Fabrication of Electron Source with Electron-Wave Interference by Nano Beam Induced Deposition Process

• Project/Area Number: 19206008
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Osaka University
• Principal Investigator: TAKAI Mikio 大阪大学, 極限量子科学研究センター, 教授 (90142306)
• Co-Investigator(Kenkyū-buntansha): WAKAYA FUJIO 大阪大学, 極限量子科学研究センター, 准教授 (60240454) ; ABO Satoshi 大阪大学, 極限量子科学研究センター, 助教 (60379310)
• Project Period (FY): 2007 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥45,240,000 (Direct Cost: ¥34,800,000、Indirect Cost: ¥10,440,000); Fiscal Year 2010: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000); Fiscal Year 2009: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000); Fiscal Year 2008: ¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000); Fiscal Year 2007: ¥23,660,000 (Direct Cost: ¥18,200,000、Indirect Cost: ¥5,460,000)
• Keywords: ナノビーム誘起堆積プロセス / 可干渉電子源 / ナノ間隙電子源 / 電子の干渉 / 干渉縞 / 電子のコヒーレンス長 / 電子波干渉 / 真空ナノエレクトロニクス / 電界電子放出電子源 / 電子のコヒーレント長 / 集束イオンビーム / 電子ビーム / ナノビーム / ビーム誘起堆積 / ビーム応用 / ナノビームプロセス / 電子のコヒーレンス / コヒーレント電子 / 電界電子放出 / フィールドエミッション

Research Abstract

1. ナノビーム誘起堆積プロセスによるナノ間隙電子源の作製
これまでの研究で明らかにした最適なプロセスパラメータを用いて、プラチナナノ間隙電子源を作製した。このとき、エミッタの先端部分がナノ間隙となった電子の隣接放出サイトを形成した。電子源の作製と2.のパターンの観察とを繰り返して、コヒーレンスの良い電子線が得られる電子源の作製が可能となった。
2. ナノ間隙電子源から放出される電子線パターンの観察
ナノ間隙電子源から放出される電子線の放射パターンを観測し、電子線の干渉縞を制御するための研究を行った。電子源からの放出電子の干渉性を大きくするために、エミッタのプロセス温度の最適化を行った。また、エミッタ材料の結晶性や不純物分布などがエミッション特性に与える影響についても検討した。室温でのエミッションの閾値の評価と、エミッションパターンの観測を行う他に、研究期間内に完成させた装置によりエミッタをヘリウム温度程度に冷却し、その時のフィールドエミッションパターンとフィールドイオンマイクロスコピーの評価を行い、ナノ間隙の電子放出サイトの特定とプロセス条件や先端形状が、干渉縞に与える影響を明らかにした。
3. 電子のコヒーレンス長と可干渉
これまで得られた堆積プラチナ層の電子のコヒーレンス長と、プラチナエミッターより激出された電子の干渉縞の関係を明らかにした。さらに、室温でコヒーレンスの良い電子線を安定に得るためのエミッタ作製条件を決定した。また、このエミッタを用いたゲート付き電子源を作成することが出来、素子応用への可能性を検討した。

Research Products

• [Journal Article] Electron Transport Properties of Pt Nanoarch Fabricated by Electron-Beam-Induced Deposition (2011)
  • Author(s): Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, Mikio Takai
  • Journal Title: Jpn.J.Appl.Phys Volume: (印刷中)
  • NAID: 210000070717
  • Peer Reviewed
• [Journal Article] Electron Transport Properties of Pt Nanoarch Fabricated by Electron Beam Induced Deposition (2011)
  • Author(s): Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, Mikio Takai
  • Journal Title: Jpn.J.Appl.Phys. in print.
