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Fabrication and evaluation of integrated magnetic thin film devices for microwave applications

Research Project

Project/Area Number 20560321
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShinshu University

Principal Investigator

SATO Toshiro  Shinshu University, 工学部, 教授 (50283239)

Co-Investigator(Renkei-kenkyūsha) SONEHARA Makoto  信州大学, 工学部, 助教 (30456496)
Research Collaborator IKEDA Kenji  太陽誘電株式会社, 研究開発センター, 主任
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2010: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2009: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2008: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords電子デバイス / 集積回路 / 磁性薄膜 / 高周波IC / 無線回路
Research Abstract

Microwave magnetic thin film devices, embedded in chip size package RF-IC for the 4th generation cell phone, have been fabricated and evaluated. Through the development of high-frequency magnetic materials and their device-application, the improvement schemes for device properties was established, and it was found that the introduction of magnetic material to IC-package is effective for suppressing local induced noise. In addition, basic investigation on the novel tunable inductor and the power inductor for integrated power supply for RF-ICs has also been done. Their new schemes will be effective as the fundamental techniques of the next generation RF-ICs.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (38 results)

All 2011 2010 2009 2008 Other

All Journal Article (13 results) (of which Peer Reviewed: 9 results) Presentation (21 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Fabrication of Planar Power Inductor for Embedded Passives in LSI Package for Hundreds Megahertz Switching DC-DC Buck Converter2011

    • Author(s)
      H.Ito, A.Takeuchi, S.Okazaki, H.Kobayashi, Y.Sugawa, A.Takeshima, M.Sonehara, N.Matsushita, T.Sato
    • Journal Title

      IEEE Transactions on Mag-netics Vol.47, 2011-No.11 掲載確定

    • NAID

      120007113621

    • Related Report
      2010 Final Research Report
  • [Journal Article] Increase of Q-factor of RF Magnetic Thin Film Inductor by Introducing Slit-patterned Magnetic thin film and Multi-line-conductor Spiral Coil2011

    • Author(s)
      T.Maruyama, Y.Obinata, M.Sonehara, K.Ikeda, T.Sato
    • Journal Title

      IEEE Transactions on Magnetics Vol.47, 2011-No.掲載確定

    • Related Report
      2010 Final Research Report
  • [Journal Article] DC-DCコンバータLSIパッケージ内蔵用Znフェライト厚膜プレーナパワーインダクタの試作2011

    • Author(s)
      岡崎眞也、竹内有沙子、竹島顕大、曽根原誠、佐藤敏郎、松下伸広
    • Journal Title

      電気学会論文誌(基礎・材料・共通部門誌)

      Volume: 131(2011年7月号掲載決定)

    • NAID

      10030522279

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Increase of Q-factor of RF Magnetic Thin Film Inductor by Introducing Slit-patterned Magnetic thin film and Multi-line-conductor Spiral Coil2011

    • Author(s)
      T.Maruyama, Y.Obinata, M.Sonehara, K.Ikeda, T.Sato
    • Journal Title

      IEEE Transactions on Magnetics

      Volume: Vol.47(2011年11月号に掲載予定)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Planar Power Inductor for Embedded Passives in LSI Package for Hundreds Megahertz Switching DC-DC Buck Converter2011

    • Author(s)
      H.Ito, A.Takeuchi, S.Okazaki, H.Kobayashi, Y.Sugawa, A.Takeshima, M.Sonehara, N.Matsushita, T.Sato
    • Journal Title

      IEEE Transactions on Magnetics

      Volume: Vol.47(2011年11月号に掲載予定)

    • NAID

      120007113621

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 非常に狭い強磁性共鳴線幅を有するCoFeSiO/SiO_2積層グラニュラー磁性膜を用いたダブルスパイラル構造インダクタ2010

    • Author(s)
      池田賢司, 鈴木利昌, 丸山誠礼, 峯村知剛, 曽根原誠, 佐藤敏郎
    • Journal Title

      Journal of the Magnetics Society of Japan 34巻

      Pages: 123-130

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 2010年 研究開発の動向と最前線,高周波マイクロ磁気応用技術の最新動向2010

    • Author(s)
      佐藤敏郎, 遠藤恭, 曽根原誠
    • Journal Title

      電気学会論文誌A 130巻

      Pages: 45-49

    • Related Report
      2009 Annual Research Report
  • [Journal Article] CoFeSiO/SiO_2 multilayer granular films with very narrow ferromagnetic resonant linewidth2009

    • Author(s)
      K.Ikeda, T.Suzuki, T.Sato
    • Journal Title

      IEEE Transactions on Magnetics Vol.45

      Pages: 4290-4293

    • Related Report
      2010 Final Research Report
  • [Journal Article] CoFeSiO/SiO_2 multilayer granular films with very narrow ferromagnetic resonant linewidth2009

