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Fabrication and Characterization of High-density Superatom-like Ge-core/Si-shell Quantum Dot for Light Emission

Research Project

Project/Area Number 19H00762
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionNagoya University

Principal Investigator

Makihara Katsunori  名古屋大学, 工学研究科, 准教授 (90553561)

Co-Investigator(Kenkyū-buntansha) 大田 晃生  名古屋大学, 工学研究科, 助教 (10553620)
洗平 昌晃  名古屋大学, 未来材料・システム研究所, 助教 (20537427)
Project Period (FY) 2019-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥44,980,000 (Direct Cost: ¥34,600,000、Indirect Cost: ¥10,380,000)
Fiscal Year 2022: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000)
Fiscal Year 2021: ¥10,790,000 (Direct Cost: ¥8,300,000、Indirect Cost: ¥2,490,000)
Fiscal Year 2020: ¥13,000,000 (Direct Cost: ¥10,000,000、Indirect Cost: ¥3,000,000)
Fiscal Year 2019: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
Keywords量子ドット / コアシェル / 発光デバイス / Si量子ドット / コア/シェル構造 / CVD / コア/シェル / Si系量子ドット / スーパーアトム
Outline of Research at the Start

本研究では、Si-Ge系スーパーアトム(コア/シェル量子ドット)において、電子および正孔の波動関数制御技術を確立し、均質ナノドットにない固有の物性・機能を実現する。具体的には、GeコアSi量子ドットにおいて、計算科学、半導体プロセスおよび物性評価の各研究者が、それぞれの分野の専門性を生かした相互・有機的連携による新しい視点からナノ構造界面を有する量子井戸に閉じ込めた電子・正孔の波動関数を深考し、スーパーアトム内での電子・正孔の結合・分離状態制御を実現する。これにより、真の量子力学に基づいた波動関数カップリングを実現し、高効率キャリア再結合を実現するSi系エレクトロルミネッセンス材料を創成する。

Outline of Final Research Achievements

We fabricated high-density Si-QDs with Ge core and studied their luminescence properties. Photoluminescence from the Si-QDs with Ge core was observed at room temperature in the near-infrared region, being attributed to radiative-recombination between quantized states in the Ge core with deep potential well for holes. We also designed and fabricated light emitting diodes having the Si-QDs with Ge core and observed a clear electroluminescence peaked at ~0.8eV under forward bias application of pulsed bias irrespective of pulse height in the range of -1~-4V. In addition to radiative recombination between higher order quantized states in the Ge core, the direct bandgap transition in Ge core may be involved in the EL signals.

Academic Significance and Societal Importance of the Research Achievements

本研究では、Si-ULSIと親和性の高いプロセスを用いてGeコアSi量子ドットの高密度・一括形成技術を確立しており、技術的観点から極めて重要性な成果が得られていると言える。また、室温で安定したPLおよび低電圧駆動ELデバイスの実現は、シリコンフォトニクスにおいて実現が極めて困難とされているSi系発光デバイスの開発につながるものであり、飛躍的な進歩を遂げているシリコンULSI 技術をベースにSi 系量子ドットトランジスタやフローティングメモリデバイスを組み合わせて、将来の少数電子・少数光子を使った大規模な高度情報処理へと発展する可能性が極めて高い。

Report

(6 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • 2019 Comments on the Screening Results   Annual Research Report
  • Research Products

    (152 results)

All 2023 2022 2021 2020 2019 Other

All Int'l Joint Research (5 results) Journal Article (22 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 21 results) Presentation (121 results) (of which Int'l Joint Research: 60 results,  Invited: 9 results) Remarks (4 results)

  • [Int'l Joint Research] IHP/Technische Universitat Berlin(ドイツ)

    • Related Report
      2022 Annual Research Report
  • [Int'l Joint Research] Inner Mongolia University of Technology(中国)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] IHP(ドイツ)

    • Related Report
      2020 Annual Research Report
  • [Int'l Joint Research] IHP(ドイツ)

    • Related Report
      2019 Annual Research Report
  • [Int'l Joint Research] Inner Mongolia University of Technology(中国)

    • Related Report
      2019 Annual Research Report
  • [Journal Article] Evaluation of Chemical Structure and Si Segregation of Al/Si(111)2022

    • Author(s)
      T. Sakai, A. Ohta, K. Matsushita, N. Taoka, K. Makihara, and S. Miyazaki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 62 Issue: SC Pages: SC1059-SC1059

    • DOI

      10.35848/1347-4065/acb1fd

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of Ultra-thin NiGe Film with Single Crystalline Phase and Smooth Surface2022

    • Author(s)
      S. Nishimura, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 62 Issue: SC Pages: SC1027-SC1027

    • DOI

      10.35848/1347-4065/acac6f

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of Cl Passivation on Al2O3/GaN Interface Properties2022

    • Author(s)
      T. Nagai, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 62 Issue: SA Pages: SA1002-SA1002

    • DOI

      10.35848/1347-4065/ac73d9

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of substrate heating during Al deposition and post annealing on surface morphology, Al crystallinity, and Ge segregation in Al/Ge(111) structure2022

    • Author(s)
      Matsushita Keigo、OHTA Akio、Taoka Noriyuki、Hayashi Shohei、MAKIHARA Katsunori、MIYAZAKI Seiichi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SH Pages: SH1012-SH1012

    • DOI

      10.35848/1347-4065/ac5fbc

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of electronic charged states of high density self-aligned Si-based quantum dots evaluated with AFM/Kelvin probe technique2022

