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Study on Piezo-effects in Nanostructures For High Sensitive Mechanical Sensing

Research Project

Project/Area Number 21710141
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Microdevices/Nanodevices
Research InstitutionRitsumeikan University

Principal Investigator

DAO Viet Dzung  Ritsumeikan University, 総合理工学研究機構, チェアプロフェッサー (50388138)

Research Collaborator BUI Thanh Tung  立命館大学, 理工学研究科, 博士後期課程
Project Period (FY) 2009 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2009: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywordsピエゾ抵抗効果 / シリコンナノワイヤ / ピエゾ光学効果 / フォトニック結晶 / ピエゾ抵抗係数 / フォトニック結晶(PhC) / フォトニック結晶キャビティ / ひずみ測定 / ピエゾ抵抗計数
Research Abstract

This study focused on theoretical and experimental studies in piezo-effects of nano structures, such as the piezoresistive effect in single crystal Si nanowire, and the piezo-optical effect in photonic crystal nanocavity. The theoretical and experimental results show big piezo-effects and corresponding orientations of SNW and PhC nanocavity. The research achievements are promising for highly-sensitive mechanical sensing applications.

Report

(3 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • Research Products

    (59 results)

All 2011 2010 2009

All Journal Article (28 results) (of which Peer Reviewed: 28 results) Presentation (29 results) Book (2 results)

  • [Journal Article] Strain sensitive effect in a triangular lattice photonic crystal hole-modified nanocavity2011

    • Author(s)
      Bui T.Tung, Hoang M.Nguyen, Dzung Viet Dao, S.Rogge, H.W.M.Salemink, S.Sugiyama
    • Journal Title

      IEEE Sensors Journal (印刷中)

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity2011

    • Author(s)
      Bui T.Tung, Dzung Viet Dao, S.Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines 巻131号7(印刷中)

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of strain sensing effect in modified single-defect photonic crystal nanocavity2011

    • Author(s)
      Bui T.Tung, Dzung Viet Dao, Taro Ikeda, Y.Kanamori, K.Hane, S.Sugiyama
    • Journal Title

      Optics Express 巻19号9

      Pages: 8821-8829

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Strain sensitive effect in a rectangular lattice photonic crystal hole-modified nanocavity2011

    • Author(s)
      Bui T.Tung, Hoang M.Nguyen, Dzung V.Dao, S.Rogge, H.W.M.Salemink, S.Sugiyama
    • Journal Title

      IEEE Sensors Journal

      Volume: (印刷中(掲載確定))

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Investigation of strain sensing effect in modified single-defect photonic crystal nanocavity2011

    • Author(s)
      Bui T Tung, Dzung V.Dao, Taro Ikeda, Yoshiaki Kanamori, Kazuhiro Hane, S Sugiyama
    • Journal Title

      Optics Express

      Volume: Vol.19, Issue 9 Pages: 8821-8829

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanostrain Sensing Based on Piezo-Optic Property of a Photonic Crystal Cavity2011

    • Author(s)
      Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines, the Institute of Electrical Engineers of Japan

      Volume: Vol.131, No.7/Sec.E Pages: 8821-8829

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development and Analysis of a Sliding Tactile Soft Fingertip Embedded with a Micro Force/Moment Sensor2011

    • Author(s)
      Van Ho, Dzung Viet Dao, Susumu Sugiyama, Shinichi Hirai
    • Journal Title

      IEEE Transactions on Robotics (T-RO), IEEE Robotics and Automation Society

      Volume: Vol.pp, Issue 99 Pages: 1-14

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Towards highly sensitive strain sensing based on nanostructured materials2010

    • Author(s)
      Dzung Viet Dao, Tung T.Bui, K.Nakamura, Van T.Dau, T.Yamada, K.Hata, S.Sugiyama
    • Journal Title

      Advances in Natural Sciences : Nanoscience and Nanotechnology 巻1号045012

      Pages: 8-8

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure2010

    • Author(s)
      R.Amarasinghe, Dzung Viet Dao, S.Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines 巻130号6

      Pages: 242-246

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Integrated CNTs thin film for MEMS mechanical sensors2010

    • Author(s)
      Van T.Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama
    • Journal Title

      Journal of Microelectronics 巻41

      Pages: 860-864

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Micro/nano Mechanical Sensors and Actuators Based on SOI-MEMS Technology2010

    • Author(s)
      Dzung Viet Dao, K.Nakamura, Tung T.Bui, S.Sugiyama
    • Journal Title

