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Two Dimensional Laser Probe for detection of Longitudinal Wave Vibration in GHz Range

Research Project

Project/Area Number 19360154
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionChiba University

Principal Investigator

HASHIMOTO Ken-ya  Chiba University, 大学院・工学研究科, 教授 (90134353)

Co-Investigator(Kenkyū-buntansha) 山口 正恆  千葉大学, 大学院・工学研究科, 助教 (00009664)
Co-Investigator(Renkei-kenkyūsha) YAMAGUCHI Masatsune  千葉大学, 大学院・工学研究科, 教授 (00009664)
OMORI Tatsuya  千葉大学, 大学院・工学研究科, 助教 (60302527)
Project Period (FY) 2007 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
Fiscal Year 2009: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2008: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2007: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Keywords弾性表面波 / レーザープローブ / サニャック干渉計 / 縦振動 / バルク弾性波 / 干渉計
Research Abstract

The authors developed a phase-sensitive and fast- scanning laser probing system for the diagnosis of radio frequency (RF) bulk acoustic wave (BAW) devices. The system is based on the Sagnac interferometer, which is insensitive to low frequency vibration. We also developed a new auto-focusing system for solving the defocusing problem arisen when the specimen surface is uneven and/or canted and a high magnification lens is employed. It was demonstrated that high quality two-dimensional (2D) image of vibration field patterns can be captured in minutes order for RF BAW devices operating in 2GHz range with 100x lens. The wavenumber domain analysis was also applied for the measurement data, and it was revealed how and where the energy leakage occurs in the device under concern.

Report

(4 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • 2007 Annual Research Report
  • Research Products

    (44 results)

All 2010 2009 2008 2007

All Journal Article (28 results) (of which Peer Reviewed: 11 results) Presentation (16 results)

  • [Journal Article] Quantitative Analysis of Power Leakage in an FBAR Device at the Anti-Resonance Frequency2010

    • Author(s)
      F. Thalmayr, K. Hashimoto, M. Ueda, T. Omori, M. Yamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 49, 7(to be published)

    • Related Report
      2009 Final Research Report
  • [Journal Article] A Multiple-Scan Focusing Method for RF BAW Device Observation by Laser Probe System2010

    • Author(s)
      N. Wu, K. Hashimoto, T. Omori, M. Yamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 49, 7(to be published)

    • Related Report
      2009 Final Research Report
  • [Journal Article] Frequency Domain Analysis of Lamb Wave Scattering and Application to Film Bulk Acoustic Wave Resonators2010

    • Author(s)
      F. Thalmayr, K. Hashimoto, T. Omori, M. Yamaguchi
    • Journal Title

      IEEE Trans.Ultrason., Ferroelec., and Freq.Contr. (to be published)

    • Related Report
      2009 Final Research Report
  • [Journal Article] Change in Piezoelectric Boundary Acoustic Wave Characteristics with Overlay and Metal Grating Materials2010

    • Author(s)
      Y. L. Wang, K. Hashimoto, T. Omori, M. Yamaguchi
    • Journal Title

      IEEE Trans.Ultrason., Ferroelec., and Freq.Contr. 57, 1

      Pages: 16-22

    • Related Report
      2009 Final Research Report
  • [Journal Article] Quantitative Analysis of Power Leakage in an FBAR Device at the Anti-Resonance Frequency2010

    • Author(s)
      F.Thalmayr, K.Hashimoto, M.Ueda, T.Omori, M.Yamaguchi
    • Journal Title

      Japanese Journal of Applied Physics 49(印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Multiple-Scan Focusing Method for RF BAW Device Observation by Laser Probe System2010

    • Author(s)
      N.Wu, K.Hashimoto, T.Omori, M.Yamaguchi
    • Journal Title

      Japanese Journal of Applied Physics 49(印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices2010

    • Author(s)
      K.Hashimoto, N.Wu, K.Kashiwa, T.Omori, M.Yamaguchi
    • Journal Title

      Proc.IUTAM Symposium of Acoustic Waves in Solids (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 2次元高速走査可能なRF帯SAW/BAWデバイス用光プローブ-産学連携の一例-2010

    • Author(s)
      橋本研也
    • Journal Title

      超音波テクノ 22(印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 弾性波可視化装置を用いたFBARにおけるエネルギー漏洩の解析2010

