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Multiplication properties of multi-ferroic nanomaterial and micro magnetic sensor

Research Project

Project/Area Number 21246019
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionHirosaki University

Principal Investigator

FURUYA Yasubumi  弘前大学, 大学院・理工学研究科, 教授 (20133051)

Co-Investigator(Kenkyū-buntansha) KIMURA Hisamichi  東北大学, 金属材料研究所, 准教授 (00161571)
MURO Hideo  千葉工業大学, 工学部, 教授 (00438912)
OKAZAKI Teiko  弘前大学, 大学院・理工学研究科, 研究員 (10003328)
MINETA Takashi  山形大学, 理工学研究科, 教授 (50374814)
MIYANAGA Takafumi  弘前大学, 大学院・理工学研究科, 教授 (70209922)
KISHI Yoichi  金沢工業大学, 工学部, 教授 (70265370)
KUBOTA Takeshi  弘前大学, 北日本新エネルギー研究所, 准教授 (70400405)
IIJIMA Takashi  独立法人産業技術研究所, 水素材料先端科学センター, 主任研究員 (90356402)
Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥45,630,000 (Direct Cost: ¥35,100,000、Indirect Cost: ¥10,530,000)
Fiscal Year 2012: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2011: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Fiscal Year 2010: ¥14,560,000 (Direct Cost: ¥11,200,000、Indirect Cost: ¥3,360,000)
Fiscal Year 2009: ¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Keywordsマルチフェッロイク材料 / 磁気・電気効果 / 磁気センサ / マイクロ加工プロセス / ME効果 / マルチフェロイイク材料 / MEMS / カンチレバー / ブロードバンドAC磁場 / マルチフェロイックス材料 / 磁歪合金 / PZT / マイクロ磁気センサ / 磁気センサー / マルチフェロイクス材料 / 複合機能化 / ナノテク材料 / 電気・磁気効果
Research Abstract

Multiplication effect of ferromagnetic/ferroelectric composite for application of multi-ferroic magnetic sensor with high sensitivity was investigated and a micro device was fabricated. Magnetic sensor designed by magnetostrictive FeSiB(50 μm) film /PZT(C-3)/ FeSiB(50μm) three layers outputted high voltage at a resonance frequency, 74 kHz. While, the sensor exhibits same sensitivity in AC frequency range of 0.001Hz~100Hz and can analyzes low magnetic field of 0.001 Oe in a range of 0.1Hz~100Hz. Micro cantilever sensor of FePd film/Si(10 μm) by MEMS fabrication process exhibited sensibility of 0.15-0.6μm/Oe in low magnetic field under 30 Oe.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (52 results)

All 2013 2012 2011 2010 2009 Other

All Journal Article (23 results) (of which Peer Reviewed: 16 results) Presentation (29 results)

  • [Journal Article] Microstructures of Fe-Pd Alloy Ribbons Subjected to Rapidly Solidified Melt Spinning2013

    • Author(s)
      Yoichi Kishi, Takeshi Kubota, Zenjiro Yajima, Teiko Okazaki, Yasubumi Furuya and Manfred Wuttig
    • Journal Title

      Materials Science Forum

      Volume: 738-739 Pages: 431-435

    • DOI

      10.4028/www.scientific.net/msf.738-739.431

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Output Voltage in the FePd/PZT/FePd tri-layered MEC2013

    • Author(s)
      Takeshi Kubota, Teiko Okazaki, Naoto Endo, Kosuke Mikami, Yasubumi Furuya
    • Journal Title

      Sensor and Actuator A

      Volume: 200 Pages: 11-15

    • DOI

      10.1016/j.sna.2012.11.021

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of Heat Treatment under Stress on Torque Sensing Using Magneto-strictive (Fe-Ga-Al)-Zr-C Alloy Ring2012

    • Author(s)
      Syusuke. Hori
    • Journal Title

      Materials Transactions

      Volume: 53 Pages: 963-967

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 片持ち梁構成のFePd/PZT積層型の高感度磁気センサの検討2012

    • Author(s)
      斉藤 崇
    • Journal Title

      電気学会論文誌E

      Volume: 132 Pages: 183-188

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Si基板上へスパッタ形成したFePd磁性形状記憶合金膜の特性評価2012

    • Author(s)
      峯田貴
    • Journal Title

      表面技術協会講演大会要旨集

      Volume: 125 Pages: 229-229

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Magnetic properties of thin-film Fe-Pd alloy and magnetoelectric coupling in Fe-Pd/Ag/PZT/Ag/Fe-Pd laminate composites2011

    • Author(s)
      Teiko Okazaki, Kosuke Mikami, Yasubumi Furuya, Yoichi kishi, Zenjirou Yajima Takeshi Kubota
    • Journal Title

      J. Alloys Compd.

      Volume: (掲載決定) Pages: S300-S304

    • DOI

      10.1016/j.jallcom.2011.10.114

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Magnetoelectric Effect of Fe_30Pd_30 Ferromagmetic Shape Memory Alloy Film : Lead Zirconate Titanate Trilayer Composites at Low and High Magnetic Field Frequencies2011

    • Author(s)
      Yusuke Sado, Cihiro Saito, Yasubumi Furuya, Yoichi Kishi, Zenjiro Yajima, Teiko Okazaki
    • Journal Title

      JPN. J. Appl. Phys.