      Adv.Nat.Sci.: Nanosci.Nanotechnol.IOP Publishing Ltd, UK 巻1号013001

      Pages: 10-10

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Towards highly sensitive strain sensing based on nanostructured materials2010

    • Author(s)
      Dzung Viet Dao, Tung Thanh Bui, Koichi Nakamura, Van Thanh Dau, Takeo Yamada, Kenji Hata, Susumu Sugiyama
    • Journal Title

      Advances in Natural Sciences : Nanoscience and Nanotechnology, Institute of Physics Publishing Ltd

      Volume: Vol.1, 045012 Pages: 1-8

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integrated CNTs thin film for MEMS mechanical sensors2010

    • Author(s)
      Van T.Dau, Takeo Yamada, Dzung Viet Dao, Bui Thanh Tung, Kenji Hata, Susumu Sugiyama
    • Journal Title

      Journal of Microelectronics

      Volume: 41 Pages: 860-864

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of mechanical and thermal properties of co-sputtered WSi thin film for MEMS applications2010

    • Author(s)
      Tung T.Bui, Dzung V.Dao, T.Toriyama, Susumu Sugiyama
    • Journal Title

      Micro Systems Technology, Springer Berlin/Heidelberg

      Volume: Vol.16, No.11 Pages: 1881-1886

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure2010

    • Author(s)
      R.Amarasinghe, Dzung V.Dao, S.Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: Vol.130, Issue 6 Pages: 242-246

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation and Analysis of Physical Properties of Nanomaterials for Highly Sensitive Mechanical Sensing Devices2010

    • Author(s)
      S.Sugiyama, T.Toriyama, Koichi Nakamura, Dzung V.Dao
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: Vol.130, No 5 Pages: 146-151

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integration of SWNT film into MEMS for a micro thermoelectric device2010

    • Author(s)
      Van Thanh Dau, Dzung Viet Dao, Takeo Yamada, Bui Thanh Tung, Kenii Hata, Susumu Sugiyama
    • Journal Title

      Journal of Smart Materials and Structures, Institute of Physics Publishing (IOP) Ltd., UK

      Volume: Vol.19, No 07 Pages: 1-6

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro/nano Mechanical Sensors and Actuators Based on SOI-MEMS Technology2010

    • Author(s)
      Dzung Viet Dao, Koichi Nakamura, Tung Thanh Bui, Susumu Sugiyama
    • Journal Title

      Advances in Natural Sciences : Nanoscience and Nanotechnology, Institute of Physics (IOP) Publishing Ltd, UK

      Volume: Vol.1, No 01 Pages: 1-10

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure2010

    • Author(s)
      R.Amarasinghe, Dzung Viet Dao, S.Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines (掲載決定)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Integrated CNTs Thin Film for MEMS Thermal Sensors2010

    • Author(s)
      V.T.Dau, Dzung V.Dao, T.Yamada, B.T.Tung, K.Hata, S.Sugiyama
    • Journal Title

      Journal of Smart Materials and Structures, Institute of Physics Publishing Ltd., UK (掲載決定)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro/nano Mechanical Sensors and Actuators Based on SOI-MEMS Technology2010

    • Author(s)
      Dzung V.Dao, K.Nakamura, Tung T.Bui, S.Sugiyama
    • Journal Title

      Adv.Nat.Sci.: Nanosci. Nanotechnol. IOP Publishing Ltd, UK 1

      Pages: 13001-13001

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 高感度機械量センサのためのナノ材料の物性の測定と解析2010

    • Author(s)
      杉山進, 鳥山寿之, 中村康一, ダオベトズン
    • Journal Title

      電気学会論文誌E(センサ・マイクロマシン部門誌) Vol.130

      Pages: 146-151

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Monolithic Dual-color Total Internal Reflection(TIR)-based Chip for Highly Sensitive and High-resolution Dual-fluorescence Imaging2009

    • Author(s)
      Nam Cao Hoai Le, Dzung Viet Dao, R.Yokokawa, John C.Wells, Susumu Sugiyama
    • Journal Title

      IEEE/ASME J.Microelectromech. Syst., (JMEMS) Vol.18

      Pages: 1371-1381

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring2009

    • Author(s)
      R.Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.129

      Pages: 142-147

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Polymer Electrostatic Comb-Drive Actuator Using Hot Embossing and Ultra-Precision Cutting Technology2009