    • Author(s)
      Y. Imai, K. Makihara, N. Taoka, A. Ohta, and S. Miyazaki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 61 Issue: SD Pages: SD1012-SD1012

    • DOI

      10.35848/1347-4065/ac61aa

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Silicidation Reaction of Fe-NDs with SiH42022

    • Author(s)
      H. Furuhata, K. Makihara, Y. Shimura, S. Fujimori, Y. Imai, A. Ohta, N. Taoka, and S. Miyazaki
    • Journal Title

      Applied Physics Express

      Volume: 15 Issue: 5 Pages: 55503-55503

    • DOI

      10.35848/1882-0786/ac6727

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Electron Emission from Phosphorus d-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures2022

    • Author(s)
      K. Makihara, T. Takemoto, S. Obayashi, A. Ohta, N. Taoka, and S. Miyazaki
    • Journal Title

      IEICE Trans, on Electronics

      Volume: E102-5 Pages: 610-615

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots2022

    • Author(s)
      J. Wu, K. Makihara, H. Zhang, H. Furuhata, N. Taoka, A. Ohta and S. Miyazaki
    • Journal Title

      IEICE Trans, on Electronics

      Volume: E102-6 Pages: 616-621

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of Boron Doping and H2 Annealing on Light Emission from Ge/Si Core-Shell Quantum Dots2022

    • Author(s)
      S. Miyazaki, and K. Makihara
    • Journal Title

      ECS Trans.

      Volume: 104 Issue: 4 Pages: 105-112

    • DOI

      10.1149/10404.0105ecst

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of substrate temperature on plasma-enhanced self-assembling formation of high-density FePt nanodots2022

    • Author(s)
      S. Honda, K. Makihara, N. Taoka, H. Furuhata, A. Ohta, D. Oshima, T. Kato, and S. Miyazaki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 61 Issue: SA Pages: SA1008-SA1008

    • DOI

      10.35848/1347-4065/ac2036

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface flattening and Ge crystalline segregation of Ag/Ge structure by thermal anneal2021

    • Author(s)
      Ohta Akio、Yamada Kenzo、Sugawa Hibiki、Taoka Noriyuki、Ikeda Mitsuhisa、Makihara Katsunori、Miyazaki Seiichi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SB Pages: SBBK05-SBBK05

    • DOI

      10.35848/1347-4065/abdad0

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Energy band diagram for SiO2/Si system as evaluated from UPS analysis under vacuum ultraviolet with variable incident photon energy2020

    • Author(s)
      A. Ohta, T. Imagawa, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SA Pages: SAAC02-SAAC02

    • DOI

      10.35848/1347-4065/abb75b

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron Field Emission from Multiply-Stacked Si Quantum Dots Structures with Graphene Top-Electrode2020

    • Author(s)
      T. Niibayashi, T. Takemoto, K. Makihara, A. Ohta, M. Ikeda, S. Miyazaki
    • Journal Title

      ECS Transactions

      Volume: 98 Pages: 429-434

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots by Using a Magnetic AFM Probe2020

    • Author(s)
      J. Wu, H. Zhang, H. Furuhata, K. Makihara, M. Ikeda, A. Ohta, S. Miyazaki
    • Journal Title

      ECS Transactions

      Volume: 98 Pages: 493-498

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Crystallization of Ge Thin Films on Sapphire(0001) by Thermal Annealing2020

    • Author(s)
      H. Sugawa, A. Ohta, M. Kobayashi, N. Taoka, M. Ikeda, K. Makihara, S. Miyazaki
    • Journal Title

      ECS Transactions

      Volume: 98 Pages: 505-512

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] haracterization of photoluminescence from Si quantum dots with B δ-doped Ge core2020

    • Author(s)
      akuya Maehara, Shuntaro Fujimori, Mitsuhisa Ikeda, Akio Ohta, Katsunori Makihara, and Seiichi Miyazaki
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: 120 Pages: 105215-105215

    • DOI

      10.1016/j.mssp.2020.105215

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of B-doping on photoluminescence properties of Si quantum dots with Ge core2020

    • Author(s)
      Katsunori Makihara, Shuntaro Fujimori, Mitsuhisa Ikeda, Akio Ohta, and Seiichi Miyazaki
    • Journal Title

      Materials Science in Semiconductor Processing

      Volume: 120 Pages: 105250-105250

    • DOI

      10.1016/j.mssp.2020.105250

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Complex dielectric function of Si oxide as evaluated from photoemission measurements2020

    • Author(s)
      Akio Ohta, Mitsuhisa Ikeda, Katsunori Makihara, and Seiichi Miyazaki
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SM Pages: SMMB04-SMMB04

    • DOI

      10.35848/1347-4065/ab8c99

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Formation of ultrathin segregated-Ge crystal on Al/Ge(111) surface2020

    • Author(s)
      Kobayashi Masato、Ohta Akio、Kurosawa Masashi、Araidai Masaaki、Taoka Noriyuki、Simizu Tomohiro、Ikeda Mitsuhisa、Makihara Katsunori、Miyazaki Seiichi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SG Pages: SGGK15-SGGK15

    • DOI

      10.35848/1347-4065/ab69de

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Electron Field Emission from Multiple-Stacking Si-Based Quantum Dots2019

