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Development of integrated optical biosensor using SOI photodiode with SP antenna

Research Project

Project/Area Number 18K04261
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionShizuoka University

Principal Investigator

Satoh Hiroaki  静岡大学, 電子工学研究所, 助教 (00380113)

Co-Investigator(Kenkyū-buntansha) 猪川 洋  静岡大学, 電子工学研究所, 教授 (50393757)
Project Period (FY) 2018-04-01 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2020: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2019: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2018: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords集積化バイオセンサー / ラベルフリー / 表面プラズモンアンテナ / SOIフォトダイオード
Outline of Final Research Achievements

The one of the most important figure of merits in optical biosensor is the detection limit of refractive index change (noise equivalent refractive index change). This detection limit near ten to the minus fifth RIU (refractive index unit) could be obtained in this project, and this value is comparable with the ones of the other optical biosensors. Furthermore,test chips with biosensor array have been fabricated for efficient measurement. It was successfully demonstrated that the signal change due to the analyte temperature change could be eliminated by the temperature sensors arranged near the biosensor array. According to the results in this project, it can be shown that the size reductions of an optical biosensor can be realized by utilizing the strong point of integrated circuit technology,although the conventional optical biosensor needs large-scale and complex measurement system.

Academic Significance and Societal Importance of the Research Achievements

光学バイオセンサーは、蛍光標識不要で広範囲な分子種を検出できる汎用性を有し、かつ高精度な測定を可能とするが、一方で装置が大型で測定系が複雑であることから、利用可能な現場は特定の研究組織や医療現場に限定されている。本研究では集積回路で構成可能な光学バイオセンサーを開発し、光を照射するだけの簡素な測定系で測定が可能となる。多種検体の同時測定によって測定の大幅な高スループット化も見込まれる。本研究の成果によってその兆しが見え始めた。本研究において残った課題が解決されれば、疾病の早期発見や創薬研究の効率化等、ライフサイエンス分野の研究現場に寄与しうる革新的な計測技術を提供できるはずである。

Report

(4 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • 2018 Research-status Report
  • Research Products

    (34 results)

All 2021 2020 2019 2018 Other

All Journal Article (5 results) (of which Int'l Joint Research: 5 results,  Peer Reviewed: 5 results,  Open Access: 2 results) Presentation (27 results) (of which Int'l Joint Research: 11 results,  Invited: 1 results) Remarks (2 results)

  • [Journal Article] Angular selectivity of SOI photodiode with surface plasmon antenna2020

    • Author(s)
      Nagarajan Anitharaj、Hara Shusuke、Satoh Hiroaki、Panchanathan Aruna Priya、Inokawa Hiroshi
    • Journal Title

      IEICE Electronics Express

      Volume: 17 Issue: 13 Pages: 20200187-20200187

    • DOI

      10.1587/elex.17.20200187

    • NAID

      130007872150

    • ISSN
      1349-2543
    • Year and Date
      2020-07-10
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Angle-Sensitive Detector Based on Silicon-On-Insulator Photodiode Stacked with Surface Plasmon Antenna2020

    • Author(s)
      Nagarajan Anitharaj、Hara Shusuke、Satoh Hiroaki、Panchanathan Aruna Priya、Inokawa Hiroshi
    • Journal Title

      Sensors

      Volume: 20 Issue: 19 Pages: 5543-5543

    • DOI

      10.3390/s20195543

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Performance Comparison of SOI-Based Temperature Sensors for Room-Temperature Terahertz Antenna-Coupled Bolometers: MOSFET, PN Junction Diode and Resistor2020

    • Author(s)
      Elamaran Durgadevi、Suzuki Yuya、Satoh Hiroaki、Banerjee Amit、Hiromoto Norihisa、Inokawa Hiroshi
    • Journal Title

      Micromachines

      Volume: 11 Issue: 8 Pages: 718-718

    • DOI

      10.3390/mi11080718

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Optimization of electric field enhancement of Ag@SiO2 trimer nanospheres by finite difference time domain method2019

    • Author(s)
      Anitharaj Nagarajana, Aruna Priya Panchanathan, Pandian Chelliah, Hiroaki Satoh, and Hiroshi Inokawa
    • Journal Title

