Research on MEMS devices utilizing thick film permanent magnet

• Project/Area Number: 19H00738
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 進士 忠彦 東京工業大学, 科学技術創成研究院, 教授 (60272720)
• Co-Investigator(Kenkyū-buntansha): 中野 正基 長崎大学, 工学研究科, 教授 (20274623) ; 韓 冬 東京工業大学, 科学技術創成研究院, 特任助教 (50825263)
• Project Period (FY): 2019-04-01 – 2024-03-31
• Project Status: Granted (Fiscal Year 2023)
• Budget Amount: ¥45,110,000 (Direct Cost: ¥34,700,000、Indirect Cost: ¥10,410,000); Fiscal Year 2023: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000); Fiscal Year 2022: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000); Fiscal Year 2021: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000); Fiscal Year 2020: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000); Fiscal Year 2019: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
• Keywords: 永久磁石 / MEMS / 着磁 / レーザ局所加熱 / マイクロアクチュエータ / 磁石 / NdFeB / FePt / アクチュエータ / マイクロデバイス / 厚膜磁石 / 微細加工 / 微細着磁 / マイクロモータ / レーザ加熱 / マイクロポンプ / 磁気スタンプ

Outline of Research at the Start

本研究では，スマートフォンカメラ用のレンズや絞り用アクチュエータ，IoTセンサ用エナジーハーベスター（マイクロ発電機）の実現に十分寄与できる，厚膜磁石を活用したMEMSデバイスの設計，磁石の成膜，微細加工，微細着磁，案内機構やマイクロコイルの製造技術を総合的に研究する．

Outline of Annual Research Achievements

MEMSデバイスにおいて，微小アクチュエータやセンサで一般に使われるネオジム磁石の活用が不十分である．申請者らは，その理由として，１）厚さ数十～数百μｍ の高性能ネオジム磁石を製造する技術が十分開発されていない，２）１）の厚みの磁石を，反磁界の影響を低減した形に，微細加工，微細着磁する技術が未開発である，３）サブミリサイズの磁石を用いたデバイスの応用先の探索とそのデバイスの設計・製造法の検討が十分に行われていないためであると考えている．

本研究では，スマートフォンカメラ用マイクロアクチュエータ，IoTや体内植え込みデバイス用エナジーハーベスターなどを開発対象に，厚膜磁石を活用したMEMSデバイスの設計，磁石成膜・加工・着磁，製造技術を総合的に検討している．

2022年度は，昨年度のSmCo磁石に加え，高温時の保磁力が高いNdFeB磁石にレーザアシスト着磁した磁気パターンをマスターとして，高温環境中で，ターゲットのネオジム磁石に磁気パターンを転写する実験を，バルクのネオジム磁石やPLD磁石に対して行い，その実験結果と理想値を比較することから，着磁パターン転写モデルの構築を進めている．また，デバイス製作に関しては，マイクロコイルも重要であり，フレキシブルな導電性コイルをPDMS樹脂にプリントする技術や，永久磁石としても構造材料とも優れるFePt厚膜をマイクロデバイスの組み込む新たな試みも始めた．また，マイクロモータの研究に関しては，企業等から応用先の提案があり，それの基づいた基礎検討も始めている．

Current Status of Research Progress

1: Research has progressed more than it was originally planned.

Reason

当初予定していた研究項目の順調な研究成果が得られているとともに，当初予定していなかった，柔軟性のあるコイルやFePtなどの柔軟性と強度の両方が得られる永久磁石材料にも，研究が展開できている．

Strategy for Future Research Activity

本研究支援のおかげで，企業からも本技術の問い合わせがあり，実際の製品への組み込みの問い合わせが始まった．本年度は最終年度であり，実施した研究成果を漏れなく論文誌に投稿するなどの活動に注力するとともに，本技術の製品への実装などの観点でも，企業のニューズをくみ取り，研究さらなる展開方向を検討したい．