    • Author(s)
      FUTAMURA Yuto、MAKIHARA Katsunori、OHTA Akio、IKEDA Mitsuhisa、MIYAZAKI Seiichi
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E102.C Issue: 6 Pages: 458-461

    • DOI

      10.1587/transele.2018FUP0007

    • NAID

      130007657491

    • ISSN
      0916-8524, 1745-1353
    • Year and Date
      2019-06-01
    • Related Report
      2019 Annual Research Report
  • [Journal Article] Effect of H2-dilution in Si-cap formation on photoluminescence intensity of Si quantum dots with Ge core2019

    • Author(s)
      Fujimori Shuntaro、Nagai Ryo、Ikeda Mitsuhisa、Makihara Katsunori、Miyazaki Seiichi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SI Pages: SIIA01-SIIA01

    • DOI

      10.7567/1347-4065/ab0c7a

    • NAID

      210000156354

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of surface pre-treatment on Pt-nanodot formation induced by remote H2-plasma exposure2019

    • Author(s)
      Fujimori Shuntaro、Makihara Katsunori、Ikeda Mitsuhisa、Ohta Akio、Miyazaki Seiichi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 58 Issue: SI Pages: SIIA15-SIIA15

    • DOI

      10.7567/1347-4065/ab23f9

    • NAID

      210000156653

    • Related Report
      2019 Annual Research Report
    • Peer Reviewed
  • [Presentation] Fe ナノドットへの SiH4照射によるβ-FeSi2ナノドットの高密度形成2023

    • Author(s)
      斎藤 陽斗、牧原 克典、王 子ロ(おうへんに路)、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Fe超薄膜へのSiH4照射によるシリサイド化反応制御2023

    • Author(s)
      斎藤 陽斗、牧原 克典、王 子ロ(おうへんに路)、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Al/Si0.2Ge0.8(111)構造の熱処理によるSiおよびGeの表面偏析2023

    • Author(s)
      酒井 大希、松下 圭吾、大田 晃生、田岡 紀之、牧原 克典、山本 裕司、宮﨑 誠一
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] SiO2上への極薄ニッケルシリサイド膜形成―Si/Ni/Si初期構造における膜厚依存性―2023

    • Author(s)
      木村 圭佑、田岡 紀之、西村 駿介、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Reduced-Pressure CVDにより形成したGeコアSi量子ドットの構造評価と室温発光特性評価2023

    • Author(s)
      牧原 克典、Yamamoto Yuji、Schubert Markus Andreas、田岡 紀之、Tillack Bernd、宮﨑 誠一
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] AFM/KFMによる熱酸化SOI基板上に自己組織化形成したSi量子ドットの局所帯電特性評価2023

    • Author(s)
      今井 友貴、牧原 克典、山本 裕司、Wen Wei-Chen、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Formation of SiO2 Layer on SiGe/Si Nano-structures using Plasma-enhanced Atomic Layer Deposition2023

    • Author(s)
      JIALUN CAI、NORIYUKI TAOKA、KATSUNORI MAKIHARA、AKIO OHTA、SEIICHI MIYAZAKI
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Al/Si(111)構造の平坦性および結晶性制御と偏析による極薄Si層形成2023

    • Author(s)
      酒井 大希、大田 晃生、松下 圭吾、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理― (第28回)
    • Related Report
      2022 Annual Research Report
  • [Presentation] SiO2上に形成したニッケルシリサイド薄膜の膜厚が表面形態・結晶相へ与える影響2023

    • Author(s)
      木村 圭佑、田岡 紀之、西村 駿介、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理― (第28回)
    • Related Report
      2022 Annual Research Report
  • [Presentation] SiO2上へのNiGe薄膜の形成とその電気特性及び電子状態2023

    • Author(s)
      西村 駿介、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理― (第28回)
    • Related Report
      2022 Annual Research Report
  • [Presentation] 共晶系の偏析により形成した極薄Ge結晶のデバイスプロセスの検討2023

    • Author(s)
      松下 圭吾、大田 晃生、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理― (第28回)
    • Related Report
      2022 Annual Research Report
  • [Presentation] AFM/ケルビンプローブモードによる超高密度一次元連結Si系量子ドットの帯電状態評価2023

    • Author(s)
      今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理― (第28回)
    • Related Report
      2022 Annual Research Report
  • [Presentation] GeコアSi量子ドットの構造評価と室温発光特性2023

    • Author(s)
      牧原 克典, Yuji Yamamoto, 今井 友貴, 田岡 紀之, Markus Andreas Schubert, Bernd Tillack, 宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理― (第28回)
    • Related Report
      2022 Annual Research Report
  • [Presentation] Al/Ge(111)上に偏析したGe薄膜の化学結合状態分析2023

    • Author(s)
      松下 圭吾、大田 晃生、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      2022年度 名古屋大学シンクロトロン光研究センターシンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] Si酸化膜上に形成したニッケルシリサイド層の 膜厚が結晶相に与える影響2023

    • Author(s)
      木村 圭佑、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      2022年度 名古屋大学シンクロトロン光研究センターシンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] Fabrication and Characterization of Ge/Si Core-Shell Quantum Dots for Light Emission Devices2022

    • Author(s)
      K. Makihara, Y. Yamamoto, B. Tillack, and S. Miyazaki
    • Organizer
      Symposium Light emission and photonics of group IV semiconductor nanostructures
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Characterization of Light Emission Properties of Impurity Doped Ge/Si Core-Shell Quantum Dots2022

