In-situ real-space observation in next-generation nano-processes by using hyper-thermal molecular beams

• Project/Area Number: 19360336
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: YOSHIGOE Akitaka Japan Atomic Energy Agency, 量子ビーム応用研究部門, 研究副主幹 (00283490)
• Co-Investigator(Kenkyū-buntansha): TERAOKA Yuden 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (10343922)
• Project Period (FY): 2007 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥20,020,000 (Direct Cost: ¥15,400,000、Indirect Cost: ¥4,620,000); Fiscal Year 2009: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2008: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2007: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
• Keywords: 超熱分子ビーム / ナノプロセス / 実空間"その場"観察 / 吸着 / 反応選択性 / プローブ顕微鏡 / 表面反応ダイナミクス / 超熱分子線 / 走査型プローブ顕微鏡 / 並進運動エネルギー / Si(111)-7×7の室温酸化 / 放射光リアルタイム光電子分光 / 空間選択的反応 / 反応機構 / 放射光 / リアルタイム光電子分光 / 原子分解能 / 酸化反応 / 実空間観察 / 吸着過程 / 精密ビーム照射 / その場観察

Research Abstract

We developed in-situ real-space observation method by using scanning tunneling microscope for applying next-generation nano-processes. With the complementary use of synchrotron radiation photoelectron spectroscopy, we have tried to confirm the spatial selectivity in the surface reactions induced by hyper-thermal molecular beam. We succeeded to obtain the atomic resolved-images of Si atoms of the surface such as Si(111)-7×7. It was also found that surface topography and morphology depending on translational kinetic energy of O_2 in the oxidation of Si(111)-7×7 surface at room temperature.

Research Products

• [Journal Article] Si-doping for the protection of hydrogenated diamond-like carbon films in a simulated atomic oxygen enviroment in low earth orbit (2009)
  • Author(s): K. Yokota, M. Tagawa, A. Kitamura, K. Matsumoto, A. Yoshigoe, Y. Teraoka, M. Belin
  • Journal Title: Trans. JSASS Space Tech. Japan Vol.7 Pages: 37-37
  • Peer Reviewed
• [Journal Article] A diamond-like carbon film by hyperthermal atomic oxygen exposures (2009)
  • Author(s): K. Yokota, M. Tagawa, A. Kitamura, K. Matsumoto, A. Yoshigoe, Y. Teraoka
  • Journal Title: Appl. Surf. Sci. Vol.255 Pages: 6710-6710
  • Peer Reviewed
• [Journal Article] Atomic layer fluorination of highly oriented pyrolytic grafite during hyperthermal atomic fluorine beam (2009)
  • Author(s): M. Tagawa, K. Yokota, K. Maeda, A. Yoshigoe, Y. Teraoka
  • Journal Title: Appl. Phys. Express Vol.2 Pages: 66002-1
  • Peer Reviewed
• [Journal Article] Kinetics of oxygen adsorption and initial oxidation on Cu(110) by hyperthermal oxygen molecular beams (2009)
  • Author(s): K. Moritani, M. Okada, Y. Teraoka, A. Yoshigoe, T. Kasai
  • Journal Title: J. Phys. Chem. A Vol.113 Pages: 15217-15217
  • Peer Reviewed
• [Journal Article] 放射光リアルタイム光電子分光で観たSi(111)表面の酸化過程 (2009)
  • Author(s): 吉越章隆、寺岡有殿
  • Journal Title: The papers of Technical Meeting on Optical and Quantum Devices, IEE Japan OQD-09-56 Pages: 67-67
  • NAID: 10026077527
• [Journal Article] Initial oxidation of Si(100) as studied by real-time synchrotron-radiation x-ray photoemission spectroscopy (2009)
  • Author(s): M. Suemitsu, Y. Yamamoto, H. Togashi, Y. Enta, A. Yoshigoe, Y. Teraoka
  • Journal Title: J. Vac. Sci. and Tech. B27 Pages: 549-549
  • Peer Reviewed
• [Journal Article] Synchrotron radiation photoemission spectroscopy for native oxide layer on Vanadium and VCrTa (2009)
  • Author(s): Y. Teraoka, A. Yoshigoe, J.R. Harries
  • Journal Title: J. Surf. Anal. Vol.15 Pages: 303-303
  • NAID: 130007686544
  • Peer Reviewed
• [Journal Article] Al(111)表面における超音速N2ビームによる極薄AlN膜形成 (2009)
  • Author(s): 寺岡有殿, 吉越章隆
  • Journal Title: 電子学会論文誌C電子・情報・システム部門誌 Vol.129 Pages: 294-294
  • Peer Reviewed
• [Journal Article] Cu3Au表面自然酸化のシンクロトロン放射光を用いた光電子分光研究 (2009)
  • Author(s): 宗和誠, 山崎大地, 岡田美智雄, 吉越章隆, 寺岡有殿, 笠井俊夫
  • Journal Title: 電子学会論文誌C電子・情報・システム部門誌 Vol.129 Pages: 229-229
  • Peer Reviewed
• [Journal Article] High resolution X-ray photoelectron spectroscopy study on initial oxidation of 4H-SiC(0001)-(√3x√3)R30° surface (2009)
  • Author(s): S. Takahashi, S. Hatta, A. Yoshigoe, Y. Teraoka, T. Aruga
  • Journal Title: Surf. Sci. Vol.603 Pages: 211-211
  • Peer Reviewed
• [Journal Article] Si-doping for the Protection of Hydrogenated Diamond-like Carbon Films in a Simulated Atomic Oxygen Enviroment in Low Earth Orbit (2009)
  • Author(s): K.Yokota
  • Journal Title: Trans.JSASS Space Tech.Japan 7 Pages: 37-42
  • Peer Reviewed
• [Journal Article] A diamond-like carbon film by hyperthermal atomic oxygen exposures (2009)
  • Author(s): K.Yokota
  • Journal Title: Appl.Surf.Sci. 255 Pages: 6710-6714
  • Peer Reviewed
• [Journal Article] Atomic layer fluorination of highly oriented pyrolytic grafite during hyperthermal atomic fluorine beam (2009)
  • Author(s): M.Tagawa
  • Journal Title: Appl.Phys.Express 2
  • Peer Reviewed
• [Journal Article] Kinetics of oxygen adsorption and initial oxidation on Cu(110)by hyperthermal oxygen molecular beams (2009)
  • Author(s): K.Moritani
  • Journal Title: J.Phys.Chem.A 113 Pages: 15217-15222
  • Peer Reviewed
• [Journal Article] 放射光リアルタイム光電子分光で観たSi(111)表面の酸化過程 (2009)
  • Author(s): 吉越章隆
  • Journal Title: The papers of Technical Meeting on Optical and Quantum Devices, IEE Japan OQD-09-56 Pages: 67-70
  • NAID: 10026077527
• [Journal Article] Initial oxidation of Si(100) as studied by real-time synchrotron-radiation x-ray photoemission spectroscopy (2009)
  • Author(s): M. Suemitsu
  • Journal Title: Journal of Vacuum Science and Technology B27 Pages: 549-550
  • Peer Reviewed
• [Journal Article] Synchrotron radiation photoemission spectroscopy for native oxide layer on Vanadium and VCrTa (2009)
  • Author(s): Y. Teraoka
  • Journal Title: Journal of Surface Analysis Vol.15 Pages: 303-306
  • NAID: 130007686544
  • Peer Reviewed
• [Journal Article] Al(111)表面における超音速N2ビームによる極薄AlN膜形成 (2009)
  • Author(s): 寺岡有殿
  • Journal Title: 電子学会論文誌C電子・情報・システム部門誌 Vol.129 Pages: 294-296
  • Peer Reviewed
• [Journal Article] Cu3Au表面自然酸化のシンクロトロン放射光を用いた電子分光研究 (2009)
  • Author(s): 宗和誠
  • Journal Title: 電子学会論文誌C電子・情報・システム部門誌 Vol.129 Pages: 229-232
  • Peer Reviewed
• [Journal Article] High resolution X-ray photoelectron spectroscopy study on initial oxidation of 4H-SiC(0001)-√<3x>√<3>) R30°surface (2009)
  • Author(s): S. Takahashi
  • Journal Title: Surface Science 603 Pages: 211-225
  • Peer Reviewed
