High Precision Measurement of Plasma Density in Atmospheric Pressure Plasma

• Project/Area Number: 21540509
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Plasma science
• Research Institution: Nagoya University
• Principal Investigator: TOYODA Hirotaka 名古屋大学, 工学研究科, 教授 (70207653)
• Co-Investigator(Kenkyū-buntansha): ISHIJIMA Tatsuo 名古屋大学, 工学研究科, 助教 (00324450)
• Project Period (FY): 2009 – 2011
• Project Status: Completed (Fiscal Year 2011)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2010: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2009: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: シュタルク効果 / 大気圧プラズマ / 電界計測 / 電子密度計測 / 発光分光 / 大気圧プラズ

Research Abstract

Atmospheric pressure plasma is used in various application areas and this trend requires diagnostic technique that enables precise plasma density measurement. Focusing on Stark broadening, we have successfully measured spatiotemporal variation of the plasma density as well as external electric field in atmospheric pressure microwave plasma and have obtained a guideline to measure plasma density with high accuracy.

Research Products

• [Presentation] シュタルク分光を用いた大気圧パルスマイクロ波プラズマの時空間分解計測 (2012)
  • Author(s): 村瀬卓也,石島達夫,豊田浩孝
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(東京)
  • Year and Date: 2012-03-18
• [Presentation] シュタルク分光を用いた大気圧パルスマイクロ波プラズマの時空間分解計測 (2012)
  • Author(s): 村瀬卓也, 石島達夫, 豊田浩孝
  • Organizer: 第59回応用物理学関係連合講演会
  • Place of Presentation: 早稲田大学(東京都)
  • Year and Date: 2012-03-18
• [Presentation] Eemporal-Spatial Measurement of Electric Field Using Stark Spectroscopy in Atmospheric-pressure Pulsed Slot-antenna Microwave Plasma (2012)
  • Author(s): T. Murase, T. Ishijima and H. Toyoda
  • Organizer: The 5th International Conference on Plasma-Nanotechnology & Science
  • Place of Presentation: 犬山国際観光センター(愛知)
  • Year and Date: 2012-03-12
• [Presentation] Temporal-Spatial Measurement of Electric Field Using Stark Spectroscopy in Atmospheric-pressure Pulsed Slot-antenna Microwave Plasma (2012)
  • Author(s): T.Murase, T.Ishijima, H.Toyoda
  • Organizer: The 5th International Conference on Plasma-Nano Technology & Science
  • Place of Presentation: 犬山国際観光センター(愛知県)
  • Year and Date: 2012-03-12
• [Presentation] Spatio-temporal Variation of Microwave Electric Field in an Atmospheric Pressure Slot-antenna Microwave Plasma (2012)
  • Author(s): T. Murase, T. Ishijima and H. Toyoda
  • Organizer: 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
  • Place of Presentation: 中部大学(愛知)
  • Year and Date: 2012-03-06
• [Presentation] Spatio-temporal Variation of Microwave Electric Field in an Atmospheric Pressure Slot-antenna Microwave Plasma (2012)
  • Author(s): TAKUYA MURASE, TATSUO ISHIJIMA HIROTAKA TOYODA
  • Organizer: 4th International Symposium On Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
  • Place of Presentation: 中部大学(愛知県)
  • Year and Date: 2012-03-06
• [Presentation] 時空間発光分光によるスロットアンテナ励起大気圧マイクロ波プラズマの診断 (2011)
  • Author(s): 村瀬卓也,石島達夫,豊田浩孝
  • Organizer: Plasma Conference 2011
  • Place of Presentation: 石川音楽堂(石川)
  • Year and Date: 2011-11-22
• [Presentation] 時空間発光分光によるスロットアンテナ励起大気圧マイクロ波プラズマの診断 (2011)
  • Author(s): 村瀬卓也, 石島達夫, 豊田浩孝
  • Organizer: Plasma Conference 2011
  • Place of Presentation: 石川音楽堂(石川県)
  • Year and Date: 2011-11-22
• [Presentation] Influence of microwave electric field on Hβbroadening in atmospheric pressure microwave plasma (2011)
  • Author(s): H. Toyoda, T. Murase and T. Ishijima
  • Organizer: 64th Annual Gaseous Electronics Conference
  • Place of Presentation: Utah(USA)
  • Year and Date: 2011-11-15
• [Presentation] Influence of microwave electric field on H_β broadening in atmospheric pressure microwave plasma (2011)