    • Author(s)
      S. Miyazaki, Y. Imai, and K. Makihara
    • Organizer
      242nd ECS Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Light-emission Properties of High-density Superatom-like Ge-core/Si-shell Quantum Dots2022

    • Author(s)
      K. Makihara, Y. Yamamoto, Y. Imai, N. Taoka, M. A. Schubert, B. Tillack, and S. Miyazaki
    • Organizer
      The 6th International Conference on Electronics, Communications and Control Engineering
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of Fe3Si Nanodots and Characterization of Their Magnetoelectronic Transport Properties2022

    • Author(s)
      J. Wu, H. Zhang, K. Makihara, N. Taoka, and S. Miyazaki
    • Organizer
      13th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Change of Surface Morphology, Chemical Bonding Features and Crystalline Phases of Ultra-thin NixSi1-x Layers Due to Thinning2022

    • Author(s)
      K. Kimura, N. Taoka, S. Nishimura, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      13th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of Fe-silicide-NDs and Characterization of Their PL Properties2022

    • Author(s)
      H. Saito, K. Makihara, Y. Hara, S. Fujimori, Y. Imai, N. Taoka, A. Ohta, and S. Miyazaki
    • Organizer
      13th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultrathin Si Segregated Layer Formation on Al/Si(111)2022

    • Author(s)
      T. Sakai, A. Ohta, K. Matsushita, N. Taoka, K. Makihara, and S. Miyazaki
    • Organizer
      13th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electronic Charged States of High Density Self-aligned Si-based Quantum Dots as Evaluated by Using an AFM/Kelvin Probe Technique2022

    • Author(s)
      Y. Imai, K. Makihara, N. Taoka, A. Ohta, and S. Miyazaki
    • Organizer
      13th International WorkShop on New Group IV Semiconductor Nanoelectronics
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-Density Formation of Fe-Silicide Nanodots and Their Magnetic-Field Dependent Electron Transport Properties2022

    • Author(s)
      J. Wu, K. Makihara, N. Taoka, and S. Miyazaki
    • Organizer
      The 3rd International Workshop on Advanced Nanomaterials for Future Electron Devices 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Alignment Control of Si-based Quantum Dots2022

    • Author(s)
      Y. Imai, K. Makihara, N. Taoka, and S. Miyazaki
    • Organizer
      The 3rd International Workshop on Advanced Nanomaterials for Future Electron Devices 2023
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Layer Transfer of Ultrathin Ge Layer Segregated on Al/Ge(111)2022

    • Author(s)
      K. Matsushita, A. Ohta, N. Taoka, K. Makihara, and S. Miyazaki
    • Organizer
      35th International Microprocesses and Nanotechnology Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface Modification and Wafer Bonding of Ultrathin Ge Segregated Layer formed on Al/Ge(111)2022

    • Author(s)
      K. Matsushita, A. Ohta, N. Taoka, K. Makihara,and S. Miyazaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Dot Size Dependence of Electron Emission from Si-QDs Multiple-Stacked Structures2022

    • Author(s)
      S. Obayashi, K. Makihara, N. Taoka, A. Ohta,and S. Miyazaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structural and Light-emission Properties of High-density Superatom-like Ge-core/Si-shell Quantum Dots2022

    • Author(s)
      K. Makihara, Y. Yamamoto, Y. Imai, N. Taoka, M. A. Schubert, B. Tillack,and S. Miyazaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of Ultra-thin Nickel Silicide Layer on SiO2 and Control of Crystalline Phase and Surface Roughness2022

    • Author(s)
      K. Kimura, S. Nishimura, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Alignment Control of Self-Assembling Si Quantum Dots2022

    • Author(s)
      Y. Imai, R. Tsuji, K. Makihara, N. Taoka, A. Ohta, and S. Miyazaki
    • Organizer
      9th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-Density Formation and Characterization of Fe-Silicide Nanodots on SiO22022

    • Author(s)
      J. Wu, H. Zhang, K. Makihara, N. Taoka, A. Ohta, and S. Miyazaki
    • Organizer
      29th International Conference on Amorphous & Nanocrystaline Ssemiconductors
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Photoluminescence Properties of Fe-silicide-NDs2022

    • Author(s)
      H. Saito, K. Makihara, Y. Hara, S. Fujimori, Y. Imai, N. Taoka, A. Ohta, and S. Miyazaki
    • Organizer
      The 6th Asia-Pacific Conference on Semiconducting Silicides and Related Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Crystalline Phase Control of Hf-oxide Layer due to Si Surface Orientations2022

    • Author(s)
      W. Yasuda, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      43rd Int. Symp. on Dry Process
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of Chemical Structure and Si Segregation of Al/Si(111)2022

    • Author(s)
      T. Sakai, A. Ohta, K. Matsushita, N. Taoka, K. Makihara, and S. Miyazaki
    • Organizer
      2022 Int. Conf. on Solid State Devices and Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of Ultra-thin NiGe film with Mono-crystalline Phase and Smooth Surface2022

    • Author(s)
      S. Nishimura, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      2022 Int. Conf. on Solid State Devices and Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Magnesium Channeled Implantation Layers in GaN(0001)2022

    • Author(s)
      A. Suyama, H. Kawanowa, H. Minagawa, J. Maekawa, S. Nagamachi, M. Aoki, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      2022 Int. Conf. on Solid State Devices and Materials
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of Chemical and Electronic States of Mg-doped GaN(0001) Surfaces2022

