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Optical property improvement of the semipolar GaN on Si by the reduction of stacking faults or point defects.

Research Project

Project/Area Number 20760012
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Applied materials science/Crystal engineering
Research InstitutionNagoya University

Principal Investigator

HONDA Yoshio  Nagoya University, 工学研究科, 助教 (60362274)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2010: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2009: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2008: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
KeywordsGaN / InGaN / 半極性 / Si基板 / 光学特性 / 誘導放出 / 選択成長 / 半極性・非極性 / MOVPE
Research Abstract

We made semi-polar GaN on etched Si substrate by selective MOVPE method. In the case of (11-22)GaN, we succeeded the high quality GaN of which dislocation density is less than 10^5/cm^2. In the case of (1-101)GaN, since the dislocation was vended at the initial growth, it did not propagate to the surface of the GaN crystal. As a result, we also achieved the dislocation density of less than10^5/cm^2on this face. We tested the optical property of high quality semi-polar (1-101)GaN. We grew InGaN/GaN MQW structure and excited by pulse laser from top side. The optical detector was set at the side edge and we could get stimulated emission. This is the first result in the world, therefore, it prove that we could get high quality semi-polar GaN crystal.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (26 results)

All 2011 2010 2009

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (18 results)

  • [Journal Article] Drastic Reduction of Dislocation Density in Semipolar (11-22) GaN Stripe Crystal on Si Substrate by Dual Selective Metal-Organic Vapor Phase Epitaxy2011

    • Author(s)
      T.Murase, T.Tanikawa, Y.Honda, M.Yamaguchi, H.Amano, N.Sawaki
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50

    • NAID

      210000138251

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Drastic Reduction of Dislocation Density in Semipolar(11-22)GaN Stripe Crystal on Si Substrate by Dual Selective Metal-Organic Vapor Phase Epitaxy2010

    • Author(s)
      T.Murase, T.Tanikawa, Y.Honda, M.Yamaguchi, H.Amano, N.Sawaki
    • Journal Title

      Jpn.J.Appl.Phys. 50

    • NAID

      210000138251

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] HVPE growth of a -plane GaN on a GaN template(110)Si substrate2010

    • Author(s)
      T.Tanikawa, N.Suzuki, Y.Honda, M.Yamaguchi, N.Sawaki
    • Journal Title

      phys.stat.sol.(c) 7

      Pages: 1760-1763

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] HVPE growth of a-plane GaN on a GaN template (110)Si substrate2010

    • Author(s)
      T.Tanikawa, N.Suzuki, Y.Honda, M.Yamaguchi, N.Sawaki
    • Journal Title

      phys.stat.sol.(c)

      Volume: 7 Pages: 1760-1763

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth and properties of semi-polar GaN on a patterned silicon substrate2009

    • Author(s)
      N.Sawaki, T.Hikosaka, N.Koide, S.Tanaka, Y.Honda, M.Yamaguchi
    • Journal Title

      J.Cryst.Growth 311

      Pages: 2867-2874

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of dislocations in a(11-22)GaN grown by selective MOVPE on(113)Si2009

    • Author(s)
      T.Tanikawa, Y.Kagohashi, Y.Honda, M.Yamaguchi, N.Sawaki
    • Journal Title

      J.Cryst.Growth 311

      Pages: 2879-2882

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reduction of dislocations in a (11-22)GaN grown by selective MOVPE on (113)Si2009

    • Author(s)
      T.Tanikawa, Y.Kagohashi, Y.Honda, M.Yamaguchi, N.Sawaki
    • Journal Title

      J.Cryst.Growth 311

      Pages: 2879-2882

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth and properties of semi-polar GaN on a patterned silicon substrate2009

    • Author(s)
      N.Sawaki, T.Hikosaka, N, Koide, S.Tanaka, Y.Honda, M.Yamaguchi
    • Journal Title

      J.Cryst.Growth 311

      Pages: 2867-2874

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] (111)Si基板上GaNのボイドを用いた残留応力低減2011

    • Author(s)
      光成正, 谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      (要旨集)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] RF-MBE法による(111)Si基板上へのInGaNナノワイヤの成長2011

    • Author(s)
      田畑拓也, 白知鉉, 本田善央, 山口雅史, 天野浩
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      (要旨集)
    • Year and Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] GaN growth on patterned Si/GaN template by HVPE2011

    • Author(s)
      Y.Honda
    • Organizer
      7th International Workshop on Bulk Nitride Semiconductor(IWBNS-7)
    • Place of Presentation
      Koyasan(高野山)
    • Related Report
      2010 Final Research Report
  • [Presentation] GaN growth on patterned Si/GaN template by HVPE2011