      Volume: 50 Pages: 113001-113006

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Magnetoelectric Effect of Fe_<30>Pd_<30> Ferromagmetic Shape Memory Alloy Film : Lead Zirconate Titanate Trilayer Compositesat Low and High Magnetic Field Frequencies2011

    • Author(s)
      Yusuke Sado
    • Journal Title

      JPN.J.Appl.Phys.

      Volume: 50 Issue: 11R Pages: 113001-113001

    • DOI

      10.1143/jjap.50.113001

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic properties of thin-film Fe-Pd alloy and magnetoelectric coupling in Fe-Pd/Ag/PZT/Ag/Fe-Pd laminate composites2011

    • Author(s)
      Teiko OKazaki
    • Journal Title

      Journal of Alloy and Compounds

      Volume: (Accepted 29 October)(印刷中)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] FePd/PZT積層型の高感度磁気センサの検討2011

    • Author(s)
      齊藤崇
    • Journal Title

      「センサ・マイクロマシンと応用システム」シンポジウム論文集

      Volume: 28 Pages: 608-612

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Relation of the Polymeric Ion Species in Plasma to the Hardness of a-C : H Film Made by PSII & D2011

    • Author(s)
      Noriaki Ikenaga
    • Journal Title

      Surface and Coatings Technology

      Volume: 272 Pages: 981-985

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Shape Memory Behavior of TiNi Alloy Films Sputter-Deposited on Polyimide Substrate2011

    • Author(s)
      Yoichi Kish
    • Journal Title

      Journal of Alloy and Compounds

      Volume: (Accepted)(印刷中)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] FePd磁気形状記憶合金薄膜/Si積層構造のマイクロカンチレバー形成2011

    • Author(s)
      峯田貴
    • Journal Title

      応用物理学会学術講演会予稿集

      Volume: 72 Pages: 22-28

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Magnetoelectric coupling in Multi-ferro Fe-Pd/ PZT/Fe-Pd Laminate Composites2010

    • Author(s)
      Teiko OKAZAKI, Yasubumi FURUYA, 他4名
    • Journal Title

      Advances in Science and Technology

      Volume: 67 Pages: 98-103

    • Related Report
      2012 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetostrictive Galfenol Torque Sensor Devices for Smart by-Wire Steering System in Automobile Technology2010

    • Author(s)
      Yasubumi Furuya
    • Journal Title

      Advances in Science and Technology

      Volume: 67 Pages: 74-81

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simultaneous, Sterilization With Surface Mpdification of Plastic Bottle By Plasma-Based Ion Implantation2010

    • Author(s)
      N.Sakudo
    • Journal Title

      MP Conference Proceedings (ION IMPLANTATION TECHNOLOGY 2010)

      Volume: 1321 Pages: 266-269

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] FeGa/PZT積層構造の高感度磁気センサの検討2010

    • Author(s)
      浜島美央
    • Journal Title

      第27回「センサ・マイクロマシンと応用システム」シンポジューム予稿集

      Volume: 27 Pages: 349-352

    • Related Report
      2010 Annual Research Report
  • [Journal Article] 強磁性形状記憶合金Fe-PdとPZTの複合磁気センサの開発2010

    • Author(s)
      岡崎禎子
    • Journal Title

      2010年秋季日本金属学会講演概要集

      Volume: 147 Pages: 80-80

    • Related Report
      2010 Annual Research Report
  • [Journal Article] 磁歪薄膜を使用したマルチラェロイクス磁気センサの周波数特性2010

    • Author(s)
      佐渡佑介
    • Journal Title

      2010年秋季日本金属学会講演概要集

      Volume: 147 Pages: 168-168

    • Related Report
      2010 Annual Research Report
  • [Journal Article] スパッタリングとイオン照射を複合して得た形状記憶合金薄膜の特性評価2010

    • Author(s)
      岸陽一
    • Journal Title

      2010年秋季日本金属学会講演概要集

      Volume: 147 Pages: 78-78

    • Related Report
      2010 Annual Research Report
  • [Journal Article] 磁歪・圧電複合型マルチフェロイックス磁気センサの設計と出力特性評価2010

