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Fabrication of Electron Source with Electron-Wave Interference by Nano Beam Induced Deposition Process

Research Project

Project/Area Number 19206008
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionOsaka University

Principal Investigator

TAKAI Mikio  大阪大学, 極限量子科学研究センター, 教授 (90142306)

Co-Investigator(Kenkyū-buntansha) WAKAYA FUJIO  大阪大学, 極限量子科学研究センター, 准教授 (60240454)
ABO Satoshi  大阪大学, 極限量子科学研究センター, 助教 (60379310)
Project Period (FY) 2007 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥45,240,000 (Direct Cost: ¥34,800,000、Indirect Cost: ¥10,440,000)
Fiscal Year 2010: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2009: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2008: ¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000)
Fiscal Year 2007: ¥23,660,000 (Direct Cost: ¥18,200,000、Indirect Cost: ¥5,460,000)
Keywordsナノビーム誘起堆積プロセス / 可干渉電子源 / ナノ間隙電子源 / 電子の干渉 / 干渉縞 / 電子のコヒーレンス長 / 電子波干渉 / 真空ナノエレクトロニクス / 電界電子放出電子源 / 電子のコヒーレント長 / 集束イオンビーム / 電子ビーム / ナノビーム / ビーム誘起堆積 / ビーム応用 / ナノビームプロセス / 電子のコヒーレンス / コヒーレント電子 / 電界電子放出 / フィールドエミッション
Research Abstract

1. ナノビーム誘起堆積プロセスによるナノ間隙電子源の作製
これまでの研究で明らかにした最適なプロセスパラメータを用いて、プラチナナノ間隙電子源を作製した。このとき、エミッタの先端部分がナノ間隙となった電子の隣接放出サイトを形成した。電子源の作製と2.のパターンの観察とを繰り返して、コヒーレンスの良い電子線が得られる電子源の作製が可能となった。
2. ナノ間隙電子源から放出される電子線パターンの観察
ナノ間隙電子源から放出される電子線の放射パターンを観測し、電子線の干渉縞を制御するための研究を行った。電子源からの放出電子の干渉性を大きくするために、エミッタのプロセス温度の最適化を行った。また、エミッタ材料の結晶性や不純物分布などがエミッション特性に与える影響についても検討した。室温でのエミッションの閾値の評価と、エミッションパターンの観測を行う他に、研究期間内に完成させた装置によりエミッタをヘリウム温度程度に冷却し、その時のフィールドエミッションパターンとフィールドイオンマイクロスコピーの評価を行い、ナノ間隙の電子放出サイトの特定とプロセス条件や先端形状が、干渉縞に与える影響を明らかにした。
3. 電子のコヒーレンス長と可干渉
これまで得られた堆積プラチナ層の電子のコヒーレンス長と、プラチナエミッターより激出された電子の干渉縞の関係を明らかにした。さらに、室温でコヒーレンスの良い電子線を安定に得るためのエミッタ作製条件を決定した。また、このエミッタを用いたゲート付き電子源を作成することが出来、素子応用への可能性を検討した。

Report

(6 results)
  • 2010 Annual Research Report
  • 2009 Annual Research Report   Self-evaluation Report ( PDF )   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (44 results)

All 2011 2010 2009 2008 2007 2006 Other

All Journal Article (19 results) (of which Peer Reviewed: 19 results) Presentation (23 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Electron Transport Properties of Pt Nanoarch Fabricated by Electron-Beam-Induced Deposition2011

    • Author(s)
      Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, Mikio Takai
    • Journal Title

      Jpn.J.Appl.Phys

      Volume: (印刷中)

    • NAID

      210000070717

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron Transport Properties of Pt Nanoarch Fabricated by Electron Beam Induced Deposition2011

    • Author(s)
      Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, Mikio Takai
    • Journal Title

      Jpn.J.Appl.Phys. in print.

