| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2009: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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| Research Abstract |
Separation and recovery process of Tetramethylammonium hydroxide (TMAH), which is contained in waste solution from semiconductor or liquid crystal factories, are investigated based on adsorption technique. MCM-41 is used for the adsorbent. The adsorption properties of TMAH with MCM-41 have been investigated with batchwise adsorption. The chromatographic operation was also conducted to develop adsorptive separation process of TMAH, followed by granulation of MCM-41 with alumina-based binder.
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