  • Author(s): H.Toyoda, T.Murase, T.Ishijima
  • Organizer: 64th Annual Gaseous Electronics Conference
  • Place of Presentation: Utah (USA)
  • Year and Date: 2011-11-15
• [Presentation] 大気圧パルスマイクロ波プラズマの時空間発光分光計測 (2011)
  • Author(s): 村瀬卓也,石島達夫,豊田浩孝
  • Organizer: 応用物理学会プラズマエレクトロニクス分科会20周年記念特別シンポジウム
  • Place of Presentation: 名古屋大学(愛知)
  • Year and Date: 2011-10-22
• [Presentation] 大気圧パルスマイクロ波プラズマの時空間発光分光計測 (2011)
  • Author(s): 村瀬卓也, 石島達夫, 豊田浩孝
  • Organizer: 応用物理学会プラズマエレクトロニクス分科会20周年記念特別シンポジウム
  • Place of Presentation: 名古屋大学(愛知県)
  • Year and Date: 2011-10-22
• [Presentation] 時空間発光分光計測を用いた大気圧パルスマイクロ波プラズマ生成過程の観察 (2011)
  • Author(s): 村瀬卓也,石島達夫,豊田浩孝
  • Organizer: 平成23年度電気関係学会東海支部連合大会
  • Place of Presentation: 三重大学(三重)
  • Year and Date: 2011-09-27
• [Presentation] 時空間発光分光計測を用いた大気圧パルスマイクロ波ププズマ生成過程の観察 (2011)
  • Author(s): 村瀬卓也, 石島達夫, 豊田浩孝
  • Organizer: 平成23年度電気関係学会東海支部連合大会
  • Place of Presentation: 三重大学(三重県)
  • Year and Date: 2011-09-27
• [Presentation] Influence of Microwave Electric Field on Spatial and Time-Variation of HυSpectra in Pulsed-Microwave Atmospheric Pressure Plasma (2011)
  • Author(s): T. Murase, A. Kamata, T. Ishijima, H. Toyoda
  • Organizer: The XXX International Conference on Phenomena in Ionized Gases
  • Place of Presentation: Belfast(Northern Ireland)
  • Year and Date: 2011-09-01
• [Presentation] Influence of Microwave Electric Field on Spatial and Time-Variation of H_β Spectra in Pulsed-Microwave Atmospheric Pressure Plasma (2011)
  • Author(s): T.Murase, A.Kamata, T.Ishijima, H.Toyoda
  • Organizer: The XXX International Conference on Phenomena in Ionized Gases
  • Place of Presentation: Belfast (Northern Ireland)
  • Year and Date: 2011-09-01
• [Presentation] Spatiotemporal measurement of microwave electric field in an atmospheric pressure microwave plasma (2011)
  • Author(s): H. Toyoda, T. Murase, T. Ishijima
  • Organizer: The 13th International Workshop on Advanced Plasma Processing and Diagnostics(招待講演)
  • Place of Presentation: Deajeon(Korea)
  • Year and Date: 2011-07-27
• [Presentation] Spatiotemporal measurement of microwave electric field in an atmospheric pressure microwave plasma (2011)
  • Author(s): Hirotaka Toyoda, Takuya Murase, Tasuo Ishijima
  • Organizer: The 13th International Workshop on Advanced Plasma Processing and Diagnostics
  • Place of Presentation: Deajeon (Korea)(招待講演)
  • Year and Date: 2011-07-27
• [Presentation] Time-and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using Ultra Short Pulses (2011)
  • Author(s): T. Murase, A. Kamata, T. Ishijima, Y Kinoshita, H. Kawauchi, K. Yoshida, and H. Toyoda
  • Place of Presentation: Dalian(China)
  • Year and Date: 2011-07-06
• [Presentation] Time-and Space-Resolved Characteristics of Ozone Concentration in Atmospheric Pressure Plasma using Ultra Short Pulses (2011)
  • Author(s): T.Murase, A.Kamata, T.Ishijima, Y.Kinoshita, H.Kawauchi, K.Yoshida, H.Toyoda
  • Organizer: The 3rd International Conference on Microelectronics and Plasma Technology
  • Place of Presentation: Dalian (China)
  • Year and Date: 2011-07-06
• [Presentation] Space-and Time-Resolved Measurement of Electric Field in Atmospheric-pressure Pulsed Microwave Plasma (2011)
  • Author(s): T. Murase, A. Kamata, T. Ishijima and H. Toyoda
  • Organizer: The 4th International Conference on Plasma-Nanotechnology & Science
  • Place of Presentation: 高山文化会館(岐阜)
  • Year and Date: 2011-03-11
• [Presentation] Space and Time Resolved Measurement of Electric Fleld in Atmospheric-pressure Pulsed Microwave Plasma (2011)
  • Author(s): T.Murase, A Kamata, T Ishijima, H Toyoda.