      Applied Surface Science

      Volume: 495 Pages: 143547-143547

    • DOI

      10.1016/j.apsusc.2019.143547

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Performance improvement of on-chip integrable terahertz microbolometer arrays using nanoscale meander titanium thermistor2019

    • Author(s)
      Amit Banerjee, Hiroaki Satoh, Durgadevi Elamaran, Yash Sharma, Norihisa Hiromoto, and Hiroshi Inokawa
    • Journal Title

      Journal of Applied Physics

      Volume: 125 Issue: 21

    • DOI

      10.1063/1.5083643

    • NAID

      120006883465

    • Related Report
      2019 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Presentation] Performance Estimation of Single-Charge Counting Photon Detectors2021

    • Author(s)
      Revathi Manivannan, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 金属ナノ微粒子膜の高周波整流特性の検討2021

    • Author(s)
      岩田賢明, 西村智紀, アルカ シン, 佐藤弘明, 猪川 洋
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Performance Improvement of THz Microbolometer by Folded-Dipole Antenna2021

    • Author(s)
      Arie Pangesti Aji, Hiroaki Satoh, Catur Apriono, Norihisa Hiromoto, and Hiroshi Inokawa
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 熱フィードバック発振器による熱伝導度・熱容量の実時間測定2021

    • Author(s)
      城取恭平, 笠原健太郎, 寄神寿明, 五井悠仁, 佐藤弘明, 猪川 洋
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] High-Frequency Rectifying Characteristics of Si Nanowire Single-Electron Transistor2021

    • Author(s)
      Alka Singh, Shogo Matsumoto, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Silicon-on-insulator photodiode with surface plasmon antenna and its applications2021

    • Author(s)
      Hiroaki Satoh
    • Organizer
      International Conference on Research and Development in Science, Engineering and Technology
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] SPアンテナ付SOIフォトダイオードを用いた生体分子間相互作用の検出における測定条件の最適化2020

    • Author(s)
      磯谷滉希、佐藤弘明、竹内 州、猪川 洋
    • Organizer
      光・電波ワークショップ
    • Related Report
      2020 Annual Research Report
  • [Presentation] Polarization Dependence of Incident Angle Sensitivity in SOI Photodiode with 2D Hole Array Grating2020

    • Author(s)
      Anitharaj Nagarajan, Shusuke Hara, Hiroaki Satoh, Aruna Priya Panchanathan, and Hiroshi Inokawa
    • Organizer
      IEEE Silicon Nanoelectronics Workshop (SNW)
    • Related Report
      2020 Annual Research Report
  • [Presentation] Photon-number Statistics Observed by SOI MOSFET Single-Photon Detector with Real-time Signal Processing2020

    • Author(s)
      Revathi Manivannan, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      IEEE Silicon Nanoelectronics Workshop (SNW)
    • Related Report
      2020 Annual Research Report
  • [Presentation] Azimuth and Elevation Angle Dependence of Light Sensitivity in SOI Photodiode with Gold Grating2020

    • Author(s)
      Anitharaj Nagarajan, Shusuke Hara, Aruna Priya Panchanathan, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] High-frequency Response of Si-SET: Experimental Verification2020

    • Author(s)
      Alka Singh, Tomoki Nishimura, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] An FPGA-Based Real-Time Signal Processing for SOI MOSFET Single-Photon Detector2020

    • Author(s)
      Revathi Manivannan, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Optical Response of SOI Photodiode with Gold Line-and-space Grating to Biomolecular Interactions2019

    • Author(s)
      Hiroaki Satoh, Koki Isogai, and Hiroshi Inokawa
    • Organizer
      The 42nd Photonics & Electromagnetics Research Symposium (PIERS) in Xiamen
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] A Study on Directivity of SOI Photodetector with 2D Hole Array Type Gold Grating2019

    • Author(s)
      Anitharaj Nagarajan, Shusuke Hara, Hiroaki Satoh, Aruna Priya Panchanathan, and Hiroshi Inokawa
    • Organizer
      The 42nd Photonics & Electromagnetics Research Symposium (PIERS) in Xiamen
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] High-Frequency Characterization of Silicon Single-Electron Transistor as a Rectifier2019

