Development and application of Nano-ion exchange lithography

• Project/Area Number: 21360320
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Inorganic materials/Physical properties
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: YANO Tetsuji 東京工業大学, 大学院・理工学研究科, 准教授 (90221647)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000); Fiscal Year 2011: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000); Fiscal Year 2010: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2009: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
• Keywords: イオン交換 / ガラス / リソグラフィ / Ag細線

Research Abstract

Nano-ion-exchange lithography(NIEL) has been developed for the fabrication of nanometer-size structure with different refractive index in/or on the transparent glass substrate. A new glass composition suitable for NIEL has also been developed to give appropriate ionic conductivities of monovalent ions at certain elevated temperature, and multi-ion-exchanged layer has also developed ; a thin NH^+_4 containing and alkali-free layer with Ag^+ containing core layer underneath. The developed NIEL succeeded in the drawing nano-lines on glass ; thin Ag metal lines with 270nm width. This enables to develop new devices using "metamaterials".

Research Products

• [Journal Article] Fabrication of Buried-Type Waveguide with Optical Gates by Nano-Ion-Exchange Method (2010)
  • Author(s): Tetsuji Yano, Eiji Shiyokatsu, Hiroyo Segawa, Shuichi Shibata
  • Journal Title: Proceedings of SPIE Volume: vol.7604 Pages: 7604-32
• [Journal Article] Fabrication of buried-type waveguide with optical gates by nano ion-exchange method (2010)
  • Author(s): T.Yano, E.Shokatsu, H.Segawa, S.Shibata
  • Journal Title: Proc.SPIE 7604
  • Peer Reviewed
• [Presentation] ガラスのイオン交換反応の基礎と応用 (2012)
  • Author(s): 矢野哲司
  • Organizer: 日本セラミックス協会ガラス製造技術講演会
  • Place of Presentation: 東京(招待講演)
  • Year and Date: 2012-02-03
• [Presentation] Photoionization of protonion-exchanged glass doped with Tb_4O_7 (2011)
  • Author(s): Chikashi Tanaka, Tetsuji Yano, Tetsuo Kishi, Shuichi Shibata
  • Organizer: Proc. of 28^<th> Japan-Korea Inter. Seminor of Ceramics, GO-O-11
  • Place of Presentation: Okayama
  • Year and Date: 2011-11-25
• [Presentation] Photoionization of Proton Ion-Exchanged Glass Doped with Tb_4O_7 (2011)
  • Author(s): 田中智佳士、矢野哲司, ほか
  • Organizer: 28^<th> Korea-Japan Ceramics Seminor
  • Place of Presentation: 姫路
  • Year and Date: 2011-11-25
• [Presentation] Solid-state electrolytic bath of organic-inorganic hybrid for low-temperature ion exchange of glass : Li^+/Ag^+ ion exchange on aluminosilicate glass (2011)
  • Author(s): Tetsuji Yano, Kanako Ito, Shuichi Shibata
  • Organizer: 5th International Conference on Science and Technology for Advanced Ceramics(STAC5)
  • Place of Presentation: Yokohama, Japan
  • Year and Date: 2011-06-24
• [Presentation] Fabrication of buried-type waveguide with optical gates by nano ion-exchange method (2010)
  • Author(s): T.Yano, et al.
  • Organizer: SPIE photonic West 2010
  • Place of Presentation: San Francisco, USA
• [Presentation] Li^+/H^+ Ion-Exchanged Li_2O-BaO-La_2O_3-TiO_2-SiO_2 Glass Doped with Er^<3+> Ions (2009)
  • Author(s): Ryo Yamaguchi, Tetsuji Yano, Hiroyo Segawa, Shuichi Shibata
  • Organizer: 3rd International Conference on Science and Technology for Advanced Ceramics(STAC3), p. 96
  • Place of Presentation: Yokohama, Japan
  • Year and Date: 2009-06-17
• [Presentation] Q factor of super-spherical optical cavity of Nd^<3+> doped soda-lime-silica glass prepared by StM method (2009)
  • Author(s): T.Yano, et al.
  • Organizer: International Conference on the Physics on Non-Crystalline Solids
  • Place of Presentation: Iguacu, Brazil