    • NAID

      210000070717

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Three dimensional measurement of nano structures by single event TOF-RBS with nuclear nano probe2011

    • Author(s)
      Satoshi Abo, Shunya Kumano, Takayuki Azuma, Ryota Sugimoto, Katsuhisa Murakami, Fujio Wakaya, Mikio Takai
    • Journal Title

      Nucl.Instr.Meth.B in press

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition2010

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Journal Title

      J.Vac.Sci.Technol.B

      Volume: 28

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation2010

    • Author(s)
      K.Murakami, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
    • Journal Title

      J.Vac.Sci.Technol.B

      Volume: 28

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation2010

    • Author(s)
      K.Murakami, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
    • Journal Title

      J.Vac.Sci.Technol.B 28

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition2010

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Journal Title

      J.Vac.Sci.Technol.B 28

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition2010

    • Author(s)
      K. Murakami, T. Matsuo, F. Wakaya, M. Takai
    • Journal Title

      J. Vac. Sci. Technol B28(in press)

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] In situ transmission electron microscopy observation of electron-beam-deposited Pt field emitter during field emission and field evaporation2010

    • Author(s)
      K. Murakami, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
    • Journal Title

      J. Vac. Sci. Technol B28(in press)

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Transmission Electron Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition2009

    • Author(s)
      Katsuhisa Murakami, Naoki Matsubara, Satoshi Ichikawa, Toshiya Kisa, Takahito Nakayama, Kunio Takamoto, Fujio Wakaya, Mikio Takai, Silke Petersen, Brigitte Amon, Heiner Ryssel
    • Journal Title

      Jpn J.of Appl.Phys. 48

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Superposition of Fringelike Electron Emission Pattern from Radical-Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2009

    • Author(s)
      K.Murakami, S.Nishihara, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
    • Journal Title

      J.Vac.Sci.Technol.B 27

      Pages: 721-724

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Superposition of Fringelike-Electron-Emission Pattern from Radical-Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2009

    • Author(s)
      K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
    • Journal Title

      J. Vac. Sci. Technol B27

      Pages: 721-724

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition2009

    • Author(s)
      Katsuhisa Murakami, Naoki Matsubara, Satoshi Ichikawa, Toshiya Kisa, Takahito Nakayama, Kunio Takamoto, Fujio Wakaya, Mikio Takai, Silke Petersen, Brigitte Amon, Heiner Ryssel
    • Journal Title

      Japanese Journal of Applied Physics 48(in press)

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Superposition of fringelike-electron-emission pattern from radical-oxygen'-gas expo sed Pt field emitter fabricated by electron-beam-induced deposition2009

    • Author(s)
      K.Murakami, S.Nishihara, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
    • Journal Title

      Journal of Vacuum Science & Technology B 27

      Pages: 721-724

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition2009

    • Author(s)
      K.Murakami, N.Matsubara, S.Ichikawa, T.Kisa, T.Nakayama, K.Takamoto, F.Wakaya, M.Takai, s.Petersen, B.Amon, H.Ryssel
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Superposition of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition2009

    • Author(s)
      K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
    • Journal Title

      J. Vacuum Science & Technology B 27(2)(In press)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of Fringe-Like Electron-Emission Pattern in Field Emission from Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2007

    • Author(s)
      K.Murakami, F.Wakaya, M.Takai
    • Journal Title

      Journal of Vacuum Science & Technology.B 25,(4)

      Pages: 1310-1314

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Observation of Fringe-Like Electron-Emission Pattern in Field Emission from Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2007

    • Author(s)
      K. Murakami, F. Wakaya, M. Takai
    • Journal Title

      Journal of Vacuum Science & Technology B25, (4)

      Pages: 1310-1314

    • Related Report
      2009 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Observation of Fringe-Like Electron-Emission Pattern in Field Emission from Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2007

    • Author(s)
      K. Murakami, F. Wakaya, M. Takai
    • Journal Title

      Journal of Vacuum Science & Technology B25(4)

      Pages: 1310-1314

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Presentation] Electron Transport Properties of Pt Nanoarch fabricated by Electron-beam-Induced Deposition2010

    • Author(s)
      F.Wakaya, K.Takamoto, T.Teraoka, K.Murakami, S.Abo, M.Takai
    • Organizer
      The 23^<rd> International Microprocesses and Nanotechnology Conference (MNC2010)
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2010-11-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Electron Emission Properties of Coherent Field Emitter for Electron Wave Interference2010

    • Author(s)
      K.Murakami, T.Kisa, T.Matsuo, S.Ichikawa, F.Wakaya, M.Takai
    • Organizer
      The 23^<rd> International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Palo Alto, USA
    • Year and Date
      2010-07-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Electron Transport Properties of Pt Nanoarch Fabricated by Electron Beam Induced Deposition2010

