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Development of water driven ultra-precision machining system and diamond turning in temperature controlled water environment

Research Project

Project/Area Number 21560131
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionKanagawa University

Principal Investigator

NAKAO Yohichi  神奈川大学, 工学部, 教授 (00260993)

Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2012: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2010: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywords超精密工作機械 / ウォータドライブスピンドル / ダイヤモンド切削 / 水静圧軸受 / マイクロファクトリ / 水圧駆動システム / ウォータドライブステージ / 加工環境制御 / スピンドル / ステージ / 水温制御 / フォータドライブスピンドル / フォータドライブステージ
Research Abstract

The water driven stage was developed. Then the water driven ultra-precision machine tool system composed of the water driven stage and the water driven spindle was fabricated. A speed control system of the water driven stage was designed in order to regulate the feed of the table during diamond turning process of the developed machine tool system. The experimental and simulation studies verified that the controller effectively regulates the feed even external loads acting on the table of the stage. All the developed machine tool system was then set in water bath achieving better thermal stability of the machining environment. Finally, diamond-turning tests were carried out using developed system.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (59 results)

All 2013 2012 2011 2010 2009 Other

All Journal Article (27 results) (of which Peer Reviewed: 24 results) Presentation (29 results) Remarks (3 results)

  • [Journal Article] Evaluation of dynamic characteristics of water driven stage2012

    • Author(s)
      Y. Nakao, T. Sano, S. Harada and K. Suzuki
    • Journal Title

      Proceedings of 12th International Conference of the European Society for Precision Engineering and Nanotechnology

      Volume: Vol. 1 Pages: 384-387

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of Spindle with Water Hydrostatic Bearings for Ultra Precision Machine Tools2012

    • Author(s)
      Y. Nakao
    • Journal Title

      Proceedings of the International Conference of Manufacturing Technology Engineers 2012

      Volume: Vol. 1 Pages: 33-36

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Design of Short-Pipe Restrictor of Hydrostatic Thrust Bearings2012

    • Author(s)
      Y. Nakao
    • Journal Title

      Proc. of ASME 2012 International Mechanical Congress and Exposition

      Volume: Vol. 1

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development and modeling of water driven stage2011

    • Author(s)
      Y. Nakao, T. Sano, M. Nagashima and K. Suzuki
    • Journal Title

      Proc. of ASME 2011 International Mechanical Congress and Exposition

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design of Speed Control System of Water Driven Stage2011

    • Author(s)
      T. Sano, M. Nagashima, Y. Nakao and K. Suzuki
    • Journal Title

      Proceedings of the 8th JFPS International Symposium on Fluid Power

      Volume: CDROM

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Model Verification and Design of Speed Control System of Water Driven Stage2011

    • Author(s)
      Y. Nakao, T. Sano, M. Nagashima and K. Suzuki
    • Journal Title

      Proc. of ASME 2011 International Design Engineering Technical Conferences

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 小型流体駆動スピンドルの回転速度制御用ロータリ形流量制御弁2011

    • Author(s)
      中尾,新宮,大林
    • Journal Title

      日本機械学会論文集(C編)

      Volume: Vol. 77, No.774 Pages: 514-526

    • NAID

      130000873760

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Driving Performance of Water Driven Stage2011

    • Author(s)
      T.Sano, M.Nagashima, Y.Nakao, K.Suzuki
    • Journal Title

      Proc.of The 4th International Conference on Manufacturing Machine Design and Tribology

      Pages: 185-186

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of feedback control system for water driven stage2011

    • Author(s)
      Y.Nakao, M.Nagashima, T.Sano, K.Suzuki
    • Journal Title

      Proc.of 11th International Conference of the European Society for Precision Engineering and Nanotechnology

      Volume: 1 Pages: 335-338

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Model Verification and Design of Speed Control System of Water Driven Stage2011

    • Author(s)
      Y.Nakao, T.Sano, M.Nagashima, K.Suzuki
    • Journal Title

      Proc.of ASME 2011 International Design Engineering Technical Conferences

      Volume: (CD-ROM)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development and modeling of water driven stage2011

