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Development of precision femtosecond laser processing method of glass by canceling stress wave

Research Project

Project/Area Number 19K23477
Research Category

Grant-in-Aid for Research Activity Start-up

Allocation TypeMulti-year Fund
Review Section 0301:Mechanics of materials, production engineering, design engineering, fluid engineering, thermal engineering, mechanical dynamics, robotics, aerospace engineering, marine and maritime engineering, and related fields
Research InstitutionThe University of Tokyo

Principal Investigator

Ito Yusuke  東京大学, 大学院工学系研究科(工学部), 助教 (90843227)

Project Period (FY) 2019-08-30 – 2021-03-31
Project Status Completed (Fiscal Year 2020)
Budget Amount *help
¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2020: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2019: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywordsフェムト秒レーザ / レーザ加工 / ガラス / 応力波 / 超高速イメージング / 干渉計測 / ポンププローブ / 超高速観察
Outline of Research at the Start

電子機器や光学機器の更なる高性能化のために,ガラス材料に微細精密加工を施す技術が求められている.ガラスの微細加工のための有効なツールとしてフェムト秒レーザが注目されているものの,加工後に多量のクラックが発生し,精密加工が阻害されるという課題が存在している.本研究では,クラックの形成要因となる,応力波の伝搬特性を制御することを目指す.これにより,抜本的なクラック抑制手法を確立する.

Outline of Final Research Achievements

In this study, we developed a measurement technique for fast-varying stress distribution with the aim of establishing a technological basis for controlling stress wave propagation, which is a factor in crack formation during femtosecond laser processing of glass. The stress distribution was experimentally inferred by a combination of actual measurement and simulation of the rapidly varying pressure distribution. Since the pressure distribution is observed as the density change inside the material, a Mach-Zehnder interferometer was constructed. Furthermore, by combining the Mach-Zehnder interferometer with time-resolved imaging, we measured the ultrafast pressure distribution. By reflecting the experimental results in the simulation, calibration of the simulation was achieved, and accurate estimation of the stress distribution was realized.

Academic Significance and Societal Importance of the Research Achievements

電子機器や光学機器の更なる高性能化のために,ガラス材料に微細精密加工を施す技術が求められている.ガラスの微細加工のための有効なツールとしてフェムト秒レーザが注目されているものの,加工後に多量のクラックが発生し,精密加工が阻害されるという課題が存在している.そこで本研究では,クラック形成の要因となる応力波伝搬を制御するための技術基盤を構築することを見据え,高速で変化する応力分布の計測技術を開発した.その結果,加工時に伝搬する応力波の引張成分の出現する時間スケールとその大きさが定量的に示された.そして明らかとなった応力の時間プロファイルを積極的に活用することによる精密加工技術開発の指針が示された.

Report

(3 results)
  • 2020 Annual Research Report   Final Research Report ( PDF )
  • 2019 Research-status Report
  • Research Products

    (11 results)

All 2020 2019

All Journal Article (4 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (7 results) (of which Int'l Joint Research: 4 results,  Invited: 1 results)

  • [Journal Article] Ultrafast internal modification of glass by selective absorption of continuous-wave laser into excited electrons2020

    • Author(s)
      Miyamoto Naoyuki、Ito Yusuke、Wei Chaoran、Yoshizaki Reina、Shibata Akihiro、Nagasawa Ikuo、Nagato Keisuke、Sugita Naohiko
    • Journal Title

      Optics Letters

      Volume: 45 Issue: 11 Pages: 3171-3174

    • DOI

      10.1364/ol.394952

    • Related Report
      2020 Annual Research Report 2019 Research-status Report
    • Peer Reviewed
  • [Journal Article] Simulation of ultrashort pulse laser drilling of glass considering heat accumulation2020

    • Author(s)
      Wei Chaoran、Ito Yusuke、Shinomoto Rin、Nagato Keisuke、Sugita Naohiko
    • Journal Title

      Optics Express

      Volume: 28 Issue: 10 Pages: 15240-15249

    • DOI

      10.1364/oe.390289

    • Related Report
      2020 Annual Research Report 2019 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] High-speed observation of pulse energy and pulse width dependences of damage generation in SiC during ultrashort pulse laser drilling2020

    • Author(s)
      Hattori Junya、Ito Yusuke、Jo Hiroshi、Nagato Keisuke、Sugita Naohiko
    • Journal Title

      Applied Physics A

      Volume: 126 Issue: 11

    • DOI

      10.1007/s00339-020-04018-y

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ガラスのフェムト秒レーザー穴あけ加工におけるダメージ形成メカニズム2020

    • Author(s)
      伊藤佑介, 杉田直彦
    • Journal Title

      光アライアンス

      Volume: 31 Pages: 5-8

    • Related Report
      2020 Annual Research Report
  • [Presentation] ガラスのフェムト秒レーザ加工における応力波のクラック形成に与える影響2020

    • Author(s)
      大囿勇也, 杉田直彦, 服部隼也, 伊藤佑介
    • Organizer
      第27回精密工学会学生会員卒業研究発表講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ガラスのフェムト秒レーザ穴あけ加工におけるダメージ形成メカニズムの調査2020

    • Author(s)
      伊藤佑介, 長藤圭介, 杉田直彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report 2019 Research-status Report
  • [Presentation] Investigation of shock waves during ultrashort pulse laser drilling of SiC by combining pump-probe imaging with a high-speed camera2020

    • Author(s)
      Junya Hattori, Yusuke Ito, Keisuke Nagato, and Naohiko Sugita
    • Organizer
      SPIE Laser Damage
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultrafast and precision processing of glass by selective absorption of fiber-laser pulse into femtosecond-laser-induced filament2020

    • Author(s)
      Yusuke Ito, Reina Yoshizaki, Akihiro Shibata, Ikuo Nagasawa, Keisuke Nagato, and Naohiko Sugita
    • Organizer
      SPIE LAMOM
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] ガラスへの選択的光吸収によって形成した高温領域の高速掃引によるレーザ溝加工2020

    • Author(s)
      魏超然, 伊藤佑介, 吉﨑れいな, 柴田章広, 長澤郁夫, 長藤圭介, 杉田直彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2019 Research-status Report
  • [Presentation] Simulation of hole drilling in glass using ultrashort pulse laser in consideration of heat accumulation2019

    • Author(s)
      Chaoran Wei, Yusuke Ito, Rin Shinomoto, Keisuke Nagato, and Naohiko Sugita
    • Organizer
      The 27th International Conference on Advanced Laser Technologies (ALT)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research
  • [Presentation] Ultrafast and precision drilling of glass by selective absorption of CW laser beam into femtosecond-laser-induced filament2019

    • Author(s)
      Yusuke Ito, Reina Yoshizaki, Naoyuki Miyamoto, Akihiro Shibata, Ikuo Nagasawa, Keisuke Nagato, and Naohiko Sugita
    • Organizer
      15th International Conference on Laser Ablation (COLA)
    • Related Report
      2019 Research-status Report
    • Int'l Joint Research

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Published: 2019-09-03   Modified: 2022-01-27  

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