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Hybrid actuator-driven ultraprecision 2-DOF rotary table system

Research Project

Project/Area Number 22686016
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionTokyo Institute of Technology

Principal Investigator

YOSHIOKA Hayato  東京工業大学, 精密工学研究所, 准教授 (90361758)

Project Period (FY) 2010 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥25,480,000 (Direct Cost: ¥19,600,000、Indirect Cost: ¥5,880,000)
Fiscal Year 2011: ¥13,130,000 (Direct Cost: ¥10,100,000、Indirect Cost: ¥3,030,000)
Fiscal Year 2010: ¥12,350,000 (Direct Cost: ¥9,500,000、Indirect Cost: ¥2,850,000)
Keywordsハイブリッド駆動 / 空気圧アクチュエータ / 電磁アクチュエータ / 回転テーブル / 超精密位置決め / 空気静圧軸受 / 静圧軸受
Research Abstract

In order to realize an ultraprecision 2-DOF rotary table system, key technologies for the table system has been proposed and evaluated in this study. A hybrid driving mechanism which can achieve high torque, quick response, and low heat generation, a torque ripple-free electric motor for precise rotation, and a high stiff and high damping hydrostatic bearing system were newly developed, and their basic characteristics were clarified.

Report

(3 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • Research Products

    (4 results)

All 2012 2011

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (3 results)

  • [Journal Article] A Newly Developed Ripple-Free Precision Toroidal Type Motor2012

    • Author(s)
      Hayato Yoshioka, Yugo Kurisaki, Hiroshi Sawano, Hidenori Shinno
    • Journal Title

      CIRP Annals-Manufacturing Technology

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Presentation] A newly developed toroidal type torque ripple-free precision motor2011

    • Author(s)
      Hayato Yoshioka, Yugo Kurisaki, Hiroshi Sawano, Hidenori Shinno
    • Organizer
      15th International Conference on Mechatronics Technology
    • Place of Presentation
      Melbourne, Australia
    • Year and Date
      2011-12-01
    • Related Report
      2011 Annual Research Report 2011 Final Research Report
  • [Presentation] A hybrid actuator-driven compact tilting motion table system for multi-axis ultraprecision machine tool, 11th International Conference of the euspen2011

    • Author(s)
      Mamoru Hayashi, Hayato Yoshioka, Hidenori Shinno, Hiroshi Sawano
    • Place of Presentation
      Lake Como, Italy
    • Year and Date
      2011-05-25
    • Related Report
      2011 Final Research Report
  • [Presentation] A hybrid actuator-driven compact tilting motion table system for multi-axis ultraprecision machine tool2011

    • Author(s)
      Mamoru Hayashi, Hayato Yoshioka, Hidenori Shinno, Hiroshi Sawano
    • Organizer
      11th International Conference of the European Society for Precision Engineering and Nanotechnology
    • Place of Presentation
      Lake Como, Italy
    • Year and Date
      2011-05-25
    • Related Report
      2011 Annual Research Report

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Published: 2010-08-23   Modified: 2016-04-21  

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