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Development of fast-scanning phase-sensitive laser probing system and its applications

Research Project

Project/Area Number 19K04527
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionChiba University

Principal Investigator

Tatsuya Omori  千葉大学, 大学院工学研究院, 准教授 (60302527)

Project Period (FY) 2019-04-01 – 2022-03-31
Project Status Completed (Fiscal Year 2021)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2021: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2020: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2019: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Keywords弾性波 / 弾性波動可視化装置 / 高周波デバイス / 非線形応答 / 弾性表面波 / 可視化 / 自動測定 / 動画化
Outline of Research at the Start

「誰でも」「簡単に」使える事を意図した高機能な高周波弾性振動可視化装置を開発し,今日の無線通信のさらなる高品質化に欠くことのできない,高周波弾性波動素子の高性能化に向けた研究・開発に寄与する強力なツールを提供することを目標とする。具体的には,本研究者が開発してきた超高速弾性振動可視化装置の制御を大幅に見直すとともに,周波数掃引などに伴う各種設定,データ取得・処理を自動で行うことが可能なハードウェア開発,またこれを有効に活かすことの可能な統合ソフトウェアを作成する予定である

Outline of Final Research Achievements

The SAW/BAW laser probing system that can visualize the distribution of acoustic vibration in UHF-SHF range devices with very high scanning speed was extensively improved. At first, we introduced the autofocus function using the Energy-of-Laplacian (EOL) as an evaluation function of the state of focusing. The mechanism has enabled us to stable measurement requiring long term such as frequency scanning. Next, the leakage-free vector signal detection system was developed using separate oscillators. The developed method can apply not only to the laser probing system but also to general vector signal measurement requiring an extremely high dynamic range, such as detecting the nonlinear responses.
Through these works, the newly developed high-performance SAW/BAW laser probing system offers to prepare attractive and useful 2D SAW/BAW distribution images.

Academic Significance and Societal Importance of the Research Achievements

高周波弾性波動素子は,今日の高度化する無線通信システムを支える高周波アナログ回路の性能を左右するキーデバイスの一つである。本研究成果は,このような弾性波動素子の研究・開発において,他の方法で得難い知見を,容易な操作で収集できる方法を提供できるものである。また,本研究で検討された,高ダイナミックレンジかつ柔軟性の高いベクトル検波方式は,本可視化システム以外にも広範に応用できるものである。今後,各種高周波素子の分数調波調波発生などを含む非線形性測定などで有効に利用されることが期待される。

Report

(4 results)
  • 2021 Annual Research Report   Final Research Report ( PDF )
  • 2020 Research-status Report
  • 2019 Research-status Report
  • Research Products

    (17 results)

All 2022 2021 2020 2019

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (11 results) (of which Int'l Joint Research: 1 results)

  • [Journal Article] Development of a high-speed, phase-sensitive laser probe system for RF surface/bulk acoustic wave devices with an autofocus function for long-time continuous operation2022

    • Author(s)
      Kawai Kazuki、Takahashi Hikaru、Omori Tatsuya、Hashimoto Ken-ya
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SG Pages: SG1012-SG1012

    • DOI

      10.35848/1347-4065/ac481f

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A detection electronics enabling ultimate suppression of leakage signals in high-speed and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices2021

    • Author(s)
      Toru Yaginuma, Tatsuya Omori, Ken-ya Hashimoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Development of a high-speed, phase-sensitive laser probe system for RF surface acoustic wave/bulk acoustic wave devices with an absolute vibration amplitude measurement function2021

    • Author(s)
      Hikaru Takahashi, Tatsuya Omori, Ken-ya Hashimoto
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Perturbation Analysis of Nonlinearity in Radio-Frequency Bulk Acoustic Wave Resonators Using the Mass-Spring Model2020

    • Author(s)
      Hashimoto Ken-ya、Li Xinyi、Bao Jingfu、Qiu Luyan、Omori Tatsuya
    • Journal Title

