Study of tunnel-injected carrier conduction mechanism of Germanium nano-device in the ultrahigh frequency region

• Project/Area Number: 19360153
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Tohoku University
• Principal Investigator: TANAKA Tetsu Tohoku University, 大学院・医工学研究科, 教授 (40417382)
• Co-Investigator(Kenkyū-buntansha): FUKUSHIMA Takafumi 東北大学, 大学院・工学研究科, 助教 (10374969) ; MOSSAD Ali Atif 東北大学, 大学院・工学研究科, 産学官連携研究員 (80436097)
• Project Period (FY): 2007 – 2008
• Project Status: Completed (Fiscal Year 2008)
• Budget Amount: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000); Fiscal Year 2008: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000); Fiscal Year 2007: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000)
• Keywords: 半導体物性 / 電子デバイス / デバイス設計 / 半導体超微細化 / 超薄膜 / 雷子デバイス

Research Abstract

従来のCMOS技術の延長では実現不可能であるナノメートル領域で動作する新しいトンネル注入制御ゲルマニウムナノデバイスを提案し、キーテクノロジである高純度ゲルマニウム層の作製技術を確立した。また、高透磁率金属ナノドットを有する高周波動作用インダクタの作製に成功した。キャリア伝導メカニズムの実験的解析法として、超高周波領域で測定した散乱パラメータ(Sパラメータ)を用いたキャリアの反射/透過現象のモデル化手法を確立した。

Research Products

• [Journal Article] Characteristicsof copper spiral inductors utilizing FePtnano-dots film (2009)
  • Author(s): W.-C. Jeong, K. Kiyoyama, K.-W. Lee, A. Noriki, M. Murugesan, T. Fukushima, T. Tanaka, and M. Koyanagi
  • Journal Title: Japanese Journal of Applied Physics C157-1C157-4
  • Peer Reviewed
• [Journal Article] Characteristics of copper spiral inductors utilizing FePt nano-dots film (2009)
  • Author(s): W. -C. Jeong
  • Journal Title: Japanese Journal of Applied Physics 48
  • Peer Reviewed
• [Journal Article] Investigation of the effect of in situ annealing of FePt nanodots under high vacuum on the chemical states of Fe and Pt by x-ray photoelectron spectroscopy (2008)
  • Author(s): M. Murugesan, J.C. Bea, C.-K. Yin, H. Nohira, E. Ikenaga, T. Hattori, M. Nishijima, T. Fukushima, T. Tanaka, M. Miyao, and M. Koyanagi
  • Journal Title: JOURNAL OF APPLIED PHYSICS 104
  • Peer Reviewed
• [Journal Article] Investigation of the effect of in situ annealing of FePt nanodots under high vacuum on the chemical states of Fe and Pt by x-ray photoelectron spectroscopy (2008)
  • Author(s): M. Murugesan
  • Journal Title: Japanese Journal of Applied Physics 104
  • Peer Reviewed
• [Presentation] Synthesis and characterization of magnetic nano-dots for on-chip inductors (2009)
  • Author(s): M. Murugesan
  • Organizer: 第56回応用物理学会学術講演会
  • Place of Presentation: 筑波大学, 日本
  • Year and Date: 2009-03-30
• [Presentation] Synthesis and characterization of magnetic nano-dots for on-chip inductors (2009)
  • Author(s): M. Murugesan
  • Organizer: 第56回応用物理学会学術講演会
  • Place of Presentation: 筑波大学、日本
  • Year and Date: 2009-03-30
• [Presentation] New Heterogeneous Multi-Chip Module Integration Technology using Self-Assembly Method (2008)
  • Author(s): T. Fukushima
  • Organizer: 2008 IEEE International Electron Devices Meeting
  • Place of Presentation: San Francisco, USA
  • Year and Date: 2008-12-16
• [Presentation] New Heterogeneous Multi-Chip Module Integration Technology Using Self-Assembly Method (2008)
  • Author(s): T. Fukushima
  • Organizer: 2008 IEEE International Electron Devices Meeting
  • Place of Presentation: San Francisco、米国
  • Year and Date: 2008-12-16
• [Presentation] study of lectromagnic inductor for power deivery to three-dimensional retinal prosthesis system (2008)
  • Author(s): W.-C. Jeng
  • Organizer: GPBE/NUS-Tohoku Graduate Student Conference in Bioengineering
  • Place of Presentation: Singapore
  • Year and Date: 2008-12-10
• [Presentation] Characteisticsof Magnetic Film Inductors with FePt Nano-Dots (2008)
  • Author(s): W.-C. Jeong
  • Organizer: 2008 International Conference on Solid State Devices and Materials
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2008-09-24
• [Presentation] 高透磁率膜上に形成したインダクタの基本特性 (2008)
  • Author(s): 木野 久志
  • Organizer: 第55回応用物理学関係連合講演会2008春
  • Place of Presentation: 船橋,日本
  • Year and Date: 2008-03-28
• [Presentation] 高透磁率膜上に形成したインダクタの基本特性 (2008)
  • Author(s): 木野 久志
  • Organizer: 第55回応用物理学関係連合講演会2008春
  • Place of Presentation: 日本大学,日本
• [Presentation] Investigation of FePt Nano-Dots Fabricated by Self-Assembled Nano-Dot Deposon Method Usin-ray Photoelectron Spectroscopy (2007)
  • Author(s): M. Murugesan
  • Organizer: 2007 International Conference on Solid State Devices and Materials
  • Place of Presentation: Tsukuba, japan
  • Year and Date: 2007-09-21
• [Remarks]
  • URL: http://www.sd.mech.tohoku.ac.jp/site/Home.html
• [Remarks]
  • URL: http://www.sd.mech.tohoku.ac.jp/Site/Home.Html