Amorphous structures on metal thin film with a surface of periodicself-organized nanostructures induced by femtosecond laser processing

• Project/Area Number: 22560720
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Material processing/treatments
• Research Institution: Kyoto University
• Principal Investigator: HASHIDA Masaki 京都大学, 化学研究所, 准教授 (50291034)
• Co-Investigator(Renkei-kenkyūsha): SAKABE Shuji 京都大学, 化学研究所, 教授 (50153903) ; TOKITA Shigeki 京都大学, 化学研究所, 助教 (20456825) ; OGAWA Tetsuya 京都大学, 化学研究所, 助教 (40224109) ; NEMOTO Takashi 京都大学, 化学研究所, 助教 (20293946)
• Project Period (FY): 2010 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2012: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2011: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2010: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
• Keywords: 結晶・組成制御 / ナノ周期構造 / 非晶質 / 金属 / フェムト秒レーザー / フェムト秒レーザー加工 / 非晶質金属薄膜 / 高エネルギー金属イオン注入

Research Abstract

The precise measurement for crystaldegree was performed on cupper thin film with transmission electron microscope. We have analyzed the electron diffraction patterns in the laser fluence of 0.08 -0.64 J/cm2where the grating structure is formed on thin films. It is found that the crystal structures are transformed depending on laser fluence; polycrystalline structures at <0.2 J/cm2, amorphous at ~ 0.23 J/cm2, and polycrystalline structures again at > 0.35 J/cm2. The mechanism of crystal structure transformation by femtosecond laser pulses is conceptually proposed, that is induced by the injection of energetic ions generated in the process of self-formation of periodic structures.