    • Author(s)
      Y.Honda
    • Organizer
      7th International Workshop on Bulk Nitride Semiconductor (IWBNS-7)
    • Place of Presentation
      Koyasan和歌山県伊都郡高野町
    • Related Report
      2010 Annual Research Report
  • [Presentation] Recent development of nitride-based micro- and nano-rod structure on Si and their application to high performance light emitters2010

    • Author(s)
      T.Tanikawa, T.Murase, T.Tabata, Y.Kawai, Y.Honda, M.Yamaguchi, H.Amano
    • Organizer
      9th International Akasaki Research Center Symposium
    • Place of Presentation
      Nagoya(名古屋)
    • Year and Date
      2010-11-26
    • Related Report
      2010 Final Research Report
  • [Presentation] Recent development of nitride-based micro- and nano-rod structure on Si and their application to high performance light emitters2010

    • Author(s)
      T.Tanikawa, T.Murase, T.Tabata, Y.Kawai, Y.Honda, M.Yamaguchi, H.Amano
    • Organizer
      9th International Akasaki Research Center Symposium
    • Place of Presentation
      Nagoya
    • Year and Date
      2010-11-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 加工Si基板上(1-101)GaNの不純物取り込み2010

    • Author(s)
      山下康平, 谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス
    • Related Report
      2010 Final Research Report
  • [Presentation] 半極性面GaNストライプ上InGaN/GaN MQWのMOVPE選択成長(II)2010

    • Author(s)
      谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス
    • Related Report
      2010 Final Research Report
  • [Presentation] Si基板上(1-101)InGaN/GaN MQWストライプレーザー構造の光学特性2010

    • Author(s)
      村瀬輔, 谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス
    • Related Report
      2010 Final Research Report
  • [Presentation] 加工Si基板上(1-101)GaNの不純物取り込み2010

    • Author(s)
      山下康平, 谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス(長崎県長崎市)
    • Related Report
      2010 Annual Research Report
  • [Presentation] 半極性面GaNストライプ上InGaN/GaN MQWのMOVPE選択成長(II)2010

    • Author(s)
      谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス(長崎県長崎市)
    • Related Report
      2010 Annual Research Report
  • [Presentation] Si基板上(1-101)InGaN/GaN MQWストライプレーザー構造の光学特性2010

    • Author(s)
      村瀬輔, 谷川智之, 本田善央, 山口雅史, 天野浩
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学文教キャンパス(長崎県長崎市)
    • Related Report
      2010 Annual Research Report
  • [Presentation] 選択MOVPE法を用いたSi基板上(11-22)GaNの転位低減2009

    • Author(s)
      村瀬輔, 谷川智之, 本田善央, 山口雅史, 澤木宣彦
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Related Report
      2010 Final Research Report 2009 Annual Research Report
  • [Presentation] GaN/InGaN hetero growth on(1-101)and (11-22)GaN on Si substrate2009

    • Author(s)
      Y.Honda, T.Tanikawa, B.J.Kim, M.Yamaguchi, N.Sawaki
    • Organizer
      第28回電子材料シンポジウム
    • Place of Presentation
      Shiga(滋賀)
    • Related Report
      2010 Final Research Report
  • [Presentation] Si基板上半極性面GaNへのInGaNヘテロ成長2009

    • Author(s)
      本田善央
    • Organizer
      第1回窒化物半導体結晶成長講演会
    • Place of Presentation
      日東京農工大(東京)
    • Related Report
      2010 Final Research Report
  • [Presentation] Si基板上半極性面GaNへのInGaNヘテロ成長2009

    • Author(s)
      本田善央
    • Organizer
      第1回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京農工大(東京)
    • Related Report
      2009 Annual Research Report
  • [Presentation] GaN/InGaN hetero growth on (1-101) and (11-22) GaN on Si substrate2009

    • Author(s)
      Y.Honda, T.Tanikawa, B.J.Kim, M.Yamaguchi, N.Sawaki
    • Organizer
      第28回電子材料シンポジウム
    • Place of Presentation
      Shiga(滋賀))ラフォーレンホニ
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of InGaN/GaN stripe structure on (111)Si and stimulated emission properties under photo-excitation2009

    • Author(s)
      B.Kim, T.Tanikawa, Y.Honda, M.Yamaguchi, N.Sawaki
    • Organizer
      The 14th International Conference on Modulated Semiconductor structures
    • Place of Presentation
      Kobe(神戸)神戸国際会議場
    • Related Report
      2009 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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