| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2011: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
|
|---|
| Research Abstract |
The study on ultra-precise positioning moves focus from nano positioning to sub-nano positioning. In this study, we fabricated the slight movement stage driven by the pneumatic bellows for ultra precise positioning, covering the shortcomings of piezoelectric element. To increase positioning accuracy of this stage, the low flow noise type servo vale, which reduce the small pressure disturbance by using clearance flow, and the control method driving this stage were developed. Finally, we realized ultimate level of sub-nano positioning.
|