Research Products

• [Journal Article] A Disposable Electromagnetic Bi-Directional Micropump Utilizing a Rotating Multi-Pole Ring Magnetic Coupling (2022)
  • Author(s): Qi Chao、Sugita Naohiro、Shinshi Tadahiko
  • Journal Title: Micromachines Volume: 13 Issue: 10 Pages: 1565-1565
  • DOI: 10.3390/mi13101565
  • Peer Reviewed / Open Access
• [Journal Article] Experiment and modelling of cantilever-based electromagnetic energy harvester driven by direct impact of spherical ball (2022)
  • Author(s): Sugita Naohiro、Kine Makoto、Han Dong、Shinshi Tadahiko
  • Journal Title: Microsystem Technologies Volume: 28 Issue: 8 Pages: 1911-1923
  • DOI: 10.1007/s00542-022-05333-5
  • Peer Reviewed
• [Journal Article] Preparation of Fe-Pt thin-sheet magnets using exfoliation behavior (2022)
  • Author(s): M. Nakano, Y. Miyahara, A. Tsuruoka, A. Yamashita, T. Yanai, T. Honda, T. Shinshi, and H. Fukunaga
  • Journal Title: AIP Advances Volume: 12 Issue: 3 Pages: 035232-035232
  • DOI: 10.1063/9.0000303
  • Peer Reviewed
• [Journal Article] A MEMS-based electromagnetic membrane actuator utilizing bonded magnets with large displacement (2021)
  • Author(s): Qi Chao、Han Dong、Shinshi Tadahiko
  • Journal Title: Sensors and Actuators A: Physical Volume: 330 Pages: 112834-112834
  • DOI: 10.1016/j.sna.2021.112834
• [Journal Article] Energy Scavenging From Low Frequency Vibrations Through a Multi-Pole Thin Magnet and a High-Aspect-Ratio Array Coil (2020)
  • Author(s): Han Dong、Shinshi Tadahiko、Kine Makoto
  • Journal Title: International Journal of Precision Engineering and Manufacturing-Green Technology Volume: 8 Issue: 1 Pages: 139-150
  • DOI: 10.1007/s40684-020-00276-6
  • Peer Reviewed
• [Journal Article] Microlinear Halbach Array of Thick-Film NdFeB Magnets Utilizing Local Laser Irradiation and a Direction-Changeable External Magnetic Field (2020)
  • Author(s): Han Dong、Shinshi Tadahiko、Nagai Keita、Momosaki Mizuki、Nakano Masaki
  • Journal Title: IEEE Magnetics Letters Volume: 11 Pages: 1-4
  • DOI: 10.1109/lmag.2020.3006785
  • Peer Reviewed
• [Journal Article] High torque micro slice motor using a multipole ring magnet (2020)
  • Author(s): Han Dong、Nagai Keita、Shinshi Tadahiko
  • Journal Title: Sensors and Actuators A: Physical Volume: 311 Pages: 112050-112050
  • DOI: 10.1016/j.sna.2020.112050
  • Peer Reviewed
• [Journal Article] Comparison of properties between Pr-Fe-B and Nd-Fe-B thick-film magnets applied to MEMS (2020)
  • Author(s): Masaki Nakano, Sho Takeichi, Takashi Yamaguchi, Keisuke Takashima, Akihiro Yamashita, Takeshi Yanai, Tadahiko Shinshi and Hirotoshi Fukunaga
  • Journal Title: Japanese Journal of Applied Physics Volume: 59 Issue: SE Pages: SEEE01-SEEE01
  • DOI: 10.7567/1347-4065/ab5534
  • NAID: 120006988248
  • Peer Reviewed
• [Journal Article] An in-plane, large-stroke, multipole electromagnetic microactuatorrealized by guideways stacking mechanism (2019)
  • Author(s): Dong Han, Tadahiko Shinshi, Noriei Azuma, Shogo Kadota
  • Journal Title: Sensors and Actuators A: Physical Volume: 298 Pages: 111563-111563
  • DOI: 10.1016/j.sna.2019.111563
  • Peer Reviewed
• [Presentation] A MAGNETIC ACTUATOR USING PLD-MADE FEPT THICK FILM AS A PERMANENT MAGNET AND MEMBRANE MATERIAL FOR BIDIRECTIONAL MICROPUMPS (2022)
  • Author(s): Chao Qi, Keita Nagai, Ming Ji, Yu Miyahara, Naohiro Sugita, Tadahiko Shinshi, Masaki Nakano, Chiaki Sato
  • Organizer: PowerMEMS 2022
  • Int'l Joint Research
• [Presentation] SURVEY OF PERMANENT MAGNET FOR A LASER-ASSISTED HEATING MAGNETIZATION TO GENERATE DESIGNED SURFACE MAGNETIC FLUX DENSITY DISTRIBUTION FOR MAGNETIC MEMS DEVICES (2022)
