Formation of high-quality poly-Si films by rapid crystallization of sputtered a-Si films

• Project/Area Number: 21760580
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Material processing/treatments
• Research Institution: Japan Advanced Institute of Science and Technology
• Principal Investigator: OHDAIRA Keisuke Japan Advanced Institute of Science and Technology, マテリアルサイエンス研究科, 助教 (40396510)
• Project Period (FY): 2009 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2009: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
• Keywords: 熱処理 / 結晶化 / 多結晶シリコン / 太陽電池 / フラッシュランプアニール / スパッタリング / 簿膜

Research Abstract

I have established the method of forming polycrystalline silicon (poly-Si) films without serious thermal damage onto glass substrates by crystallizing precursor amorphous Si (a-Si) films formed by sputtering, safer than chemical vapor deposition (CVD). I have clarified that sputtered a-Si films can be crystallized without Cr adhesion films and show a crystallization mechanism similar to that shown in CVD a-Si films.

Research Products

• [Journal Article] Lateral Crystallization of Amorphous Silicon films Induced by Flash Lamp Annealing (2011)
  • Author(s): Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
  • Journal Title: Proceedings of the 7th Thin-Films Materials and Devices Meeting Pages: 110107015-110107015
  • Peer Reviewed
• [Journal Article] Lateral Crystallization of Amorphous Silicon Films Induced by Flash Lamp Annealing (2011)
  • Author(s): Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
  • Journal Title: Proceedings of the Seventh Thin-Films Materials and Devices Meeting
  • Peer Reviewed
• [Journal Article] Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization (2011)
  • Author(s): Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
  • Journal Title: Journal of Nanoscience and Nanotechnology Volume: (掲載確定)
  • Peer Reviewed
• [Journal Article] Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization
  • Author(s): Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
  • Journal Title: Journal of Nanoscience and Nanotechnology in press
  • Peer Reviewed
• [Presentation] 瞬間結晶化による太陽電池用多結晶シリコン薄膜形成 (2011)
  • Author(s): 大平圭介
  • Organizer: 日本化学会第91春季年会
  • Place of Presentation: 神奈川(予稿発行のみ)
  • Year and Date: 2011-03-28
• [Presentation] 瞬間結晶化による太陽電池用多結晶シリコン薄膜形成 (2011)
  • Author(s): 大平圭介
  • Organizer: 日本化学会第91春季年会
  • Place of Presentation: (地震のため中止(予稿集のみ発行))
  • Year and Date: 2011-03-26
• [Presentation] フラッシュランプアニールによる非晶質シリコン膜の結晶化とその太陽電池応用 (2011)
  • Author(s): 大平圭介、松村英樹
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川(予稿発行のみ)
  • Year and Date: 2011-03-09
• [Presentation] フラッシュランプアニールによる非晶質シリコン膜の結晶化とその太陽電池応用 (2011)
  • Author(s): 大平圭介、松村英樹
  • Organizer: 2011年春季第58回応用物理学関係連合講演会
  • Place of Presentation: (招待講演 地震のため中止(予稿集のみ発行))
  • Year and Date: 2011-03-09
• [Presentation] フラッシュランプアニールによるa-Si膜の横方向結晶化 (2010)
  • Author(s): 大平圭介、石井翔平、渡村尚仁、松村英樹
  • Organizer: 第7回薄膜材料デバイス研究会
  • Place of Presentation: 奈良
• [Presentation] Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization (2010)
  • Author(s): Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
  • Organizer: Asian Conference on Nanoscience & Nanotechnology (AsiaNANO 2010)
  • Place of Presentation: Tokyo, Japan
• [Presentation] フラッシュランプアニールによるa-Si膜の横方向結晶化 (2010)
  • Author(s): 大平圭介、石井翔平、渡村尚仁、松村英樹
  • Organizer: 第7回薄膜材料デバイス研究会
  • Place of Presentation: なら100年会館(奈良)
• [Presentation] Polycrystalline Silicon Films with Nanometer-Sized Dense Fine Grains Formed by Flash-Lamp-Induced Crystallization (2010)
  • Author(s): Keisuke Ohdaira, Shohei Ishii, Naohito Tomura, Hideki Matsumura
  • Organizer: Asian Conference on Nanoscience & Nanotechnology (Asia NANO 2010)
  • Place of Presentation: Miraikan, Tokyo, Japan
• [Remarks] ホームページ等
  • URL: http://www.jaist.ac.jp/profiles/info.php?profile_id=00452
• [Remarks]
  • URL: http://www.jaist.ac.jp/profiles/info.php?profile_id=00452