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High-Density New Two-Terminal Resistive Nonvolatile Memory Using SiC and Its Integration Technology

Research Project

Project/Area Number 21360164
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

SUDA Yoshiyuki  東京農工大学, 大学院・工学研究院, 教授 (10226582)

Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
Fiscal Year 2011: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2010: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
Keywords集積回路 / 半導体メモリ / SiC / 不揮発性メモリ / 半導体超微細化 / 抵抗変化型 / トンネル効果 / RRAM / 電子デバイス・機器 / メモリ / MIS / 不揮発性
Research Abstract

To evolve the miniaturization and versatility for industrial and consumer electronics which will become core products for future in Japan, we have clarified the relationship between the structure and the operating principle for our proposed new-structured metal/tunneling oxide-layer/electron trapping-layer/SiC/n-Si two-terminal resistive nonvolatile memory and have obtained an on/off current ratio of > 10 and an endurance cycle of >10^4. In addition to the results, we have furthermore devised advanced-type memory by changing materials for the layers and substrate and have obtained important fundamental technologies and guidelines for practical integration applications.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (39 results)

All 2012 2011 2010 2009 2008 Other

All Journal Article (6 results) (of which Peer Reviewed: 2 results) Presentation (24 results) Remarks (3 results) Patent(Industrial Property Rights) (6 results) (of which Overseas: 3 results)

  • [Journal Article] Electric-Field-Induced Al_2O_3/3C-SiC Resistance Memory2012

    • Author(s)
      Nobuo Yamaguchi and Yoshiyuki Suda
    • Journal Title

      Mater. Res. Soc. Proc.

      Volume: 1430

    • Related Report
      2011 Final Research Report
  • [Journal Article] Al_2O_3/3C-SiC/n-Si Nonvolatile Resistance Memory2012

    • Author(s)
      Nobuo Yamaguchi and Yoshiyuki Suda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51(assepted)

    • Related Report
      2011 Final Research Report
  • [Journal Article] Oxide Structure Dependence of SiO_2/SiO_x/3C-SiC/n-Type Si Nonvolatile Resistive Memory on Memory Operation Characteristics2012

    • Author(s)
      Yuichiro Yamaguchi, Masatsugu Shouji, and Yoshiyuki Suda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: (accepted)

    • Related Report
      2011 Final Research Report
  • [Journal Article] Electric-field-induced Al2O3/3C-SiC Resistance Memory2012

    • Author(s)
      Nobuo Yamaguchi, Yoshiyuki Suda
    • Journal Title

      Mater.Res.Soc.Proc.

      Volume: (掲載確定)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Strain Distribution Analysis of Sputter-Formed Strained Si by Tip-Enhanced Raman Spectroscopy2011

    • Author(s)
      Hiroaki Hanafusa, Nobumitsu Hirose, Akifumi Kasamatsu, Takashi Mimura, Toshiaki Matsui, Harold M. H. Chong, Hiroshi Mizuta, and Yoshiyuki Suda
    • Journal Title

      Appl. Phys.

      Volume: Express 4 Pages: 25701-25701

    • NAID

      10027783571

    • Related Report
      2011 Final Research Report
  • [Journal Article] Strain Distribution Analysis of Sputter-Formed Strained Si by Tip-Enhanced Raman Spectroscopy2011

    • Author(s)
      H.Hanafusa, N.Hirose, A.Kasamatsu, T.Mimura, T.Matsui, H.M.H.Chong, H.Mizuta, Y.Suda
    • Journal Title

      Applied Physics Express

      Volume: 4

    • NAID

      10027783571

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] スパッタSiC膜を用いた抵抗変化型MISメモリ2012

    • Author(s)
      小松辰実、須田良幸
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県、愛媛大学(発表決定)
    • Year and Date
      2012-09-11
    • Related Report
      2011 Final Research Report
  • [Presentation] 4H-SiC基板を用いた不揮発性メモリ2012

    • Author(s)
      山田有季乃、須田良幸
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛県、愛媛大学(発表決定)
    • Year and Date
      2012-09-11
    • Related Report
      2011 Final Research Report
  • [Presentation] Electric-Field-Induced Al_2O_3/3C-SiC Resistance Memory2012