    • Author(s)
      K.Ikeda, T.Suzuki, T.Sato
    • Journal Title

      IEEE Transactions on Magnetics 45巻

      Pages: 4290-4293

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] スリットパターン化Mn-Ir/Fe-Si交換結合膜の飽和磁界と高周波磁気特性の熱処理温度依存性2008

    • Author(s)
      稲垣慶, 曽根原誠, 佐藤敏郎, 山沢清人, 三浦義正
    • Journal Title

      Journal of the Magnetics Society of Japan 33

      Pages: 9-14

    • NAID

      110007008445

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of Sm Segregation and Improvement in Thermal Stability by Introducing Ru Underlayer in Co-Sm Amorphous Films2008

    • Author(s)
      K, Ikeda, T. Suzuki, T. Sato
    • Journal Title

      IEEE Transactions on Magnetics 44

      Pages: 3906-3909

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic properties of Co-Sm amorphous films in GHz band2008

    • Author(s)
      K. Ikeda, T, Suzuki, T. Sato
    • Journal Title

      Journal of the Magnetics Society of Japan 32

      Pages: 179-186

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 携帯電話用CoFeB磁性薄膜方向性結合器の大振幅信号伝送特性2008

    • Author(s)
      水田創, 中沢政博, 滝澤和孝, 佐藤敏郎, 山沢清人, 三浦義正, 三宅裕子, 秋江正則, 上原裕二, 宗像誠, 八木正昭
    • Journal Title

      Journal of the Magnetics Society of Japan 32

      Pages: 376-381

    • NAID

      110006818160

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] RFチューナブル磁性薄薄膜デバイスの基礎検討2011

    • Author(s)
      峯村知剛, 他6名
    • Organizer
      平成23年電気学会全国大会
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-03-18
    • Related Report
      2010 Final Research Report
  • [Presentation] RFチューナブル磁性薄膜デバイスの基礎検討2011

    • Author(s)
      峯村知剛、結城恵、曽根原誠、佐藤敏郎、池田賢司、山沢清人、三浦義正
    • Organizer
      平成23年電気学会全国大会
    • Place of Presentation
      大阪大学
    • Year and Date
      2011-03-18
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高周波マイクロ磁気応用技術に関する研究2010

    • Author(s)
      佐藤敏郎
    • Organizer
      東北大学電気通信研究所スピニクス研究会
    • Place of Presentation
      東北大学 招待講演
    • Year and Date
      2010-12-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] CSP RF-IC用スパイラルインダクタの磁性膜装荷による近傍配線のクロストーク抑制効果の実験的検討2010

    • Author(s)
      丸山誠礼, 他5名
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      崇城大学
    • Year and Date
      2010-12-16
    • Related Report
      2010 Final Research Report
  • [Presentation] CSP RF-IC用スパイラルインダクタの磁性膜装荷による近傍配線のクロストーク抑制効果の実験的検討2010

    • Author(s)
      丸山誠礼、曽根原誠、池田賢司、佐藤敏郎、山沢清人、三浦義正
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      崇城大学(熊本市)
    • Year and Date
      2010-12-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fe系アモルファス微粒子分散複合材料を用いた集積化電源用プレーナインダクタの作製と評価2010

    • Author(s)
      伊藤秀幸、佐藤敏郎、曽根原誠、山沢清人、三浦義正
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      秋田大学
    • Year and Date
      2010-11-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] CoFeSiO/SiO2グラニュラー積層膜を用いた磁性膜サンドイッチ型薄膜インダクタの作製と特性評価2010

    • Author(s)
      丸山誠礼、小林大輔、池田賢司、佐藤敏郎、曽根原誠、山沢清人、三浦義正
    • Organizer
      第34回日本磁気学会学術講演会
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] 磁性微粒子分散複合材料を用いた集積化電源用プレーナインダクタの作製と特性評価2010

    • Author(s)
      伊藤秀幸、海堀信博、小川圭介、佐藤敏郎、曽根原誠、山沢清人、三浦義正
    • Organizer
      第34回日本磁気学会学術講演会
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] CoFeSiO/SiO_2 Mag-netic Thin Film Inductor for CSP RF-IC2010

    • Author(s)
      T.Maruyama, et al
    • Organizer
      International Conference on Microwave Magnetics 2010
    • Place of Presentation
      North-eastern University, Boston, MA, USA
    • Year and Date
      2010-06-03
    • Related Report
      2010 Final Research Report
  • [Presentation] CoFeSiO/SiO▼2▼ Magnetic Thin Film Inductor for CSP RF-IC2010

    • Author(s)
      T.Maruyama, M.Yuki, D.Kobayashi, T.Minemura, M.Sonehara, K.Ikeda, T.Sato
    • Organizer
      International Conference on Microwave Magnetics 2010, IEEE Magnetics Society
    • Place of Presentation
      Northeastern University, Boston, MA, USA
    • Year and Date
      2010-06-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of Zn-Ferrite Thick Film Planar Power Inductor2010

