Budget Amount *help |
¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2012: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2011: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2010: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
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Research Abstract |
Experimental database of material ablation caused by an intense extreme ultra-violet (EUV) light generated by laser has been constructed to study energy transport, change in material states and hydrodynamic motions. By utilizing these results, possibility of material synthesizing with expanding plumes and micro-processing was investigated as substitution of conventional pulsed laser deposition (PLD).
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