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Ultra-precision machine system feedback-controlled with measurement device for six-degree-of-freedom relative motions between tool and workpiece

Research Project

Project/Area Number 23360110
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionShizuoka University

Principal Investigator

OIWA Takaaki  静岡大学, 工学研究科, 教授 (00223727)

Co-Investigator(Kenkyū-buntansha) ASAMA Junichi  静岡大学, 工学研究科, 准教授 (70447522)
寺林 賢司  静岡大学, 工学部, 助教 (20509161)
Project Period (FY) 2011-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000)
Fiscal Year 2014: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2012: ¥8,450,000 (Direct Cost: ¥6,500,000、Indirect Cost: ¥1,950,000)
Fiscal Year 2011: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Keywords精密機械システム / 6自由度運動誤差補正 / パラレルメカニズム / 工作機械 / 超精密加工機 / 三次元座標測定機 / 6自由度運動誤差補正 / 超精密機械システム
Outline of Final Research Achievements

This research aims to realize a feedback-controlled precision machine system based on a hexapod-type measurement device for six-degree-of-freedom relative motions between the tool and work piece. The hexpod consisting of six extensible struts accurately measures the motions for the feedback control of the machine regardless with temperature fluctuation and external forces because each strut has a compensation device for elastic and thermal deformations of the joints and links. First, an improved strut equipped with a laser interferometer length measurement system has been developed instead of the strut with a linear encoder. Second, a test apparatus has been improved to shorten a dead path of the interferometer system to reduce the influence of temperature and air pressure fluctuation. Finally, the research deals with kinematic parameter identification based on distance errors among spheres on a three-dimensional ball plate calibrated by a coordinate measurement machine.

Report

(5 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (27 results)

All 2014 2013 2012 Other

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (16 results) (of which Invited: 2 results) Remarks (6 results)

  • [Journal Article] Positioning error improvement based on ultrasonic oscillation for a linear motion rolling bearing during sinusoidal motion2014

    • Author(s)
      Hashim Syamsul, Takaaki Oiwa, Toshiharu Tanaka, Junichi Asama
    • Journal Title

      Precision Engineering

      Volume: 38 Issue: 3 Pages: 617-627

    • DOI

      10.1016/j.precisioneng.2014.02.012

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Calibration Method for a Six-degree-of-freedom Parallel Manipulator with a Redundant Passive Chain2013

    • Author(s)
      T. Oiwa and H. Ikuma
    • Journal Title

      Mechanisms and Machine Science

      Volume: 17 Pages: 349-356

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] パラレルメカニズム形機械のフレームの変形補正に関する研究(アッベの原理に基づく補正装置の改良)2013

    • Author(s)
      大岩 孝彰,寺澤 祐哉
    • Journal Title

      日本機械学会論文集C編

      Volume: 79-808 Pages: 5103-5116

    • NAID

      130003386560

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Calibration Method for a Three-degrees-of-freedom Parallel Manipulator with a Redundant Passive Chain2012

    • Author(s)
      Takaaki Oiwa
    • Journal Title

      Applied Mechanics and Materials

      Volume: 162 Pages: 171-178

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Calibration Method for a Three-degrees-of-freedom Parallel2012

    • Author(s)
      Takaaki Oiwa, Harunaho Daido, Junichi Asama
    • Journal Title

      Applied Mechanics and Materials

      Volume: 162 Pages: 171-178

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Presentation] Relationship between Wear Quantity and Friction Torque inApplying Ultrasonic Oscillation on Nylon Resin Nut2014

    • Author(s)
      Yuta Mizuno, Takahiro Niimi, Toshiharu Tanaka and Takaaki Oiwa
    • Organizer
      The 6th International Conference on Positioning Technology ICPT2014
    • Place of Presentation
      Kitakyushu International Conference Center, Kitakyushu-shi, Fukuoka, Japan
    • Year and Date
      2014-11-18 – 2014-11-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation on accuracy improvement in hexapod-type measurement device for six degreeof-freedom relative motions2014

    • Author(s)
      Kazuki Kobayashi, Takaaki Oiwa, Junichi Asami and Kenji Terabayashi
    • Organizer
      The 6th International Conference on Positioning Technology ICPT2014
    • Place of Presentation
      Kitakyushu International Conference Center, Kitakyushu-shi, Fukuoka, Japan
    • Year and Date
      2014-11-18 – 2014-11-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] Kinematic calibration for three-degree of freedom parallel manipulator based on doubleended ball bar and touch probe2014

    • Author(s)
      Keita Otaki, Takaaki Oiwa, Junichi Asami and Kenji Terabayashi
    • Organizer
      The 6th International Conference on Positioning Technology ICPT2014
    • Place of Presentation
      Kitakyushu International Conference Center, Kitakyushu-shi, Fukuoka, Japan
    • Year and Date
      2014-11-18 – 2014-11-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] Sensitivity improvement in three-dimensional touch trigger probe system based on fiber optic displacement sensors2014

    • Author(s)
      Takuro Ishino, Takaaki Oiwa, Junichi Asami and Kenji Terabayashi
    • Organizer
      The 6th International Conference on Positioning Technology ICPT2014
    • Place of Presentation
      Kitakyushu International Conference Center, Kitakyushu-shi, Fukuoka, Japan
    • Year and Date
      2014-11-18 – 2014-11-21
    • Related Report
      2014 Annual Research Report
  • [Presentation] Machine design and error compensation for precise machine system2014

