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Elucidation of Ultrafine Bubble Collapse Dynamics and Applications to Mechanical Manufacturing

Research Project

Project/Area Number 19H00734
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Research InstitutionTohoku University

Principal Investigator

Kuriyagawa Tsunemoto  東北大学, 工学研究科, 教授 (90170092)

Co-Investigator(Kenkyū-buntansha) 水谷 正義  東北大学, 工学研究科, 准教授 (50398640)
久保 百司  東北大学, 金属材料研究所, 教授 (90241538)
今野 豊彦  東北大学, 金属材料研究所, 教授 (90260447)
嶋田 慶太  東北大学, 工学研究科, 助教 (30633383)
Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥46,800,000 (Direct Cost: ¥36,000,000、Indirect Cost: ¥10,800,000)
Fiscal Year 2021: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2020: ¥10,010,000 (Direct Cost: ¥7,700,000、Indirect Cost: ¥2,310,000)
Fiscal Year 2019: ¥31,720,000 (Direct Cost: ¥24,400,000、Indirect Cost: ¥7,320,000)
Keywordsウルトラファインバブル / 研磨加工 / 切削加工 / 表面酸化 / 分子動力学 / 冷却性能 / 膜沸騰 / 研削加工 / 殺菌 / マイクロテクスチャリング / 分子動力学シミュレーション / ハイブリッドテクスチャリング / GaN研磨加工 / Ti切削加工 / Ti 切削加工 / GaN研磨
Outline of Research at the Start

近年、その応用分野が急速に拡大しているウルトラファインバブル(UFB)の基礎的な流動・圧壊ダイナミクスを大規模分子動力学シミュレーションにより解明し、その知見に基づきGaNの最終仕上げ研磨加工とチタン合金の超高能率切削加工に応用展開し、加工の高能率化、高精度化を実現することを目的とする。そしてUFBの効果を最大化するため研磨加工においては超音波援用供給法を、また切削加工においては工具すくい面と逃げ面にマイクロテクスチャリング処理を施した機能性工具を試作し、それぞれの加工性能の向上を実現する。

Outline of Final Research Achievements

Ultrafine bubbles (UFB) began to be applied to the fishery and agricultural fields in the mid-2000s, and at present, their applications are widely expanding such as to medicine, dentistry, pharmacy, engineering fields. However, its mechanism of UFB behaviors has not been fully elucidated, and there is an urgent need to prove it scientifically. In this study, the basic USB collapse dynamics was clarified by a large-scale molecular dynamics simulation. We have succeeded in improving the efficiency of the polishing process of gallium nitride by collapsing ultrafine bubbles and generating OH radicals by the ultrasonic-assisted coolant supply method. And it was found that this is due to the surface activation effect peculiar to the ultrafine bubble.

Academic Significance and Societal Importance of the Research Achievements

ウルトラファインバブルは“日本発”の技術であり、産業界への波及効果が非常に大きい。“ものづくりJAPAN”ブランド確立のため、経済産業省をはじめとして国を挙げてUFBの国際標準化に取り組んでいる。数年前からはUFBの切削、研削、研磨などの機械加工分野への適用が始まっている。さらにUFBは“水と空気”のみを使う技術であり、化学薬剤は一切不要である。したがって環境にも非常に優しい技術である。本研究はUFBの原子レベルでの挙動解明を行うことにより、UFB利用技術の最適化を行おうとする全く新しい試みである。

Report

(5 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Annual Research Report
  • 2019 Comments on the Screening Results   Annual Research Report
  • Research Products

    (15 results)

All 2021 2020 2019

All Journal Article (7 results) (of which Int'l Joint Research: 3 results,  Peer Reviewed: 7 results,  Open Access: 7 results) Presentation (8 results) (of which Int'l Joint Research: 6 results)

  • [Journal Article] Effect of Ta substitution on the synthesis of (K,Na)(Nb,Ta)O<sub>3</sub> powders by hydrothermal reaction: Insight into the combination of alkaline solution and raw powder2021

    • Author(s)
      Shintaro SANO, Takahisa SHIRAISHI, Takanori KIGUCHI, Toyohiko. J. KONNO
    • Journal Title

      Journal of the Ceramic Society of Japan

      Volume: 129 Issue: 7 Pages: 365-371

    • DOI

      10.2109/jcersj2.20240

    • NAID

      130008060687

    • ISSN
      1348-6535, 1882-0743
    • Year and Date
      2021-07-01
    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effect of Ultrafine Bubbles on <i>Pseudomonas Aeruginosa</i> and <i>Staphylococcus Aureus</i> During Sterilization of Machining Fluid2021

    • Author(s)
      Yamada Hiroko、Konishi Kensuke、Shimada Keita、Mizutani Masayoshi、Kuriyagawa Tsunemoto、Graduate School of Biomedical Engineering, Tohoku University 6-6-01 Aramaki Aza-Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan、Graduate School of Engineering, Tohoku University, Sendai, Japan
    • Journal Title

      International Journal of Automation Technology

      Volume: 15 Issue: 1 Pages: 99-108

    • DOI

      10.20965/ijat.2021.p0099

    • NAID

      130007966132

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2021-01-05
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Cooperative Roles of Chemical Reactions and Mechanical Friction in Chemical Mechanical Polishing of Gallium Nitride Assisted by OH Radicals: Tight-Binding Quantum Chemical Molecular Dynamics Simulations2021

    • Author(s)
      K. Kawaguchi, Y. Wang, J. Xu, Y. Ootani, Y. Higuchi, N. Ozawa, M. Kubo
    • Journal Title

      Phys. Chem. Chem. Phys.

