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Pyroelectric infrared sensor using carbon nanotube FETs with ferroelectric gate

Research Project

Project/Area Number 20241035
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionOsaka Prefecture University

Principal Investigator

AKITA Seiji  Osaka Prefecture University, 工学研究科, 教授 (60202529)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥42,640,000 (Direct Cost: ¥32,800,000、Indirect Cost: ¥9,840,000)
Fiscal Year 2010: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2009: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
Fiscal Year 2008: ¥26,780,000 (Direct Cost: ¥20,600,000、Indirect Cost: ¥6,180,000)
Keywordsカーボンナノチューブ / マイクロ・デバイス / 強誘電体 / 光センサ / ナノ材料 / ナノチューブ・フラーレン
Research Abstract

We have developed carbon nanotube (CNT) field effect transistors (FETs) with ferroelectric thin films as gate insulators and applied to infrared sensors using pyroelectric effect of the ferroelectric thin films. In the case of FETs showing apparent semiconductive nature, the devices responded to the light inversely expecting from the pyroelectric effect due to the photoconductive effect of the CNTs. Additionally, we have found that the yield of the device with the response depending on the polarization direction of the ferroelectric film was much improved by covering the CNT channel with ionic liquid.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (43 results)

All 2011 2010 2009 2008 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (35 results) Remarks (1 results)

  • [Journal Article] Diameter-Dependent Dissipation of Vibration Energy of Cantilevered Multiwall Carbon Nanotubes2011

    • Author(s)
      S. Sawaya, T. Arie, S. Akita
    • Journal Title

      Nanotechnology 22

      Pages: 165702-165702

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanoincandescent Consisting of Individual Carbon Nanotubes2011

    • Author(s)
      S. Akita, Y. Ohshima, T. Arie
    • Journal Title

      Appl.Phys.Express 4

      Pages: 25101-25101

    • NAID

      10027783479

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Diameter-dependent dissipation of vibration energy of cantilevered multiwall carbon nanotubes2011

    • Author(s)
      S.Sawaya, T.Arie, S.Akita
    • Journal Title

      Nanotechnology

      Volume: 22 Pages: 165702-165702

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Response of Carbon Nanotube Field Effect Transistors to Vibrating Gate Determined by Scanning Gate Microscopy2009

    • Author(s)
      K. Hata, Y. Nakayama, S. Akita
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      210000066713

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Carbon Nanotube Mechanical Resonators for Mass Sensing2009

    • Author(s)
      T. Arie, S. Akita
    • Journal Title

      Sensors and Materials 21

      Pages: 339-339

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Response of Carbon Nanotube Field Effect Transistors to Vibrating Gate Determined by Scanning Gate Microscopy2009

    • Author(s)
      K.Hata, Y.Nakayama, S.Akita
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      210000066713

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Carbon Nanotube Mechanical Rasonators for Mass Sensing2009

    • Author(s)
      T.Arie, S.Akita
    • Journal Title

      Sensors and Materials 21

      Pages: 339-349

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Analysis of piezoelectric response toward PZT-CNT-FET2011

    • Author(s)
      片岡翔吾, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      2011 Frontiers on Nanoscale Science and Technology (FNST) Workshop
    • Place of Presentation
      Riken Wako campus (Saitama, Japan)
    • Year and Date
      2011-11-05
    • Related Report
      2010 Final Research Report
  • [Presentation] 金属電極端へのレーザー照射によるCNTの配置制御2011

    • Author(s)
      高橋徹, 祷竜治, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Final Research Report
  • [Presentation] PZT-CNT-FETにおけるイオン液体による伝達特性改善2011

    • Author(s)
      片岡翔吾, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Final Research Report
  • [Presentation] ゲート絶縁膜にPZTを用いたPZT-Graphene-FET2011

    • Author(s)
      鈴木淳也, 有江隆之, 秋田成司
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Final Research Report
  • [Presentation] 金属電極端へのレーザー照射によるCNTの配置制御2011

    • Author(s)
      高橋徹, 祷竜治, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県厚木市)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] PZT-CNT-FETにおけるイオン液体による伝達特性改善2011

    • Author(s)
      片岡翔吾, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県厚木市)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] ゲート絶縁膜にPZTを用いたPZT-Graphene-FET2011

    • Author(s)
      鈴木淳也, 有江隆之, 秋田成司
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県厚木市)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] 濃度勾配を用いたゲルクロマトグラフィーによるSWCNTの分離2011