  • NAID: 210000070717
  • Peer Reviewed
• [Journal Article] Three dimensional measurement of nano structures by single event TOF-RBS with nuclear nano probe (2011)
  • Author(s): Satoshi Abo, Shunya Kumano, Takayuki Azuma, Ryota Sugimoto, Katsuhisa Murakami, Fujio Wakaya, Mikio Takai
  • Journal Title: Nucl.Instr.Meth.B in press
  • Peer Reviewed
• [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition (2010)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Journal Title: J.Vac.Sci.Technol.B Volume: 28
  • Peer Reviewed
• [Journal Article] In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation (2010)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
  • Journal Title: J.Vac.Sci.Technol.B Volume: 28
  • Peer Reviewed
• [Journal Article] In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation (2010)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
  • Journal Title: J.Vac.Sci.Technol.B 28
  • Peer Reviewed
• [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition (2010)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Journal Title: J.Vac.Sci.Technol.B 28
  • Peer Reviewed
• [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition (2010)
  • Author(s): K. Murakami, T. Matsuo, F. Wakaya, M. Takai
  • Journal Title: J. Vac. Sci. Technol B28(in press)
  • Peer Reviewed
• [Journal Article] In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation (2010)
  • Author(s): K. Murakami, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
  • Journal Title: J. Vac. Sci. Technol B28(in press)
  • Peer Reviewed
• [Journal Article] Transmission Electron Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition (2009)
  • Author(s): Katsuhisa Murakami, Naoki Matsubara, Satoshi Ichikawa, Toshiya Kisa, Takahito Nakayama, Kunio Takamoto, Fujio Wakaya, Mikio Takai, Silke Petersen, Brigitte Amon, Heiner Ryssel
  • Journal Title: Jpn J.of Appl.Phys. 48
  • Peer Reviewed
• [Journal Article] Superposition of Fringelike Electron Emission Pattern from Radical-Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2009)
  • Author(s): K.Murakami, S.Nishihara, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
  • Journal Title: J.Vac.Sci.Technol.B 27 Pages: 721-724
  • Peer Reviewed
• [Journal Article] Superposition of Fringelike-Electron-Emission Pattern from Radical-Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2009)
  • Author(s): K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
  • Journal Title: J. Vac. Sci. Technol B27 Pages: 721-724
  • Peer Reviewed
• [Journal Article] Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition (2009)
  • Author(s): Katsuhisa Murakami, Naoki Matsubara, Satoshi Ichikawa, Toshiya Kisa, Takahito Nakayama, Kunio Takamoto, Fujio Wakaya, Mikio Takai, Silke Petersen, Brigitte Amon, Heiner Ryssel
  • Journal Title: Japanese Journal of Applied Physics 48(in press)
  • Peer Reviewed
• [Journal Article] Superposition of fringelike-electron-emission pattern from radical-oxygen'-gas expo sed Pt field emitter fabricated by electron-beam-induced deposition (2009)
  • Author(s): K.Murakami, S.Nishihara, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
  • Journal Title: Journal of Vacuum Science & Technology B 27 Pages: 721-724
  • Peer Reviewed
• [Journal Article] Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition (2009)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, T.Kisa, T.Nakayama, K.Takamoto, F.Wakaya, M.Takai, s.Petersen, B.Amon, H.Ryssel
  • Journal Title: Japanese Journal of Applied Physics 48
  • Peer Reviewed
• [Journal Article] Superposition of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition (2009)
  • Author(s): K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
  • Journal Title: J. Vacuum Science & Technology B 27(2)(In press)
  • Peer Reviewed
• [Journal Article] Observation of Fringe-Like Electron-Emission Pattern in Field Emission from Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2007)
  • Author(s): K.Murakami, F.Wakaya, M.Takai
  • Journal Title: Journal of Vacuum Science & Technology.B 25,(4) Pages: 1310-1314
  • Peer Reviewed
• [Journal Article] Observation of Fringe-Like Electron-Emission Pattern in Field Emission from Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2007)
  • Author(s): K. Murakami, F. Wakaya, M. Takai
  • Journal Title: Journal of Vacuum Science & Technology B25, (4) Pages: 1310-1314
  • Peer Reviewed
• [Journal Article] Observation of Fringe-Like Electron-Emission Pattern in Field Emission from Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2007)
  • Author(s): K. Murakami, F. Wakaya, M. Takai
  • Journal Title: Journal of Vacuum Science & Technology B25(4) Pages: 1310-1314
  • Peer Reviewed
• [Presentation] Electron Transport Properties of Pt Nanoarch fabricated by Electron-beam-Induced Deposition (2010)
  • Author(s): F.Wakaya, K.Takamoto, T.Teraoka, K.Murakami, S.Abo, M.Takai
  • Organizer: The 23^<rd> International Microprocesses and Nanotechnology Conference (MNC2010)
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2010-11-10
• [Presentation] Electron Emission Properties of Coherent Field Emitter for Electron Wave Interference (2010)
  • Author(s): K.Murakami, T.Kisa, T.Matsuo, S.Ichikawa, F.Wakaya, M.Takai
  • Organizer: The 23^<rd> International Vacuum Nanoelectronics Conference
  • Place of Presentation: Palo Alto, USA
  • Year and Date: 2010-07-26
• [Presentation] Electron Transport Properties of Pt Nanoarch Fabricated by Electron Beam Induced Deposition (2010)
  • Author(s): Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, Mikio Takai
  • Organizer: The 23^<rd> International Microprocesses and Nanotechnology Conference (MNC2010)
  • Place of Presentation: Kokura, Japan.
