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Amorphous structures on metal thin film with a surface of periodicself-organized nanostructures induced by femtosecond laser processing

Research Project

Project/Area Number 22560720
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionKyoto University

Principal Investigator

HASHIDA Masaki  京都大学, 化学研究所, 准教授 (50291034)

Co-Investigator(Renkei-kenkyūsha) SAKABE Shuji  京都大学, 化学研究所, 教授 (50153903)
TOKITA Shigeki  京都大学, 化学研究所, 助教 (20456825)
OGAWA Tetsuya  京都大学, 化学研究所, 助教 (40224109)
NEMOTO Takashi  京都大学, 化学研究所, 助教 (20293946)
Project Period (FY) 2010 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Keywords結晶・組成制御 / ナノ周期構造 / 非晶質 / 金属 / フェムト秒レーザー / フェムト秒レーザー加工 / 非晶質金属薄膜 / 高エネルギー金属イオン注入
Research Abstract

The precise measurement for crystaldegree was performed on cupper thin film with transmission electron microscope. We have analyzed the electron diffraction patterns in the laser fluence of 0.08 -0.64 J/cm2where the grating structure is formed on thin films. It is found that the crystal structures are transformed depending on laser fluence; polycrystalline structures at <0.2 J/cm2, amorphous at ~ 0.23 J/cm2, and polycrystalline structures again at > 0.35 J/cm2. The mechanism of crystal structure transformation by femtosecond laser pulses is conceptually proposed, that is induced by the injection of energetic ions generated in the process of self-formation of periodic structures.

Report

(4 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • Research Products

    (30 results)

All 2012 2011 2010 Other

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (17 results) (of which Invited: 1 results) Book (3 results) Remarks (1 results)

  • [Journal Article] Nonthermal emission ofenergetic ions from a metal surfaceirradiated by extremely low fluencefemtosecond laser pulses2012

    • Author(s)
      Y. Miyasaka, M. Hashida, Y. Ikuta, K.Otani, S. Tokita, and S.Sakabe
    • Journal Title

      PhysicalReview B

      Volume: Vol.86

    • URL

      http://prb.aps.org/pdf/PRB/v86/i7/e075431

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Periodic nano-gratingstructures produced by femtosecondlaser pulses for metals with low- andhigh-melting points2012

    • Author(s)
      M. Hashida, Y. Miyasaka, Y. Ikuta, K.Otani, S. Tokita, and S.Sakabe
    • Journal Title

      Journal of LaserMicro/Nanoengineering

      Volume: Vol.7,No.2 Pages: 194-197

    • URL

      http://www.jlps.gr.jp/jlmn/upload/5372fba805aa9aaa30daf185bed3d222.pdf

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Periodic Nano-Grating Structures Produced by Femtosecond Laser Pulses for Metals with Low- and High-Melting Points2012

    • Author(s)
      Masaki Hashida
    • Journal Title

      Journal of Laser Micro/Nanoengineering

      Volume: 7 Pages: 194-197

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nonthermal emission of energetic ions from a metal surface irradiated by extremely low-fluence femtosecond laser pulses2012

    • Author(s)
      Yasuhiro Miyasaka
    • Journal Title

      Physical Review B

      Volume: 86 Issue: 7 Pages: 75431-75431

    • DOI

      10.1103/physrevb.86.075431

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Crystalstructures on a copper thin film with asurface of periodic self-organizednanostructures induced by femtosecondlaser pulses2011

    • Author(s)
      M.Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita, and S. Sakabe
    • Journal Title

      Physical Review B

      Volume: Vol.83

    • URL

      http://prb.aps.org/pdf/PRB/v83/i23/e235413

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Crystal structures on a copper thin film with a surface of periodic self-organized nanostructures induced by femtosecond laser pulses2011

    • Author(s)
      M.Hashida, et al.
    • Journal Title

      Physical Review B

      Volume: 83 Issue: 23

    • DOI

      10.1103/physrevb.83.235413

    • NAID

      120003338826

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Laserfluence dependence of periodic gratingstructures formed on metal surfacesunder femtosecond laser pulseirradiation2010