    • Author(s)
      S.Okazaki, A.Takeuchi, M.Sonehara, T.Sato, N.Matsushita
    • Organizer
      International Conference on Microwave Magnetics 2010, IEEE Magnetics Society
    • Place of Presentation
      Northeastern University, Boston, MA, USA
    • Year and Date
      2010-06-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] CoFeSiO/SiO_2グラニュラー積層磁性膜を用いたRF薄膜インダクタ作製と特性評価2010

    • Author(s)
      丸山誠礼、峯村知剛、橋本篤典、池田賢司、佐藤敏郎、曽根原誠、山沢清人、三浦義正
    • Organizer
      平成22年電気学会全国大会
    • Place of Presentation
      明治大学
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 集積化電源用フェライトメッキ膜プレーナインダクタの試作2009

    • Author(s)
      岡崎眞也、竹内有沙子、曽根原誠、佐藤敏郎、山沢清人、三浦義正、松下伸広
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      東北大学
    • Year and Date
      2009-12-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] CoSm高周波磁性膜を用いた薄膜伝送線路デバイスの試作と損失低減効果の検討2009

    • Author(s)
      中山英俊、古田正樹、松澤康太、橋本篤典、曽根原誠、佐藤敏郎、池田賢司
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      東北大学
    • Year and Date
      2009-12-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 非常に狭い強磁性共鳴線幅を有するCoFeSiO/SiO_2積層グラニュラー磁性薄膜の微細構造とPd添加効果2009

    • Author(s)
      池田賢司、鈴木利昌、佐藤敏郎
    • Organizer
      日本学術振興会 アモルファス・ナノ材料第147委員会、第105回研究会
    • Place of Presentation
      弘済会館
    • Year and Date
      2009-10-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] Zn-Feフェライトめっき薄膜の平面パワーインダクタへの適用2009

    • Author(s)
      岡崎眞也、佐藤敏郎、曽根原誠、山沢清人、三浦義正、直江正幸、多田大、松下伸広
    • Organizer
      第33回日本磁気学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] 狭い強磁性共鳴線幅を有するCoFeSiO/SiO_2積層グラニュラー磁性薄膜の高周波磁気特性と薄膜インダクタへの応用2009

    • Author(s)
      池田賢司、鈴木利昌、佐藤敏郎
    • Organizer
      第33回日本磁気学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2009-09-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] CoFeSiO/SiO_2積層グラニュラー膜の狭い強磁性共鳴ピークに対するPd添加効果2009

    • Author(s)
      池田賢司、鈴木利昌、佐藤敏郎
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      北見工業大学
    • Year and Date
      2009-08-07
    • Related Report
      2009 Annual Research Report
  • [Presentation] CoFeSiOグラニュラー積層磁性薄膜を用いたRFインダクタの試作と評価2009

    • Author(s)
      池田賢司、丸山誠礼、峯村知剛、橋本篤典、曽根原誠、佐藤敏郎、山沢清人、三浦義正、鈴木利昌
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      北見工業大学
    • Year and Date
      2009-08-07
    • Related Report
      2009 Annual Research Report
  • [Presentation] CoFeSiO/SiO_2 multilayer granular film with very narrow ferromagnetic resonant linewidth2009

    • Author(s)
      K.Ikeda, T.Suzuki, T.Sato
    • Organizer
      IEEE International Magnetics Conference (INTERMAG 2009)
    • Place of Presentation
      サクラメントコンベンションセンター、米国サクラメント市
    • Year and Date
      2009-05-05
    • Related Report
      2009 Annual Research Report
  • [Presentation] 磁性薄膜インダクク/ポリイミドMIMキヤパシタを用いた2段共振器型高次スプリアスフィルタの試作2008

    • Author(s)
      杉浦一真, 橋本篤典, 佐藤敏郎, 山沢清人, 三浦義正, 大沼繁弘
    • Organizer
      電気学会マグネティツクス研究会
    • Place of Presentation
      常山工業高等辱専門学校
    • Year and Date
      2008-07-31
    • Related Report
      2008 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://amdl.shinshu-u.ac.jp/

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://amdl.shinshu-u.ac.jp/

    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 磁性薄膜、その製造方法及び制御方法、薄膜磁気デバイス2011

    • Inventor(s)
      池田賢司、佐藤敏郎、曽根原誠
    • Industrial Property Rights Holder
      太陽誘電株式会社、国立大学法人信州大学
    • Industrial Property Number
      2011-056029
    • Filing Date
      2011-03-15
    • Related Report
      2010 Final Research Report
  • [Patent(Industrial Property Rights)] 磁性薄膜、その製造方法及び制御方法、薄膜磁気デバイス2011

    • Inventor(s)
      池田賢司, 佐藤敏郎, 曽根原誠
    • Industrial Property Rights Holder
      太陽誘電株式会社国立大学法人信州大学
    • Industrial Property Number
      2011-056029
    • Filing Date
      2011-03-15
    • Related Report
      2010 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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