  • Author(s): Keita Nagai, Naohiro Sugita, Tadahiko Shinshi
  • Organizer: PowerMEMS 2022
  • Int'l Joint Research
• [Presentation] Fine Magnetic Pattern Transferred on Nd-Fe-B Magnets Using High Heat-resistant Nd-Fe-B Magnets (2022)
  • Author(s): Keita NAGAI, Naohiro SUGITA, Tadahiko SHINSHI
  • Organizer: The 9th International Conference of ASPEN（ASPEN 2022）
  • Int'l Joint Research
• [Presentation] Fabrication of Flexible Coil on PDMS for MEMS-based Electromagnetic Membrane Actuator (2022)
  • Author(s): Chao Qi, Atsushi Nakazato, Naohiro Sugita, Tadahiko Shinshi
  • Organizer: The 9th International Conference of ASPEN（ASPEN 2022）
  • Int'l Joint Research
• [Presentation] A Disposable Electromagnetic Micropump for Oscillatory-flow PCR Microfluidic System (2022)
  • Author(s): Chao Qi, Naohiro Sugita, Tadahiko Shinshi
  • Organizer: ACTUATOR 2022
  • Int'l Joint Research
• [Presentation] Fabrication of Micro Halbach Arrays in a Monolithic Ring Magnet by Laser-Assisted Heating Magnetization (2022)
  • Author(s): Keita Nagai, Yohei Hamaoka, Naohiro Sugita, Tadahiko Shinshi
  • Organizer: ACTUATOR 2022
  • Int'l Joint Research
• [Presentation] A Disposable Bidirectional Micropump With Three Diaphragms Driven by a Rotating Multi-pole Magnet (2021)
  • Author(s): Chao QI, Tadahiko SHINSHI
  • Organizer: The 30th International Symposium on Industrial Electronics
  • Int'l Joint Research
• [Presentation] A Disposable Electromagnetic Micropump for Rapid and High throughput Point of care PCR Tests (2021)
  • Author(s): Chao Qi, Naohiro Sugita, Tadahiko Shinshi.
  • Organizer: The 6th International Symposium on Biomedical Engineering
  • Int'l Joint Research
• [Presentation] 永久磁石の微細加工・微細着磁技術の開発とそのデバイス応用 (2021)
  • Author(s): 進士忠彦
  • Organizer: マグネティックス研究会
  • Invited
• [Presentation] ネオジムリング磁石の多極ハルバッハ配列着磁 (2021)
  • Author(s): 永井 慧大, 杉田 直広, 進士 忠彦
  • Organizer: 第12 回マイクロ・ナノ工学シンポジウム
• [Presentation] ネオジム磁石に対するサマコバ磁石の微細磁気パターンの転写 (2021)
  • Author(s): 濱岡 陽平, 杉田 直広, 進士 忠彦
  • Organizer: 第33回「電磁力関連のダイナミクス」
• [Presentation] Valveless Micropump Actuated by an Axial Magnetic Coupling of Two Ring Multi-pole NdFeB Magnets (2020)
  • Author(s): Chao QI, Dong HAN, Tadahiko SHINSHI
  • Organizer: 18th International Conference on Precision Engineering
  • Int'l Joint Research
• [Presentation] MICRO ELECTROMAGNETIC FLAT MOTOR USING AN 80-POLES AND 0.3-MM-THICK RING MAGNET FOR HIGH TORQUE (2020)
  • Author(s): Dong Han, Keita Nagai, Tadahiko Shinshi.
  • Organizer: MEMS2020
  • Int'l Joint Research
• [Presentation] MEMS Energy Harvester Utilizing a Multi-pole Magnet and a High-aspect-ratio Array Coil for Low Frequency Vibrations (2019)
  • Author(s): Dong Han, Makoto Kine, Tadahiko Shinshi, Shogo Kadota
  • Organizer: PowerMEMS2019 Technical Digest Manuscript
  • Int'l Joint Research
• [Presentation] Magnetization Improvement of Multipole Ring Magnet by Double-sided Laser Assisted Heating and Its Application to a High Torque Micro Slice Motor (2019)
  • Author(s): Keita Nagai, Dong Han, Tadahiko Shinsh
  • Organizer: 8th International Conference of Asian Society for Precision Engineering of Nanotechnology
  • Int'l Joint Research
• [Presentation] MEMS Power Generator for Low-frequency-Vibration Energy Harvesting Using a Multi-pole Magnet and a high-aspect-ratio Array Coil (2019)
  • Author(s): Makoto Kine, Dong Han, TADAHIKO SHINSHI, Shogo Kadota
  • Organizer: 8th International Conference of Asian Society for Precision Engineering of Nanotechnology
  • Int'l Joint Research