    • Author(s)
      K. Okamuro, M. Hashida, Y. Miyasaka, Y.Ikuta, S. Tokita, and S. Sakabe
    • Journal Title

      Physical Review B

      Volume: Vol.82

    • URL

      http://prb.aps.org/pdf/PRB/v82/i16/e165417

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation2010

    • Author(s)
      K.Okamuro, M.Hashida, et al.
    • Journal Title

      Physical Review B

      Volume: 82 Issue: 16

    • DOI

      10.1103/physrevb.82.165417

    • NAID

      120003338827

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation2010

    • Author(s)
      Kiminori Okamuro, Masaki Hashida, Yasuhiro Miyasaka, Yoshinobu Ikuta, Shigeki Tokita, Shuji_ Sakabe
    • Journal Title

      Physical Review B

      Volume: 82 Pages: 165417-165417

    • NAID

      120003338827

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Presentation] 短パルスレーザーナノレーザーアブレーションによる金属の微細構造形成2012

    • Author(s)
      橋田昌樹,宮坂泰弘,清水雅弘,時田茂樹,阪部周二
    • Organizer
      第78回レーザー加工学会講演会
    • Place of Presentation
      アクトシティー浜松コングレスセンター
    • Year and Date
      2012-12-14
    • Related Report
      2012 Final Research Report
  • [Presentation] Periodic Grating StructuresSelf-formed by Femtosecond LaserAblation for Metals2012

    • Author(s)
      M. Hashida, M. Miyasaka, Y. Ikuta, T.Ogata, H. Sakagami, S. Tokita, and S.Sakabe
    • Organizer
      13th InternationalSymposium on Laser PrecisionMicrofabrication (LPM2012)
    • Place of Presentation
      Washington,DC
    • Year and Date
      2012-06-15
    • Related Report
      2012 Final Research Report
  • [Presentation] Mechanism of femtosecond lasernano-ablation for metals2012

    • Author(s)
      M. Hashida, M. Miyasaka, M. Shimizu, T.Ogata, H. Sakagami, S. Tokita, and S.Sakabe
    • Organizer
      AdvancedLaser technologies(ALT2012)
    • Place of Presentation
      Thun Switzerland
    • Related Report
      2012 Final Research Report
  • [Presentation] Periodic grating structures onmetals induced by femtosecond laserpulses2012

    • Author(s)
      M. Hashida, M. Miyasaka, Y. Ikuta, T.Ogata, H. Sakagami, S. Tokita, and S.Sakabe
    • Organizer
      The 8thAsia Pacific laserSymposium (APLS2012)
    • Place of Presentation
      Huangshan, China
    • Related Report
      2012 Final Research Report
  • [Presentation] Periodic grating structures on metal induced by femtosecond laser pulses2012

    • Author(s)
      Masaki Hashida
    • Organizer
      The 8th Asia Pacific Laser Symposium (APLS2012)
    • Place of Presentation
      黄山・中国
    • Related Report
      2012 Annual Research Report
  • [Presentation] Periodic Grating Structures Self- ‐formed by Femtosecond Laser Aablation for Metals2012

    • Author(s)
      Masaki Hashida
    • Organizer
      13th International Symposium on Laser Precision Microfabrication (LPM2012)
    • Place of Presentation
      Washington,DC・USA
    • Related Report
      2012 Annual Research Report
  • [Presentation] MECHANISM OF FEMTOSECOND LASER NANO-ABLATION FOR METALS2012

    • Author(s)
      Masaki Hashida
    • Organizer
      The 20th International Conference on Advanced Laser Technologies (ALT'12)
    • Place of Presentation
      Thun・ Switzerland
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Mechanism forcrystal structure transformation onmetal surface by femtosecond laserpulses2011

    • Author(s)
      M. Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita and S. Sakabe
    • Organizer
      11th International Conferenceon Laser Ablation(COLA2011)
    • Place of Presentation
      Mexico
    • Year and Date
      2011-11-14
    • Related Report
      2012 Final Research Report
  • [Presentation] フェムト秒レーザー誘起ナノ周期構造の結晶構造2011