    • Author(s)
      Nobuo Yamaguchi, Yoshiyuki Suda
    • Organizer
      2012 Mater.Res. Soc.Spring Meeting
    • Place of Presentation
      Moscone West Convention Center, San Francisco, USA
    • Year and Date
      2012-04-12
    • Related Report
      2011 Annual Research Report
  • [Presentation] Electric-Field-Induced A_l2O_3/3C-SiC Resistance Memory2012

    • Author(s)
      Nobuo Yamaguchi, Yoshiyuki Suda
    • Organizer
      2012 Mater. Res. Soc. Spring Meeting
    • Place of Presentation
      San Francisco, Marriott Marquis
    • Year and Date
      2012-04-04
    • Related Report
      2011 Final Research Report
  • [Presentation] スパッタエピタキシー法を用いたSiC膜の形成とメモリへの応用2011

    • Author(s)
      小松辰実, 須田良幸
    • Organizer
      東京農工大学・電気通信大学「ナノ未来材料とコヒーレント光科学」第8回合同シンポジウム
    • Place of Presentation
      東京都東京農工大学
    • Year and Date
      2011-12-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] 浮遊金属の酸化を用いた不揮発性SiCメモリ2011

    • Author(s)
      山口伸雄, 須田良幸
    • Organizer
      東京農工大学・電気通信大学「ナノ未来材料とコヒーレント光科学」第8回合同シンポジウム
    • Place of Presentation
      東京都東京農工大学
    • Year and Date
      2011-12-10
    • Related Report
      2011 Annual Research Report
  • [Presentation] 浮遊金属の酸化による不揮発性SiCメモリの素子化2011

    • Author(s)
      山口伸雄、須田良幸
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形県、山形大学
    • Year and Date
      2011-09-01
    • Related Report
      2011 Final Research Report
  • [Presentation] 浮遊金属の酸化による不揮発性SiCメモリの素子化2011

    • Author(s)
      山口伸雄、須田良幸
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形県山形大学
    • Year and Date
      2011-09-01
    • Related Report
      2011 Annual Research Report
  • [Presentation] スパッタSiC膜を用いた抵抗変化型MISメモリ2011

    • Author(s)
      岩崎慶士、須田良幸、井上直久
    • Organizer
      2011電子情報通信学会総合大会
    • Place of Presentation
      (DVDの発行をもって成立)
    • Related Report
      2011 Final Research Report
  • [Presentation] 浮遊電極を用いた2端子抵抗変化型不揮発性メモリ2011

    • Author(s)
      野村彬成、須田良幸
    • Organizer
      2011電子情報通信学会総合大会
    • Place of Presentation
      (DVDの発行をもって成立)
    • Related Report
      2011 Final Research Report
  • [Presentation] スパッ.死ic膜を用いた抵抗変化型MISメモリ2011

    • Author(s)
      岩崎慶士、須田良幸、井上直久
    • Organizer
      2011電子情報通信学会総合大会
    • Place of Presentation
      2011年総合大会講演論文集のDVDの発行をもって成立
    • Related Report
      2010 Annual Research Report
  • [Presentation] 浮遊電極を用いた2端子抵抗変化型不揮発性メモリ2011

    • Author(s)
      野村彬成・須田良幸
    • Organizer
      2011電子情報通信学会総合大会
    • Place of Presentation
      2011年総合大会講演論文集のDVDの発行をもって成立
    • Related Report
      2010 Annual Research Report
  • [Presentation] Two-Terminal Nonvolatile Resistive Memory Having Floating Metal2010

    • Author(s)
      A.Nomura, K.Iwasaki, Y.Suda
    • Organizer
      東京農工大学・電気通信大学「ナノ未来材料とコヒーレント光科学」第7回合同シンポジウム
    • Place of Presentation
      東京都
    • Year and Date
      2010-12-11
    • Related Report
      2010 Annual Research Report
  • [Presentation] 3C-SiC抵抗変化型不揮発メモリー2010

    • Author(s)
      須田良幸
    • Organizer
      薄膜第131委員会第253 回研究会
    • Place of Presentation
      大阪府、メルパルク大阪
    • Year and Date
      2010-12-09
    • Related Report
      2011 Final Research Report
  • [Presentation] 3c-SiC抵抗変化型不揮発メモリー2010

    • Author(s)
      須田良幸
    • Organizer
      薄膜第131委員会第253回研究会
    • Place of Presentation
      大阪府 招待講演
    • Year and Date
      2010-12-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] SiCの赤外吸収(2)各種材料の測定2010

