Budget Amount *help |
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2011: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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Research Abstract |
A new type ionizer has been developed for much faster charge elimination performance compared to conentional ionizer. The charge eliminating model including evaluation method for the charge elimination performance were also developed. This modelcan predict the optimum setup of the instrument for user's different needs. Although conventional ionizer use airflow to convey positive and negative ion, this technique never use airflow. High density of positive and negative ion were created by special electrode setup (opposed phi-type electrodes) and a grounded mesh electrode was located underneath the produced ions. By closing the instruments to the target, an electric field is formed between the target and the grounded mesh. The opposite polarity ions are transported by the electric field to the target until the electric field become zero, resulting in ms order charge elimination with lower final potential less than a few volts.
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