    • Author(s)
      Takaaki OIwa
    • Organizer
      IFToMM Summer School on Micro- and Macro Mechanisms Design in Mechatronics Robotics 2014
    • Place of Presentation
      University Politehnica Timisoara, Romania
    • Year and Date
      2014-06-13 – 2014-06-20
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 6自由度パラレルメカニズムの校正に関する研究(第12報)―位置誤差を用いた校正シミュレーション―2014

    • Author(s)
      舩戸慶彦,大岩孝彰,寺林賢司,朝間淳一
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学本郷キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] パラレルメカニズムを用いた高速・高精度3次元座標計測システム(第27報)―3Dボールプレートを想定した校正シミュレーション―2014

    • Author(s)
      小里武史,大岩孝彰,寺林賢司,朝間淳一
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学本郷キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] A calibration method for a six-degree-of-freedom parallel manipulator with a redundant passive chain2013

    • Author(s)
      T. Oiwa and H. Ikuma
    • Organizer
      The Second Conference on Mechanisms,Transmissions and Applications(MeTrApp2013)
    • Place of Presentation
      Bilbao, Spain
    • Related Report
      2013 Annual Research Report
  • [Presentation] 6自由度パラレルメカニズムの校正に関する研究(第11報) -位置測定誤差を用いる校正-2013

    • Author(s)
      大岩孝彰,田澤直也,朝間淳一
    • Organizer
      日本機械学会2013年度年次大会
    • Place of Presentation
      岡山大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] パラレルメカニズムを用いた高速・高精度3次元座標計測システム(第26報)(ダブルボールバーを用いた校正)2013

    • Author(s)
      大滝 啓太,大岩 孝彰,朝間淳一
    • Organizer
      日本機械学会2013年度年次大会
    • Place of Presentation
      岡山大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ultra-precision machine system feedback-controlled using hexapod-type measurement device for six-degree-of-freedom relative motions between tool and workpiece2013

    • Author(s)
      Takaaki OIWA
    • Organizer
      euspen Lamdamap 10th International Conference
    • Place of Presentation
      Kavli Royal Society International Centre, Buckinghamshire, (UK)
    • Related Report
      2012 Annual Research Report
  • [Presentation] A Calibration Method Based on Inverse Kinematics Model for Six-degree-of-freedom Parallel Kinematic Machine2012

    • Author(s)
      Hiroshi Suzukawa
    • Organizer
      The 5th International Conference on Positioning Technology 2012
    • Place of Presentation
      Garden Villa (Kaohsiung City, Taiwan)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Parameter Identification Based on for Three- degree-of-freedom Parallel Mechanism a Redundant Passive chain2012

    • Author(s)
      Harunaho Daido
    • Organizer
      The 5th International Conference on Positioning Technology 2012
    • Place of Presentation
      Garden Villa (Kaohsiung City, Taiwan)
    • Related Report
      2012 Annual Research Report
  • [Presentation] A Kinematic Calibration Method for Coordinate Measuring Machine based on Parallel Mechanism with Seven Chains2012

    • Author(s)
      Naoya Tazawa
    • Organizer
      The 5th International Conference on Positioning Technology 2012
    • Place of Presentation
      Garden Villa (Kaohsiung City, Taiwan)
    • Related Report
      2012 Annual Research Report
  • [Presentation] A Calibration Method for a Three-degrees-of-freedom Parallel Manipulator with a Redundant Passive Chain2012

    • Author(s)
      Takaaki Oiwa
    • Organizer
      The Joint International Conference of the XI International Conference on Mechanisms and Mechanical Transmissions (MTM) and the International Conference on Robotics (Robotics’12
    • Place of Presentation
      IFMA, Clermont-ferrand (France)
    • Related Report
      2012 Annual Research Report
  • [Presentation] Machine design and error compensation for ultra-precision positioning2012

    • Author(s)
      Takaaki OIWA
    • Organizer
      The Joint International Conference of the XI International Conference on Mechanisms and Mechanical Transmissions (MTM) and the International Conference on Robotics (Robotics’12
    • Place of Presentation
      IFMA, Clermont-ferrand, (France)
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Remarks] 6-DOF Perfect Relative Motion

    • URL

      http://oiwa.eng.shizuoka.ac.jp/field/6dof/6dof.htm

    • Related Report
      2014 Annual Research Report
  • [Remarks] ワーク・ツール間の6自由度完全相対運動を目指した超精密機械の開発

    • URL

      http://oiwa.eng.shizuoka.ac.jp/field/6dof/6dof.htm

    • Related Report
      2013 Annual Research Report
  • [Remarks] Ultra-precise Machine System

    • URL

      http://oiwa.eng.shizuoka.ac.jp/field/6dof/6dof_e.htm

    • Related Report
      2013 Annual Research Report
  • [Remarks] パラレルメカニズムの高精度化に関する研究

    • URL

      http://oiwa.eng.shizuoka.ac.jp/field/stewart/stewart.htm

    • Related Report
      2013 Annual Research Report
  • [Remarks] Accuracy Improvement for PKM

    • URL

      http://oiwa.eng.shizuoka.ac.jp/field/stewart/stewart_e.htm

    • Related Report
      2013 Annual Research Report
  • [Remarks]

    • URL

      http://oiwa.eng.shizuoka.ac.jp/

    • Related Report
      2011 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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