    • Author(s)
      橋田昌樹,生田美延,宮坂泰弘,時田茂樹,阪部周二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学
    • Year and Date
      2011-08-31
    • Related Report
      2012 Final Research Report
  • [Presentation] Periodic nano-grating structures produced byfemtosecond laser pulses for metals withlow- and high-melting points2011

    • Author(s)
      M. Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita and S. Sakabe
    • Organizer
      International Symposium on LaserPrecision Microfabrication (LPM2011)
    • Place of Presentation
      Takamatsu
    • Year and Date
      2011-06-09
    • Related Report
      2012 Final Research Report
  • [Presentation] Dependence ofthe periodic structure interspaces onlaser fluence for metals irradiated withfemtosecond laser2011

    • Author(s)
      M. Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita, and S. Sakabe
    • Organizer
      Conference onlasers and Electro Optics 2011(CLEO2011)
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-03
    • Related Report
      2012 Final Research Report
  • [Presentation] Dependence of the periodic structure interspaces on laser fluence for metals irradiated with femtosecond laser2011

    • Author(s)
      M.Hashida, et.al.
    • Organizer
      Conference on lasers and Electro Optics 2011 (CLEO2011)
    • Place of Presentation
      Baltimore, USA(招待講演)
    • Year and Date
      2011-05-03
    • Related Report
      2011 Annual Research Report
  • [Presentation] フェムト秒レーザー照射による金属薄膜の結晶構造観察II2011

    • Author(s)
      橋田昌樹,生田美延,宮坂泰弘,時田茂樹,阪部周二
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-26
    • Related Report
      2012 Final Research Report
  • [Presentation] フェムト秒レーザー照射による金属薄膜の結晶構造観察II2011

    • Author(s)
      橋田昌樹, 宮坂泰弘, 生田美延, 時田茂樹, 阪部周二
    • Organizer
      2011年春季第58回応用物理学関係連合講演会(東北関東大震災のため講演会は中止。しかし、予稿集が発行されている事から発表は成立したものとみなされている)
    • Place of Presentation
      神奈川工科大学・厚木市
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Periodic grating structures self-formed on metal surfaces under femtosecond laser pulse irradiation2010

    • Author(s)
      Masaki Hashida, Shigeki Tokita, Shuji Sakabe
    • Organizer
      JSPS-CAS Core University Program Seminar, Japan-China Joint Seminar on laser Plasma and High Energy Density Physics
    • Place of Presentation
      上海交通大学・上海(中国)
    • Year and Date
      2010-10-16
    • Related Report
      2010 Annual Research Report
  • [Presentation] フェムト秒レーザー照射による金属表面周期構造自己形成機構2010

    • Author(s)
      橋田昌樹,生田美延,宮坂泰弘,時田茂樹,阪部周二
    • Organizer
      日本物理学会 2010 年秋季大会
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2010-09-26
    • Related Report
      2012 Final Research Report
  • [Presentation] フェムト秒レーザーによる金属表面周期構造自己形成機構の解明IV~各種金属に対する周期構造間隔のフルーエンス依存性~2010

    • Author(s)
      橋田昌樹,岡室皇紀,生田美延,宮坂泰弘,時田茂樹,阪部周二
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Related Report
      2012 Final Research Report
  • [Book] レーザーと化学2012

    • Author(s)
      日本化学会
    • Publisher
      共立出版
    • Related Report
      2012 Final Research Report
  • [Book] 先端固体レーザー2012

    • Author(s)
      神成文彦、橋田昌樹, 他5名
    • Total Pages
      524
    • Publisher
      オーム社
    • Related Report
      2011 Annual Research Report
  • [Book] 先端固体レーザー2011

    • Author(s)
      (社)レーザー学会
    • Publisher
      オーム社
    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://laser.kuicr.kyoto-u.ac.jp/index.html

    • Related Report
      2012 Final Research Report

URL: 

Published: 2010-08-23   Modified: 2019-07-29  

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