• [Journal Article] Hydrogen adsorption on single-walled carbon nanotubes studied by core-level photoelectron spectroscopy and Raman spectroscopy (2008)
  • Author(s): A. Tokura, F. Maeda, Y. Teraoka, A. Yoshigoe, D. Takagi, Y. Homma, Y. Watanabe, Y. Kobayashi
  • Journal Title: Carbon Vol.46 Pages: 1903-1903
  • Peer Reviewed
• [Journal Article] SR-XPS and STM observa-tion of metastable chemisorption state of oxygen on Si(110)-16×2 Surface (2008)
  • Author(s): Y. Yamamoto, H. Togashi, A. Kato, Y. Takahashi, A. Konno, Y. Teraoka, A. Yoshigoe, H. Asaoka, M. Suemitsu
  • Journal Title: Appl. Surf. Sci. Vol.254 Pages: 6232-6232
  • Peer Reviewed
• [Journal Article] Reconstruction of Cu (111) induced by a hyperthermal oxygen molecular beam (2008)
  • Author(s): K. Moritani, M. Okada, Y. Teraoka, A. Yoshigoe, T. Kasai
  • Journal Title: J. Phys. Chem. C. Vol.112(2) Pages: 8662-8662
  • Peer Reviewed
• [Journal Article] Mechanisms of Concurrent SiO Desorption with Oxide Layer Formation at Si(001) Surface (2008)
  • Author(s): Y. Teraoka, A. Yoshigoe, K. Moritani
  • Journal Title: Electrical Engineering in Japan Vol.164 Pages: 60-60
  • NAID: 10018480370
  • Peer Reviewed
• [Journal Article] Si(110)面上熱酸化膜形成におけるSiサブオキサイド時間発展のXPSリアルタイム測定 (2008)
  • Author(s): 山本喜久, 富樫秀晃, 今野篤史, 松本光正, 加藤篤, 斎藤英司, 末光真希, 寺岡有殿, 吉越章隆
  • Journal Title: 信学技報 Vol.53 Pages: 65-65
  • Peer Reviewed
• [Journal Article] SR-PES and STM observa-tion of metastable chemisorption state of oxygen on Si(110)-16×2 surface (2008)
  • Author(s): Y. Yamamoto, H. Togashi, A. Kato, Y. Takahashi, A. Konno, Y. Teraoka, A. Yoshigoe, H. Asaoka, M. Suemitsu
  • Journal Title: Appl. Surf. Sci. Vol.254 Pages: 6232-6232
  • Peer Reviewed
• [Journal Article] Hydrogen adsorption single-walled carbon nanotubes studied by core-level photoelectron spectroscopy and Raman spectroscopy (2008)
  • Author(s): A. Tokura
  • Journal Title: Carbon 46 Pages: 1903-1908
  • Peer Reviewed
• [Journal Article] SR-XPS and STM observation of metastable chemisorption state of oxygen on Si(110)-16x2 Surface (2008)
  • Author(s): Y. Yamamoto
  • Journal Title: Applied Surface Science 254 Pages: 6232-65234
  • Peer Reviewed
• [Journal Article] Reconstruction of Cu(111) Induced by a Hyperthermal Oxygen Molecular Beam (2008)
  • Author(s): K. Moritani
  • Journal Title: J. Phys. Chem. C. 112(2) Pages: 8662-8667
  • Peer Reviewed
• [Journal Article] Mechanisms of Concurrent SiO Desorption with Oxide Layer Formation at Si(001) Surface (2008)
  • Author(s): Y. Teraoka
  • Journal Title: Electrical Engineering in Japan 164 Pages: 60-68
  • NAID: 210000165562
  • Peer Reviewed
• [Journal Article] Si(110)面上熱酸化膜形成におけるSiサブオキサイド時間発展のXPSリアルタイム測定 (2008)
  • Author(s): 山本喜久
  • Journal Title: 信学技報 53 Pages: 65-70
  • Peer Reviewed
• [Journal Article] SR-PES and STM observation of metastable chemisorption state of oxygen on Si(110)-16x2 surface (2008)
  • Author(s): Y. Yamamoto
  • Journal Title: Applied Surface Science (印刷中)
  • Peer Reviewed
• [Journal Article] Vibrationally-assisted dissociative adsorption of oxygen on Ru(0001)-p(2×1)-O (2007)
  • Author(s): S. Takahashi, Y. Fujimoto, Y. Teraoka, A. Yoshigoe, H. Okuyama, T. Aruga
  • Journal Title: Jpn. J. Appl. Phys. Vol46,No.4B Pages: 1888-1888
  • Peer Reviewed
• [Journal Article] Effects of vibrational and rotational exciation on the dissociative adsorption of O2 on Cu surfaces (2007)
  • Author(s): K. Moritani, M. Tsuda, Y. Teraoka, M. Okada, A. Yoshigoe, T. Fukuyama, T. Kasai, H. Kasai
  • Journal Title: J. Phys. Chem. Vol.111 Pages: 9961-9961
  • Peer Reviewed
• [Journal Article] Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams (2007)
  • Author(s): M. Tagawa, K. Yokota, C. Sogo, A. Yoshigoe, Y. Teraoka
  • Journal Title: Appl. Phys. Lett. Vol.91 Pages: 33504-33504
  • Peer Reviewed
• [Journal Article] Real-time observation of initial thermal oxidation on Si(110)-16×2 surfaces by O 1s photoemission spectroscopy using synchrotron radiation (2007)
  • Author(s): M. Suemitsu, A. Kato, H. Togashi, A. Konno, Y. Yamamoto, Y. Teraoka, A. Yoshigoe, Y. Narita, Y. Enta
  • Journal Title: Jpn. J. Appl. Phys. Vol.46,No4B Pages: 1888-1888
  • Peer Reviewed
• [Journal Article] Si(001) surface layer-by-layer oxidation studied by real-time photoelectron spectroscopy using synchrotron radiation (2007)
  • Author(s): S. Ogawa, A. Yoshigoe, S. Ishizuka, Y. Teraoka, Y. Takakuwa
  • Journal Title: Jpn. J. Appl. Phys. Vol.46,No.5B Pages: 3244-3244
  • Peer Reviewed
• [Journal Article] Si(001)表面における酸化膜形成過程とSiO脱離の共存機構 (2007)
  • Author(s): 寺岡有殿, 吉越章隆, 盛谷浩右
  • Journal Title: 電気学会論文誌C Vol.127 Pages: 133-133
  • Peer Reviewed
• [Journal Article] 超音速酸素分子ビームによる並進運動エネルギー誘起Ti(0001)表面酸化反応 (2007)
  • Author(s): 小川修一, 高桑雄二, 石塚眞治, 吉越章隆, 寺岡有殿, 盛谷浩右, 水野善之
  • Journal Title: 電気学会論文誌C Vol.127 Pages: 140-140
  • NAID: 10018480389
  • Peer Reviewed
• [Journal Article] Vibrationally-assisted dissociative adsorption of oxygen on Ru(0001)-p(2x)-O (2007)
  • Author(s): S. Takahashi
  • Journal Title: Japanese Journal Applied Physics Vol46,No.4B Pages: 1888-1890
  • Peer Reviewed
• [Journal Article] Effects of vibrational and rotational exciation on the dissociative adsorption of O_2 on Cu surfaces (2007)
  • Author(s): K. Moritani
  • Journal Title: Journal Physical Chemistry 111 Pages: 9961-9967
  • Peer Reviewed
• [Journal Article] Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams (2007)
  • Author(s): M. Tagawa
  • Journal Title: Applied Physics letters 91 Pages: 33504-33506
  • Peer Reviewed
• [Journal Article] Real-time observation of initial thermal oxidation on Si(110)-16x2 surfaces by O1s photoemission spectroscopy using synchrotron radiation (2007)
  • Author(s): S. Suemitsu
  • Journal Title: Japanese Journal Applied Physics Vol.46,No4B Pages: 1888-1890
  • Peer Reviewed
• [Journal Article] Si(001) surface layer-by-layer oxidation studied by real-time photoelectran spectroscopy using synchrotron radiation (2007)
  • Author(s): S. Ogawa
  • Journal Title: Japanese Journal Applied Physics Vol.46,No.5B Pages: 3244-3254
  • Peer Reviewed
• [Journal Article] Si(001)表面における酸化膜形成過程とSiO脱離の共存機構 (2007)
  • Author(s): 寺岡 有殿
  • Journal Title: 電気学会論文誌C 127 Pages: 133-139
  • Peer Reviewed
• [Journal Article] 超音速酸素分子ビームによる並進運動エネルギー誘起Ti(0001)表面酸化反応 (2007)
  • Author(s): 小川 修一
  • Journal Title: 電気学会論文誌C 127 Pages: 140-145
  • Peer Reviewed
• [Journal Article] XPS and STM studies on initial oxidation of Si(110)-16×2