    • Author(s)
      Y.Nakao, T.Sano, M.Nagashima, K.Suzuki
    • Journal Title

      Proc.of ASME 2011 International Mechanical Congress and Exposition

      Volume: (CD-ROM)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of Speed Control System of Water Driven Stage2011

    • Author(s)
      T.Sano, M.Nagashima, Y.Nakao, K.Suzuki
    • Journal Title

      Proce.of the 8th JFPS International Symposium on Fluid Power

      Volume: (CD-ROM)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] アクアドライブシステムの超精密工作機械への応用2011

    • Author(s)
      中尾陽一
    • Journal Title

      油空圧技術

      Volume: 11 Pages: 33-39

    • Related Report
      2011 Annual Research Report
  • [Journal Article] Design of Short-Pipe Restrictor of Hydrostatic Thrust Bearings2010

    • Author(s)
      Y. Nakao, S. Nakatsugawa, M. Komori and K. Suzuki
    • Journal Title

      Proc. of ASME Control of Water-Driven Spindle,Proc. of ASME 2010 International Mechanical Congress and Exposition

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Angular Position-Control of Fluid-Driven Bi-Directional Motor, Proceedings of the Institution of Mechanical Engineers2010

    • Author(s)
      Y. Nakao and M. Ishikawa
    • Journal Title

      Part C: Journal of Mechanical Engineering Science

      Volume: Vol. 224, No.C11 Pages: 2350-2362

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design of Rotary-Type Flow Control Valve for Control of Water-Driven Spindle2010

    • Author(s)
      Y. Nakao, H. Niimiya and T. Ohbayashi
    • Journal Title

      Proc. of ASME 2010 International Mechanical Congress and Exposition

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modelling and characteristics of fluid-driven bi-directional motor for angular position-control system, Proceedings of the Institution of Mechanical Engineers2010

    • Author(s)
      Y. Nakao and M. Ishikawa
    • Journal Title

      Part C: Journal of Mechanical Engineering Science

      Volume: Vol. 224, No.C4 Pages: 863-876

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] 回転角制御機能を備えた流体駆動スピンドルの開発と回転角制御2010

    • Author(s)
      中尾,浅岡,藤本
    • Journal Title

      日本機械学会論文集(C編)

      Volume: Vol.76,No.763 Pages: 749-758

    • NAID

      40019599416

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modelling and characteristics of fluid-driven bi-directional motor for angular position-control system2010

    • Author(s)
      Y.Nakao, M.Ishikawa
    • Journal Title

      Proceedings of the Institution of Mechanical Engineers, Part C : Journal of Mechanical Engineering Science

      Volume: 224 Pages: 863-876

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Angular Position-Control of Fluid-Driven Bi-Directional Motor2010

    • Author(s)
      Y.Nakao, M.Ishikawa
    • Journal Title

      Proceedings of the Institution of Mechanical Engineers, Part C : Journal of Mechanical Engineering Science

      Volume: 224 Pages: 2350-2362

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 小型流体駆動スピンドルの回転速度制御用ロータリ形流量制御弁2010

    • Author(s)
      中尾, 新宮, 大林
    • Journal Title

      日本機械学会論文集(C編)

      Volume: 77 Pages: 514-526

    • NAID

      130000873760

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fundamental Consideration on Design of Restrictor for Hydrostatic Bearing2010

    • Author(s)
      Y.Nakao
    • Journal Title

      Proceedings of 10th International Conference of the European Society for Precision Engineering and Nanotechnology

      Volume: 1 Pages: 380-383

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design of Rotary-Type Flow Control Valve for Control of Water-Driven Spindle2010

    • Author(s)
      Y.Nakao, H.Niimiya, T.Ohbayashi
    • Journal Title

      Proc.of ASME 2010 International Mechanical Congress and Exposition

      Volume: (CD-ROM)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 回転角制御機能を備えた流体駆動スピンドルの開発と回転角制御2010