    • Author(s)
      井上直久、須田良幸、岩崎慶士、菅谷孝夫、後藤安則、河村裕一
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県、東海大学
    • Year and Date
      2010-03-20
    • Related Report
      2011 Final Research Report
  • [Presentation] SiCの赤外吸収(2)各種材料の測定2010

    • Author(s)
      井上直久、須田良幸、岩崎慶士、菅谷孝夫、後藤安則、河村裕一
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大、神奈川県
    • Year and Date
      2010-03-20
    • Related Report
      2009 Annual Research Report
  • [Presentation] Nonvolatile-Resistance-Memory Property of SiOx-capped 3C-SiC Ultrathin Films on Si(100) Prepared by Using Monomethylsilane2010

    • Author(s)
      ローランドバンタクロ、山口祐一郎、齋藤英司、半田浩之、宮本優、鈴木康、須田良幸、末光眞希
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大、神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] スパッタSiC膜を用いたMISメモリ2010

    • Author(s)
      岩崎慶士、長谷川宏巳、井上直久、河村裕一、須田良幸
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川県、東海大学
    • Year and Date
      2010-03-17
    • Related Report
      2011 Final Research Report
  • [Presentation] スパッタSiC膜を用いたMISメモリ2010

    • Author(s)
      岩崎慶士、長谷川宏巳、井上直久、河村裕一、須田良幸
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大、神奈川県
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] SiCを用いた2端子抵抗変化型不揮発性メモリ2009

    • Author(s)
      須田良幸, 山口祐一郎
    • Organizer
      第6回電通大・東京農工大合同シンポジウム
    • Place of Presentation
      東京農工大、東京都
    • Year and Date
      2009-12-05
    • Related Report
      2009 Annual Research Report
  • [Presentation] 浮遊電極を用いた2端子型抵抗変化型不揮発性メモリ2009

    • Author(s)
      野村彬成、山口祐一郎、須田良幸
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山県、富山大学
    • Year and Date
      2009-09-09
    • Related Report
      2011 Final Research Report
  • [Presentation] 浮遊電極を用いた2端子型抵抗変化型不揮発性メモリ2009

    • Author(s)
      野村彬成、山口祐一郎、須田良幸
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学、富山県
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] SiC薄膜の赤外吸収2009

    • Author(s)
      井上直久、須田良幸、長谷川宏巳、山口祐一郎、河村裕一、大山英典、高倉健一郎、井手亜貴子、菅谷孝夫、田久保嘉隆
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学、茨城県
    • Year and Date
      2009-04-02
    • Related Report
      2009 Annual Research Report
  • [Remarks]

    • URL

      http://www.tuat.ac.jp/~boss

    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.tuat.ac.jp/~boss/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.tuat.ac.jp/~boss/

    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体メモリ装置及びその製造方法2011

    • Inventor(s)
      須田良幸、山口伸雄
    • Industrial Property Rights Holder
      東京農工大
    • Filing Date
      2011-12-06
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] Semiconductor memory device2011

    • Inventor(s)
      須田良幸
    • Industrial Property Rights Holder
      東京農工大学
    • Acquisition Date
      2011-10-04
    • Related Report
      2011 Final Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体メモリ装置およびその製造方法2011

    • Inventor(s)
      須田良幸、山口伸雄
    • Industrial Property Rights Holder
      東京農工大学
    • Industrial Property Number
      2011-176599
    • Filing Date
      2011-08-12
    • Related Report
      2011 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体メモリ装置及びその製造方法2010

    • Inventor(s)
      須田良幸、野村秋成
    • Industrial Property Rights Holder
      東京農工大
    • Filing Date
      2010-03-11
    • Related Report
      2011 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体メモリ装置及びその製造方法2010

    • Inventor(s)
      須田良幸、野村彬成
    • Industrial Property Rights Holder
      東京農工大学
    • Filing Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] Semiconductor memory device2008

    • Inventor(s)
      須田良幸、山口伸雄
    • Industrial Property Rights Holder
      東京農工大学
    • Filing Date
      2008-09-08
    • Acquisition Date
      2011-10-04
    • Related Report
      2011 Annual Research Report
    • Overseas

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Published: 2009-04-01   Modified: 2016-04-21  

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