    • Author(s)
      Fujio Wakaya, Kunio Takamoto, Tsuyoshi Teraoka, Katsuhisa Murakami, Satoshi Abo, Mikio Takai
    • Organizer
      The 23^<rd> International Microprocesses and Nanotechnology Conference (MNC2010)
    • Place of Presentation
      Kokura, Japan.
    • Related Report
      2009 Final Research Report
  • [Presentation] Electron Emission Properties of Coherent Field Emitter for Electron Wave Interference2010

    • Author(s)
      K.Murakami, T.Kisa, T Matsuo, S.Ichikawa, F.Wakaya, M.Takai
    • Organizer
      The 23^<rd> International Vacuum Nanoelectronics Conference (IVNC2010)
    • Place of Presentation
      Palo Alto, USA.
    • Related Report
      2009 Final Research Report
  • [Presentation] Three dimensional measurement of nanostructures by single event TOF-RBS with nuclear nanoprobem2010

    • Author(s)
      Satoshi Abo, Shunya Kumano, Takayuki Azuma, Ryota Sugimoto, Kohei Koresawa, Katsuhisa Murakami, Fujio Wakaya, Mikio Takai
    • Organizer
      The 12^<nd> International Conference on Nuclear Microprobe Technology and Applications (ICNMTA2010)
    • Place of Presentation
      Dresden, Germany.
    • Related Report
      2009 Final Research Report
  • [Presentation] Observation of electron wave interference pattern from Pt field emitter fabricated by beam-induced deposition2010

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Organizer
      The 2^<nd> Japan-Korea Vacuum Nanoelectronics Workshop
    • Place of Presentation
      Hamamatsu, Japan.
    • Related Report
      2009 Final Research Report
  • [Presentation] Observation of Electron-wave Interference Pattern and Electron-emission Site of Pt Nanocrystalline Field Emitter by Field-emission Microscopy and Field-ion Microscopy2009

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Organizer
      7th International Symposium on Atomic Level Characterizations for New Materials and Devices
    • Place of Presentation
      Maui, Hawaii, USA
    • Year and Date
      2009-12-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of Pt nanocrystalline field emitter for electron-wave interference by beam-induced deposition2009

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Organizer
      The 22nd International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      札幌
    • Year and Date
      2009-11-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] In situ transmission-electron-microscope observation of electron-beam-deposited_ Pt field emitter under field emission and field evaporation2009

    • Author(s)
      K.Murakami, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
    • Organizer
      The 22nd International Vacuum Nanoelectronics Conference
    • Place of Presentation
      浜松
    • Year and Date
      2009-07-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fab ricated by focused-ion-beam-induced deposition2009

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Organizer
      The 22nd International Vacuum Nanoelectronics Conference
    • Place of Presentation
      浜松
    • Year and Date
      2009-07-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Observation of electron wave interference pattern and electron-emission site of Pt nanocrystalline field emitter by field-emission microscopy and field-ion microscopy2009

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Organizer
      The 7^<th> International Symposium on Atomic Level Characterizations for New Materials and Devices '09
    • Place of Presentation
      Hawaii, USA.
    • Related Report
      2009 Final Research Report
  • [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition2009

    • Author(s)
      K.Murakami, T.Matsuo, F.Wakaya, M.Takai
    • Organizer
      The 22^<nd> International Vacuum Nanoelectronics Conference 2009 (IVNC2009)
    • Place of Presentation
      Hamamatsu, Japan.
    • Related Report
      2009 Final Research Report
  • [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition2009

    • Author(s)
      K. Murakami, T. Matsuo, F. Wakaya, M. Takai
    • Organizer
      The 22^nd International Vacuum Nanoelectronics Conference 2009 (IVNC2009)
    • Place of Presentation
      Hamamatsu, Japan
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] ransmission-electron-microscope observation of Pt pillar fabricated by electron-beam-induced deposition2008

    • Author(s)
      K.Murakami, N.Matsubara, S.Ichikawa, T.Nakayama, K.Takamoto F.Wakaya, M.Takai, S.Petersen, H.Ryssel
    • Organizer
      The 21^<st> International Microprocesses and Nanotechnology Conference (MNC08)
    • Place of Presentation
      Fukuoka, Japan.
    • Related Report
      2009 Final Research Report
  • [Presentation] Electron Coherence Length in Electron-Beam-Deposited Pt2008