    • Author(s)
      中尾, 浅岡, 藤本
    • Journal Title

      日本機械学会論文集(C編) 76

      Pages: 749-758

    • NAID

      40019599416

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Angular PositionControl of Fluid-Driven Spindle2009

    • Author(s)
      Y. Nakao and N. Asaoka
    • Journal Title

      Proc. of ASME2009 International Mechanical Congress andExposition

      Volume: CD-ROM

    • Related Report
      2012 Final Research Report
  • [Journal Article] Design of water driven stage2009

    • Author(s)
      Y.Nakao, M.Kawakami
    • Journal Title

      Proc.of 9^<th> International Conference of the European Society for Precision Engineering and Nanotechnology

      Pages: 200-203

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Angular Position Control of Fluid-Driven Spindle2009

    • Author(s)
      Yohichi Nakao, Naoya Asaoke
    • Journal Title

      Proc.of ASME 2009 International Mechanical Congress and Exposition (CD-ROM)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] ウォータドライブステージの速度制御系設計第三報:ステージのフィードバック速度制御系の性能評価2013

    • Author(s)
      佐野,鳥居,鈴木,中尾
    • Organizer
      日本機械学会関東支部19期総会講演会学会発表
    • Place of Presentation
      首都大学東京
    • Year and Date
      2013-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブ加工システムによるダイヤモンド切削の試み2013

    • Author(s)
      原田,鈴木,中尾
    • Organizer
      日本機械学会関東支部19期総会講演会学会発表
    • Place of Presentation
      首都大学東京
    • Year and Date
      2013-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブ加工システムによるダイヤモンド切削の試み2013

    • Author(s)
      原田翔
    • Organizer
      日本機械学会関東支部19期総会講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧スラスト軸受におけるリセス圧力と軸受剛性の測定2013

    • Author(s)
      小森正敬
    • Organizer
      日本機械学会関東支部19期総会講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] ウォータドライブステージの速度制御系設計 第三報:ステージのフィードバック速度制御系の性能評価2013

    • Author(s)
      佐野利晃
    • Organizer
      日本機械学会関東支部19期総会講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧軸受の支持剛性を最大にする短管軸受絞りの設計問題2012

    • Author(s)
      中尾,小森,牧野,中津川,鈴木
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会学会発表
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-27
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブステージの性能評価(第一報水静圧軸受の剛性測定)2012

    • Author(s)
      原田,鈴木,中尾
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会学会発表
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-27
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブステージの速度制御系設計(第二報比例弁による速度制御の試み)2012

    • Author(s)
      佐野,鈴木,中尾
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会学会発表
    • Place of Presentation
      由利本荘
    • Year and Date
      2012-10-27
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブステージに組み込まれた水静圧軸受の剛性測定2012

    • Author(s)
      原田,鈴木,中尾
    • Organizer
      日本機械学会2012年度年次大会学会発表
    • Place of Presentation
      金沢
    • Year and Date
      2012-09-10
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブステージの速度制御系設計第一報ウォータドライブステージのモデル化2012

    • Author(s)
      佐野,鈴木,中尾
    • Organizer
      日本機械学会2012年度年次大会学会発表
    • Place of Presentation
      金沢
    • Year and Date
      2012-09-10
    • Related Report
      2012 Final Research Report
  • [Presentation] ウォータドライブステージに組み込まれた水静圧軸受の剛性測定2012

    • Author(s)
      原田翔
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] ウォータドライブステージの速度制御系設計 第一報 ウォータドライブステージのモデル化2012

    • Author(s)
      佐野利晃
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧スラスト軸受の剛性測定2012

    • Author(s)
      小森正敬
    • Organizer
      日本機械学会2012年度年次大会
    • Place of Presentation
      金沢大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] ウォータドライブステージの速度制御系設計(第二報 比例弁による速度制御の試み)2012

    • Author(s)
      佐野利晃
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] ウォータドライブステージの性能評価(第一報 水静圧軸受の剛性測定)2012