  • Organizer: The 4th International Conference on Plasma Nano Technology & Science
  • Place of Presentation: 高山文化会館(岐阜県)
  • Year and Date: 2011-03-11
• [Presentation] 子シュタルク拡がりを用いた大気圧マイクロ波プラズマにおける電子密度および電界強度の時分解計測,「原子分子光の素過程とプラズマ分光の研究フロンティア」「原子分子データ応用フォーラムセミナー」 (2011)
  • Author(s): 石島達夫,水素原子
  • Organizer: 合同研究会
  • Place of Presentation: 核融合科学研究所(岐阜)
  • Year and Date: 2011-02-03
• [Presentation] 水素原子シュタルク拡がりを用いた大気圧マイクロ波プラズマにおける電子密度および電界強度の時分解計測 (2011)
  • Author(s): 石島達夫
  • Organizer: 「原子分子光の素過程とプラズマ分光の研究フロンティア」「原子分子データ応用フォーラムセミナー」合同研究会
  • Place of Presentation: 核融合科学研究所(岐阜県)
  • Year and Date: 2011-02-03
• [Presentation] Time and Space Resolved Measurement of Microwave Electric Field in Atmospheric Pressure Plasma (2011)
  • Author(s): H. Toyoda, A. Kamata, T. Murase, T. Ishijima
  • Organizer: The 12th International Workshop of Advanced Plasma Processing and Diagnostics
  • Place of Presentation: 九州大学(福岡)
  • Year and Date: 2011-01-05
• [Presentation] Time and Space Resolved Measrement of Microwave Electric Field in Atmospheric Pressure Plasma (2011)
  • Author(s): H Toyoda, A Kamata, T Murase, T Ishijima.
  • Organizer: The 12th International Workshop of Advanced Plasma Processing and Diagnostics
  • Place of Presentation: 九州大学(福岡県)
  • Year and Date: 2011-01-05
• [Presentation] Diagnostics of atmospheric pressure plasma by space and time-resolved Stark broadening (2010)
  • Author(s): H. Toyoda, A. Kamata, T. Murase, and T. Ishijima
  • Organizer: The 2nd International Plasma Nanoscience Symposium
  • Place of Presentation: New SouthWales(Australia)
  • Year and Date: 2010-12-13
• [Presentation] Diagnostics of atmospheric pressure plasma by space and time-resolved Stark broadening (2010)
  • Author(s): H Toyoda, A Kamata, T Murase, T.Ishijima.
