentation: 福岡県福岡市
  • Year and Date: 2008-09-27
• [Presentation] 電気化学的手法によりタングステンチップ上に堆積した炭素系被膜のアトムプローブ分析 (2008)
  • Author(s): 吉田寛之, 他4名
  • Organizer: 日本分析化学会第57年会
  • Place of Presentation: 福岡県福岡市
  • Year and Date: 2008-09-10
• [Presentation] 走査型アトムプローブによるカーボンナノチューブの原子レベルでの組成評価 (2008)
  • Author(s): 西川治、谷口昌宏
  • Organizer: 第69回応用物理学学術講演会
  • Place of Presentation: 愛知県名古屋市
  • Year and Date: 2008-09-02
• [Presentation] Scannng atom Probe Study of Characteristic Fragmentation of Biomolecules (2008)
  • Author(s): O. Nishikawa, M. Taniguchi
  • Organizer: International Conference on Nanoscience Technology
  • Place of Presentation: Colorado, USA.
  • Year and Date: 2008-07-22
• [Presentation] Carbon Material Analysis by using the Scanning Atom Probe (2008)
  • Author(s): M. Taniguchi, O. Nishikawa
  • Organizer: The 10th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2008-07-17
• [Presentation] Development of Laser-Assisted Wide Angle Three-Dimensional Atom Probe and Its Application to Atomic Level Characterization of Real Electronic Devices (2008)
  • Author(s): M. Owari
  • Organizer: The 10th International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2008-07-17
• [Presentation] Atomic Level Evaluation of Carbon Nanotubes by the Scanning Atom Probe (2008)
  • Author(s): O. Nishikawa, 他3名
  • Organizer: 21st International VAcuum Nanoelectronics Conference
  • Place of Presentation: Wroclaw, Poland
  • Year and Date: 2008-07-14
• [Presentation] Characterization of carbon nanotubes by the scanning atom probe (2008)
  • Author(s): M. Taniguchi, 他3名
  • Organizer: The 51st International Field Emission Symposium
  • Place of Presentation: Rouen, France
  • Year and Date: 2008-07-01
• [Presentation] New concepts for sample preparation on 3DAP using FIB (2008)
  • Author(s): S. Mikami, 他7名
  • Organizer: The 51st International Field Emission Symposium
  • Place of Presentation: Rouen, France
  • Year and Date: 2008-07-01
• [Presentation] Study on ionization in laser-assisted atom probe (2008)
  • Author(s): N. Mayama, 他6名
  • Organizer: The 51st International Field Emission Symposium
  • Place of Presentation: Rouen, France
  • Year and Date: 2008-07-01
• [Presentation] Improvement of Mass Resolution in Wide-Angle Laser-Assisted Atom-Probe by F light Path Compensation (2008)
  • Author(s): T. Iwata, 他4名
  • Organizer: The 51st International Field Emission Symposium
  • Place of Presentation: Rouen, France
  • Year and Date: 2008-07-01
• [Presentation] (2008)
  • Author(s): M.Owari
  • Organizer: The 10^<th> International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University (SISS-10)(招待講演)
  • Place of Presentation: Tokyo, Japan.
