| Project/Area Number |
22360148
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | NTT Basic Research Laboratories |
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Principal Investigator |
SHIBATA Hiroyuki 日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主任研究員 (60393732)
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| Co-Investigator(Renkei-kenkyūsha) |
TAKESUE Hiroki 日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主任研究員 (60393790)
HONJO Toshimori 日本電信電話株式会社NTT物性科学基礎研究所, 量子光物性研究部, 主任研究員 (70393791)
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| Project Period (FY) |
2010 – 2012
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| Project Status |
Completed (Fiscal Year 2012)
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| Budget Amount *help |
¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000)
Fiscal Year 2012: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2010: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
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| Keywords | 光デバイス / 光回路 / 二硼化マグネシウム / 単一光子検出器 / ナノ細線 / 超伝導材料 / 保護膜 / 超薄膜 / MBE / 赤外線 / 超伝導材料・素子 / リフトオフ |
|---|
| Research Abstract |
We have developed superconducting single-photon detector (SSPD) using MgB_2 nanowire. The SSPD was made of 10-nm-thick and 135-nm-wide meander pattern of MgB_2, and can detect single-photon between 405 to 1560 nm wavelengths. New nano-fabrication process of MgB_2 based on lift-off of inorganic mask has been developed. Rapid annealing process has been also developed for improving MgB_2 film qualities. We have also developed in-situ AlN passivation process to protect MgB_2 surface from oxidation.
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