    • Author(s)
      Alka Singh, Tomoki Nishimura, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] A Study on Biomolecular Interaction Observation Using Silicon-On-Insulator Photodiode with Surface Plasmon Antenna2019

    • Author(s)
      Koki Isogai, Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Azimuth and Elevation Angle Dependence of SOI Photodiode Characteristics with 2D Hole Array Grating2019

    • Author(s)
      Anitharaj Nagarajan, Shusuke Hara, Hiroaki Satoh, Aruna Priya Panchanathan, and Hiroshi Inokawa
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Design and Implementation of FPGA-Based Real-Time Signal Processing for SOI MOSFET Single-Photon Detector2019

    • Author(s)
      Revathi Manivannan, Hiroaki Satoh, Hiroshi Inokawa
    • Organizer
      The 4th International Symposium on Biomedical Engineering (ISBE 2019)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] 単電子トランジスタ整流器の感度と周波数特性の改善2019

    • Author(s)
      西村智紀, Alka Singh, 杉山皓慎, 佐藤弘明, 猪川 洋
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] SPアンテナ付SOIフォトダイオードを用いた生体分子間相互作用の測定における理想的性能のFDTD解析2019

    • Author(s)
      磯谷滉希, 佐藤弘明, 竹内 州, 猪川 洋
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] 金属格子型SPアンテナ付SOI フォトダイオードの光感度における指向性の評価2019

    • Author(s)
      原 秀輔, ナガラジャン アニタラジ, 佐藤弘明, 猪川 洋
    • Organizer
      光・電波ワークショップ(電子情報通信学会・光エレクトロニクス研究会)
    • Related Report
      2019 Research-status Report
  • [Presentation] Directivity of SOI Photodiode with Gold Surface Plasmon Antenna2019

    • Author(s)
      Anitharaj Nagarajan, Shusuke Hara, Hiroaki Satoh, Aruna Priya Panchanathan, and Hiroshi Inokawa
    • Organizer
      2019 Silicon Nanoelectronics Workshop
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Comparative Study on 1-THz Antenna-Coupled Bolometer with Various SOI-CMOS based Temperature Sensors: MOSFET, Diode, Resistor and Thermocouple2019

    • Author(s)
      Durgadevi Elamaran, Takeo Ueta, Hiroaki Satoh, Norihisa Hiromoto, and Hiroshi Inokawa
    • Organizer
      2019 Silicon Nanoelectronics Workshop
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Directivity for SOI Photodiode with Gold 2D Hole Array Grating2018

    • Author(s)
      Anitharaj Nagarajan, Shusuke Hara, Hiroaki Satoh, Aruna Priya Panchanathan, Hiroshi Inokawa
    • Organizer
      31st International Microprocesses and Nanotechnology Conference (MNC 2018)
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] Refractive Index Measurement with Surface Plasmon Antenna on Photodiode and its Application to Biosensing2018

    • Author(s)
      Hiroshi Inokawa, Hiroaki Satoh, Taiki Aso, Ryosuke Hayashi, Shu Takeuchi
    • Organizer
      The 3nd International Symposium on Biomedical Engineering
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Presentation] 表面プラズモンアンテナ付SOIフォトダイオードを用いた 屈折率測定における温度補償方法の検討2018

    • Author(s)
      林 凌佑、佐藤弘明、竹内 州、猪川 洋
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Research-status Report
  • [Presentation] Analysis of Directivity for SOI Photodiode with Gold Line-and-space Grating2018

    • Author(s)
      Hiroaki Satoh, and Hiroshi Inokawa
    • Organizer
      PIERS (Progress In Electromagnetics Research Symposium) 2018 in Toyama
    • Related Report
      2018 Research-status Report
    • Int'l Joint Research
  • [Remarks] 静岡大学教員データベース

    • URL

      https://tdb.shizuoka.ac.jp/ResearcherDB/public/Default2.aspx?id=10821&l=0

    • Related Report
      2020 Annual Research Report
  • [Remarks] 静岡大学教員データベース

    • URL

      https://tdb.shizuoka.ac.jp/ResearcherDB/public/Default2.aspx?id=10821

    • Related Report
      2019 Research-status Report

URL: 

Published: 2018-04-23   Modified: 2022-01-27  

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