• [Presentation] Electron Emission Properties of Coherent Field Emitter for Electron Wave Interference (2010)
  • Author(s): K.Murakami, T.Kisa, T Matsuo, S.Ichikawa, F.Wakaya, M.Takai
  • Organizer: The 23^<rd> International Vacuum Nanoelectronics Conference (IVNC2010)
  • Place of Presentation: Palo Alto, USA.
• [Presentation] Three dimensional measurement of nanostructures by single event TOF-RBS with nuclear nanoprobem (2010)
  • Author(s): Satoshi Abo, Shunya Kumano, Takayuki Azuma, Ryota Sugimoto, Kohei Koresawa, Katsuhisa Murakami, Fujio Wakaya, Mikio Takai
  • Organizer: The 12^<nd> International Conference on Nuclear Microprobe Technology and Applications (ICNMTA2010)
  • Place of Presentation: Dresden, Germany.
• [Presentation] Observation of electron wave interference pattern from Pt field emitter fabricated by beam-induced deposition (2010)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 2^<nd> Japan-Korea Vacuum Nanoelectronics Workshop
  • Place of Presentation: Hamamatsu, Japan.
• [Presentation] Observation of Electron-wave Interference Pattern and Electron-emission Site of Pt Nanocrystalline Field Emitter by Field-emission Microscopy and Field-ion Microscopy (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Maui, Hawaii, USA
  • Year and Date: 2009-12-08
• [Presentation] Fabrication of Pt nanocrystalline field emitter for electron-wave interference by beam-induced deposition (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 22nd International Microprocesses and Nanotechnology Conference
  • Place of Presentation: 札幌
  • Year and Date: 2009-11-19
• [Presentation] In situ transmission-electron-microscope observation of electron-beam-deposited_ Pt field emitter under field emission and field evaporation (2009)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
  • Organizer: The 22nd International Vacuum Nanoelectronics Conference
  • Place of Presentation: 浜松
  • Year and Date: 2009-07-21
• [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fab ricated by focused-ion-beam-induced deposition (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 22nd International Vacuum Nanoelectronics Conference
  • Place of Presentation: 浜松
  • Year and Date: 2009-07-21
• [Presentation] Observation of electron wave interference pattern and electron-emission site of Pt nanocrystalline field emitter by field-emission microscopy and field-ion microscopy (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 7^<th> International Symposium on Atomic Level Characterizations for New Materials and Devices '09
  • Place of Presentation: Hawaii, USA.
• [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 22^<nd> International Vacuum Nanoelectronics Conference 2009 (IVNC2009)
  • Place of Presentation: Hamamatsu, Japan.
• [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition (2009)
  • Author(s): K. Murakami, T. Matsuo, F. Wakaya, M. Takai
  • Organizer: The 22^nd International Vacuum Nanoelectronics Conference 2009 (IVNC2009)
  • Place of Presentation: Hamamatsu, Japan
• [Presentation] ransmission-electron-microscope observation of Pt pillar fabricated by electron-beam-induced deposition (2008)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, T.Nakayama, K.Takamoto F.Wakaya, M.Takai, S.Petersen, H.Ryssel
  • Organizer: The 21^<st> International Microprocesses and Nanotechnology Conference (MNC08)
  • Place of Presentation: Fukuoka, Japan.