  • Author(s): M. Suemitsu, H. Togashi, A. Kato, Y. Takahashi, A. Konno, Y. Yamamoto, Y. Teraoka, A. Yoshigoe, H. Asaoka
  • Journal Title: MRS the Symposium H Proceedings
• [Presentation] 酸素分子線照射量に依存したSi(111)表面の形状変化のSTM観察―並進運動エネルギーを2. 2 eVとした場合― (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 超音速酸素分子線によるSi(111)-7×7表面の室温酸化後のSTM観察 (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 2010年春季第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 酸素分子線照射量に依存したSi(111)表面の形状変化のSTM観察-並進運動エネルギーを2.2eVとした場合- (2010)
  • Author(s): 吉越章隆
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 超音速酸素分子線によるSi(111)-7×7表面の室温酸化後のSTM観察 (2010)
  • Author(s): 吉越章隆
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 放射光XPSによるSio_2/4H-SiC構造の伝導帯オフセット評価 (2010)
  • Author(s): 桐野嵩史
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 極薄EOT実現に向けたプラズマ窒化応用high-k/Geゲートスタックの提案 (2010)
  • Author(s): 朽木克博
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 高水素化DLC膜からの水素脱離に対する表面金属酸化膜の効果 (2010)
  • Author(s): 田川雅人
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 高水素化DLC膜への真空紫外線照射効果 (2010)
  • Author(s): 横田久美子
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] リアルタイム放射光光電子分光によるSi(110)表面上数層の熱酸化膜形成過程の評価 (2010)
  • Author(s): 鈴木康
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] グラフェン・オン・シリコン形成過程のLEED, XPS観察 (2010)
  • Author(s): 高橋良太
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 酸素添加によるSiC表面グラフェン化プロセスの低温化 (2010)
  • Author(s): 今泉京
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] SiO_2/Si界面酸化における格子歪みの役割(3):酸化誘起炭素濃縮による3C-siC成長 (2010)
  • Author(s): 穂積英彬
  • Organizer: 2010年春季 第57回 応用物理学関係連合講演会
  • Place of Presentation: 東海大学(湘南キャンパス)
  • Year and Date: 2010-03-17
• [Presentation] 酸素によるSi(001)表面エッチングにおける炭素濃縮 (2010)
  • Author(s): 穂積英彬
  • Organizer: 平成21年度日本表面科学会東北・北海道支部講演会
  • Place of Presentation: 仙台市
  • Year and Date: 2010-03-10
• [Presentation] Carbon condensation and 3C-SiC growth caused by oxidizing Si_<1-x>C_x alloy layers on Si(001) (2010)
  • Author(s): H.Hozumi
  • Organizer: The 5^<th> International Workshop on New Group IV Semiconductor Nanoelectronics
  • Place of Presentation: Sendai, Japan
  • Year and Date: 2010-01-29
• [Presentation] Thermal degradation process of deuterium ion implanted V_<25>Cr_<40>Ti_<35> using high-resolution soft x-ray synchrotron radiation photoelectron spectroscopy (2010)
  • Author(s): 戸出真由美
  • Organizer: JAEA-Symposium on Synchrotron Radiation Research 2010-Material Science on Metal Hydide-
  • Place of Presentation: Sayo, Japan
  • Year and Date: 2010-01-25
• [Presentation] Effect of vacuum ultraviolet exposure and surface oxide layer on the hydrogen desorption from hydrogeneated diamond-like carbon films (2010)
  • Author(s): 田川雅人
  • Organizer: JAEA-Symposium on Synchrotron Radiation Research 2010-Material Science on Metal Hydide-
  • Place of Presentation: Sayo, Japan
  • Year and Date: 2010-01-25
• [Presentation] ZrO_2ゲート絶縁膜を用いたGe MOSデバイスの界面設計 (2010)
  • Author(s): 細井卓治
  • Organizer: 第15回ゲートスタック研究会
  • Place of Presentation: 東レ総合研修センター(三島市)
  • Year and Date: 2010-01-22
• [Presentation] Si_<1-x>C_x合金層/Si(001)表面における酸化誘起炭素拡散:酸化膜成長とエッチング条件での比較 (2010)
  • Author(s): 穂積英彬
  • Organizer: 第15回ゲートスタック研究会
  • Place of Presentation: 東レ総合研修センター(三島市)
  • Year and Date: 2010-01-22
• [Presentation] 表面反応分析装置への走査型プローブ顕微鏡の導入-実空間"その場“観察の実現- (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] Si(111)-7×7表面の室温酸化の放射光XPS、LEEDおよびSTMによるリアルタイム観察 (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] 酸素分子の並進運動エネルギーによるSi(111)-7×7表面の酸化反応の促進 (2010)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] 表面反応分析装置への走査型プローブ顕微鏡の導入-実空間"その場"観察の実現- (2010)
  • Author(s): 吉越章隆
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] Si(111)-7x7表面の室温酸化の放射光XPS、LEEDおよびSTMによるリアルタイム観察 (2010)
  • Author(s): 吉越章隆
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] 酸素分子の並進運動エネルギーによるSi(111)-7x7表面の酸化反応の促進 (2010)
  • Author(s): 吉越章隆
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] 高分解能軟X線放射光光電子分光による重水素化VCrTi表面の熱安定化の評価 (2010)
  • Author(s): 戸出真由美
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] Nitidation of Al(111) by supersonic N_2 molecules (2010)
  • Author(s): Harries James
  • Organizer: 第23回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: イーグレ姫路(姫路)
  • Year and Date: 2010-01-06
• [Presentation] 表面変性層制御と水素脱離温度特性との相関研究-TiFe合金の熱処理による表面皮膜の変性- (2009)
  • Author(s): 戸出真由美
  • Organizer: 第3回水素貯蔵材料先端基盤研究事業技術検討会議
  • Place of Presentation: 産総研臨海副都心センター(東京都江東区)
  • Year and Date: 2009-12-18
• [Presentation] 放射光XPSによる熱酸化SiO2/4H-SiC界面のエネルギーバンド構造分析 (2009)
  • Author(s): 桐野嵩史
  • Organizer: SiC及び関連ワイドギャップ半導体研究会第18回講演会
  • Place of Presentation: 神戸国際会議(神戸)
  • Year and Date: 2009-12-17
• [Presentation] プラズマ窒化技術とAl0N/SiO2積層絶縁膜によるSiC-MOSデバイスの高機能化(招待講演) (2009)
  • Author(s): 渡辺平司
  • Organizer: SiC及び関連ワイドギャップ半導体研究会第18回講演会
  • Place of Presentation: 神戸国際会議場(神戸)
  • Year and Date: 2009-12-17
• [Presentation] Real-time photoelectron spectroscopy study of 3C-SiC nucleation and growth on Si(001) surface by carbonization with ethylene (2009)
  • Author(s): H.Hozumi
  • Organizer: 7^<th> International Synposimu on Atomic Layer Characterizations for New Materials and Devices '09
  • Place of Presentation: The Westin Maui Resort & Spa, Maui, Hawaii, USA
  • Year and Date: 2009-12-06
• [Presentation] Photoemission spectroscopic analysis with synchrotron radiation for directnitridation of Al(111) by supersonic N_2 molecular beams (2009)
  • Author(s): Y.Teraoka
  • Organizer: 22^<nd> International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Sheraton Sapporo Hotel, Sapporo, Japan
  • Year and Date: 2009-11-16
• [Presentation] Chemical state resolved depth-profiling using XPS and the maximum entropy method (2009)
  • Author(s): H.James
  • Organizer: 5^<th> International Workshop on High-Resolution Depth Profiling
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2009-11-15
• [Presentation] Enhancement of O2 adsorption on Si(111)-7×7 by translational kinetic energy of O2 revealed by real-time XPS using synchrotron radiation (2009)
  • Author(s): A. Yoshigoe, Y. Teraoka, J.R. Harries
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology (ISSS-5)
  • Place of Presentation: Waseda University
  • Year and Date: 2009-11-09
• [Presentation] Photoemission Analyses on Oxides at Single Crystal Vanadium Surfaces (2009)
  • Author(s): Y. Teraoka, A. Yoshigoe, J.R. Harries