    • Author(s)
      X. Tian, W. Liu, A. Ohta, N. Taoka, K. Makihara, and S. Miyazaki
    • Organizer
      2022 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単一結晶相を有する Ni-Germanide 極薄膜の電気特性および電子状態2022

    • Author(s)
      西村 駿介、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] SiGeナノドット/Si多重集積構造からの電界電子放出2022

    • Author(s)
      邱 実、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] FePt ナノ構造の帯磁特性評価2022

    • Author(s)
      武 嘉麟,牧原 克典,田岡 紀之,大田 晃生,宮﨑 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] ニッケルシリサイド超薄膜形成におけるSiキャップ層の効果2022

    • Author(s)
      木村 圭佑、田岡 紀之、西村 駿介、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 高温短時間熱処理による極薄SiO2上に形成したa-Si膜の結晶化2022

    • Author(s)
      今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮崎 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] l/Ge(111)構造上に偏析した極薄Ge 結晶層の転写2022

    • Author(s)
      松下 圭吾、大田 晃生、柴山 茂久、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Fe シリサイドドットの室温 PL 特性―ドットサイズ依存性2022

    • Author(s)
      斎藤 陽斗、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 金属Hfの酸化によって形成した酸化物の結晶構造および化学組成にSi基板面方位が与える影響2022

    • Author(s)
      安田 航、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      電気通信情報学会(SDM) シリコンテクノロジー分科会 6月度合同研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Si(111)上のAl(111)薄膜形成と熱処理によるSi原子の表面偏析制御2022

    • Author(s)
      酒井 大希、松下 圭吾、大田 晃生、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      電気通信情報学会(SDM) シリコンテクノロジー分科会 6月度合同研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] SiO2上へのニッケルシリサイド薄膜形成とその表面形態・結晶相制御2022

    • Author(s)
      木村 圭佑、田岡 紀之、西村 駿介、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      電気通信情報学会(SDM) シリコンテクノロジー分科会 6月度合同研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Effects of Cl Passivation on Al2O3/GaN Interface Properties2022

    • Author(s)
      T. Nagai, N. Taoka, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      ISPlasma2022/IC-PLANTS2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Photoemission Study of Mg Doped GaN(0001) Surfaces2022

    • Author(s)
      W. Liu, X. Tian, A. Ohta, N. Taoka, K. Makihara, and S. Miyazaki
    • Organizer
      ISPlasma2022/IC-PLANTS2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Suppression of Ga Diffusion by Interfacial Barrier Layer in AlSiO/p-GaN2022

    • Author(s)
      X. Tian, W. Liu, A. Ohta, N. Taoka, K. Makihara, T. Narita, K. Ito, K. Kataoka, S. Iwasaki, D. Kikuta, K. Tomita, and S. Miyazaki
    • Organizer
      ISPlasma2022/IC-PLANTS2022
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SiO2上に形成したNiGe超薄膜の表面形態と結晶相制御2022

    • Author(s)
      西村 駿介、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] HCl前洗浄したAl2O3/GaN界面の高温電気的特性2022

    • Author(s)
      長井 大誠、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Si量子ドット多重集積構造からの電界電子放出―ドットサイズ依存性2022

    • Author(s)
      尾林 秀治、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Feシリサイドドットの発光特性評価2022

    • Author(s)
      古幡 裕志、斎藤 陽斗、牧原 克典、大田 晃生、田岡 紀之、宮﨑 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Al/Si(111)上に表面偏析したSiの光電子分光分析2022

    • Author(s)
      酒井 大希、松下 圭吾、大田 晃生、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] SiO2上へのニッケルシリサイド超薄膜の形成と化学結合状態分析2022

    • Author(s)
      木村 圭佑、西村 駿介、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Si量子ドットの一次元配列制御2022

    • Author(s)
      辻 綾哉、今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮崎 誠一
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] HCl による表面洗浄がAl2O3/GaN 界面特性および電気的特性に与える影響2022

    • Author(s)
      長井 大誠、田岡 紀之、大田 晃生、牧原 克典、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会-材料・プロセス・デバイス特性の物理-(第27回)
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板加熱によるAl/Ge(111)の結晶性・平坦性の制御と熱処理によるGe 表面偏析2022

    • Author(s)
      松下 圭吾、大田 晃生、林 将平、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      電子デバイス界面テクノロジー研究会-材料・プロセス・デバイス特性の物理-(第27回)
    • Related Report
      2021 Annual Research Report
  • [Presentation] Impact of Boron Doping and H2 Annealing on Light Emission from Ge/Si Core-Shell Quantum Dots2021

    • Author(s)
      S. Miyazaki, K. Makihara
    • Organizer
      240th ECS Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High Density Formation and Light Emission Characterization of Si Quantum Dots with Ge Core2021

    • Author(s)
      K. Makihara, and S. Miyazaki
    • Organizer
      2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Roles for Si, Oxygen atoms and Oxygen Vacancy in Crystalline Phase Stabilization of HfZr-oxide Layer2021

    • Author(s)
      N. Taoka, R. Hasegawa, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      2021 International Workshop on Dielectric Thin Films For Future Electron Devices -Science and Technology- (IWDTF 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impact of Substrate Heating on Surface Flattening and Ge Segregation of Al/Ge(111)2021

    • Author(s)
      K. Matsushita, A. Ohta, N. Taoka, S. Hayashi, K. Makihara, and S. Miyazaki
    • Organizer
      2021 International Workshop on Dielectric Thin Films For Future Electron Devices -Science and Technology- (IWDTF 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Density Formation of Fe-based Silicide Nanodots Induced by Remote H2 Plasma2021