    • Author(s)
      祷竜治, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      第40回フラーレン・ナノチューブ総合シンポジウム
    • Place of Presentation
      名城大学(名古屋市)
    • Year and Date
      2011-03-10
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] カーボンナノチューブのNEMSとその応用(招待講演)2011

    • Author(s)
      秋田成司
    • Organizer
      電子デバイス研究会特別ワークショップ-ナノチューブ/グラフェンエレクトロニクス:成長からデバイス応用まで-
    • Place of Presentation
      首都大学東京秋葉原サテライト(東京)
    • Year and Date
      2011-03-07
    • Related Report
      2010 Final Research Report
  • [Presentation] カーボンナノチューブのNEMSとその応用2011

    • Author(s)
      秋田成司
    • Organizer
      電子デバイス研究会特別ワークショップーナノチューブ/グラフェンエレクトロニクス:成長からデバイス応用まで-
    • Place of Presentation
      首都大学東京 秋葉原サテライト(東京都)(招待講演)
    • Year and Date
      2011-03-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Analysis of piezoelectric response toward PZT-CNT-FET2011

    • Author(s)
      S.Kataoka, T.Okada, T.Arie, S.Akita
    • Organizer
      2011 Frontiers on Nanoscale Science and Technology (FNST) Workshop
    • Place of Presentation
      理化学研究所(埼玉県和光市)
    • Year and Date
      2011-01-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] Optical Observation of Graphene on PZT Thin Film toward PZT-Graphene-FET2010

    • Author(s)
      鈴木淳也, 有江隆之, 秋田成司
    • Organizer
      23th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      RIHGA Royal Hotel Kokura, (Fukuoka, Japan).
    • Year and Date
      2010-11-12
    • Related Report
      2010 Final Research Report
  • [Presentation] Piezoelectric Response of PZT Domain with CNT toward PZT-CNT-FET2010

    • Author(s)
      片岡翔吾, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      23th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      RIHGA Royal Hotel Kokura, (Fukuoka, Japan).
    • Year and Date
      2010-11-12
    • Related Report
      2010 Final Research Report
  • [Presentation] Piezoelectric Response of PZT Domain with CNT toward PZT-CNT-FET2010

    • Author(s)
      S.Kataoka, T.Okada, T.Arie, S.Akita
    • Organizer
      23th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      リーガロイヤルホテル小倉(北九州市)
    • Year and Date
      2010-11-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] Optical Observation of Graphene on PZT Thin Film toward PZT-Graphene-FET2010

    • Author(s)
      J.Suzuki, T.Arie, S.Akita
    • Organizer
      23th International Microprocesses and Nanotechnalogy Conference
    • Place of Presentation
      リーガロイヤルホテル小倉(北九州市)
    • Year and Date
      2010-11-12
    • Related Report
      2010 Annual Research Report
  • [Presentation] PZT-CNTFETにに向けたPZTドメインの圧電応答解析2010

    • Author(s)
      片岡翔吾, 有江隆之, 秋田成司
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Final Research Report
  • [Presentation] PZT-Graphene-FETへ向けたPZT薄膜上におけるグラフェンの光学的観察2010

    • Author(s)
      鈴木淳也, 有江隆之, 秋田成司
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Final Research Report
  • [Presentation] PZT-CNT-FETに向けたPZTドメインの圧電応答解析2010

    • Author(s)
      片岡翔吾, 有江隆之, 秋田成司
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] PZT-Ghaphene-FETへ向けたPZT薄膜上におけるグラフェンの光学的観察2010

    • Author(s)
      鈴木淳也, 有江隆之, 秋田成司
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] CNTの半導体・金属の分離と半導体型CNTを用いたPZT-CNT-FETの作製とその評価2010

    • Author(s)
      祷竜治, 岡田貴子, 有江隆之, 秋田成司
    • Organizer
      第39回フラーレン・ナノチューブ総合シンポジウム
    • Place of Presentation
      京都大学(京都市)
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report 2010 Final Research Report
  • [Presentation] 電気検出型片持ち梁カーボンナノチューブ共振デバイスの作製2010

    • Author(s)
      西井亮介, 松永直之, 小田康太, 有江隆之, 秋田成司
    • Organizer
      2010年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(神奈川)
    • Year and Date
      2010-03-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Polarization Characteristics of Light Emission from an Individual Multiwall Carbon Nanotube during Joule Heating2009