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology (ISSS-5)
  • Place of Presentation: Waseda University
  • Year and Date: 2009-11-09
• [Presentation] In situ XPS depth-profiling of hydrogen storage material VCrTi during thermal annealing (2009)
  • Author(s): J.Harries
  • Organizer: AVS 56^<TH> INTERNATIONAL SYMPOSIUM & EXHIBITION
  • Place of Presentation: SAN JOSE CONVENTION CENTER/SAN JOSE, CALIFORNIA
  • Year and Date: 2009-11-08
• [Presentation] SPring-8 BL23SUの表面化学反応分析装置(SUREAC2000)における実空間“その場"観察の実現 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第50回真空に関する連合講演会
  • Place of Presentation: 学習院大学, 東京
  • Year and Date: 2009-11-04
• [Presentation] SPring-8 BL23SUの表面化学反応分析装置(SUREAC2000)における実空間"その場"観察の実現 (2009)
  • Author(s): 吉越章隆
  • Organizer: 第50回真空に関する連合講演会
  • Place of Presentation: 学習院大学、東京
  • Year and Date: 2009-11-04
• [Presentation] 重水素イオン注入した水素貯蔵材(V_<25>Cr_<40>Ti_<35>)の高分解能軟X線放射光光電子分光による自然酸化膜の熱安定性の評価 (2009)
  • Author(s): 戸出真由美
  • Organizer: 第50回真空に関する連合講演会
  • Place of Presentation: 学習院大学、東京
  • Year and Date: 2009-11-04
• [Presentation] Si(111)-7×7表面酸化の促進と酸素分子の並進運動エネルギーの関係 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第29回表面科学学術講演会
  • Place of Presentation: タワーホール舟堀, 東京
  • Year and Date: 2009-10-27
• [Presentation] 放射光表面化学反応分析装置に導入した走査型プローブ顕微鏡 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第29回表面科学学術講演会
  • Place of Presentation: タワーホール舟堀, 東京
  • Year and Date: 2009-10-27
• [Presentation] Si(111)-7x7表面酸化の促進と酸素分子の並進運動エネルギーの関係 (2009)
  • Author(s): 吉越章隆
  • Organizer: 第29回表面科学学術講演会
  • Place of Presentation: タワーホール舟堀、東京
  • Year and Date: 2009-10-27
• [Presentation] 放射光表面化学反応分析装置に導入した走査型プローブ顕微鏡 (2009)
  • Author(s): 吉越章隆
  • Organizer: 第29回表面科学学術講演会
  • Place of Presentation: タワーホール舟堀、東京
  • Year and Date: 2009-10-27
• [Presentation] Si(001)表面炭化反応における3C-SiC核発生の時間遅れ:表面近傍の臨界炭素濃度 (2009)
  • Author(s): 穂積英彬
  • Organizer: 第29回表面科学学術講演会会
  • Place of Presentation: タワーホール舟堀、東京
  • Year and Date: 2009-10-27
• [Presentation] グラフェン・オン・シリコシ表面構造のLEED観察 (2009)
  • Author(s): 高橋良太
  • Organizer: 第29回表面科学学術講演会会
  • Place of Presentation: タワーホール舟堀、東京
  • Year and Date: 2009-10-27
• [Presentation] Real-time observation of oxidation of Si(111)-7×7 surface at 300 K by using synchrotron radiation XPS, LEED and STM (2009)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: International Workshop on Electronic Spectroscopy for Gas-phase molecules and solid surfaces (IWES2009), ICESS 11 satellite workshop hosted by IMRAM
  • Place of Presentation: Tohoku University, Hotel Taikanso, Matsushima, Sendai
  • Year and Date: 2009-10-12
• [Presentation] Real-time observation of oxidation of Si(111)-7x7 surface at 300 K by using synchrotron radiation XPS, LEED and STM (2009)
  • Author(s): A.Yoshigoe
  • Organizer: International Workshop on Electronic Spectroscopy for Gas-phase molecules and solid surfaces (IWES2009), ICESS11 satellite workshop hosted by IMRAM, Tohoku University
  • Place of Presentation: Hotel Taikanso, Matsushima, Sendai
  • Year and Date: 2009-10-12
• [Presentation] Chemical-state resolved depth-profiling using angle-resolved X-ray photoelectron spectroscopy and the maximum entropy method (2009)
  • Author(s): J.R.Harries
  • Organizer: International Workshop on Electronic Spectroscopy for Gas-phase molecules and solid surfaces (IWES2009), ICESS11 satellite workshop hosted by IMRAM, Tohoku University
  • Place of Presentation: Hotel Taikanso, Matsushima, Sendai
  • Year and Date: 2009-10-12
• [Presentation] Strained Si atoms at SiO_2/Si interface during oxidation of Sil-xC alloy layer on Si(001) surfaces (2009)
  • Author(s): H.Hozumi
  • Organizer: International Workshop on Electronic Spectroscopy for Gas-phase molecules and solid surfaces (IWES2009), ICESS11 satellite workshop hosted by IMRAM, Tohoku University
  • Place of Presentation: Hotel Taikanso, Matsushima, Sendai
  • Year and Date: 2009-10-12
• [Presentation] Enhancement of Carbon Diffusion caused by Thermal Oxidation on Sil-xCx Alloy Layer/Si(001) Surfaces (2009)
  • Author(s): H.Hozumi
  • Organizer: 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: Sendai, Japan
  • Year and Date: 2009-10-07
• [Presentation] Epitaxy of Graphene on Si substrates toward Three-Dimensional Graphen Devices (2009)
  • Author(s): H.Fukidome
  • Organizer: 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: Sendai, Japan
  • Year and Date: 2009-10-07
• [Presentation] Induced oxidation on Ni(111) by kinetic energy of O_2 molecular beams (2009)
  • Author(s): Y.Teraoka
  • Organizer: ELEVENTH INTERNATIONAL CONFERENCE ON ELECTRONIC SPECTROSCOPY & STRUCTURE
  • Place of Presentation: NARA, JAPAN
  • Year and Date: 2009-10-06
• [Presentation] X-ray photoemission study of oxidation process on Cu(110) surface using a hyperthermal O_2 moecular beam (2009)
  • Author(s): M.Hashinokuchi
  • Organizer: ELEVENTH INTERNATIONAL CONFERENCE ON ELECTRONIC SPECTROSCOPY & STRUCTURE
  • Place of Presentation: NARA, JAPAN
  • Year and Date: 2009-10-06
• [Presentation] Synchrotron radiation photoemission study on native oxides of VCrTi ally and its modification by deuterium ion implantation (2009)
  • Author(s): Y.Teraoka
  • Organizer: 10^<th> International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN 10)
  • Place of Presentation: Granada, Spain
  • Year and Date: 2009-09-22
• [Presentation] 高分解能軟X線放射光光電子分光による重水素化VCrTiの表面分析 (2009)
  • Author(s): 戸出真由美
  • Organizer: 社団法人 日本金属学会 9年秋期(第145回)大会
  • Place of Presentation: 京都大学吉田キャンパス
  • Year and Date: 2009-09-15
• [Presentation] Si(111)-7×7表面の室温酸化のLEED、STMおよび放射光XPSによるリアルタイム観察 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 2009年(平成21年)秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学五福キャンパス
  • Year and Date: 2009-09-08
• [Presentation] 放射光X線光電子分光によるTiAl酸化過程の研究 (2009)
  • Author(s): 橋之口道宏
  • Organizer: 2009年(平成21年)秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学 五福キャンパス
  • Year and Date: 2009-09-08
• [Presentation] 界面特性に優れたAl_<2O>_3/ZrO_2/GeO_2積層構造のゲート絶縁膜の作製と評価 (2009)
  • Author(s): 岡本学
  • Organizer: 2009年(平成21年)秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学 五福キャンパス
  • Year and Date: 2009-09-08
• [Presentation] 4H-SiC(0001)面の熱酸化により形成したSiO_2/Si界面の放射光XPS評価 (2009)
  • Author(s): 桐野嵩史
  • Organizer: 2009年(平成21年)秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学 五福キャンパス
  • Year and Date: 2009-09-08
• [Presentation] SiO_2/Si界面酸化における格子歪みの役割(2):二次元島成長における炭素拡散 (2009)