      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

      Volume: 67 Issue: 7 Pages: 1479-1484

    • DOI

      10.1109/tuffc.2020.2969165

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Full 3D FEM Analysis of Scattering at a Border Between IDT and Reflector in SAW Resonators2019

    • Author(s)
      Iyama Akihiro、Li Xinyi、Bao Jingfu、Matsuoka Naoto、Omori Tatsuya、Hashimoto Ken-ya
    • Journal Title

      Proc. 2019 IEEE Ultrasonics symposium

      Volume: - Pages: 1235-1238

    • DOI

      10.1109/ultsym.2019.8925826

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Analysis of SAW Scattering With Discontinuous Periodic Gratings Using Travelling Wave Excitation and Hierarchical Cascading Technique2019

    • Author(s)
      Huang Yulin、Bao Jingfu、Li Xinyi、Zhang Benfeng、Qiu Luyan、Omori Tatsuya、Hashimoto Ken-Ya
    • Journal Title

      IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

      Volume: 66 Issue: 7 Pages: 1255-1263

    • DOI

      10.1109/tuffc.2019.2911133

    • Related Report
      2019 Research-status Report
    • Peer Reviewed
  • [Presentation] 弾性振動可視化システムに対するオートフォーカス機能の実装とその周波数掃引測定への応用2022

    • Author(s)
      川井一輝,大森達也,橋本研也
    • Organizer
      圧電材料・デバイスシンポジウム2022
    • Related Report
      2021 Annual Research Report
  • [Presentation] Nonlinear Generation of Subharmonic Signals by Small Particles on RF SAW Resonators2021

    • Author(s)
      Kazuki Yamamori, Tatsuya Omori, Ken-Ya Hashimoto
    • Organizer
      IEEE International Ultrasonics Symposium 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高周波弾性波素子用レーザプローブ の長時間連続運転を目的とした自動焦点機能の実装2021

    • Author(s)
      川井一輝,髙橋輝,大森達也,橋本研也
    • Organizer
      第42回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] 弾性波素子における分数調波非線形応答に関する一考察2021

    • Author(s)
      大森達也
    • Organizer
      弾性波素子技術コンソーシアム第4回研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] SAW共振子における分数調波非線形信号の観測2021

    • Author(s)
      山守一輝,大森達也,橋本研也
    • Organizer
      弾性波素子技術コンソーシアム第3回研究会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 弾性振動測定用 Michelson 干渉計の安定化に関する一検討2021

    • Author(s)
      川井一輝, 大森達也, 橋本研也
    • Organizer
      圧電材料・デバイスシンポジウム2021
    • Related Report
      2020 Research-status Report
  • [Presentation] 究極的な漏れ信号抑圧が可能な RF SAW/BAW レーザプローブ用受信回路2020

    • Author(s)
      栁沼 達, 大森 達也, 橋本 研也
    • Organizer
      第41回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Related Report
      2020 Research-status Report
  • [Presentation] RF SAW/BAW デバイス用高速・位相感応型レーザプローブに対する絶対振幅測定機能の実装2020

    • Author(s)
      髙橋 輝, 大森 達也, 橋本 研也
    • Organizer
      第41回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Related Report
      2020 Research-status Report
  • [Presentation] 新規弾性振動可視化システムによる絶対振幅測定2020

    • Author(s)
      小野直大, 井山明洋, 高橋輝, 高橋輝, 大森達也, 橋本研也
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2019 Research-status Report
  • [Presentation] 絶対振幅測定機能を有する弾性振動可視化システムの構築2020

    • Author(s)
      高橋輝, 小野直大, 大森達也, 橋本研也
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2019 Research-status Report
  • [Presentation] 階層的縦続法を用いた有限要素法解析に基づく TC-SAW デバイスの過剰損失機構に関する検討2019

    • Author(s)
      松岡直人, Li Xinyi, 大森達也, 橋本研也
    • Organizer
      超音波シンポジウム USE2019
    • Related Report
      2019 Research-status Report

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Published: 2019-04-18   Modified: 2023-01-30  

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