    • Author(s)
      F.Wakaya, T.Nakayama, K.Takamoto, T.Takeuchi, N.Matsubara, K.Murakami, S.Ichikawa, S.Abo, M.Takai
    • Organizer
      The 34^<th> International Conference on Micro and Nanoengineering 2008 (MNE2008)
    • Place of Presentation
      Athens, Greece.
    • Related Report
      2009 Final Research Report
  • [Presentation] Observation of Fringelike Electron Emission Pattern From Radical Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2008

    • Author(s)
      K.Murakami, S.Nishihara, N.Matsubara, S.Abo, F.Wakaya, M.Takai
    • Organizer
      The 21^<st> International Vacuum Nanoelectronics Conference (IVNC2008)
    • Place of Presentation
      Wroclaw, Poland.
    • Related Report
      2009 Final Research Report
  • [Presentation] Observation of Fringelike Electron-Emission-Pattern From Radical-Oxygen-Gas Exposed Pt Field Emitter Fabricated by Electron-Beam-Induced Deposition2008

    • Author(s)
      K. Murakami, S. Nishihara, N. Matsubara, S. Abo, F. Wakaya, M. Takai
    • Organizer
      The 21st International Vacuum Nanoelectronics Conference (IVNC2008)
    • Place of Presentation
      Wroclaw, Poland
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Electron Coherence Length in Electron-Beam-Deposited Pt2008

    • Author(s)
      F. Wakaya, T. Nakayama, K. Takamoto, T. Takeuchi, N. Matsubara, K. Murakami, S. Ichikawa, S. Abo, M. Takai
    • Organizer
      The 34th International Conference on Micro and Nanoengineering 2008 (MNE2008)
    • Place of Presentation
      Athens, Greece
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Transmission-electron-microscope observation of Pt pillar fabricated by electron-beam-induced deposition2008

    • Author(s)
      K. Murakami, N. Matsubara, S. Ichikawa, T. Nakayama, K. Takamoto F. Waka Takai, S. Petersen, H. Ryssel
    • Organizer
      The 21st International Microprocesses and Nanotechnology Conference (MNC08)
    • Place of Presentation
      Fukuoka, Japan
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Observation of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition2008

    • Author(s)
      K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
    • Organizer
      International Vacuum Nanoelectronics Conference (IVNC08)
    • Place of Presentation
      Wrocklaw, Poland
    • Related Report
      2008 Annual Research Report
  • [Presentation] Effect of radical oxygen gas exposure on Pt field emitter fabricated by electron-beam induced deposition2007

    • Author(s)
      K.Murakami, S.Abe, S.Nishihara, S.Abo, F.Wakaya, M.Takai
    • Organizer
      The 20^<th> International Vacuum Nanoelectronics Conference (IVNC2007)
    • Place of Presentation
      Chicago, Illinois, USA.
    • Related Report
      2009 Final Research Report
  • [Presentation] Effect of radical oxygen gas exposure on Pt field emitter fabricated by electron-beam induced deposition2007

    • Author(s)
      K. Murakami, S. Abe, S. Nishihara, S. Abo, F. Wakava, M. Takai
    • Organizer
      The 20th International Vacuum Nanoelectronics Conference (IVNC2007)
    • Place of Presentation
      Chicago, Illinois, USA
    • Related Report
      2009 Self-evaluation Report
  • [Presentation] Effect of Radical Oxygen Gas Exposure on Pt Field Emitter Fabricated by Electron-Beam Induced Deposition2007

    • Author(s)
      K. Murakami, S. Abe, S. Nishihara, S. Abo, F. Wakaya, M. Takai
    • Organizer
      The 20th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Chicago, Illinois, USA.
    • Related Report
      2007 Annual Research Report
  • [Remarks]

    • URL

      http://www.nano.cqst.osaka-u.ac.jp

    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 電子波干渉ナノメートル電子源の作成法とこれを用いた素子2006

    • Inventor(s)
      高井幹夫
    • Industrial Property Rights Holder
      高井幹夫
    • Filing Date
      2006-03-27
    • Related Report
      2009 Self-evaluation Report

URL: 

Published: 2007-04-01   Modified: 2017-05-19  

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