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Robust Multi-Molecular Recognition through Nano-Spatiotemporal Thermal Control of Integrated Oxide Sensors

Research Project

Project/Area Number 20H02208
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionThe University of Tokyo

Principal Investigator

Takahashi Tsunaki  東京大学, 大学院工学系研究科(工学部), 准教授 (60724838)

Project Period (FY) 2020-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
Fiscal Year 2022: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2021: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
Fiscal Year 2020: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords分子センサ / 集積化デバイス / 金属酸化物ナノ薄膜 / ジュール自己加熱 / 集積化センサ / 自己加熱効果 / 集積化センサデバイス / 金属酸化物 / 自己加熱
Outline of Research at the Start

環境中に含まれる分子群の種類・数のような化学データ取得に向けたセンサシステムは一般に多種類の感応材料を用いたセンサ群から構成されるため,大規模集積化や低エネルギー化は難しい.本研究は,同一の酸化物半導体センサを多数集積した素子を作製し,各センサの分子に対する応答性の動的な変調と多種類分子群の検出を目的とする.ナノ電子デバイスのジュール発熱を利用した時空間熱制御技術を駆使し,金属酸化物半導体表面の温度を制御する.金属酸化物-分子間反応の温度変調解析と併せ,多種類分子群の検出を目指す.

Outline of Final Research Achievements

In this study, we aimed to electrically identify diverse molecular species using integrated sensor devices, enabled by thermal control technology for nano-electronic devices, from sensors made from identical materials and structures. Specifically, we focused on (1) integrating over 1000 oxide molecular sensor devices on a single chip and their molecular detection operation, and (2) identifying molecules through nano-thermal control of integrated oxide molecular sensor devices. As a result, we achieved one-chip integration and reliable operation of 1024 oxide sensor devices through the use of lateral channel structures. Moreover, by employing spatiotemporal thermal control technology, we measured a solution mimicking human urine, successfully demonstrating the principle of biogas identification.

Academic Significance and Societal Importance of the Research Achievements

本研究で実証したナノ薄膜酸化物横型チャネル構造とクロスバー電極を基盤とした集積化分子センサは分子センサの高密度集積化と高信頼化を両立する技術である.これらはいずれもIoT機器による化学情報の活用に不可欠な要素技術であり,社会的意義はきわめて大きい.また,ジュール自己加熱による熱制御に基づく集積化センサは作製や信頼性の観点で従来の材料の制限を超えて分子認識技術であることから,これまで分子群計測が難しかった系の評価につながる可能性があり,社会的意義に加えて幅広い学術分野への波及効果が非常に大きい.

Report

(3 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • Research Products

    (11 results)

All 2023 2022 2021

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (6 results) (of which Int'l Joint Research: 2 results) Book (1 results)

  • [Journal Article] Compact model of a metal oxide molecule sensor for self-heating control2023

    • Author(s)
      Shiiki Yohsuke、Nagata Shintaro、Takahashi Tsunaki、Yanagida Takeshi、Ishikuro Hiroki
    • Journal Title

      Solid-State Electronics

      Volume: 204 Pages: 108641-108641

    • DOI

      10.1016/j.sse.2023.108641

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface dissociation effect on phosphonic acid self-assembled monolayer formation on ZnO nanowires2022

    • Author(s)
      K. Nakamura, T. Takahashi, T. Hosomi, Y. Yamaguchi, W. Tanaka, J. Liu, M. Kanai, K. Nagashima, T. Yanagida
    • Journal Title

      ACS Omega

      Volume: 7 Issue: 1 Pages: 1462-1467

    • DOI

      10.1021/acsomega.1c06183

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Impact of Lateral SnO<sub>2</sub> Nanofilm Channel Geometry on a 1024 Crossbar Chemical Sensor Array2022

    • Author(s)
      Honda Haruka、Takahashi Tsunaki、Shiiki Yohsuke、Zeng Hao、Nakamura Kentaro、Nagata Shintaro、Hosomi Takuro、Tanaka Wataru、Zhang Guozhu、Kanai Masaki、Nagashima Kazuki、Ishikuro Hiroki、Yanagida Takeshi
    • Journal Title

      ACS Sensors

      Volume: 7 Issue: 2 Pages: 460-468

    • DOI

      10.1021/acssensors.1c02173

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Robust and Electrically Conductive ZnO Thin Films and Nanostructures: Their Applications in Thermally and Chemically Harsh Environments2021

    • Author(s)
      Yan Ruolin、Takahashi Tsunaki、Zeng Hao、Hosomi Takuro、Kanai Masaki、Zhang Guozhu、Nagashima Kazuki、Yanagida Takeshi
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 3 Issue: 7 Pages: 2925-2940

    • DOI

      10.1021/acsaelm.1c00428

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] Spatiotemporal thermal management of homogeneous oxide sensor array for discrimination of biomarkers in mixed molecules2022

    • Author(s)
      S. Nagata, T. Takahashi, H. Honda, M. Date, Y. Shiiki, W. Tanaka, T. Hosomi, K. Nagashima, H. Ishikuro, and T. Yanagida
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compact model of a metal oxide molecule sensor for self-heating control2022

    • Author(s)
      Y. Shiiki, S. Nagata, T. Takahashi, T. Yanagida, and H. Ishikuro
    • Organizer
      International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 混合分子群中のバイオマーカー識別に向けた金属酸化物センサアレイの時空間熱制御2022

    • Author(s)
      長田紳太郎,高橋綱己,本田陽翔,伊達基起,椎木陽介,細見拓郎,田中航,金井真樹,長島一樹,石黒仁揮,柳田剛
    • Organizer
      2022年 第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 単一材料金属酸化物センサの局所自己加熱による分子識別の検討2022

    • Author(s)
      長田紳太郎,高橋綱己,本田陽翔,嵯峨渚央,山下薫,椎木陽介,細見拓郎,田中航,金井真樹,長島一樹,石黒仁揮,柳田剛
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 横型金属酸化物ナノ薄膜チャネル構造を用いたクロスバー集積化分子センサアレイ2022

    • Author(s)
      本田陽翔,高橋綱己,長田紳太郎,椎木陽介,細見拓郎,田中航,長島一樹,石黒仁揮,柳田剛
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 自己組織化単分子膜による酸化亜鉛ナノワイヤ表面分子吸着状態制御と分子センシング特性向上2022

    • Author(s)
      中村健太郎,高橋綱己,山口優,細見拓郎,田中航,金井真樹,長島一樹,柳田剛
    • Organizer
      2022年 第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Book] AI・ナノ・量子による超高感度・迅速バイオセンシング2021

    • Author(s)
      馬場嘉信、柳田 剛、加地範匡
    • Total Pages
      244
    • Publisher
      シーエムシー出版
    • ISBN
      9784781316093
    • Related Report
      2021 Annual Research Report

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Published: 2020-04-28   Modified: 2024-12-25  

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