Nanoscale measurement of cylinder surfaces of tribo-elements using a laser scanning interferometry with a wide field of view
| Project/Area Number |
23360075
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Niigata University |
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Principal Investigator |
NITTA ISAMI 新潟大学, 自然科学系, 教授 (30159082)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2013: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2011: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
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| Keywords | トライボロジー / 機械要素 / 円筒表面 / 欠陥検査 / レーザ干渉 / レーザ走査 / ナノレベル / シュリンクフィッタ / 表面欠陥検査 |
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| Research Abstract |
In a previous study, we have developed a new type laser microscope with a wide field of vew. There is a trade-off between the resolution and the field of view. We sacrificed the resolution of the laser microscope in the depth direction to get the wide field of view. To achieve a nano-level measurement of the whole shape of a cylindrical object, two-beam interferometry was introduced to the laser microscope with wide field of view. Among the various forms of interferometry, two-beam interferometry is especially simple and straightforward in principle, as well as practice, and is therefore utilized for a broad range of applications. In this work, we have acquired interference images of the whole cylinder surface with the aid of a reference flat. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the surface profile of the cylinder on a nano scale.
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Report
(4 results)
Research Products
(8 results)