  • Author(s): 穂積英彬
  • Organizer: 2009年(平成21年)秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学 五福キャンパス
  • Year and Date: 2009-09-08
• [Presentation] Si(111)-7×7表面の室温酸化のLEED、STMおよび放射光SPSによるリアルタイム観察 (2009)
  • Author(s): 吉越章隆
  • Organizer: 2009年(平成21年)秋季第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学 五福キャンパス
  • Year and Date: 2009-09-08
• [Presentation] Role of translational kinetic energy of O2 in adsorption process on Si(111)-7×7 surface at room temperature (2009)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: European Conference on Surface Science 26 (ECOSS 26)
  • Place of Presentation: Parma, Italy
  • Year and Date: 2009-08-30
• [Presentation] Role of translational kinetic energy of O_2 in adsorption process on Si(111)-7×7 surface at room temperature (2009)
  • Author(s): A.Yoshigoe
  • Organizer: European Conference on Surface Science 26 (ECOSS 26)
  • Place of Presentation: Parma, Italy
  • Year and Date: 2009-08-30
• [Presentation] Oxidation of Si(111)-7x7 enhanced by translational kinetic energy of O_2 (2009)
  • Author(s): A.Yoshigoe
  • Organizer: 5^<th> International Workshop on Reactions Involving Oxygen & Hydrogen, SPring-8, JAEA-CMD OSAKA University Joint Seminor
  • Place of Presentation: Osaka University
  • Year and Date: 2009-06-17
• [Presentation] Depth-profiling using angular-resolved X-ray photoelectron spectroscopy and the maximum entropy method (2009)
  • Author(s): H.James
  • Organizer: 5^<th> International Workshop on Reactions Involving Oxygen & Hydrogen, SPring-8, JAEA-CMD OSAKA University Joint Seminor
  • Place of Presentation: Osaka University
  • Year and Date: 2009-06-17
• [Presentation] High-temperature oxidation of titanuium-nickel alloy and its effect on the formation of protective layer (2009)
  • Author(s): T.Kasai
  • Organizer: 5^<th> International Workshop on Reactions Involving Oxygen & Hydrogen, SPring-8, JAEA-CMD OSAKA University Joint Seminor
  • Place of Presentation: Osaka University
  • Year and Date: 2009-06-17
• [Presentation] SR-XPS study on the native oxide of VCrTi and its modification by deuterium ion implantation (2009)
  • Author(s): M.Tode
  • Organizer: 5^<th> International Workshop on Reactions Involving Oxygen & Hydrogen, SPring-8, JAEA-CMD OSAKA University Joint Seminor
  • Place of Presentation: Osaka University
  • Year and Date: 2009-06-17
• [Presentation] Al(111)の窒化反応 (2009)
  • Author(s): James HARRIES
  • Organizer: 第25回化学反応討論会
  • Place of Presentation: 大宮ソニックシティー
  • Year and Date: 2009-06-01
• [Presentation] 放射光リアルタイム光電子分光で観たSi(111)表面の酸化過程 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 電気学会光・量子デバイス研究会
  • Place of Presentation: 神戸大学(神戸市)
  • Year and Date: 2009-05-07
• [Presentation] Si(111)-7×7への室温での酸素吸着過程に及ぼす酸素分子の並進運動エネルギーの役割 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 2009春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-03-30
• [Presentation] SPring-8 BL23SUの表面化学反応分析実験ステーションにおける走査型プローブ顕微鏡 (2009)
  • Author(s): 吉越章隆、寺岡有殿
  • Organizer: 2009春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-03-30
• [Presentation] Synchrotron radiation photoemission spectroscopy for native oxide layer on Vanadium and VCrTa (2009)
  • Author(s): Y. Teraoka, A. Yoshigoe, J.R. Harries
  • Organizer: The International Workshop for Surface Analysis and Standardization'09 (ISAS-09)
  • Place of Presentation: Okinawa Convention Center
  • Year and Date: 2009-03-15
• [Presentation] 酸素分子の並進運動エネルギーによるSi(111)-7×7表面への吸着促進機構の放射光リアルタイム光電子分光観察 (2009)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第22回放射光学会年会・合同シンポジウム
  • Place of Presentation: 東大本郷キャンパス
  • Year and Date: 2009-01-09
• [Presentation] Synchrotron radiation photoemission spectroscopy for native oxide layer on Vanadium and VCrTa (2009)
  • Author(s): Y. Teraoka
  • Organizer: The International Workshop for Surface Analysis and Standardization '09 (iSAS-09)
  • Place of Presentation: Okinawa Convention Center
• [Presentation] Si(111)-7x7への室温での酸素吸着過程に及ぼす酸素分子の並進運動エネルギーの役割 (2009)
  • Author(s): 吉越章隆
  • Organizer: 2009春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
• [Presentation] 超熱酸素分子線によるTiNi表面の酸化物生成過程のx線光電子分光研究 (2009)
  • Author(s): 宗和誠
  • Organizer: 2009春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
• [Presentation] SiO2/Si界面酸化における格子歪みの役割(1):炭素原子の挙動 (2009)
  • Author(s): 穂積英彬
  • Organizer: 2009春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
• [Presentation] プラズマ窒化SiC表面の熱酸化により形成したSiO2/SiC界面の放射光XPS評価 (2009)
  • Author(s): 景井悠介
  • Organizer: 2009春季第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
• [Presentation] 光電子分光と基板曲率測定によるSi(110)初期酸化過程の評価 (2009)
  • Author(s): 山本喜久
  • Organizer: 第14回ゲートスタック研究会
  • Place of Presentation: 三島市、東レ総合研修センター
• [Presentation] SiO2/Si(001)界面の炭素原子によるSi酸化反応機構への影響 (2009)
  • Author(s): 穂積英彬
  • Organizer: 第14回ゲートスタック研究会
  • Place of Presentation: 三島市、東レ総合研修センター
• [Presentation] 放射光O1s光電子分光法によるNi(111)表面酸化反応ダイナミクスのその場観察 (2009)
  • Author(s): 川上泰典
  • Organizer: 第22回放射光学会年会・合同シンポジウム
  • Place of Presentation: 東大本郷キャンパス
• [Presentation] Enhancement of O2 adsorption on Si(111)-7x7 by translational kinetic energy of O2 revealed by real-time XPS using synchrotron radiation (2009)
  • Author(s): A. Yoshigoe
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology (ISSS-5)
  • Place of Presentation: Waseda University
• [Presentation] Time-resolved observation of trapping-mediated O2 adsorption on Si(111)-7×7 by synchrotron radiation photoelectron spectroscopy (2008)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 2008 International Workshop on Dielectric Thin Films for Future ULSI Devices Science and Technology (IWDTF2008)
  • Place of Presentation: Tokyo Institute of Technology
  • Year and Date: 2008-11-05
• [Presentation] Si(001)表面炭化/酸化過程のリアルタイムXPS測定 (2008)
  • Author(s): 穂積英彬
  • Organizer: 2008年実用表面分析講演会
  • Place of Presentation: 仙台
  • Year and Date: 2008-10-14
• [Presentation] Si(111)-7×7への前駆的吸着状態を経由した酸素分子の吸着過程のリアルタイム放射光光電子分光観察 (2008)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
  • Year and Date: 2008-09-02
• [Presentation] 直接吸着機構による酸素分子のSi(111)-7×7への吸着促進 (2008)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
  • Year and Date: 2008-09-02
• [Presentation] Real-time observation of Si(111)-7×7 by using synchrotron radiation photoelectron spectroscopy (2008)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 4th International Workshop on reactions involving oxidation & hydrogen-Global COE Forum 2008-