    • Author(s)
      佐渡佑介
    • Journal Title

      日本金属学会誌(受理) (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 強磁性形状記憶合金Fe-PdとPZT積層複合体における磁気電気効果2010

    • Author(s)
      佐渡佑介
    • Journal Title

      「電磁力関連のダイナミクス」シンポジュウム、講演論文集 22(印刷中)

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Microstructure of Ion-Implanted region in TiNi alloy2009

    • Author(s)
      Noriaki Ikenaga
    • Journal Title

      Nuclear Instruments and Methods in Physics Research, Section B 267

      Pages: 1509-1513

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Microstructures of Fe-Pd Alloy Ribbons Subjected to Rapidly Solidified Melt-Spinning2012

    • Author(s)
      Yoichi Kishi, Takeshi Kubota, Zenjiro Yajima, Teiko Okazaki, Yasubumi Furuya
    • Organizer
      9th European Symposium on Martensitic Transformations ESOMAT
    • Place of Presentation
      Saint-Petersburg, Russia
    • Year and Date
      2012-09-14
    • Related Report
      2012 Final Research Report
  • [Presentation] トルクセンサFeCoVリングの磁歪2012

    • Author(s)
      岡崎禎子
    • Organizer
      日本金属学会2012年春季大会
    • Place of Presentation
      横浜国立大学常盤台キャンパス
    • Year and Date
      2012-03-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Fe70Pd30/PZT/Fe70Pd30 ME磁気センサの周波数特性2012

    • Author(s)
      三上晃祐
    • Organizer
      日本金属学会2012年春季大会
    • Place of Presentation
      横浜国立大学常盤台キャンパス
    • Year and Date
      2012-03-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] スパッタリング法を用いて成膜したPZT薄膜の密着性に及ぼす結晶化熱処理条件の影響2012

    • Author(s)
      繁在家聖
    • Organizer
      日本金属学会2012年春季大会
    • Place of Presentation
      横浜国立大学常盤台キャンパス
    • Year and Date
      2012-03-28
    • Related Report
      2011 Annual Research Report
  • [Presentation] Output Voltage in the FePd/PZT/FePd tri-layered MEC2012

    • Author(s)
      Takeshi Kubota, Teiko Okazaki, Naoto Endo, Kosuke Mikami, Yasubumi Furuya
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators
    • Place of Presentation
      Hirosaki, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Output Voltage in the FePd/PZT/FePd tri-layered MEC2012

    • Author(s)
      Takeshi Kubota
    • Organizer
      International Workshop on Piezoelectric Materials
    • Place of Presentation
      Hirosaki Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] 磁気センサのためのFePd膜を積層したMEMSカンチデバーの形成2012

    • Author(s)
      西方孝志
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fe-Pd 薄帯-PZT三層型ME磁気センサの出力特性2012

    • Author(s)
      遠藤直人
    • Organizer
      日本金属学会2012秋季大会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] プロトタイプME磁気センサの試作・評価2012

    • Author(s)
      三上 晃右
    • Organizer
      日本金属学会2012秋季大会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] Fe-Pd膜/PZT/Fe-Pd膜ME磁気センサの高機能化2011

    • Author(s)
      岡崎禎子
    • Organizer
      日本金属学会2011年秋季大会
    • Place of Presentation
      沖縄コンベンションセンター
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] 急冷遠心鋳造Fe49C049 V2磁歪リングの強度とトルク感度2011

    • Author(s)
      舘岡賢司
    • Organizer
      日本金属学会2011年秋季大会
    • Place of Presentation
      沖縄コンベンションセンター
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] 応力熱処理FeGa系磁歪リングのトルクセンサ感度2011

    • Author(s)
      堀秀輔
    • Organizer
      日本金属学会2011年秋季大会
    • Place of Presentation
      沖縄コンベンションセンター
    • Year and Date
      2011-11-07
    • Related Report
      2011 Annual Research Report
  • [Presentation] Magnetic Properties of Thin-fi lm Fe-Pd Alloy and Magnetoelectric Coupling in Fe-Pd/PZT/Fe-Pd Laminate Composites2011

    • Author(s)
      Teiko OKazaki, Yusuke Sado, Yasubumi Furuya, Yoichi Kishi and Zenjiro Yajima
    • Organizer
      International Conference on Martensistic Transformation
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-09-05
    • Related Report
      2012 Final Research Report
  • [Presentation] Magnetic properties of thin-film Fe-Pd alloy and magnetoelectric coupling in Fe-Pd/Ag/PZT/Ag/Fe-Pd laminate composites2011