    • Author(s)
      呉楠, 柏景介, 大森達也, 橋本研也, 山口正恆
    • Journal Title

      超音波テクノ 22

      Pages: 41-45

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Focus Adjustment System for a Fast-Scanning and Phase-Sensitive Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices2009

    • Author(s)
      N. Wu, K. Kashiwa, K. Hashimoto, T. Omori, M. Yamaguchi, N. Kasai
    • Journal Title

      Jpn.J.Appl.Phys. 48, 10

      Pages: 108002-108002

    • Related Report
      2009 Final Research Report
  • [Journal Article] Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices2009

    • Author(s)
      K. Hashimoto, N. Wu, K. Kashiwa, T. Omori, M. Yamaguchi
    • Journal Title

      Proc.IUTAM Symposium of Acoustic Waves in Solids (to be published)

    • Related Report
      2009 Final Research Report
  • [Journal Article] Integrated Software for Image Processing in Radio Frequency Surface and Bulk Acoustic Waves Laser Probe System2009

    • Author(s)
      N. Wu, K. Hashimoto, K. Kashiwa, T. Omori, M. Yamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 48, 8

      Pages: 88002-88002

    • NAID

      210000067270

    • Related Report
      2009 Final Research Report
  • [Journal Article] Study on the Frequency Dependence of Lateral Energy Leakage in RF BAW Device by Fast-Scanning Laser Probe System2009

    • Author(s)
      N. Wu, K. Hashimoto, K. Kashiwa, T. Omori, M. Yamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 48, 7

    • Related Report
      2009 Final Research Report
  • [Journal Article] Focus Adjustment System for a Fast-Scanning and Phase-Sensitive Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices2009

    • Author(s)
      N.Wu, K.Kashiwa, K.Hashimoto, T.Omori, M.Yamaguchi, N.Kasai
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integrated Software for Image Processing in Radio Frequency Surface and Bulk Acoustic Waves Laser Probe System2009

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      210000067270

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on the Frequency Dependence of Lateral Energy Leakage in RF BAW Device by Fast-Scanning Laser Probe System2009

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 高周波MEMS素子用超高速2次元走査光プローブの開発2009

    • Author(s)
      橋本研也, 呉楠
    • Journal Title

      検査技術 14

      Pages: 1-7

    • NAID

      40016661436

    • Related Report
      2009 Annual Research Report
  • [Journal Article] 高周波MEMS素子用超高速2次元走査光プローブの開発2009

    • Author(s)
      橋本研也
    • Journal Title

      日本機械学会誌 111

      Pages: 1003-1003

    • NAID

      40016661436

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range2008

    • Author(s)
      K. Kashiwa, T. Omori, K. Hashimoto, M. Yamaguchi
    • Journal Title

      Jpn.J.Appl.Phys. 47, 5B

      Pages: 4108-4110

    • Related Report
      2009 Final Research Report
  • [Journal Article] Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range2008

    • Author(s)
      K.Kashiwa, T.Omori, K.Hashimoto and M.Yamaguchi
    • Journal Title

      Japanese Journal of Applied Physics 47B

      Pages: 4108-4110

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 高周波MEMS素子用超高速2次元走査光プローブの開発2008

    • Author(s)
      橋本研也
    • Journal Title

      日本機械学会誌 111

      Pages: 1003-1003

    • NAID

      40016661436

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Study on the Frequency Dependence of Lateral Energy Leakage in RFBAW Device by Fast-Scanning Laser Probe System2008

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori and M.Yamaguchi
    • Journal Title

      Proceedings of IEEE Ultrasonics Symposium (to be published)

    • Related Report
      2008 Annual Research Report
  • [Journal Article] A Fast Scanning Laser Probe Based on Sagnac Interferometer for RF Surface and Bulk Acoustic Wave Devices2008

    • Author(s)
      K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi, O.Takano, S. Meguro and K.Akahane
    • Journal Title

      Technical Digest, IEEE Microwave Symposium

      Pages: 851-854

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integrated Software for Image Processing in RF SAW/BAW Laser Probe System2008

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, and M.Yamaguchi
    • Journal Title