    • Author(s)
      Z. He、J. Wu、K. Makihara、H. Zhang、H. Furuhata、N. Taoka、A. Ohta、S. Miyazaki
    • Organizer
      42nd International Symposium on Dry Process (DPS2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Electronic Charged States of High Density Self-aligned Si-based Quantum Dots Evaluated with AFM/Kelvin Probe Technique2021

    • Author(s)
      Y. Imai, K. Makihara, N. Taoka, A. Ohta, and S. Miyazaki
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Silicidation Reaction of Fe-NDs with SiH42021

    • Author(s)
      H. Furuhata, K. Makihara, A. Ohta, N. Taoka and S. Miyazaki
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Remote Hydrogen Plasma-Assisted Formation and Characterization of High-Density Fe-Silicide Nanodots2021

    • Author(s)
      J. Wu、Z. He、K. Makihara、H. Zhang、H. Furuhata、N. Taoka、A. Ohta、S. Miyazaki
    • Organizer
      2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Silicidation Reaction of Fe-NDs with SiH4 for Light Emission Devices2021

    • Author(s)
      H. Furuhata, K. Makihara, A. Ohta, N. Taoka, and S. Miyazaki
    • Organizer
      2nd International Workshop on Advanced Nanomaterials for Future Electron Devices 2021 (IWAN2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on Electron Emission from Phosphorus delta-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures2021

    • Author(s)
      K. Makihara, T. Takemoto, S. Obayashi, A. Ohta, N. Taoka, and S. Miyazaki
    • Organizer
      2021 International Conference on Solid State Devices and Materials (SSDM2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots2021

    • Author(s)
      J. Wu, K. Makihara, H. Zhang, H. Furuhata, N. Taoka, A. Ohta and S. Miyazaki
    • Organizer
      Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices 2021(AWAD 2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electroluminescence Study of Si Quantum Dots with Ge Core2021

    • Author(s)
      牧原 克典、宮﨑 誠一
    • Organizer
      2021年度 ナノ構造・物性-ナノ機能・応用部会合同シンポジウム
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] ナノドットによる量子物性制御デバイスの開発2021

    • Author(s)
      牧原 克典、宮﨑 誠一
    • Organizer
      令和3年度「放射線科学とその応用第186委員会」第38回研究会
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] FeナノドットへのSiH4照射による Feシリサイドナノドットの高密度・一括形成と室温PL特性評価2021

    • Author(s)
      斎藤 陽斗、古幡 裕志、牧原 克典、大田 晃生、田岡 紀之、宮﨑 誠一
    • Organizer
      第21回 日本表面真空学会中部支部学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] AFM/KFMによる超高密度一次元連結Si系量子ドットの局所帯電電荷分布計測2021

    • Author(s)
      今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第21回 日本表面真空学会中部支部学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 熱処理によるAlおよびAg/Ge(111)上の極薄Ge形成と層厚制御2021

    • Author(s)
      大田 晃生、松下 圭吾、田岡 紀之、牧原 克典、宮﨑 誠一
    • Organizer
      電気通信情報学会(SDM) [シリコン材料・デバイス] シリコンテクノロジー分科会 6月度合同研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 高密度FeナノドットへのSiH4照射によるシリサイド化反応制御2021

    • Author(s)
      古幡 裕志、牧原 克典、大田 晃生、田岡 紀之、宮﨑 誠一
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 基板加熱がAl/Ge(111)構造の表面平坦化とGe偏析に及ぼす影響2021

    • Author(s)
      松下 圭吾、大田 晃夫、田岡 紀之、林 将平、牧原 克典、宮﨑 誠一
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 後酸化によって形成したHf酸化物の結晶構造に基板面方位が与える影響2021

    • Author(s)
      安田航, 田岡 紀之, 大田 晃生, 牧原 克典, 宮﨑 誠一
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Si量子ドット多重集積構造へのP添加による内部ポテンシャル変調と電子放出特性評価2021

    • Author(s)
      尾林 秀治、牧原 克典、竹本 竜也、田岡 紀之、大田 晃夫、宮﨑誠一
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots2021

    • Author(s)
      J. Wu、K. Makihara、H. Zhang、H. Furuhata、N. Taoka、A. Ohta、S. Miyazaki
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] AFM/KFMによる超高密度一次元連結Si系量子ドットの局所帯電電荷計測2021

    • Author(s)
      今井 友貴、牧原 克典、田岡 紀之、大田 晃生、宮﨑 誠一
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] リモート H2 プラズマ支援による高密度 Fe 系シリサイドナノドットの 高密度一括形成2021

    • Author(s)
      何 智雪, 武 嘉麟, 牧原 克典, 張 海, 古幡 裕志 ,田岡 紀之, 大田 晃生, 宮崎 誠一
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] High-Density Formation of FeSi2 Nanodots on Ultrathin SiO2 Induced by Remote Hydrogen Plasma2021

    • Author(s)
      He Zhixue, Hai Zhang, Akio Ohta, Mitsuhisa Ikeda, Noriyuki Taoka, Katsunori Makihara and Seiichi Miyazaki
    • Organizer
      13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Influence of Substrate Temperature on Plsma-Enhaced Self-Assembling Formation of High Density FePt-Nanodot2021

