Subsurface damage recovery of single crystal silicon by ultra-short high-output flash lamp irradiation

• Project/Area Number: 23656094
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: Keio University (2012); Tohoku University (2011)
• Principal Investigator: YAN Jiwang 慶應義塾大学, 理工学部, 教授 (40323042)
• Project Period (FY): 2011 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2011: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 超精密加工 / 加工変質層 / 単結晶シリコン / フラッシュランプ / レーザ / 加工欠陥

Research Abstract

Ultra-short pulsed high-output flash lamp irradiation was used torecover subsurface damage of silicon surfaces after mechanical machining. The subsurfacemicrostructural changes due to lamp irradiation were experimentally characterized andthe damage recove

Research Products

• [Journal Article] Laser recovery of machining damage under curved silicon surface (2013)
  • Author(s): J. Yan, F. Kobayashi
  • Journal Title: CIRP Annals - Manufacturing Technology Volume: Vol.62, No.1(In Press)
  • Peer Reviewed
• [Presentation] Atomic subsurface integrity improvement for curved and microstructured silicon surface by laser irradiation (2012)
  • Author(s): J. Yan, F. Kobayashi, M. Kubo, T. Kuriyagawa
  • Organizer: Proceedings of 12th International Conference of the European Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Stockholm, Sweden
• [Presentation] Atomic subsurface integrity improvement for curved and micro-structured silicon surface by laser irradiation (2012)
  • Author(s): J. Yan, F. Kobayashi, M. Kubo, and T. Kuriyagawa
  • Organizer: The 12th euspen International Conference
  • Place of Presentation: Stockholm
• [Presentation] レーザによるシリコン単結晶化技術 (2012)
  • Author(s): 閻 紀旺
  • Organizer: 第36回レーザ協会セミナー
  • Place of Presentation: 東京
  • Invited
• [Presentation] レーザ照射による単結晶シリコン加工変質層の修復 (2011)
  • Author(s): 小林史典，閻 紀旺，久保百司，厨川常元
  • Organizer: 2011年度精密工学会東北支部学術講演会
  • Place of Presentation: 仙台