    • Author(s)
      Satoshi Amaya, Dzung Viet Dao Susumu Sugiyama
    • Journal Title

      Journal of Micro/Nanolithography, MEMS, and MOEMS(JM3) Vol.8

      Pages: 43065-43065

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of Polymer Electrostatic Comb-Drive Actuator Using Hot Embossing and Ultra-Precision Cutting Technology2009

    • Author(s)
      S.Amaya, Dzung V.Dao, Susumu Sugiyama
    • Journal Title

      Journal of Micro/Nanolithography, MEMS, and MOEMS(JM3) Vol.8

      Pages: 43065-43065

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices2009

    • Author(s)
      Nam C.H.Le, Dzung V.Dao, Ryuji Yokokawa, John C.Wells, S.Sugiyama
    • Journal Title

      Microsystems Technology, Springer Berlin/Heidelberg Vol.15

      Pages: 1845-1853

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Versatile Microfluidic Total Internal Reflection(TIR)-based Devices : Application to Microbeads Velocity Measurement and Single Molecule Detection with Upright and Inverted Microscope2009

    • Author(s)
      Nam Cao Hoai Le, Ryuji Yokokawa, Dzung Viet Dao, Thien Duy Nguyen, John Wells, Susumu Sugiyama
    • Journal Title

      Lab on a Chip, Royal Society of Chemistry, UK Vol.9

      Pages: 244-250

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Towards Highly Sensitive Strain Sensing Based on Nanostructured Materials2010

    • Author(s)
      Dzung V.Dao, Tung T.Bui, K.Nakamura, S.Sugiyama
    • Organizer
      The 5th International Workshop on Advanced Materials Science and Nanotechnology
    • Place of Presentation
      ハノイ(ベトナム)
    • Year and Date
      2010-11-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Towards Highly Sensitive Strain Sensing Based on Nanostructured Materials2010

    • Author(s)
      Dzung Viet Dao, Tung Thanh Bui, K.Nakamura, S.Sugiyama
    • Organizer
      The 5th Int' 1 Workshop on Advanced Materials Science and Nanotechnology (IWAMSN2010)
    • Place of Presentation
      Hanoi, Vietnam
    • Year and Date
      2010-11-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Theoretical Investigation of Piezo-Optic Effect in Photonic Crystal Nanocavity for Nanostrain Detection2010

    • Author(s)
      Dzung V.Dao, Tung T.Bui, S.Sugiyama
    • Organizer
      IEEE International Symposium on Micro-NanoMechatronics and Human Science
    • Place of Presentation
      名古屋大学(愛知県)
    • Year and Date
      2010-11-09
    • Related Report
      2010 Final Research Report
  • [Presentation] Theoretical Investigation of Piezo-Optic Effect in Photonic Crystal Nanocavity for Nanostrain Detection2010

    • Author(s)
      Dzung V.Dao, Tung T.Bui, S.Sugiyama
    • Organizer
      IEEE International Symposium on Micro-NanoMechatronics and Human Science (MHS2010)
    • Place of Presentation
      名古屋大学(愛知)
    • Year and Date
      2010-11-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Strain Sensitivity of a Modified Single-Defect Photonic Crystal Nanocavity for Mechanical Sensing2010

    • Author(s)
      Bui T.Tung, Dzung V.Dao, S.Sugiyama, Hoang M.Nguyen, S.Rogge, Huub W.M.Salemink
    • Organizer
      9th IEEE International Conference on Sensors
    • Place of Presentation
      Hawaii(USA)
    • Year and Date
      2010-11-04
    • Related Report
      2010 Final Research Report
  • [Presentation] Strain Sensitivity of a Modified Single-Defect Photonic Crystal Nanocavity for Mechanical Sensing2010

    • Author(s)
      Bui Thanh Tung, Dzung Viet Dao, Sugiyama Susumu, Hoang Minh Nguyen, Sven Rogge, Huub W.M.Salemink
    • Organizer
      9th IEEE Int' 1 Conference on Sensors (IEEE SENSORS 2010)
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] Nanostrain Sensing Based on Piezo-optic Property of a Photonic Crystal Filter2010

    • Author(s)
      Bui T.Tung, Dzung V.Dao, S.Sugiyama
    • Organizer
      The 27th Sensor Symposium IEEJ
    • Place of Presentation
      くにびきメッセ(島根県)
    • Year and Date
      2010-10-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Nanostrain Sensing Based on Piezo-optic Property of a Photonic Crystal Filter2010