      Proceedings of IEEE Frequency Control Symposium

      Pages: 778-782

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Improvement of detection system for fast-scanning and phase-sensitive laser probe for surface acoustic wave devices in 2 GHz range2008

    • Author(s)
      K. Kashiwa, T. Omori, K. Hashimoto and M. Yamaguchi
    • Journal Title

      Japanese. Joumal of Applied. Physics 47

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] RF SAW/BAWデバイス用超高速2次元レーザプローブの開発2008

    • Author(s)
      柏景 介, 橋本 研也, 大森 達也, 山口 正恆, 高野 修, 目黒 栄, 赤羽 浩
    • Journal Title

      日本学術振興会弾性波素子技術第150委員会研究会予稿集

      Pages: 13-18

    • Related Report
      2007 Annual Research Report
  • [Journal Article] レーザプローブによる2GHzlWSh-SAWデバイスの観測2008

    • Author(s)
      柏景 介, 橋本 研也, 大森 達也, 山口 正恆
    • Journal Title

      日本学術振興会弾性波素子技術第150委員会研究会予稿集

      Pages: 11-14

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Wavenumber Domain Analysis of Two-Dimensional SAW Images Captured by Phase-Sensitive Laser Probe System2007

    • Author(s)
      K. Hashimoto, H. Kamizuma, M. Watanabe, T. Omori, M. Yamaguchi
    • Journal Title

      IEEE Trans.Ultrason., Ferroelec., and Freq.Contr. 53, 5

      Pages: 1072-1075

    • Related Report
      2009 Final Research Report
  • [Presentation] Frequency Domain Analysis of Lamb Wave Scattering and Application to Film Bulk Acoustic Wave Resonators2010

    • Author(s)
      F. Thalmayr, K. Hashimoto, T. Omori, M. Yamaguchi
    • Organizer
      Proc. Fourth Int'l Symp. on Acoustic Wave Devices for Future Mobile Comm. Systems
    • Place of Presentation
      Chiba, Japan
    • Year and Date
      2010-03-04
    • Related Report
      2009 Final Research Report
  • [Presentation] Recent Progress in Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices2010

    • Author(s)
      N. Wu, K. Hashimoto, K. Kashiwa, T. Omori, M. Yamaguchi
    • Organizer
      Proc. Fourth Int'l Symp. on Acoustic Wave Devices for Future Mobile Comm. Systems
    • Place of Presentation
      Chiba, Japan
    • Year and Date
      2010-03-03
    • Related Report
      2009 Final Research Report
  • [Presentation] Recent Progress in Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices2010

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
    • Organizer
      Fourth International Symposium on Acoustic Wave Devices for Future Mobile Comm.Systems
    • Place of Presentation
      千葉
    • Year and Date
      2010-03-03
    • Related Report
      2009 Annual Research Report
  • [Presentation] Time-Delay Compensation in Detection Electronics of Fast Scanning 2D SAW/BAW Laser Probe2009

    • Author(s)
      T. Omori, K. Kashiwa, K. Hashimoto, M. Yamaguchi
    • Organizer
      Proc. IEEE Ultrasonics Symposium
    • Place of Presentation
      Rome, Italy
    • Year and Date
      2009-09-21
    • Related Report
      2009 Final Research Report
  • [Presentation] A Multiple-Scan Focusing Method for RF BAW Device Observation by Laser Probe System2009

    • Author(s)
      N. Wu, K. Hashimoto, T. Omori, M.Yamaguchi
    • Organizer
      Proc. IEEE Ultrasonics Symposium
    • Place of Presentation
      Rome, Italy
    • Year and Date
      2009-09-20
    • Related Report
      2009 Final Research Report
  • [Presentation] Time-Delay Compensation in Detection Electronics of Fast Scanning 2D SAW/BAW Laser Probe2009

    • Author(s)
      T.Omori, K.Kashiwa, K.Hashimoto, M.Yamaguchi
    • Organizer
      IEEE Ultrasonics Symposium
    • Place of Presentation
      Rome
    • Year and Date
      2009-09-03
    • Related Report
      2009 Annual Research Report
  • [Presentation] A Multiple-Scan Focusing Method for RF BAW Device Observation by Laser Probe System2009