Research Products

• [Journal Article] Nonthermal emission ofenergetic ions from a metal surfaceirradiated by extremely low fluencefemtosecond laser pulses (2012)
  • Author(s): Y. Miyasaka, M. Hashida, Y. Ikuta, K.Otani, S. Tokita, and S.Sakabe
  • Journal Title: PhysicalReview B Volume: Vol.86
  • URL: http://prb.aps.org/pdf/PRB/v86/i7/e075431
  • Peer Reviewed
• [Journal Article] Periodic nano-gratingstructures produced by femtosecondlaser pulses for metals with low- andhigh-melting points (2012)
  • Author(s): M. Hashida, Y. Miyasaka, Y. Ikuta, K.Otani, S. Tokita, and S.Sakabe
  • Journal Title: Journal of LaserMicro/Nanoengineering Volume: Vol.7,No.2 Pages: 194-197
  • URL: http://www.jlps.gr.jp/jlmn/upload/5372fba805aa9aaa30daf185bed3d222.pdf
  • Peer Reviewed
• [Journal Article] Periodic Nano-Grating Structures Produced by Femtosecond Laser Pulses for Metals with Low- and High-Melting Points (2012)
  • Author(s): Masaki Hashida
  • Journal Title: Journal of Laser Micro/Nanoengineering Volume: 7 Pages: 194-197
  • Peer Reviewed
• [Journal Article] Nonthermal emission of energetic ions from a metal surface irradiated by extremely low-fluence femtosecond laser pulses (2012)
  • Author(s): Yasuhiro Miyasaka
  • Journal Title: Physical Review B Volume: 86 Issue: 7 Pages: 75431-75431
  • DOI: 10.1103/physrevb.86.075431
  • Peer Reviewed
• [Journal Article] Crystalstructures on a copper thin film with asurface of periodic self-organizednanostructures induced by femtosecondlaser pulses (2011)
  • Author(s): M.Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita, and S. Sakabe
  • Journal Title: Physical Review B Volume: Vol.83
  • URL: http://prb.aps.org/pdf/PRB/v83/i23/e235413
  • Peer Reviewed
• [Journal Article] Crystal structures on a copper thin film with a surface of periodic self-organized nanostructures induced by femtosecond laser pulses (2011)
  • Author(s): M.Hashida, et al.
  • Journal Title: Physical Review B Volume: 83 Issue: 23
  • DOI: 10.1103/physrevb.83.235413
  • NAID: 120003338826
  • Peer Reviewed
• [Journal Article] Laserfluence dependence of periodic gratingstructures formed on metal surfacesunder femtosecond laser pulseirradiation (2010)
  • Author(s): K. Okamuro, M. Hashida, Y. Miyasaka, Y.Ikuta, S. Tokita, and S. Sakabe
  • Journal Title: Physical Review B Volume: Vol.82
  • URL: http://prb.aps.org/pdf/PRB/v82/i16/e165417
  • Peer Reviewed
• [Journal Article] Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation (2010)
  • Author(s): K.Okamuro, M.Hashida, et al.
  • Journal Title: Physical Review B Volume: 82 Issue: 16
  • DOI: 10.1103/physrevb.82.165417
  • NAID: 120003338827
  • Peer Reviewed
• [Journal Article] Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation (2010)
  • Author(s): Kiminori Okamuro, Masaki Hashida, Yasuhiro Miyasaka, Yoshinobu Ikuta, Shigeki Tokita, Shuji_ Sakabe
  • Journal Title: Physical Review B Volume: 82 Pages: 165417-165417
  • NAID: 120003338827
  • Peer Reviewed
• [Presentation] 短パルスレーザーナノレーザーアブレーションによる金属の微細構造形成 (2012)
  • Author(s): 橋田昌樹,宮坂泰弘,清水雅弘,時田茂樹,阪部周二
  • Organizer: 第78回レーザー加工学会講演会
  • Place of Presentation: アクトシティー浜松コングレスセンター
  • Year and Date: 2012-12-14
• [Presentation] Periodic Grating StructuresSelf-formed by Femtosecond LaserAblation for Metals (2012)
  • Author(s): M. Hashida, M. Miyasaka, Y. Ikuta, T.Ogata, H. Sakagami, S. Tokita, and S.Sakabe
  • Organizer: 13th InternationalSymposium on Laser PrecisionMicrofabrication (LPM2012)
  • Place of Presentation: Washington,DC
  • Year and Date: 2012-06-15
• [Presentation] Mechanism of femtosecond lasernano-ablation for metals (2012)
  • Author(s): M. Hashida, M. Miyasaka, M. Shimizu, T.Ogata, H. Sakagami, S. Tokita, and S.Sakabe
  • Organizer: AdvancedLaser technologies(ALT2012)
  • Place of Presentation: Thun Switzerland
• [Presentation] Periodic grating structures onmetals induced by femtosecond laserpulses (2012)
  • Author(s): M. Hashida, M. Miyasaka, Y. Ikuta, T.Ogata, H. Sakagami, S. Tokita, and S.Sakabe