• [Presentation] Electron Coherence Length in Electron-Beam-Deposited Pt (2008)
  • Author(s): F.Wakaya, T.Nakayama, K.Takamoto, T.Takeuchi, N.Matsubara, K.Murakami, S.Ichikawa, S.Abo, M.Takai
  • Organizer: The 34^<th> International Conference on Micro and Nanoengineering 2008 (MNE2008)
  • Place of Presentation: Athens, Greece.
• [Presentation] Observation of Fringelike Electron Emission Pattern From Radical Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2008)
  • Author(s): K.Murakami, S.Nishihara, N.Matsubara, S.Abo, F.Wakaya, M.Takai
  • Organizer: The 21^<st> International Vacuum Nanoelectronics Conference (IVNC2008)
  • Place of Presentation: Wroclaw, Poland.
• [Presentation] Observation of Fringelike Electron-Emission-Pattern From Radical-Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition (2008)
  • Author(s): K. Murakami, S. Nishihara, N. Matsubara, S. Abo, F. Wakaya, M. Takai
  • Organizer: The 21st International Vacuum Nanoelectronics Conference (IVNC2008)
  • Place of Presentation: Wroclaw, Poland
• [Presentation] Electron Coherence Length in Electron-Beam-Deposited Pt (2008)
  • Author(s): F. Wakaya, T. Nakayama, K. Takamoto, T. Takeuchi, N. Matsubara, K. Murakami, S. Ichikawa, S. Abo, M. Takai
  • Organizer: The 34th International Conference on Micro and Nanoengineering 2008 (MNE2008)
  • Place of Presentation: Athens, Greece
• [Presentation] Transmission-electron-microscope observation of Pt pillar fabricated by electron-beam-induced deposition (2008)
  • Author(s): K. Murakami, N. Matsubara, S. Ichikawa, T. Nakayama, K. Takamoto F. Waka Takai, S. Petersen, H. Ryssel
  • Organizer: The 21st International Microprocesses and Nanotechnology Conference (MNC08)
  • Place of Presentation: Fukuoka, Japan
• [Presentation] Observation of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition (2008)
  • Author(s): K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
  • Organizer: International Vacuum Nanoelectronics Conference (IVNC08)
  • Place of Presentation: Wrocklaw, Poland
• [Presentation] Effect of radical oxygen gas exposure on Pt field emitter fabricated by electron-beam induced deposition (2007)
  • Author(s): K.Murakami, S.Abe, S.Nishihara, S.Abo, F.Wakaya, M.Takai
  • Organizer: The 20^<th> International Vacuum Nanoelectronics Conference (IVNC2007)
  • Place of Presentation: Chicago, Illinois, USA.
• [Presentation] Effect of radical oxygen gas exposure on Pt field emitter fabricated by electron-beam induced deposition (2007)
  • Author(s): K. Murakami, S. Abe, S. Nishihara, S. Abo, F. Wakava, M. Takai
  • Organizer: The 20th International Vacuum Nanoelectronics Conference (IVNC2007)
  • Place of Presentation: Chicago, Illinois, USA
• [Presentation] Effect of Radical Oxygen Gas Exposure on Pt Field Emitter Fabricated by Electron-Beam Induced Deposition (2007)
  • Author(s): K. Murakami, S. Abe, S. Nishihara, S. Abo, F. Wakaya, M. Takai
  • Organizer: The 20th International Vacuum Nanoelectronics Conference
  • Place of Presentation: Chicago, Illinois, USA.
• [Remarks]
  • URL: http://www.nano.cqst.osaka-u.ac.jp
• [Patent(Industrial Property Rights)] 電子波干渉ナノメートル電子源の作成法とこれを用いた素子 (2006)
  • Inventor(s): 高井幹夫
  • Industrial Property Rights Holder: 高井幹夫
  • Filing Date: 2006-03-27