      Volume: 23 Issue: 7 Pages: 4075-4084

    • DOI

      10.1039/d0cp05826b

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Atom-by-Atom and Sheet-by-Sheet Chemical Mechanical Polishing of Diamond Assisted by OH Radicals: A Tight-Binding Quantum Chemical Molecular Dynamics Simulation Study2021

    • Author(s)
      Kawaguchi Kentaro、Wang Yang、Xu Jingxiang、Ootani Yusuke、Higuchi Yuji、Ozawa Nobuki、Kubo Momoji
    • Journal Title

      ACS Applied Materials &amp; Interfaces

      Volume: 13 Issue: 34 Pages: 41231-41237

    • DOI

      10.1021/acsami.1c09468

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Crystallization behavior and machining properties of annealed FeSiBCr amorphous alloys2021

    • Author(s)
      Chieko Kuji, Kana Takenaka, Masayoshi Mizutani, Keita Shimada, Tsunemoto Kuriyagawa, Toyohiko J. Konno
    • Journal Title

      Journal of Materials Science

      Volume: 56 Issue: 29 Pages: 16697-16711

    • DOI

      10.1007/s10853-021-06346-7

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Multiscale structural characterization of yttria dispersed copper alloys fabricated by hot isostatic processing of mechanically alloyed powders2020

    • Author(s)
      Shimada Yusuke、Kazukawa Makoto、Hishinuma Yoshimitsu、Ikeda Ken-ichi、Noto Hiroyuki、Ma Bing、Takeguchi Masaki、Muroga Takeo、Konno Toyohiko J.
    • Journal Title

      Materialia

      Volume: 14 Pages: 100892-100892

    • DOI

      10.1016/j.mtla.2020.100892

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Energy storage properties of epitaxially grown xCaZrO3(1-x)NaNbO3 thin films prepared with chemical solution deposition method2020

    • Author(s)
      T. Shiraishi, S. Suzuki, T. Kiguchi, T. J. Konno
    • Journal Title

      Journal of Applied Physics

      Volume: 128 Issue: 4 Pages: 044102-044102

    • DOI

      10.1063/5.0004239

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Effect of Bubble Concentration Added to Coolant on Cutting2021

    • Author(s)
      Yasuhiro KUNIEDA, Kenta NAKAMURA, Keita SHIMADA, Masayoshi MIZUTANI, Tsunemoto KURIYAGAWA
    • Organizer
      The 6th International Symposium on Micro/Nano Mechanical Machining and Manufacturing
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ウルトラファインバブルクーラントのぬれ性と研削性能2021

    • Author(s)
      畑山陽介,大越広夢,水谷正義,厨川常元
    • Organizer
      2021年度砥粒加工学会学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Ultrasonic assistance on the generation of hydroxyl radicals in ultrafine bubble suspended water2019

    • Author(s)
      Keita Shimada, Kazuki Suzuki, Masayoshi Mizutan, Tsunemoto Kuriyagawa
    • Organizer
      The 8th international Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN 2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Bactericidal effect of ultrafine bubble against Pseudomonas aeruginosa in grinding fluid2019

    • Author(s)
      Hiroko Yamada, Kensuke Konishi, Keita Shimada, Masayoshi Mizutani, Tsunemoto Kuriyagawa
    • Organizer
      The 22nd International Symposium on Advances in Abrasive Technology
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Large-scale Molecular Dynamics Simulations on Chemical Mechanical Polishing Process of AlN Substrate with Nanobubbles2019

    • Author(s)
      Sota Kimura, Wang Yang, Narumasa Miyazaki, Yusuke Ootani, Nobuki Ozawa, Momoji Kubo
    • Organizer
      WINDS2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Chemical Mechanical Polishing Process with Nanobubbles of Nitride Semiconductor Substrate: Molecular Dynamics Investigation2019

    • Author(s)
      Sota Kimura, Narumasa Miyazaki, Yusuke Ootani, Nobuki Ozawa, Momoji Kubo
    • Organizer
      ITC2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nanobubble Collapse Simulation for Efficient Chemical Mechanical Polishing of Aluminum Nitride by Molecular Dynamics Method2019

    • Author(s)
      Sota Kimura, Narumasa Miyazaki, Yusuke Ootani, Nobuki Ozawa, Momoji Kubo
    • Organizer
      Tribochemistry
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 複数のナノバブルを用いたAlN基板の 化学機械研磨における大規模分子動力学 シミュレーション2019

    • Author(s)
      木村颯太, 王楊, 宮崎成正, 大谷優介, 尾澤伸樹, 久保百司
    • Organizer
      精密工学会2019年度秋季大会
    • Related Report
      2019 Annual Research Report

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Published: 2019-04-18   Modified: 2023-01-30  

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