    • Author(s)
      Y.Ohshima, T.Arie, S.Akita
    • Organizer
      2009 International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Sheraton Sapporo Hotel(Sapporo)
    • Year and Date
      2009-11-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Photo-Response of Carbon Nanotube FETswith Thick Piezoelectric GateInsulator2009

    • Author(s)
      根井直毅, 池山敏生, 有江隆之, 秋田成司
    • Organizer
      2009 International Conference on Solid State Deviceand Materials
    • Place of Presentation
      Sendai Kokusai Hotel (Miyagi, Japan).
    • Year and Date
      2009-10-09
    • Related Report
      2010 Final Research Report
  • [Presentation] Photo-Response of Carbon Nanotube FETs with Thick Piezoelectric Gate Insulator2009

    • Author(s)
      N.Nei, T.Ikeyama, T.Arie, S.Akita
    • Organizer
      2009 International Conference on Solid State Device and Materials
    • Place of Presentation
      Sendai International Hotel(Miyagi)
    • Year and Date
      2009-10-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] 大気のにおける両持ち梁カーボンナノチューブの振動検出2009

    • Author(s)
      小田康太, 西井亮介, 有江隆之, 秋田成司
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山)
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of force sensing device using carbon nanotube cantilever2009

    • Author(s)
      R.Nishii, K.Oda, T.Arie, S.Akita
    • Organizer
      International workshop on biological application of carbon nanotubes
    • Place of Presentation
      Naha, Okinawa
    • Year and Date
      2009-09-04
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of force sensing device using doubly clamped carbon nanotube2009

    • Author(s)
      K.Oda, T.Arie, S.Akita
    • Organizer
      International workshop on biological application of carbon nanotubes
    • Place of Presentation
      Naha, Okinawa
    • Year and Date
      2009-09-04
    • Related Report
      2009 Annual Research Report
  • [Presentation] 片持ち梁カーボンナノチューブカセンサの設計と作製2009

    • Author(s)
      西井亮介, 小田康太, 有江隆之, 秋田成司
    • Organizer
      第37回フラーレン・ナノチューブ総合シンポジウム
    • Place of Presentation
      つくばり国際会議場(茨城)
    • Year and Date
      2009-09-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] ブラシ状カーボンナノチューブの嵩密度の向上2009

    • Author(s)
      久保元, 有江隆之, 秋田成司
    • Organizer
      第37回フラーレン・ナノチューブ総合シンポジウム
    • Place of Presentation
      つくばり国際会議場(茨城)
    • Year and Date
      2009-09-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] 圧電体ゲートカーボンナノチューブFETの光応答2009

    • Author(s)
      池山敏生, 根井直毅, 有江隆之, 秋田成司
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学(茨城県)
    • Year and Date
      2009-03-31
    • Related Report
      2010 Final Research Report
  • [Presentation] 圧電体ゲートカーボンナノチューブFETの光応答2009

    • Author(s)
      池山敏生, 根井直毅, 有江隆之, 秋田成司
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      つくば
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] Response of Carbon Nanotube Field Effect Transistors to Vibrating Gate2008

    • Author(s)
      K.Hata, Y.Nakayama, S.Akita
    • Organizer
      2008 International Conference on Solid State Device and Materials
    • Place of Presentation
      Tsukuba International Congress Center (Ibaraki, Japan)
    • Year and Date
      2008-09-25
    • Related Report
      2010 Final Research Report
  • [Presentation] Response of Carbon Nanotube Field Eiffect Transistors to Vibrating Gate2008

    • Author(s)
      K. Hata, Y. Nakayama, S. Akita
    • Organizer
      2008 International Conference on Solid state Device and Materials
    • Place of Presentation
      つくば
    • Year and Date
      2008-09-25
    • Related Report
      2008 Annual Research Report
  • [Presentation] 強誘電体/ナノチューブハイブリッドIRセンサー2008

    • Author(s)
      秋田成司
    • Organizer
      イノベーション・ジャパン2008-大学見本市新技術説明会
    • Place of Presentation
      東京国際フォーラム(東京)
    • Year and Date
      2008-09-18
    • Related Report
      2010 Final Research Report
  • [Presentation] 強誘電体/ナノチューブハイブリッドIRセンサー2008

    • Author(s)
      秋田成司
    • Organizer
      イノベーション・ジャパン2008-大学見本市新技術説明会
    • Place of Presentation
      東京
    • Year and Date
      2008-09-18
    • Related Report
      2008 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.pe.osakafu-u.ac.jp/pe4/index.html

    • Related Report
      2010 Final Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

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