  • Place of Presentation: Osaka University
  • Year and Date: 2008-08-22
• [Presentation] Real-time observation of Si(111)-7x7 by using synchrotron radiation photoelectron spectroscopy (2008)
  • Author(s): Akitaka Yoshigoe
  • Organizer: 4th International Workshop on reactions involving oxidation & hydrogen-Global COE Forum 2008-
  • Place of Presentation: Osaka University
  • Year and Date: 2008-08-22
• [Presentation] Synchrotron radiation photoemission spectroscopy for native oxide, its thermal instability and re-oxidation of hydrogen storage metals (2008)
  • Author(s): Yuden Teraoka
  • Organizer: 4th International Workshop on reactions involving oxidation & hydrogen-Global COE Forum 2008-
  • Place of Presentation: Osaka University
  • Year and Date: 2008-08-22
• [Presentation] Temperature dependence of Cu-oxide formation with hyperthermal oxygen molecular beam (2008)
  • Author(s): 岡田美智雄
  • Organizer: 4th International Workshop on reactions involving oxidation & hydrogen-Global COE Forum 2008-
  • Place of Presentation: Osaka University
  • Year and Date: 2008-08-22
• [Presentation] ERDA/RBS/SR-PES study on the effect of reactive atomic beam exposures to hydrogenerated diamond-like carbon films relevance to hydrogen storage applications (2008)
  • Author(s): 田川雅人
  • Organizer: 4th International Workshop on reactions involving oxidation & hydrogen-Global COE Forum 2008-
  • Place of Presentation: Osaka University
  • Year and Date: 2008-08-22
• [Presentation] Real-time monitoring of rest atoms during oxidation at 300 K of Si(111)-7×7 using synchrotron radiation photoelectron spectroscopy (2008)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 25th European Conference on Surface Science (ECOSS-25)
  • Place of Presentation: University of Liverpool
  • Year and Date: 2008-07-27
• [Presentation] 酸素分子によるSi(111)-7×7の酸化反応ダイナミクスと初期吸着確率の表面温度依存性 (2008)
  • Author(s): 吉越章隆、寺岡有殿
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工, 千葉
  • Year and Date: 2008-03-27
• [Presentation] Si(111)-7×7表面の室温酸化におけるレストアトムの放射光XPSによるリアルタイム観察 (2008)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工, 千葉
  • Year and Date: 2008-03-27
• [Presentation] 酸素分子によるSi(111)-7x7の酸化反応ダイナミクスと初期吸着確率の表面温度依存性 (2008)
  • Author(s): 吉越 章隆
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] Si(111)-7x7表面の室温酸化におけるレストアトムの放射光XPSによるリアルタイム観察 (2008)
  • Author(s): 吉越 章隆
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] Si(110)面上1原子層酸化膜の形成過程とその界面結合状態 (2008)
  • Author(s): 山本 喜久
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] 水素終端si(110)表面UV/O_3酸化過程のXPS解析 (2008)
  • Author(s): 中野 卓哉
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] 超熱酸素分子線によるCu(410)表面の酸化物生成の表面温度依存性 (2008)
  • Author(s): 岡田 美智雄
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] SR-PESとSTMによるsi(110)-16x2室温酸化表面上の準安定状態の観察 (2008)
  • Author(s): 富樫 秀晃
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] タングステン表面に注入された不純物元素の深さ分布と化学結合状態に関する研究 (2008)
  • Author(s): 上浦 良文
  • Organizer: 第55回応用物理学学術講演会
  • Place of Presentation: 日大理工、千葉
  • Year and Date: 2008-03-27
• [Presentation] Bonding structure of ultarthin oxides on Si(110)surface (2008)
  • Author(s): 山本 喜久
  • Organizer: MRS spring meeting 2008
  • Place of Presentation: San Francisco
  • Year and Date: 2008-03-24
• [Presentation] Real time observation of O2 adsorption on Si(111)-7x7 at 300K by use of synchrotron radiation O 1s and Si 2p XPS (2008)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: Symposium on Surface and Nano Science 2008 (SSNS08)
  • Place of Presentation: Appi, Iwate
  • Year and Date: 2008-01-22
• [Presentation] Real time observation of O_2 adsorption on Si(111)-7x7 at 300K by use of synchrotron radiation O1s and Si2p XPS (2008)
  • Author(s): Akitaka Yoshigoe
  • Organizer: Symposium on Surface and Nano Science 2008(SSNS08)
  • Place of Presentation: Appi, Iwate
  • Year and Date: 2008-01-22
• [Presentation] SiO_2/Si(001)界面における酸化誘起欠陥と酸素分子の反応過程 (2008)
  • Author(s): 小川 修一
  • Organizer: 第13回ゲートスタック研究会
  • Place of Presentation: 三島市
  • Year and Date: 2008-01-14
• [Presentation] SR-PESとSTMによるSi(110)-16x2表面上準安定酸化状態の観察 (2008)
  • Author(s): 山本 喜久
  • Organizer: 第13回ゲートスタック研究会
  • Place of Presentation: 三島市
  • Year and Date: 2008-01-14
• [Presentation] Si(110)-16x2面上極薄酸化膜形成過程とその界面構造 (2008)
  • Author(s): 山本 喜久
  • Organizer: 第13回ゲートスタック研究会
  • Place of Presentation: 三島市
  • Year and Date: 2008-01-14
• [Presentation] Si(111)表面の酸化反応ダイナミクスと初期吸着確率の表面温度依存性の関係 (2008)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第21回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 立命館大学草津キャンパス
  • Year and Date: 2008-01-12
• [Presentation] 放射光リアルタイムO 1sおよびSi 2p光電子分光で観た酸素ガスによるSi(111)表面の室温酸化反応 (2008)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第21回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 立命館大学草津キャンパス
  • Year and Date: 2008-01-12
• [Presentation] 放射光リアルタイム01sおよびSi2p光電子分光で観た酸素ガスによるSi(111)表面の室温酸化反応 (2008)
  • Author(s): 吉越 章隆
  • Organizer: 第21回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 立命館大学草津キャンパス
  • Year and Date: 2008-01-12
• [Presentation] Si(110)初期酸化時の化学結合状態および基板曲率のリアルタイム計測 (2008)
  • Author(s): 山本喜久
  • Organizer: 第63回応用物理学会東北支部学術講演会
  • Place of Presentation: 仙台市
• [Presentation] Si1-xCx合金層/Si(001)酸化反応過程のリアルタイムXPS観察 (2008)
  • Author(s): 穂積英彬
  • Organizer: 第28回表面科学学術講演会
  • Place of Presentation: 早稲田大学
• [Presentation] Time-resolved observation of trapping-mediated O2 adsorption on Si(111)-7x7 by synchrotron radiation radiation photoelectron spectroscopy (2008)
  • Author(s): A. Yoshigoe
  • Organizer: 2008 International Workshop on Dielectric Thin Films for Future ULSI Devices Science and Technology (IWDTF2008)
  • Place of Presentation: Tokyo Institute of Technology
• [Presentation] Selective Etching of sp2 Carbon in a Diamond-like Carbon Film by Hyperthermal Atomic Oxygen Exposures (2008)
  • Author(s): M. Tagawa
  • Organizer: 4th Vacuum and Surface Science Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: Matsue
• [Presentation] Change in Hydrogen Amount in a Diamond-like Carbon Film under Hyperthermal Atomic Oxygen Exposures (2008)
  • Author(s): K. Yokota
  • Organizer: 4th Vacuum and Surface Science Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: Matsue
• [Presentation] Photoemission study on oxide at poly-vanadium surface (2008)
  • Author(s): Yuden Teraoka
