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Investigation of material ablation by high power extreme-ultra violet light (EUV)

Research Project

Project/Area Number 22340172
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Plasma science
Research InstitutionOsaka University

Principal Investigator

NISHIMURA Hiroaki  大阪大学, レーザーエネルギー学研究センター, 教授 (60135754)

Co-Investigator(Kenkyū-buntansha) FUJIOKA Shinsuke  大阪大学, レーザーエネルギー学研究センター, 准教授 (40372635)
Co-Investigator(Renkei-kenkyūsha) MURAKAMI Masakatsu  大阪大学, レーザーエネルギー学研究センター, 教授 (80192772)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2012: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Fiscal Year 2011: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2010: ¥7,410,000 (Direct Cost: ¥5,700,000、Indirect Cost: ¥1,710,000)
Keywords極端紫外(EUV)光源 / EUV アブレーション / WDM 物理 / レーザープラズマ光源 / 極端紫外(EUV)光源 / EUVアブレーション / WDM物理 / 極紫外(EUV)光源
Research Abstract

Experimental database of material ablation caused by an intense extreme ultra-violet (EUV) light generated by laser has been constructed to study energy transport, change in material states and hydrodynamic motions. By utilizing these results, possibility of material synthesizing with expanding plumes and micro-processing was investigated as substitution of conventional pulsed laser deposition (PLD).

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (24 results)

All 2013 2012 2011 2010 Other

All Journal Article (15 results) (of which Peer Reviewed: 15 results) Presentation (7 results) (of which Invited: 1 results) Remarks (2 results)

  • [Journal Article] Quantitative measurement of hard X-ray spectra from laser-driven fast ignition plasma2013

    • Author(s)
      Z. Zhang, H. Nishimura, T. Namimoto, S. Fujioka, Y. Arikawa, H. Nagatomo, M. Nakai, T. Ozaki, M. Koga, T. Johzaki, A. Sunahara, H. Chen, J. Park, G.J. Williams, H. Shiraga, S. Kojima, M. Nishikino, T. Kawachi, 他7名
    • Journal Title

      High Energy Density Physics

      Volume: Vol. 9 Pages: 435-438

    • URL

      http://dx.doi.org/10.1016/j.hedp.2013.04.001

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet Emission from Laser-Induced Plasma During Atomic Oxygen Tests2013

    • Author(s)
      M. Tagawa, K. Kishida, K. Yokota, Y. Kimoto, M. Koga, and H. Nishimura
    • Journal Title

      J. of Spacecraft and Rockets

      Volume: Vol. 50 Pages: 460-462

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Extreme Ultraviolet Emission from Laser-Induced Plasma During Atomic Oxygen Tests2013

    • Author(s)
      M. Tagawa
    • Journal Title

      Journal of Spacecraft and Rockets

      Volume: 50 Pages: 460-462

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quantitative measurement of hard x-ray spectra for high intensity laser produced plasma2012

    • Author(s)
      Z. Zhang
    • Journal Title

      Review of Scientific Instruments

      Volume: 82 Issue: 5

    • DOI

      10.1063/1.4717677

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] X-ray backlight measurement of preformed plasma by kJ-class petawatt LFEX laser2012

    • Author(s)
      S. Ohira
    • Journal Title

      Journal of Applied Physics

      Volume: 112 Issue: 6 Pages: 63301-6

    • DOI

      10.1063/1.4752872

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Two-facing Laser Pulses to Suppress Position Shift of Expanded Tin Microsphere for Extreme Ultraviolet Light Source2011

    • Author(s)
      Y. Matsuoka, S.Fujioka, H. Nishimura
    • Journal Title

      Applied Physics Express

      Volume: Vol. 4

    • URL

      http://dx.doi./10.1143/APEX.4.056201

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] X-ray spectroscopy to study energy transport of a low-Z2011

    • Author(s)
      H. Nishimura, R. Mishra, S. Ohshima, H. Nakamura,他14名
    • Journal Title

      reduced-mass target irradiated with a high intensity laser pulseHigh Energy Density Physics

      Volume: Vol. 7 Pages: 117-123

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Energy transport and isochoric heating of a low-Z, reduced-mass target irradiated with a high intensity laser pulse2011

    • Author(s)
      H. Nishimura, R. Mishra, S. Ohshima, H. Nakamura, M. Tanabe, T. Fujiwara, N. Yamamoto, S. Fujioka, 他10名
    • Journal Title

      Physics of Plasma

      Volume: Vol. 18

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Two-facing irradiation of laser pulses to suppress position shift of expanded tin microsphere for extreme ultraviolet light source2011

    • Author(s)
      松岡祐司、藤岡慎介、西村博明
    • Journal Title

      Applied Physics Express

      Volume: 4 Issue: 5 Pages: 56201-56201

    • DOI

      10.1143/apex.4.056201

    • NAID

      10028210690

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] レーザー爆縮法によるkeV黒体放射場の形成と天体模擬光電離プラズマの生成2011

