| Budget Amount *help |
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2013: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2011: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
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| Research Abstract |
In a previous study, we have developed a new type laser microscope with a wide field of vew. There is a trade-off between the resolution and the field of view. We sacrificed the resolution of the laser microscope in the depth direction to get the wide field of view. To achieve a nano-level measurement of the whole shape of a cylindrical object, two-beam interferometry was introduced to the laser microscope with wide field of view. Among the various forms of interferometry, two-beam interferometry is especially simple and straightforward in principle, as well as practice, and is therefore utilized for a broad range of applications. In this work, we have acquired interference images of the whole cylinder surface with the aid of a reference flat. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the surface profile of the cylinder on a nano scale.
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