    • Author(s)
      Shunsuke Honda, Katsunori Makihara, Hiroshi Furuhata, Akio Ohta, Mitsuhisa Ikeda and Seiichi Miyazaki
    • Organizer
      13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Electron Field Emission from Phosphorus δ-Doped Si-QDs/Undoped Si-QDs Multiple-Stacked Structures2021

    • Author(s)
      Tatsuya Takemoto, Tomohumi Niibayashi, Katsunori Makihara, Akio Ohta, Mitsuhisa Ikeda and Seiichi Miyazaki
    • Organizer
      13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Magnetoelectronic Transport Characteristics of Fe3Si Nanodots on Ultrathin SiO2 Induced by Remote Hydrogen Plasma2021

    • Author(s)
      Wu Jialin, Hai Zhang, Akio Ohta, Mitsuhisa Ikeda, Katsunori Makihara and Seiichi Miyazaki
    • Organizer
      13th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 低温水素アニール処理がGeコアSi量子ドットのPL特性に及ぼす影響2021

    • Author(s)
      前原 拓哉,池田 弥央,大田 晃生,牧原 克典,宮﨑 誠一
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] リモート水素プラズマ支援FePt合金ナノドット自己組織化形成プロセスにおける基板温度が磁化特性に与える影響2021

    • Author(s)
      本田 俊輔,古幡 裕志, 大田 晃生, 池田 弥央, 大島 大輝, 加藤 剛志, 牧原 克典,宮﨑 誠一
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] XANAMによるSi-Ge量子ドットにおけるX線誘起力変化の調査2021

    • Author(s)
      鈴木 秀士、向井 慎吾、田 旺帝、野村 昌治、藤森 俊太郎、池田 弥央、牧原 克典、宮﨑 誠一、朝倉 清高
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Si-Ge系ナノドットの高密度集積と光・電子物性制御2020

    • Author(s)
      牧原 克典、宮﨑 誠一
    • Organizer
      阪大CSRN 第二回異分野研究交流会 ~半導体ナノカーボン系~
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Crystallization of Ge Thin Films on Sapphire(0001) by Thermal Annealing2020

    • Author(s)
      H. Sugawa, A. Ohta, M. Kobayashi, N. Taoka, M. Ikeda, K. Makihara, and S. Miyazaki
    • Organizer
      PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Magnetic-Field Dependent Electron Transport of Fe3Si Nanodots By Using a Magnetic AFM Probe2020

    • Author(s)
      J. Wu, H. Zhang , H. Furuhata, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki
    • Organizer
      PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electron Field Emission from Multiply-Stacked Si Quantum Dots Structures with Graphene Top-Electrode2020

    • Author(s)
      T. Niibayashi, T. Takemoto, K. Makihara, A. Ohta, M. Ikeda, and S. Miyaaki
    • Organizer
      PRiME 2020 (ECS, ECSJ, & KECS Joint Meeting)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of Ultrathin Ge Crystal Layer by Surface Segregation and Flattening of Ag/Ge Structure2020

    • Author(s)
      A. Ohta, K. Yamada, H. Sugawa, N. Taoka, M. Ikeda, K. Makihara, S. Miyazaki
    • Organizer
      2020 International Conference on Solid State Devices and Materials
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 金属Zr/Hf構造の熱酸化によるZrHf酸化物の形成と結晶相制御2020

    • Author(s)
      長谷川 遼介、田岡 紀之、大田 晃生、牧原 克典、池田 弥央、宮﨑 誠一
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] グラフェン上部電極を用いたSi量子ドット多重集積構造からの電界電子放出 ―コレクタ電極電圧依存性評価2020

    • Author(s)
      新林 智文、竹本 竜也、牧原 克典、大田 晃生、池田 弥央、宮崎 誠一
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] グラフェン電極を用いたSi量子ドット多重集積構造からの電界電子放出2020

    • Author(s)
      新林 智文、牧原 克典、大田 晃生、池田 弥央、宮崎 誠一
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Reduced-Pressure CVDによるGeコアSi量子ドットの高密度一括形成と発光特性評価2020

    • Author(s)
      牧原 克典、Yamamoto Yuji、藤森 俊太郎、前原 拓哉、池田 弥央、Tillack Bernd、宮崎 誠一
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] 磁性AFM探針を用いたFe3Siナノドットの電子輸送特性評価2020

    • Author(s)
      武 嘉麟、張 海、古幡 裕志、牧原 克典、池田 弥央、大田 晃生、宮崎 誠一
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Ge量子ドット像のXANAMによるX線エネルギー依存性測定2020

    • Author(s)
      鈴木 秀士、向井 慎吾、田 旺帝、野村 昌治、藤森 俊太郎、池田 弥央、牧原 克典、宮﨑 誠一、朝倉 清高
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Fabrication of Impurity Doped Si Quantum Dots with Ge Core for Light Emission Devices2019

    • Author(s)
      K. Makihara, M. Ikeda, and S. Miyazaki
    • Organizer
      8th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Formation and Characterization of Si Quantum Dots with Ge Core for Electroluminescent Devices2019

    • Author(s)
      K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki
    • Organizer
      Compound Semiconductor Week 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Formation of High Density Fe-silicide Nanodots Induced by Remote Hydrogen Plasma and Characterization of Their Magnetic Properties2019