    • Author(s)
      山本則正、藤岡慎介、西村博明、Salzmann David, Wang Feilu, 他7名
    • Journal Title

      J.Plasma Fusion Res

      Volume: 4 Pages: 112-117

    • NAID

      110008460981

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] X-ray spectroscopy to study energy transport of a low-Z, reduced-masstarget irradiated with a high intensity laser pulse2011

    • Author(s)
      H.Nishimura, R.Mishra, S.Ohshima, H.Nakamura, 他14名
    • Journal Title

      High Energy Density Physics

      Volume: 7 Issue: 3 Pages: 117-123

    • DOI

      10.1016/j.hedp.2011.03.002

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparative and quantitative study of neutral debris emanated from tin plasmas produced by neodymium-doped yttrium-aluminum-garnet and carbon dioxide laser pulses2011

    • Author(s)
      Y.Matsuoka, Y.Nakai, S.Fujioka, S.Maeda, M.Shimomura, Y.Shimada, A.Sunahara, H.Nislumura, M.Yoshida
    • Journal Title

      Applied Physics Letters

      Volume: 97

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Energy transport and isochoric heating of a low-Z, reduced-mass target irradiated with a high intensity laser pulse2011

    • Author(s)
      H.Nishimura, R.Mishra, S.Ohshima, H.Nakamura, M.Tanabe, T.Fujiwara, N.Yamamoto, S.Fujioka, 他10名
    • Journal Title

      Physics of Plasmas

      Volume: 18

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Efficient multi-keV x-ray generation from a high-Z targetirradiated with a clean ultra-short laser pulse2011

    • Author(s)
      Z.Zhang, M.Nishikino, H.Nishimura,T.Kawachi, 他13名
    • Journal Title

      Optics Express

      Volume: 19 Pages: 4560-4565

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Comparative and quantitative study of neutral debris emanated from tin plasmas produced by neodymium-doped yttrium-aluminum-garnet and carbon dioxide laser pulses2010

    • Author(s)
      Y. Matsuoka, Y. Nakai, S. Fujioka, S. Maeda, M. Shimomura, Y.Shimada, A. Sunahara, H. Nishimura, and M. Yoshida
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol. 97

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Presentation] レーザー生成 6.7nm 光源用ガドリニウムターゲットの供給法に関する研究2012

    • Author(s)
      鵜篭照之、藤岡慎介、西村博明
    • Organizer
      応用物理学会
    • Place of Presentation
      愛媛大学
    • Year and Date
      2012-09-11
    • Related Report
      2012 Final Research Report
  • [Presentation] Optimization of extreme ultraviolet (EUV) pulses emitted light source for ablation studies2012

    • Author(s)
      羽根一嘉、藤岡慎介、張鉄竜、他 4 名
    • Organizer
      応用物理学会連合講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-16
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] Quantitative measurement of hard x-ray spectra from laser-driven fast ignition plasma2012

    • Author(s)
      H. Nishimura
    • Organizer
      International Workshop on Radiative Properties of Hot Dense Matter
    • Place of Presentation
      Santa Barbara
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] プレパルス対向照射による EUV 光源ターゲットの形状制御・移動抑制2011

    • Author(s)
      松岡祐司 , 藤岡慎介 , 羽根一嘉 , 長畑学, 島田義則, 西村博明
    • Organizer
      レーザー学会学術講演会第31回年次大会
    • Place of Presentation
      電気通信大学
    • Year and Date
      2011-01-09
    • Related Report
      2012 Final Research Report
  • [Presentation] プレパルス対向照射によるEUV光源ターゲットの形状制御・移動抑制2011

    • Author(s)
      松岡祐司, 藤岡慎介, 羽根一嘉,長畑学, 島田義則, 西村博明
    • Organizer
      レーザー学会学術講演会第31回年次大会
    • Place of Presentation
      電気通信大学
    • Year and Date
      2011-01-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] Conversion efficiency of 6.X nm Emitted from Nd:YAG Laser Produced Plasma2011

    • Author(s)
      H. Nishimura, M. Miyake, T. Ugomori, M. Yoshida, H. Azechi
    • Organizer
      2011 International Workshop on EUV and Soft X-ray Sources
    • Place of Presentation
      ダブリン(アイルランド)
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] レーザー生成6.7nm光源用ガドリニウムターゲットの供給法に関する研究

    • Author(s)
      鵜篭照之
    • Organizer
      応用物理学会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Annual Research Report
  • [Remarks] ホームページ

    • URL

      http://www.ile.osaka-u.ac.jp/jp/groups/radiation/pxs.html

    • Related Report
      2012 Final Research Report
  • [Remarks] 大阪大学レーザーエネルギー学研究センター/グループ一覧/光量子放射学研究部門/プラズマX線分光

    • URL

      http://www.ile.osaka-u.ac.jp/jp/groups/radiation/pxs.html

    • Related Report
      2012 Annual Research Report

URL: 

Published: 2010-08-23   Modified: 2019-07-29  

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