    • Author(s)
      Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      The 27th Sensor Symposium, (IEEJ)
    • Place of Presentation
      くにびきメッセ(島根)
    • Year and Date
      2010-10-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Investigation of Strain Sensitivity of Photonic Crystal Nanocavity for Mechanical Sensing2010

    • Author(s)
      Bui Thanh Tung, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      2010 International Conference on Optical MEMS & Nanophotonics, (IEEE Photonics Society)
    • Place of Presentation
      札幌コンベンションセンター(北海道)
    • Year and Date
      2010-08-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Multi-axis NEMS Accelerometer with Nanoscale Sensing Elements and Surrounding Mass Structure2010

    • Author(s)
      Ranjith Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010)
    • Place of Presentation
      Perth, Australia
    • Year and Date
      2010-07-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] A three Sensing Points Tactile Finger Tip2010

    • Author(s)
      Dzung Viet Dao, Nima Izadi, Van Anh Ho, Susumu Sugiyama, S.Hirai
    • Organizer
      5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010)
    • Place of Presentation
      Perth, Australia
    • Year and Date
      2010-07-08
    • Related Report
      2010 Annual Research Report
  • [Presentation] Micro/Nano Mechanical Sensors and Actuator Based on Silicon MEMS Technology2009

    • Author(s)
      Dzung Viet Dao, K.Nakamura, S.Sugiyama
    • Organizer
      The 2nd Int'l Workshop on Nanotechnology and Application
    • Place of Presentation
      Vungtau(Vietnam)
    • Year and Date
      2009-11-12
    • Related Report
      2010 Final Research Report
  • [Presentation] Micro/Nano Mechanical Sensors and Actuator Based on Silicon MEMS Technology2009

    • Author(s)
      Dzung Viet Dao, K.Nakamura, S.Sugiyama
    • Organizer
      The 2nd Int'1 Workshop on Nanotechnology and Application
    • Place of Presentation
      Vung Tau, Vietnam
    • Year and Date
      2009-11-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] Sensitivity Enhancement of Piezoresistive Micro Acceleration Sensors with Nanometer Stress Concentration Regions on Sensing Elements2009

    • Author(s)
      R.Amarasinghe, Dzung Viet Dao, Van T.Dau, S.Sugiyama
    • Organizer
      15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers09)
    • Place of Presentation
      Colorado (USA)
    • Year and Date
      2009-06-24
    • Related Report
      2010 Final Research Report
  • [Presentation] Evaluation of the Piezoresistive Effect in Single Crystalline Silicon Nanowires2009

    • Author(s)
      Bui T.Tung, Dzung Viet Dao, T.Toriyama, S.Sugiyama
    • Organizer
      8th IEEE International Conference on Sensors (IEEE SENSORS 2009)
    • Place of Presentation
      Christchurch (New Zealand)
    • Related Report
      2010 Final Research Report
  • [Presentation] Characterization of the Piezoresistive Effect and Temperature Coefficient of Resistance in Single Crystalline Silicon Nanowires2009

    • Author(s)
      Tung T.Bui, Dzung V.Dao, K.Nakamura, T.Toriyama, S.Sugiyama
    • Organizer
      IEEE Int'l Symp.onMicro-NanoMechatronics and Human Science (MHS2009)
    • Place of Presentation
      名古屋大学 (愛知県)
    • Related Report
      2010 Final Research Report
  • [Presentation] Piezoresistive Effect in Silicon Nanowires-A Comprehensive Analysis Based on First-Principles Calculations2009

    • Author(s)
      K.Nakamura, Dzung V.Dao, Bui T.Tung, T..i Toriyama, S.Sugiyama
    • Organizer
      IEEE Int'l Symp.on Micro-NanoMechatronics and Human Science (MHS2009)
    • Place of Presentation
      名古屋大学(愛知県)
    • Related Report
      2010 Final Research Report
  • [Presentation] Sensitivity Enhancement of Piezoresistive Micro Acceleration Sensors with Nanometer Stress Concentration Regions on Sensing Elements2009

    • Author(s)
      Ranjith Amarasinghe, Dzung Viet Dao, Van Thanh Dan, Susumu Sugiyama
    • Organizer
      15th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers09)
    • Place of Presentation
      Denver, Colorado, USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] Tangential and Perpendicular Driving Micro Transmission Systems Based on Ratchet Mechanism and Electrostatic Actuator2009

