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Study on THz Spectroscopy Using MEMS Chiral Metamaterial

Research Project

Project/Area Number 18H01843
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 28050:Nano/micro-systems-related
Research InstitutionThe University of Electro-Communications

Principal Investigator

Kan Tetsuo  電気通信大学, 大学院情報理工学研究科, 准教授 (30504815)

Co-Investigator(Kenkyū-buntansha) 小西 邦昭  東京大学, 大学院理学系研究科(理学部), 助教 (60543072)
神田 夏輝  東京大学, 物性研究所, 助教 (60631778)
岩瀬 英治  早稲田大学, 理工学術院, 教授 (70436559)
高橋 英俊  慶應義塾大学, 理工学部(矢上), 講師 (90625485)
Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2020: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2019: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2018: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
KeywordsMEMS / キラルメタマテリアル / THz / メタマテリアル / キラル / テラヘルツ / 分光
Outline of Final Research Achievements

To realize vibrational circularly polarized light dichromatic spectroscopy in the THz frequency band, a MEMS tunable metamaterial was formed with a three-dimensional chiral optical resonator structure that resonates strongly with circularly polarized light. In order to achieve the goal, the MEMS tunable metamaterial needs to be deformed significantly, so we focused on the generation of a stable large deformation method, which has been a problem in the past. In order to realize a stable large deformation method, we focused on the elimination of instability from the deformation method and the excellent deformation characteristics of silicon, and came up with a driving method that mechanically pulls up the helical structure fabricated on a silicon substrate. We designed and fabricated a structure that enables large deformation, verified the amount and shape of deformation by the mechanical driving method, and clarified the response of the fabricated structure by calculation.

Academic Significance and Societal Importance of the Research Achievements

THz周波数帯は、近年大きな注目を集めている電磁波の周波数帯である。THz周波数帯には多くの分子の振動吸収が存在するが、とくに左右円偏光に対する吸収特性の差である振動円偏光二色性スペクトル(VCD)は、ヘリックス構造など分子構造のキラル構造の情報をもたらすことが知られている。したがって、THz周波数帯において、物質の振動円偏光二色スペクトル計測技術が確立すれば、THz光の長い波長を生かして、タンパク質など大型の3次元分子構造を、結晶化せずに計測できることが期待される。本研究は、これまで微弱であり計測が難しかったTHz VCDの信号増強を行う素子の作製であり、優れた分光方法の確立に貢献する。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Annual Research Report
  • 2018 Annual Research Report
  • Research Products

    (11 results)

All 2021 2020 2019 2018 Other

All Journal Article (2 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results) Presentation (7 results) (of which Int'l Joint Research: 2 results,  Invited: 1 results) Remarks (2 results)

  • [Journal Article] Mechanically Deformable 3D Chiral THz Metamaterial2020

    • Author(s)
      Kosuge Takuya、Kan Tetsuo
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 140 Issue: 7 Pages: 170-176

    • DOI

      10.1541/ieejsmas.140.170

    • NAID

      130007867743

    • ISSN
      1341-8939, 1347-5525
    • Year and Date
      2020-07-01
    • Related Report
      2020 Annual Research Report
  • [Journal Article] Tunable and nonlinear metamaterials for controlling circular polarization2020

    • Author(s)
      Konishi Kuniaki、Kan Tetsuo、Kuwata-Gonokami Makoto
    • Journal Title

      Journal of Applied Physics

      Volume: 127 Issue: 23 Pages: 230902-230902

    • DOI

      10.1063/5.0005131

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] らせん状キラルメタマテリアルにおいて一様な立体変形をもたらす構造の研究2021

    • Author(s)
      丸山晃平, 小菅拓也, 菅哲朗
    • Organizer
      日本機械学会 関東支部 第27期講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 複数の梁で構成された平面らせん構造における垂直変形の特性評価,2020

    • Author(s)
      武田湧希, 岩瀬英治
    • Organizer
      日本機械学会 第12回マイクロ・ナノ工学シンポジウム
    • Related Report
      2020 Annual Research Report
  • [Presentation] Mechanical Large Deformation 3D Chiral THz Metamaterial2020

    • Author(s)
      Takuya Kosuge, Tetsuo Kan, Kuniaki Konishi, Mizuho Matoba, Natsuki Kanda, and Makoto Kuwata-Gonokami
    • Organizer
      The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 機械的変形可能な3DキラルTHzメタマテリアル2019

    • Author(s)
      小菅 拓也, 菅哲朗
    • Organizer
      電気学会第36回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] 平面らせん構造の垂直変形特性評価, Vertical Deformation Characterization of Planar Spiral Structure2019

    • Author(s)
      武田湧希, 岩瀬英治
    • Organizer
      本機械学会 第10回マイクロ・ナノ工学シンポジウム
    • Related Report
      2019 Annual Research Report
  • [Presentation] MEMS Reconfigurable Chiral Metamaterial for Terahertz Frequency2018

    • Author(s)
      Tetsuo Kan
    • Organizer
      2018 International Conference on Optical MEMS and Nanophotonics (OMN)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 平面らせん構造の垂直変形量測定, Vertical Deformation Measurement of Planner Spiral Structure2018

    • Author(s)
      徐奔馳, 岩瀬英治
    • Organizer
      日本機械学会 関東学生会 第58回学生員卒業研究発表講演会
    • Related Report
      2018 Annual Research Report
  • [Remarks] 菅研究室

    • URL

      http://www.ms.mi.uec.ac.jp

    • Related Report
      2020 Annual Research Report 2019 Annual Research Report
  • [Remarks] 菅研究室

    • URL

      http://ms.mi.uec.ac.jp

    • Related Report
      2018 Annual Research Report

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Published: 2018-04-23   Modified: 2022-01-27  

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