  • Organizer: The 8thAsia Pacific laserSymposium (APLS2012)
  • Place of Presentation: Huangshan, China
• [Presentation] Periodic grating structures on metal induced by femtosecond laser pulses (2012)
  • Author(s): Masaki Hashida
  • Organizer: The 8th Asia Pacific Laser Symposium (APLS2012)
  • Place of Presentation: 黄山・中国
• [Presentation] Periodic Grating Structures Self- ‐formed by Femtosecond Laser Aablation for Metals (2012)
  • Author(s): Masaki Hashida
  • Organizer: 13th International Symposium on Laser Precision Microfabrication (LPM2012)
  • Place of Presentation: Washington,DC・USA
• [Presentation] MECHANISM OF FEMTOSECOND LASER NANO-ABLATION FOR METALS (2012)
  • Author(s): Masaki Hashida
  • Organizer: The 20th International Conference on Advanced Laser Technologies (ALT'12)
  • Place of Presentation: Thun・ Switzerland
  • Invited
• [Presentation] Mechanism forcrystal structure transformation onmetal surface by femtosecond laserpulses (2011)
  • Author(s): M. Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita and S. Sakabe
  • Organizer: 11th International Conferenceon Laser Ablation(COLA2011)
  • Place of Presentation: Mexico
  • Year and Date: 2011-11-14
• [Presentation] フェムト秒レーザー誘起ナノ周期構造の結晶構造 (2011)
  • Author(s): 橋田昌樹,生田美延,宮坂泰弘,時田茂樹,阪部周二
  • Organizer: 第72回応用物理学会学術講演会
  • Place of Presentation: 山形大学
  • Year and Date: 2011-08-31
• [Presentation] Periodic nano-grating structures produced byfemtosecond laser pulses for metals withlow- and high-melting points (2011)
  • Author(s): M. Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita and S. Sakabe
  • Organizer: International Symposium on LaserPrecision Microfabrication (LPM2011)
  • Place of Presentation: Takamatsu
  • Year and Date: 2011-06-09
• [Presentation] Dependence ofthe periodic structure interspaces onlaser fluence for metals irradiated withfemtosecond laser (2011)
  • Author(s): M. Hashida, Y. Miyasaka, Y. Ikuta, S.Tokita, and S. Sakabe
  • Organizer: Conference onlasers and Electro Optics 2011(CLEO2011)
  • Place of Presentation: Baltimore, USA
  • Year and Date: 2011-05-03
• [Presentation] Dependence of the periodic structure interspaces on laser fluence for metals irradiated with femtosecond laser (2011)
  • Author(s): M.Hashida, et.al.
  • Organizer: Conference on lasers and Electro Optics 2011 (CLEO2011)
  • Place of Presentation: Baltimore, USA(招待講演)
  • Year and Date: 2011-05-03
• [Presentation] フェムト秒レーザー照射による金属薄膜の結晶構造観察II (2011)
  • Author(s): 橋田昌樹,生田美延,宮坂泰弘,時田茂樹,阪部周二
  • Organizer: 第58回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2011-03-26
• [Presentation] フェムト秒レーザー照射による金属薄膜の結晶構造観察II (2011)
  • Author(s): 橋田昌樹, 宮坂泰弘, 生田美延, 時田茂樹, 阪部周二
  • Organizer: 2011年春季第58回応用物理学関係連合講演会(東北関東大震災のため講演会は中止。しかし、予稿集が発行されている事から発表は成立したものとみなされている)
  • Place of Presentation: 神奈川工科大学・厚木市
  • Year and Date: 2011-03-26
• [Presentation] Periodic grating structures self-formed on metal surfaces under femtosecond laser pulse irradiation (2010)
  • Author(s): Masaki Hashida, Shigeki Tokita, Shuji Sakabe
  • Organizer: JSPS-CAS Core University Program Seminar, Japan-China Joint Seminar on laser Plasma and High Energy Density Physics
  • Place of Presentation: 上海交通大学・上海(中国)
  • Year and Date: 2010-10-16
• [Presentation] フェムト秒レーザー照射による金属表面周期構造自己形成機構 (2010)
  • Author(s): 橋田昌樹,生田美延,宮坂泰弘,時田茂樹,阪部周二
  • Organizer: 日本物理学会 2010 年秋季大会
  • Place of Presentation: 大阪府立大学
  • Year and Date: 2010-09-26
• [Presentation] フェムト秒レーザーによる金属表面周期構造自己形成機構の解明IV～各種金属に対する周期構造間隔のフルーエンス依存性～ (2010)
  • Author(s): 橋田昌樹,岡室皇紀,生田美延,宮坂泰弘,時田茂樹,阪部周二
  • Organizer: 第71回応用物理学会学術講演会
  • Place of Presentation: 長崎大学
  • Year and Date: 2010-09-14
• [Book] レーザーと化学 (2012)
  • Author(s): 日本化学会
  • Publisher: 共立出版
• [Book] 先端固体レーザー (2012)
  • Author(s): 神成文彦、橋田昌樹, 他5名
  • Total Pages: 524
  • Publisher: オーム社
• [Book] 先端固体レーザー (2011)
  • Author(s): (社)レーザー学会
  • Publisher: オーム社
• [Remarks]
  • URL: http://laser.kuicr.kyoto-u.ac.jp/index.html