  • Organizer: The 2nd International Plasma Nanoscience Symposium
  • Place of Presentation: New South Wales(Australia)
  • Year and Date: 2010-12-13
• [Presentation] 大気圧パルスマイクロ波プラズマにおける時空間発光分光計測 (2010)
  • Author(s): 鎌田安住,石島達夫,豊田浩孝
  • Organizer: 平成22年度電気関係学会東海支部連合大会
  • Place of Presentation: 中部大学(愛知)
  • Year and Date: 2010-08-30
• [Presentation] 大気圧パルスマイクロ波プラズマにおける時空間発光分光計測 (2010)
  • Author(s): 鎌田安住, 石島達夫, 豊田浩孝
  • Organizer: 平成22年度電気関係学会東海支部連合大会
  • Place of Presentation: 中部大学(愛知県)
  • Year and Date: 2010-08-30
• [Presentation] 水素原子偏光スペクトル計測を用いた大気圧パルスプラズマの外部印加電界強度の検討 (2010)
  • Author(s): 鎌田安住,楊海鵬,石島達夫,豊田浩孝
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学(神奈川)
  • Year and Date: 2010-03-17
• [Presentation] 水素原子偏光スペクトル計測を用いた大気圧パルスプラズマの外部印加電界強度の検討 (2010)
  • Author(s): 鎌田安住, 楊海鵬, 石島達天 豊田浩孝
  • Organizer: 第57回応用物理学関係連合講演会
  • Place of Presentation: 東海大学(神奈川県)
  • Year and Date: 2010-03-17
• [Presentation] Time Resolved Measurement of HβEmission from Atmospheric-Pressure Pulsed Microwave Plasma (2010)
  • Author(s): A. Kamata, H. Yang, T. Ishijima, H. Toyoda
  • Organizer: The 3rd International Conference on Plasma-Nanotechnology & Science
  • Place of Presentation: 名城大学(愛知)
  • Year and Date: 2010-03-11
• [Presentation] Time Resolved Measurement of H_β Emission from Atmospheric-Pressure Pulsed Microwave Plasma (2010)
  • Author(s): A.Kamata, H.Yang, T.Ishijima, H.Toyoda
  • Organizer: The 3rd International Conference on Plasma-Nano Technology & Science
  • Place of Presentation: 名城大学(名古屋市)
  • Year and Date: 2010-03-11
• [Presentation] 大気圧パルスマイクロ波プラズマの時分解発光分光計測 (2010)
  • Author(s): 鎌田安住,楊海鵬,石島達夫,豊田浩孝
  • Organizer: 第27回プラズマプロセシング研究会
  • Place of Presentation: 横浜市開港記念会館(神奈川)
  • Year and Date: 2010-02-03
• [Presentation] 大気圧パルスマイクロ波プラズマの時分解発光分光計測 (2010)
  • Author(s): 鎌田安住, 楊海鵬, 石島達夫, 豊田浩孝
  • Organizer: 第27回プラズマプロセシング研究会
  • Place of Presentation: 横浜市開港記念会館(神奈川県)
  • Year and Date: 2010-02-03
• [Presentation] Temporal variation of plasma density in atmospheric pressure pulsed-microwave plasma (2009)
  • Author(s): H. Toyoda, H. Yang, T. Ishijima
  • Organizer: 62nd Annual Gaseous Electronics Conference
  • Place of Presentation: Saratoga Springs(NY, USA)
  • Year and Date: 2009-10-20
• [Presentation] Temporal variation of plasma density in atmosphericpressure pulsed-microwave plasma (2009)
  • Author(s): H.Toyoda, H.Yang, T.Ishijima
  • Organizer: 62nd Annual Gaseous Electronics Conference
  • Place of Presentation: Saratoga Springs(NY, USA)
  • Year and Date: 2009-10-20
• [Presentation] Temporal Variation of Hydrogen Atom Spectrum Emitted from Pulsed Microwave Plasma under Atmospheric Pressure (2009)
  • Author(s): H. Yang, T. Ishijima, H. Toyoda
  • Organizer: The 31th International Symposium on Dry Process
  • Place of Presentation: Busan Exhibition & Convention Center(Busan, Korea)
  • Year and Date: 2009-09-24
• [Presentation] Temporal Variation of Hydrogen Atom Spectrum Emitted from Pulsed Microwave Plasma under Atmospheric Pressure (2009)
  • Author(s): H.Yang, T.Ishijima, H.Toyoda
  • Organizer: The 31th International Symposium on Dry Process
  • Place of Presentation: Busan Exhibition & Convention Center(Susan, Korea)
  • Year and Date: 2009-09-24
• [Presentation] シュタルク拡がりを用いたプラズマ密度計測における外部電界の影響 (2009)
  • Author(s): 楊海鵬、石島達夫、豊田浩孝
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学(富山)
  • Year and Date: 2009-09-09
• [Presentation] シュタルク拡がりを用いたプラズマ密度計測における外部電界の影響 (2009)
  • Author(s): 楊海鵬、石島達失、豊田浩孝
  • Organizer: 第70回応用物理学会学術講演会
  • Place of Presentation: 富山大学(富山県)
  • Year and Date: 2009-09-09