    • Author(s)
      J. Wu, H. Furuhata, H. Zhang, Y. Hashimoto, M. Ikeda, A. Ohta, A. Kohno, K. Makihara, and S. Miyazaki
    • Organizer
      8th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High Density Formation and Magnetoelectronic Transport Properties of Magnetic Fe-silicide Nanodots2019

    • Author(s)
      H. Zhang, X. Liu, K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki
    • Organizer
      8th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Photoluminescence from Si-QDs with B δ-Doped Ge Core2019

    • Author(s)
      T. Maehara, S. Fujimori, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      8th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Application of Surface Chemical Imaging by XANAM to Ge Surfaces2019

    • Author(s)
      S. Suzuki, S. Mukai, W. J. Chun, M. Nomura, S. Fujimori, M. Ikeda, K. Makihara, S. Miyazaki, K. Asakura
    • Organizer
      8th International Symposium on Control of Semiconductor Interfaces
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Operand Study of Multiple Stacked Si Quantum Dots by Hard X-ray Photoelectron Spectroscopy2019

    • Author(s)
      M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      International Conference on Materials and Systems for Sustainability 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impact of Boron Doping into Si Quantum Dots with Ge Core on Their Photoluminescence Properties2019

    • Author(s)
      S. Fujimori, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      International Conference on Materials and Systems for Sustainability 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Determination of Complex Dielectric Function of Oxide Film from Photoemission Measurements2019

    • Author(s)
      A. Ohata, M. Ikeda, K. Makihara, and S. Miyazaki
    • Organizer
      International Conference on Materials and Systems for Sustainability 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of High Density PtAl Nanodots Induced by Remote Hydrogen Plasma Exposure2019

    • Author(s)
      K. Makihara, M. Ikeda, A. Ohta, and S. Miyazaki
    • Organizer
      41st International Symposium on Dry Process
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impact of Boron Doping into Si Quantum Dots with Ge Core on Their Photoluminescence Properties2019

    • Author(s)
      K. Makihara, S. Fujimori, M. Ikeda, A. Ohta, and S. Miyazaki
    • Organizer
      32nd International Microprocesses and Nanotechnology Conference
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of B-doping on Photoluminescence Properties of Si-QDs with Ge Core2019

    • Author(s)
      S. Fujimori, R. Nagai, M. Ikeda, A. Ohta, K. Makihara, and S. Miyazaki
    • Organizer
      2nd Joint ISTDM / ICSI 2019 Conference; 10th International SiGe Technology and Device Meeting (ISTDM)/ 12th International Conference on Silicon Epitaxy and Heterostructures (ICSI)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of high density Fe-silicide nanodots induced by remote H2 plasma and their magnetic properties2019

    • Author(s)
      Y. Hashimoto, K. Makihara, M. Ikeda, A. Ohta, A. Kohno, S. Miyazaki
    • Organizer
      The 5th Asia-Pacific Conference on Semiconducting Silicides and Related Materials, 2019
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Electron Field Emission of Multiply-Stacked Si-QDs/SiO2 Structures2019

    • Author(s)
      T. Takemoto, Y. Futamura, M. Ikeda, A. Ohta, K. Makihara, S. Miyazaki
    • Organizer
      2019 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of Electron Field Emission from Si Quantum Dots with Ge Core/Si Quantum Dots Hybrid Stacked Structures2019

    • Author(s)
      T. Takemoto, K. Makihara, A. Ohta, M. Ikeda, S. Miyazaki
    • Organizer
      2019 International Conference of Solid State of Device and Materials
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 光電子エネルギー損失信号によるSi系材料の複素誘電関数評価2019

    • Author(s)
      大田 晃生、田岡 紀之、池田 弥央、牧原 克典、宮﨑 誠一
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] B添加がGeコアSi量子ドットのPL特性に及ぼす影響2019

    • Author(s)
      前原 拓哉、藤森 俊太郎、池田 弥央、大田 晃生、牧原 克典、宮崎 誠一
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] リモート水素プラズマ支援による磁性合金FeSiナノドットの高密度・一括形成2019

    • Author(s)
      橋本 靖司、牧原 克典、大田 晃生、池田 弥央、香野 淳、宮崎 誠一
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] GeコアSi 量子ドットにおけるGe選択成長温度が発光特性に及ぼす影響2019

    • Author(s)
      藤森 俊太郎, 前原 拓哉, 今井 友貴, 池田 弥央, 牧原 克典,宮崎 誠一
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Presentation] Ge試料表面構造のXANAM像の取得2019

    • Author(s)
      鈴木 秀士,向井 慎吾,田旺帝,野村 昌治,藤森 俊太郎,池田 弥央,牧原 克典,宮﨑 誠一,朝倉 清高
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2019 Annual Research Report
  • [Remarks] 名古屋大学 大学院 工学研究科 電子工学専攻・宮﨑研究室

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/miyazakilab/

    • Related Report
      2022 Annual Research Report
  • [Remarks] 名古屋大学大学院工学研究科電子工学専攻宮﨑研究室

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/miyazakilab/index.html

    • Related Report
      2021 Annual Research Report
  • [Remarks] 名古屋大学大学院 工学研究科 電子工学専攻 宮﨑研究室

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/miyazakilab/

    • Related Report
      2020 Annual Research Report
  • [Remarks] 名古屋大学大学院 工学研究科 電子工学専攻 宮﨑研究室

    • URL

      http://www.nuee.nagoya-u.ac.jp/labs/miyazakilab/

    • Related Report
      2019 Annual Research Report

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Published: 2019-04-18   Modified: 2024-01-30  

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