  • Organizer: 4th Vacuum and Surface Science Conference of Asia and Australia (VASSCAA-4)
  • Place of Presentation: Matsue
• [Presentation] New oxide layer formed by oxygen molecular beam on vanadium and its alloys as observed by photoemission spectroscopy with synchrotron radiation (2008)
  • Author(s): Y. Teraoka
  • Organizer: European Materials Research Society (E-MRS 2008 FALL MEETING)
  • Place of Presentation: Warsaw (Poland)
• [Presentation] Si(111)-7x7への前駆的吸着状態を経由した酸素分子の吸着過程のリアルタイム放射光光電子分光観察 (2008)
  • Author(s): 吉越章隆
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] 直接吸着機構による酸素分子のSi(111)-7x7への吸着促進 (2008)
  • Author(s): 吉越章隆
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] Si(110)面上1原始層酸化膜の結合構造のSR-PESによる評価 (2008)
  • Author(s): 山本喜久
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] エチレンによるSi(001)表面炭化反応過程のリアルタイムXPS観察 (2008)
  • Author(s): 高桑雄二
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] 統合Si酸化反応モデルの実験的検証(4):表面酸化反応様式への依存 (2008)
  • Author(s): 小川修一
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] 原子状酸素を照射した水素化ダイヤモンドライクカーボン薄膜の水素分布 (2008)
  • Author(s): 田川雅人
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] 放射光O1s光電子分光で観た超音速O2分子線照射によるNi(111)の室温酸化反応 (2008)
  • Author(s): 川上泰典
  • Organizer: 2008年(平成20年)秋季第69回応用物理学学術講演会
  • Place of Presentation: 中部大学(春日井市)
• [Presentation] Real-time monitoring of rest atoms during oxidation at 300 K of Si(111)-7x7 using synchrotron radiation photoelectron spectroscopy (2008)
  • Author(s): Akitaka Yoshigoe
  • Organizer: 25th European Conference on Surface Science (ECOSS-25)
  • Place of Presentation: University of Liverpool
• [Presentation] Si-doping for the protection of hydrogenated diamond-like carbon films in a stimulated atomic oxygen environment in LEO (2008)
  • Author(s): 横田久美子
  • Organizer: The 26th International Symposium on Space Technology and Science
  • Place of Presentation: Hamamatsu
• [Presentation] Protection of diamond-like carbon films from an enegetic atomic oxygen bombardment with Si-doping technology (2008)
  • Author(s): K. Yokota
  • Organizer: The 26th International Symposium on Space Technology and Science
  • Place of Presentation: Hamamatsu
• [Presentation] Initial oxidation of Si(110) as studied by real-time SR-XPS (2008)
  • Author(s): 末光真希
  • Organizer: 15th Workshop on Dielectric in Microelectrics
  • Place of Presentation: Berlin
• [Presentation] Incident kinetic energy of O2 and surface temperature dependence of initial sticking probability for Si(111)-7×7 investigated by real-time XPS combined with supersonic molecular beam (2007)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 4th International Symposium on Practical Surface Analysis and 6th Korea-Japan International Symposium on Surface Analysis
  • Place of Presentation: 金沢音楽堂
  • Year and Date: 2007-11-25
• [Presentation] Incident kinetic energy of O_2 and surface temperature dependence of initial sticking probability for Si(111)-7×7 investigated by real-time XPS combined with supersonic molecular beam (2007)
  • Author(s): Akitaka Yoshigoe
  • Organizer: 4th Intemational Symposium on Practical Surface Analysis and 6th Korea-Japan International Symposiun on Surface Analysis
  • Place of Presentation: 金沢音楽堂
  • Year and Date: 2007-11-25
• [Presentation] SR-PES and STM observation of metastable chemisorption state of oxygen on Si(110)-16x2 (2007)
  • Author(s): Y. Yamamoto
  • Organizer: International Symposium on control of semiconductor interface
  • Place of Presentation: Sendai in Japan
  • Year and Date: 2007-11-12
• [Presentation] Time resolved O 1s & Si 2p XPS for oxidation of Si(111)-7×7 at 300K (2007)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 9th International Conference on Atomically controlled Syrfaces, Interfaces and Nanostructures
  • Place of Presentation: 東大生産技術研究所
  • Year and Date: 2007-11-11
• [Presentation] Time resolved O1s&Si2p XPS for oxidation of Si(111)-7x7 at 300K (2007)
  • Author(s): Akitaka Yoshigoe
  • Organizer: 9th International Confbrence on Atomically controlled Syrfaces, Interfaces and Nanostructures
  • Place of Presentation: 東大生産技術研究所
  • Year and Date: 2007-11-11
• [Presentation] Diameter dependence of hydrogen adsorption on single-walled carbonnanotubes (2007)
  • Author(s): A. Tokura
  • Organizer: 9th Intemational Conference on Atomically controlled Syrfaces, Interfaces and Nanostructures
  • Place of Presentation: Sendai in Japan
  • Year and Date: 2007-11-11
• [Presentation] Temperature dependence of the oxidation-induced strain at SiO_2/Si(001)interface studied by XPS synchrotron radiation (2007)
  • Author(s): S. Ogawa
  • Organizer: 9th Intemational Conference on Atomically controlled Syrfaces, Interfaces and Nanostructures
  • Place of Presentation: Sendai in Japan
  • Year and Date: 2007-11-11
• [Presentation] SR-XPS analysis for AlN layer formed on Al(111) at 473K by supersonic N2 molecular beams (2007)
  • Author(s): Y. Teraoka, A. Yoshigoe
  • Organizer: 4th International Symposium on Practical Surface Analysis and 6th Korea-Japan International Symposium on Surface Analysis
  • Place of Presentation: Sendai in Japan
  • Year and Date: 2007-11-08
• [Presentation] Metastable chemisorption state of oxygen on Si(110)-16x2 surface observed by SR-PES (2007)
  • Author(s): 山本 喜久
  • Organizer: Third International Workshop on New Group IV Semiconductor Nanoelectronics
  • Place of Presentation: Sendai in Japan
  • Year and Date: 2007-11-08
• [Presentation] SR-XPS analysis for AIN layer formed on Al(111)at 473K by supersonic N_2 molecular beams (2007)
  • Author(s): Yuden Teraoka
  • Organizer: 4th International Symposium on Practical SurfaceAnalysis and 6th Korea-Japan International Symposium on Surface Analysis
  • Place of Presentation: Sendai in Japan
  • Year and Date: 2007-11-08
• [Presentation] 初期吸着確率の入射運動エネルギーおよびその表面温度依存性にみるSi(111)-7×7表面への酸素分子の吸着ダイナミクス (2007)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第27回表面科学講演大会
  • Place of Presentation: 東大生産技術研究所
  • Year and Date: 2007-11-01
• [Presentation] Si(111)-7×7表面への酸素分子の室温吸着過程の放射光光電子分光によるリアルタイム観察-O 1sおよびSi 2pの時間変化およびその相関- (2007)
  • Author(s): 吉越章隆, 寺岡有殿
  • Organizer: 第27回表面科学講演大会
  • Place of Presentation: 東大生産技術研究所
  • Year and Date: 2007-11-01
• [Presentation] Si(111)-7×7表面への酸素分子の室温吸着過程の放射光光電子分光によるリアルタイム観察-O1sおよびSi2pの時間変化およびその相関- (2007)
  • Author(s): 吉越 章隆
  • Organizer: 第27回表面科学講演大会
  • Place of Presentation: 東大生産技術研究所