• [Presentation] Quantitative Evaluation of Carbon Nano Tubes by the Scanning Atom Probe (2008)
  • Author(s): O. Nishikawa, M. Taniguchi
  • Organizer: AVS 55th International Symposium & Exhibition
  • Place of Presentation: Boston, USA
• [Presentation] Development of Laser-Assisted Three-Dimensional Atom Probe for Atomic Level Characterization of Real Electronic Devices (2007)
  • Author(s): Masanori Owari
  • Organizer: 6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
  • Place of Presentation: 金沢市
  • Year and Date: 2007-11-02
• [Presentation] Study on Imidazolium-based Ionic Liquids with Scanning Atom Probe and Knudse Effusion Mass Spectrometry (2007)
  • Author(s): A.Tolstoguzov, 他3名
  • Organizer: 6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
  • Place of Presentation: 金沢市
  • Year and Date: 2007-10-30
• [Presentation] Study of graphite nanofibers by the scanning atom probe (2007)
  • Author(s): M. Taniguchi, 他3名
  • Organizer: 6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
  • Place of Presentation: 金沢市
  • Year and Date: 2007-10-30
• [Presentation] Evaluation of the instrument for three-dimensional atom probe (3DAP) (2007)
  • Author(s): T. Kaneko, 他6名
  • Organizer: 6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
  • Place of Presentation: 金沢市
  • Year and Date: 2007-10-30
• [Presentation] The stress of the needle specimen on the three-dimensional atom probe (3DAP) (2007)
  • Author(s): N. Mayama, 他4名
  • Organizer: 6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
  • Place of Presentation: 金沢市
  • Year and Date: 2007-10-30
• [Presentation] Development of preset-type sample stage in three-dimensional atom probe (2007)
  • Author(s): S. Ito, 他8名
  • Organizer: 6th International Symposium on Atomic Level Characterizations for New Materials and Devices'07
  • Place of Presentation: 金沢市
  • Year and Date: 2007-10-30
• [Presentation] Scanning atom probe study of graphite nanofibers (2007)
  • Author(s): M, Taniguchi, 他3名
  • Organizer: Atom Probe Workshop 2007
  • Place of Presentation: Gothenburg, Sweden
• [Presentation] 走査型アトムプローブによるグラファイトナノファイバーの分析 (2007)
  • Author(s): 谷口昌宏, 他3名
  • Organizer: 第1回分子科学討論会
  • Place of Presentation: 仙台市
• [Book] イオンを用いた新たなナノ計測への展開(「アトムプローブの新たな展開」電子情報通信学会「知識ベース」、S2郡(ナノ・量子・バイオ)-4編(ナノ加工・計測技術)-3章(ナノ計測技術-ナノプローブ以外)-3.4) (2009)
  • Author(s): 間山憲仁、尾張真則
  • Publisher: オーム社(Web公開)
• [Book] 第5版実験化学講座24(表面・界面)(第3章11節FEM, FIM,アトムプローブ) (2007)
  • Author(s): 谷口昌宏
  • Total Pages: 150
  • Publisher: 日本化学会編(株)丸善
• [Book] 第5版 実験化学講座 24(表面・界面) 第3章11節 "FEM,FIM,アトムプローブ (2007)
  • Author(s): 谷口昌宏(分担執筆)
  • Publisher: 日本化学会編(株)丸善
• [Patent(Industrial Property Rights)] アトムプローブ用針状試料の加工方法及び集束イオンビーム装置 (2007)
  • Inventor(s): 尾張真則, 皆藤孝, 野島雅
  • Industrial Property Rights Holder: 尾張真則, 皆藤孝, 野島雅
  • Industrial Property Number: 2007-279319
  • Filing Date: 2007-10-26
• [Patent(Industrial Property Rights)] 試料及び電極ホルダユニット、位置調整台、並びに試料及び電極の装置への組付方法 (2007)
  • Inventor(s): 尾張真則, 野島雅,谷口昌宏, 間山憲仁, 足立達哉
  • Industrial Property Rights Holder: 尾張真則, 野島雅,谷口昌宏, 間山憲仁, 足立達哉
  • Industrial Property Number: 2007-279318
  • Filing Date: 2007-10-26
• [Patent(Industrial Property Rights)] アトムプローブ用針状試料の加工方法及び集束イオンビーム装置 (2007)
  • Inventor(s): 尾張真則, 皆藤孝, 野島雅
  • Industrial Property Rights Holder: 尾張真則, 皆藤孝, 野島雅
  • Filing Date: 2007-10-26
• [Patent(Industrial Property Rights)] 試料及び電極ホルダユニット、位置調整台、並びに試料及び電極の装置への組付方法 (2007)
  • Inventor(s): 尾張真則, 野島雅,谷口昌宏, 間山憲仁, 足立達哉
  • Industrial Property Rights Holder: 尾張真則, 野島雅,谷口昌宏, 間山憲仁, 足立達哉
  • Filing Date: 2007-10-26
• [Patent(Industrial Property Rights)] 特許権 (2007)
  • Inventor(s): 尾張真則, 他4名
  • Industrial Property Rights Holder: 尾張真則, 他4名
  • Industrial Property Number: 2007-279318
  • Filing Date: 2007-10-26
• [Patent(Industrial Property Rights)] 特許権 (2007)
  • Inventor(s): 尾張真則, 他2名
  • Industrial Property Rights Holder: 尾張真則, 他2名
  • Industrial Property Number: 2007-279319
  • Filing Date: 2007-10-26