| Project/Area Number |
21360158
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Tohoku University |
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Principal Investigator |
TSUBOI Hideyuki 東北大学, 未来科学技術共同研究センター, 准教授 (20375182)
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| Co-Investigator(Kenkyū-buntansha) |
MIYAMOTO Akira 東北大学, 未来科学技術共同研究センター, 教授 (50093076)
TAKABA Hiromitsu 東北大学, 大学院・工学研究科, 准教授 (80302769)
HATAKEYAMA Nozomu 東北大学, 大学院・工学研究科, 准教授 (50312666)
SUZUKI Ai 東北大学, 未来科学技術共同研究センター, 助教 (40463781)
三浦 隆治 東北大学, 大学院・工学研究科, 助教 (00570897)
遠藤 明 東北大学, 大学院・工学研究科, 准教授 (90344704)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2010: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Fiscal Year 2009: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
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| Keywords | エレクトロマイグレーション / 超高速化量子分子動力学法 / 電子wind force / 配線寿命 / 実物モデル化 / 配線寿命予測 |
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| Research Abstract |
The electromigration (EM)of the wiring material from which movement and diffusion of a metal atom become a trigger has influenced the semiconductor device life directly, and is a critical solution subject in the further miniaturization and high integration of a semiconductor. In this research, the practical wiring life prediction simulator by integration with the kinetic Monte Carlo method was developed based on the novel ultra-accelerated quantum chemical molecular dynamics method to analyze directly EM phenomenon which atoms and holes move by the electron wind force in an electron and an atomic level.
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