  • Year and Date: 2007-11-01
• [Presentation] Chemical reactions of hydrogenated diamond-like carbon thin films withoxygen atoms (2007)
  • Author(s): 田川 雅人
  • Organizer: 第51回宇宙科学技術連合講演会
  • Place of Presentation: 札幌コンベンションセンター
  • Year and Date: 2007-10-29
• [Presentation] Oxidation of Pt(111)surface by hyperthermal oxygen molecular beam (2007)
  • Author(s): 松本 祥志
  • Organizer: Second International Symposium on Atomic Technology
  • Place of Presentation: Awaji in Japan
  • Year and Date: 2007-10-01
• [Presentation] 高分解能XPSおよび超音速分子線法による4H-SiC(0001)表面の酸化過程の研究 (2007)
  • Author(s): 高橋 真
  • Organizer: 日本物理学会第62回年次大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2007-09-21
• [Presentation] Real-time monitoring of initial oxidation of Si(110)-16x2 surface by Si2p photoemission spectroscopy (2007)
  • Author(s): 山本 喜久
  • Organizer: The 2007 International Conference on Solid State Devices and Materials(SSDM)
  • Place of Presentation: Tsukuba International Congress Center (EPOCHAL TSUKUBA)
  • Year and Date: 2007-09-18
• [Presentation] Observation of metastable O2 adsorption structure on Si(111)-7×7 at room temperature by real-time O1s & Si2p XPS using synchrotron radiation (2007)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 12th European Conference on Applications of Surface and Interface Analysis (ECASIA'07)
  • Place of Presentation: Brussels -Flagey-
  • Year and Date: 2007-09-09
• [Presentation] Nitridation of Al(111) Surface induced by supersonic Nitrogen Molecular Beams as observed by in-situ photoemission spectroscopy with synchrotron radiation (2007)
  • Author(s): Yuden Teraoka
  • Organizer: 12th European Conference on Applications of Surfaceand Interface Analysis (ECASIA'07)
  • Place of Presentation: Brussels-Flagey
  • Year and Date: 2007-09-09
• [Presentation] Observation of metastable O_2 adsorption structure on Si(111)-7x7 at roomtemperature by real-real-time O1s&Si2p XPS using synchrotron radiation (2007)
  • Author(s): Akitaka Yoshigoe
  • Organizer: 12th European Conference on Applications of Surface and Interface Analysis (ECASIA'07)
  • Place of Presentation: Brussels-Flagey
  • Year and Date: 2007-09-09
• [Presentation] Si(111)-7×7表面の室温酸化におけるO 1sおよびSi 2p光電子スペクトルの時間変化 (2007)
  • Author(s): 吉越章隆、寺岡有殿
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] Sii(111)-7x7表面の室温酸化におけるO1sおよびSi2p光電子スペクトルの時間変化 (2007)
  • Author(s): 吉越 章隆
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] 統合Si酸化反応モデルの実験的検証(2):界面酸化速度のO_2圧力依存性 (2007)
  • Author(s): 小川 修一
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] Si(110)-16x2表面の急速初期酸化現象と表面再配列 (2007)
  • Author(s): 富樫 秀晃
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] Si(110)-16x2面のリアルタイムSR-SPS観察と自己触媒反応モデル (2007)
  • Author(s): 山本 喜久
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] 放射光XPSによるGe_3N_4膜の化学結合状態及び熱脱離過程のその場観察 (2007)
  • Author(s): 細井 卓治
  • Organizer: 第68回応用物理学学術講演会
  • Place of Presentation: 北海道工業大学
  • Year and Date: 2007-09-04
• [Presentation] Real-time photoelectron spectroscopy study on the oxidation-inducedstrained Si atom at SiO_2/Si(001) interface dependence on oxidation temperature (2007)
  • Author(s): S. Ogawa
  • Organizer: 17th International Vacuum Congress (IVC-17), 13th International Conferemce on Surface Science(ICSS-13), International Conference on Nano Scienceand Technology (ICN+T 2007)
  • Place of Presentation: Stockholm
  • Year and Date: 2007-07-02
• [Presentation] In-situ observation of oxidation on Si(111)-7×7 surface at room temperature by use of synchrotron radiation x-ray photoelectron spectroscopy (2007)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: 2nd Japan-Korea Symposium on Surface Nanostructure
  • Place of Presentation: Matsushima, Miyagi
  • Year and Date: 2007-06-19
• [Presentation] In-situ observation of oxidation on Si(111)-7x7 surface at room temperatureby use of synchrotron radiation x-ray photoelectron spectroscopy (2007)
  • Author(s): Akitaka Yoshigoe
  • Organizer: 2nd Japan-Korea Symposium on Surface Nanostructure
  • Place of Presentation: Matsushima,Miyagi
  • Year and Date: 2007-06-19
• [Presentation] Metastable moleculary chemisorbed oxygen adsorbate on Si(111)-7×7 surface observed by synchrotron radiation real-time photoelectron spectroscopy (2007)
  • Author(s): A. Yoshigoe, Y. Teraoka
  • Organizer: The 3rd International Workshop on Oxidation Reactions
  • Place of Presentation: Suita, Osaka
  • Year and Date: 2007-05-10
• [Presentation] Metastable moleculary chemisorbed oxygen adsorbate on Si(111)-7x7 surface observed by synchrotron radiation real-time photoelectron spectroscopy (2007)
  • Author(s): Akitaka Yoshigoe
  • Organizer: The 3rd International Workshop on Oxidation Reactions
  • Place of Presentation: Suita, Osaka
  • Year and Date: 2007-05-10
• [Presentation] Effects of vibrational and rotational excitations on the dissociative adsorption of O_2 on Cu surfaces (2007)
  • Author(s): Kousuke Moritani
  • Organizer: The 3rd International Workshop on Oxidation Reactions
  • Place of Presentation: Suita, Osaka
  • Year and Date: 2007-05-10
• [Presentation] Photoemission study of the oxidation process via hyperthermal O_2 adsorptionat Cu and Cu_3Au (2007)
  • Author(s): M. Okada
  • Organizer: The 3rd International Workshop on Oxidation Reactions
  • Place of Presentation: Suita, Osaka
  • Year and Date: 2007-05-10
• [Presentation] Oxidation reaction kinetics on Ti(0001)surface studied by real-time monitoring methods of XPS, UPS and RHEED combined with AES (2007)
  • Author(s): Y. Takakuwa
  • Organizer: The 3rd International Workshop on Oxidation Reactions
  • Place of Presentation: Suita, Osaka
  • Year and Date: 2007-05-10
• [Presentation] Astudy on the causes of bias temperature instability in advanced gate stacks (2007)
  • Author(s): S. Fujieda
  • Organizer: 211th Meeting of the Electrochemical Society
  • Place of Presentation: Chicago, Illinois
  • Year and Date: 2007-05-06
• [Presentation] XPS and STM studies on initial oxidation of Si(110)-16x2 (2007)
  • Author(s): M. Suemitsu
  • Organizer: 2007MRS Spring Meeting
  • Place of Presentation: San Francisco
  • Year and Date: 2007-04-09
• [Patent(Industrial Property Rights)] グラフェンの形成方法およびグラフェンの形成装置 (2010)
  • Inventor(s): 寺岡有殿、吉越章隆、吹留博一、末光眞希、今泉京
  • Industrial Property Rights Holder: 独立行政法人日本原子力研究開発機構、国立大学法人東北大学
  • Industrial Property Number: 2010-045842
  • Filing Date: 2010-03-02