    • Author(s)
      原田翔
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧軸受の支持剛性を最大にする短管軸受絞りの設計問題2012

    • Author(s)
      中尾陽一
    • Organizer
      日本機械学会第9回生産加工・工作機械部門講演会
    • Place of Presentation
      秋田県立大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧軸受の最適設計による小型超精密工作機械用テーブルの性能向上に関する研究2012

    • Author(s)
      中尾陽一
    • Organizer
      第15回国際工作機械技術者会議
    • Place of Presentation
      東京ビックサイト
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧回転テーブルの支持剛性の測定2012

    • Author(s)
      中津川, 中尾, 鈴木
    • Organizer
      日本機械学会関東支部第18期総会講演会
    • Place of Presentation
      日本大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] 水静圧軸受の変位の能動制御2012

    • Author(s)
      中津川, 中尾, 鈴木
    • Organizer
      日本機械学会関西支部第87期定時総会講演会
    • Place of Presentation
      関西大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] 水静圧軸受の変位制御2011

    • Author(s)
      中津川, 中尾, 鈴木
    • Organizer
      2011年度日本機械学会年次大会
    • Place of Presentation
      東京工業大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] ダイヤモンド切削用流体駆動スピンドルの回転角制御2010

    • Author(s)
      中尾
    • Organizer
      日本機械学会九州支部・第62期総会講演会学会発表
    • Place of Presentation
      熊本
    • Year and Date
      2010-03-15
    • Related Report
      2012 Final Research Report
  • [Presentation] ダイヤモンド切削用流体駆動スピンドルの回転角制御2010

    • Author(s)
      中尾, 浅岡
    • Organizer
      日本機械学会九州支部第63期総会・講演会
    • Place of Presentation
      熊本大学
    • Year and Date
      2010-03-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] ウォータドライブステージの開発と速度及び駆動力の評価2010

    • Author(s)
      長島, 中尾
    • Organizer
      日本機械学会東北支部第45期総会・講演会
    • Place of Presentation
      東北大学
    • Year and Date
      2010-03-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] 流体駆動スピンドルの回転数制御系の設計2010

    • Author(s)
      品村, 中尾
    • Organizer
      日本機械学会東北支部第45期総会・講演会
    • Place of Presentation
      東北大学
    • Year and Date
      2010-03-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] 水静圧軸受における軸受隙間や軸受絞りの誤差の影響2009

    • Author(s)
      長島, 中尾
    • Organizer
      日本機械学会2009年度年次大会
    • Place of Presentation
      岩手大学
    • Year and Date
      2009-09-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] 水静圧スラスト軸受の高剛性化のための軸受絞りの設計

    • Author(s)
      牧野尚拓
    • Organizer
      日本機械学会関東学生会第52回学生員卒業研究発表講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] 水静圧スピンドルの設計

    • Author(s)
      山田晃平
    • Organizer
      日本機械学会関東学生会第52回学生員卒業研究発表講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] ウォータドライブステージの速度制御系設計

    • Author(s)
      鳥居侑祐
    • Organizer
      日本機械学会関東学生会第52回学生員卒業研究発表講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] ウォータドライブ加工システムの開発と性能評価

    • Author(s)
      樋口貴郁
    • Organizer
      日本機械学会関東学生会第52回学生員卒業研究発表講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.mech.kanagawa-u.ac.jp/lab/nakao_lab/index.html

    • Related Report
      2012 Final Research Report
  • [Remarks] 中尾研究室

    • URL

      http://www.mech.kanagawa-u.ac.jp/lab/nakao_lab/

    • Related Report
      2012 Annual Research Report
  • [Remarks] 日本機械学会賞(論文)受賞 受賞論文:「回転角制御機能を備えた流体駆動スピンドルの開発と回転角制御」 日本機械学会論文集(C編),Vol.76,No.763,pp.749-758,(2010-3)

    • Related Report
      2010 Annual Research Report

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Published: 2009-04-01   Modified: 2019-07-29  

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