    • Author(s)
      Teiko Okazaki
    • Organizer
      International conference on Martensitic Transformations
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-09-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] Shape Memory Behavior of TiNi Alloy Films Sputter-Deposited on Polyimide Substrate2011

    • Author(s)
      Yoichi Kish
    • Organizer
      International conference on Martensitic Transformations
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2011-09-05
    • Related Report
      2011 Annual Research Report
  • [Presentation] FeGa/PZT積層構造の高感度磁気セシサの検討2010

    • Author(s)
      浜島美央
    • Organizer
      第27回「センサ・マイクロマシンと応用システム」シンポジューム
    • Place of Presentation
      島根県立産業交流会館(松江市)
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] 強磁性形状記憶合金Fe-PdとPZTの複合磁気センサの開発2010

    • Author(s)
      岡崎禎子
    • Organizer
      2010年秋季日本金属学会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2010-09-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 磁歪薄膜を使用したマルチフェロイクス磁気センサの周波数特性2010

    • Author(s)
      佐渡佑介
    • Organizer
      2010年秋季日本金属学会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] スパッタリングとイオン照射を複合して得た形状記憶合金薄膜の特性評価2010

    • Author(s)
      岸陽一
    • Organizer
      2010年秋季日本金属学会
    • Place of Presentation
      北海道大学(札幌市)
    • Year and Date
      2010-09-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] Effect of Ion Fluence on Crystallization of TiNi Film made by Sputter Deposition with Simultaneous Ion Irradiation2010

    • Author(s)
      N.Ikenaga
    • Organizer
      Program and Abstract Book of 17th International Conference on Ion Beam Modification of Materials
    • Place of Presentation
      Montreal, Canada
    • Year and Date
      2010-08-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] Magnetostrictive Galfenol Torque Sensor Devices for Smart by-Wire Steering System in Automobile Technology2010

    • Author(s)
      Yasubumi Furuya (Invited)
    • Organizer
      CIMETIC2010 (12^<Th> International Ceramics Congress)
    • Place of Presentation
      Montecatini Termo, ITALY
    • Year and Date
      2010-06-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] Magnetoelectric coupling in Multi-ferro Fe-Pd/ PZT/Fe-Pd Laminate Composites2010

    • Author(s)
      Teiko OKAZAKI
    • Organizer
      CIMETIC2010 (12^<th> International Ceramics Congress)
    • Place of Presentation
      Montecatini Termo, ITALY
    • Year and Date
      2010-06-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] 水晶単結晶を用いたマルチフェロイックス磁気センサの開発2010

    • Author(s)
      岡崎禎子
    • Organizer
      日本金属学会2010年春期大会
    • Place of Presentation
      筑波大学
    • Year and Date
      2010-03-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] マルチフェロイックス磁気センサの磁歪膜厚依存性2010

    • Author(s)
      佐渡佑介
    • Organizer
      日本金属学会2010年春期大会
    • Place of Presentation
      筑波大学
    • Year and Date
      2010-03-30
    • Related Report
      2009 Annual Research Report
  • [Presentation] マルチフェロイック材料を使ったセンサー/アクチュエータ素子の開発2010

    • Author(s)
      岸陽一
    • Organizer
      日本金属学会北陸信越支部
    • Place of Presentation
      金沢工業大学
    • Year and Date
      2010-02-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] Magnetoelectric coupling in Multi-ferro Fe-Pd/PZT/Fe-Pd Laminate Composites2010

    • Author(s)
      Teiko OKAZAKI, Yasubumi FURUYA, Yusuke SADO, Yoshiyuki HAYASHI, Syunsuke SATO and Chihiro SAITO
    • Organizer
      12th International Conference on Modern Materials & Materials Technologies
    • Place of Presentation
      Montecatini Termo, Italy
    • Related Report
      2012 Final Research Report
  • [Presentation] マルチフェロイックス効果を利用した磁気センサの開発2009

    • Author(s)
      岡崎禎子
    • Organizer
      日本金属学会2009年秋期大会
    • Place of Presentation
      京都大学
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] 磁歪薄膜を用いたマルチフェロイクス磁気センサの特性2009

    • Author(s)
      佐渡佑介
    • Organizer
      日本金属学会2009年秋期大会
    • Place of Presentation
      京都大学
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] Microstructure of Fe-Pd Alloy Ribbons Subjected to Rapidly Solidified Melt-Spinning

    • Author(s)
      Yoichi Kishi
    • Organizer
      9th European Symposium on Martensitic Transfomations ESOMAT 2012
    • Place of Presentation
      Russia, Saint-petersbur
    • Related Report
      2012 Annual Research Report

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Published: 2009-04-01   Modified: 2019-07-29  

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