    • Author(s)
      Uzung Viet Dao, Phuc Hong Pham, Satoshi Senkawa, Susumu Sugiyama
    • Organizer
      15th International Conference on Solid-State Sensors, Actuators and Microsystems(Transducers09)
    • Place of Presentation
      Denver, Colorado, USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluation of the Piezoresistive Effect in Single Crystalline Silicon Nanowires2009

    • Author(s)
      Bui Thanh Tung, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama
    • Organizer
      8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
    • Place of Presentation
      Christchurch, New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] Design and Fabrication of Ultra Miniature Novel Three-Axis Micro Accelerometer2009

    • Author(s)
      Ranjith Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
    • Place of Presentation
      Christchurch, New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] Piezoresistive and Thermoelectric Effects of CNT Thin Film Patterned by EB Lithography2009

    • Author(s)
      Van T.Dau, T.Yamada, Dzung Viet Dao, Bui T.Tung, K.Hata, S.Sugiyama
    • Organizer
      8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
    • Place of Presentation
      Christchurch, New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] All PDMS Multi-color Total Internal Reflection(TIR)-based Devices for Multi-fluorescence Detection and Imaging2009

    • Author(s)
      Nam Cao Hoai Le, Dzung Viet Dao Ryuji Yokokawa, John C.Wells, Susumu Sugiyama
    • Organizer
      8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
    • Place of Presentation
      Christchurch, New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] A PMMA High Sensitive Capacitive Micro Accelerometer Fabricated Based On Hot Embossing2009

    • Author(s)
      Satoshi Amaya, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      8th IEEE Int'1 Conference on Sensors(IEEE SENSORS 2009)
    • Place of Presentation
      Christchurch, New Zealand
    • Related Report
      2009 Annual Research Report
  • [Presentation] Dual-color Total Internal Reflection(TIR)-based Devices with Uniform and High S/N Ratio overlapped Evanescent Fields2009

    • Author(s)
      Nam C.Hoai Le, R.Yokokawa, Dzung V.Dao, John C.Wells, S.Sugiyama
    • Organizer
      13th Int'1 Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2009)
    • Place of Presentation
      Jeju, Korea
    • Related Report
      2009 Annual Research Report
  • [Presentation] Characterization of the Piezoresistive Effect and Temperature Coefficient of Resistance in Single Crystalline Silicon Nanowires2009

    • Author(s)
      Tung T.Bui, Dzung V.Dao, K.Nakamura, T.Toriyama, S.Sugiyama
    • Organizer
      IEEE Int'1 Symp. on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
    • Place of Presentation
      名古屋大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Piezoresistive Effect in Silicon Nanowires-A Comprehensive Analysis Based on First-Principles Calculations2009

    • Author(s)
      K.Nakamura, Dzung V.Dao, Bui T.Tung, T..i Toriyama, S.Sugiyama
    • Organizer
      IEEE Int'1 Symp.on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
    • Place of Presentation
      名古屋大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Study on an Efficient Fabrication Process for PMMMA Movable Microstructures Based on Hot Embossing and Polishing Processes2009

    • Author(s)
      Satoshi Amaya, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      IEEE Int'1 Symp.on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
    • Place of Presentation
      名古屋大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Presentation] Ultra Miniatured micro-accelerometer for wearable physical activity monitoring systems2009

    • Author(s)
      Ranjith Amarasinghe, Dzung Viet Dao, Susumu Sugiyama
    • Organizer
      IEEE Int'1 Symp.on Micro-NanoMechatronics andHuman Science(MHS2009), pp.0467-471
    • Place of Presentation
      名古屋大学(愛知県)
    • Related Report
      2009 Annual Research Report
  • [Book] "Nanowires", 第15章:"Electronic States and Piezoresistivity in Silicon Nanowires"2010

    • Author(s)
      中村康一、Dzung Viet Dao、磯野吉正、鳥山寿之、杉山進
    • Publisher
      In-Tech, Vienna
    • Related Report
      2010 Final Research Report
  • [Book] 書名: "Nanowires", Chapter : "Electronic States and Piezoresistivity in Silicon Nanowires"2010

    • Author(s)
      中村康一、Dzung Viet Dao、磯野吉正、鳥山寿之、杉山進
    • Publisher
      In-Tech, Vienna(In press(掲載決定))
    • Related Report
      2009 Annual Research Report

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Published: 2009-04-01   Modified: 2021-04-07  

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