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
    • Organizer
      IEEE Ultrasonics Symposium
    • Place of Presentation
      Rome
    • Year and Date
      2009-09-03
    • Related Report
      2009 Annual Research Report
  • [Presentation] Foucus Adjustment System for a Fast-Scanning and Phase-Sensitive Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices2009

    • Author(s)
      N.Wu, K.Kashiwa, K.Hashimoto, T.Omori, M.Yamaguchi, N.Kasai
    • Organizer
      IEEE Frequency Control Symposium
    • Place of Presentation
      Besancon, France
    • Year and Date
      2009-06-04
    • Related Report
      2009 Annual Research Report
  • [Presentation] Phase-Sensitive and Fast-Scanning Laser Probe System for RF SAW/BAW Devices2009

    • Author(s)
      K.Hashimoto, N.Wu, K.Kashiwa, T.Omori, M.Yamaguchi, K.Akahane, S.Meguro, O.Takano
    • Organizer
      IUTAM Symposium on Recent Advances of Acoustic Waves in Solids
    • Place of Presentation
      台北,中華民国
    • Year and Date
      2009-05-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Focus Adjustment System for a Fast-Scanning and Phase-Sensitive Laser Probe for Radio Frequency Surface and Bulk Acoustic Wave Devices2009

    • Author(s)
      N. Wu, K. Kashiwa, K. Hashimoto, T. Omori, M. Yamaguchi, N. Kasai
    • Organizer
      Proc. IEEE Frequency Control Symposium
    • Place of Presentation
      Besancon, France
    • Year and Date
      2009-04-23
    • Related Report
      2009 Final Research Report
  • [Presentation] 2次元高速走査可能なRF帯SAW/BAWデバイズ用光プローブ-産学連携の一例-2009

    • Author(s)
      橋本研也
    • Organizer
      圧電材料・デバイスシンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2009-02-02
    • Related Report
      2008 Annual Research Report
  • [Presentation] 2次元高速走査可能なRF帯SAW/BAWデバイズ用光プローブ-産学連携の一例-2008

    • Author(s)
      N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, and M.Yamaguchi
    • Organizer
      Proceedings of 2008 Joint Japan-USA International Meeting on Acoustic Wave Devices
    • Place of Presentation
      Orlando, Florida, USA
    • Year and Date
      2008-12-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] Study on the Frequency Dependence of Lateral Energy Leakage in RF BAW Device by Fast-Scanning Laser Probe System2008

    • Author(s)
      N. Wu, K. Hashimoto, K. Kashiwa, T. Omori, M. Yamaguchi
    • Organizer
      Proc. IEEE Ultrasonics Symposium
    • Place of Presentation
      Beijing, China
    • Year and Date
      2008-11-04
    • Related Report
      2009 Final Research Report
  • [Presentation] A Fast Scanning Laser Probe Based on Sagnac Interferometer for RF Surface and Bulk Acoustic Wave Devices2008

    • Author(s)
      K. Hashimoto, K. Kashiwa, T. Omori, M. Yamaguchi, O. Takano, S. Meguro, K. Akahane
    • Organizer
      Technical Digest, IEEE Microwave Symposium
    • Place of Presentation
      Atlanta, Georgia, USA
    • Year and Date
      2008-06-18
    • Related Report
      2009 Final Research Report
  • [Presentation] Integrated Software for Image Processing in RF SAW/BAW Laser Probe System2008

    • Author(s)
      N. Wu, K. Hashimoto, K. Kashiwa, T. Omori, M. Yamaguchi
    • Organizer
      Proc. IEEE Frequency Control Symposium
    • Place of Presentation
      Honolulu, Hawaii, USA
    • Year and Date
      2008-05-20
    • Related Report
      2009 Final Research Report
  • [Presentation] A Fast Scanning Laser Probe Based on Sagnac Interferometer fbr RF Surface and Bulk Acoustic Wave Devlces2007

    • Author(s)
      K. Hashimoto, K. Kashiwa T. Omori, M. Yamaguchi, O. Takapo, S. Meguro and K. Akahane
    • Organizer
      Second Japan Taiwan International Workshop on Future Freuenc Control Devices
    • Place of Presentation
      日大理工学部(東京)
    • Year and Date
      2007-11-28
    • Related Report
      2007 Annual Research Report

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Published: 2007-04-01   Modified: 2016-04-21  

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