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Soft micro actuator with interaction between magnetic elements

Research Project

Project/Area Number 23686042
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionKyushu University

Principal Investigator

TSUMORI Fujio  九州大学, 工学(系)研究科(研究院), 准教授 (10343237)

Project Period (FY) 2011-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥27,300,000 (Direct Cost: ¥21,000,000、Indirect Cost: ¥6,300,000)
Fiscal Year 2013: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
Fiscal Year 2012: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
Fiscal Year 2011: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
Keywordsソフトメカニクス / 微細加工 / MEMS / マイクロアクチュエータ / MEMS / 磁性粒子 / アクチュエータ / エラストマー / PDMS / 生体模倣
Research Abstract

A micro actuator using interactions between many micro magnetic elements was proposed and developed in this work. There are two merits using the magnetic interactions; the first is that we can obtain many variations of deformations, and the second is that smaller structure can be fabricated because of its simple mechanism.
Some new fabrication processes were developed in the present work. Finite element magnetic analysis was also performed to show effectiveness of the interactions between the magnetic elements. Finally, an artificial cilium, which was actuated by a newly developed system for application of magnetic field, was demonstrated.

Report

(4 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Annual Research Report
  • 2011 Annual Research Report
  • Research Products

    (43 results)

All 2014 2013 2012 2011 Other

All Journal Article (15 results) (of which Peer Reviewed: 4 results) Presentation (28 results)

  • [Journal Article] Development of improved solid oxide fuel cell electrolyte sheet by microimprinting for layered material2014

    • Author(s)
      Fujio TSUMORI, Yuki TANAKA, XU YANG, Toshiko Osada, Hideshi Miura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53

    • NAID

      210000144126

    • Related Report
      2013 Final Research Report
  • [Journal Article] Development of Powder Generation Device Using Inverse Magnetostriction Effect of Elastomer Material Dispersed with Magnetic Powder2014

    • Author(s)
      Fujio TSUMORI, Suguru ECHIKAWA, Yujiro HIRABAYASHI, Tsuyoshi NAKATSUJI, Toshiko OSADA, Hideshi MIURA
    • Journal Title

      Japan Journal of Powder and Powder Metallurgy

      Volume: 61-4 Pages: 193-198

    • Related Report
      2013 Final Research Report
  • [Journal Article] 磁性粒子分散エラストマーを用いた逆磁歪発電デバイスの開発2014

    • Author(s)
      津守不二夫,越川卓,平林祐次郎,仲辻毅,長田稔子,三浦秀士
    • Journal Title

      粉体および粉末冶金

      Volume: 61-4

    • NAID

      130004678658

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Improvement of solid oxide fuel cell by imprinted micropatterns on electrolyte2013

    • Author(s)
      XU YANG, Fu j io TSUMORI, Toshiko Osada, Hideshi Miura
    • Journal Title

      Micro & Nano Letters

      Volume: 8, 10 Pages: 571-574

    • Related Report
      2013 Final Research Report
  • [Journal Article] SIMULATION OF DEFORMATION OF LAYERED SHEET DURING MICRO POWDER IMPRINTING PROCESS2013

    • Author(s)
      Fujio TSUMORI, XU YANG, HYUNGOO KANG, Toshiko Osada, Hideshi Miura
    • Journal Title

      XII International Conference on Computational Plasticity

      Pages: 1267-1273

    • Related Report
      2013 Final Research Report
  • [Journal Article] Magneto-FEM Analysis for Micro Actuator using Array of Magnetic Elements2013

    • Author(s)
      TSUMORI Fujio, HATAMA Kenji, KANG HYUNGOO, Osada Toshiko, Miura Hideshi
    • Journal Title

      Proc.IEEE-NEMS2013

      Pages: 845-848

    • Related Report
      2013 Final Research Report
  • [Journal Article] Improvement of Solid Oxide Fuel Cell by Imprinted Patterns on Eelectrolyte2013

    • Author(s)
      XU YANG, TSUMORI Fujio, HASHIMOTO Seiya, TAKAHASHI Masashi, KANG HYUNGOO, Osada Toshiko, Miura Hideshi
    • Journal Title

      IEEE-NEMS2013

      Pages: 887-890

    • Related Report
      2013 Final Research Report
  • [Journal Article] Micro Imprinting Process for Surface Patterning of Ceramic Sheet2013

    • Author(s)
      F. Tsumori, S. Hashimoto, M. Takahashi, Y. Xu, H. Kang, T. Osada, H. Miura
    • Journal Title

      Proceedings of the 2012 Powder Metalluryg World Congress & Exhibition

    • Related Report
      2013 Final Research Report
  • [Journal Article] Magneto-FEM Analysis for Micro Actuator using Array of Magnetic Elements2013

    • Author(s)
      TSUMORI Fujio, HATAMA Kenji, KANG HYUNGOO, Osada Toshiko, Miura Hideshi
    • Journal Title

      Proc. IEEE-NEMS2013

      Volume: 1 Pages: 845-848

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magneto-FEM Analysis for Micro Actuator using Array of Magnetic Elements2013

    • Author(s)
      Fujio Tsumori, Kenji Hatama, Hyungoo Kang, Toshiko Osada, Hideshi Miura
    • Journal Title

      Proc. IEEE-NEMS

      Volume: 未定

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on Fabrication of Micrometer Patterned Ceramic Sheet with Micro Powder Imprinting (μ PI) Method2012

    • Author(s)
      Yang Xu, Fu j io Tsumori, Hyun Goo Kang, Hideshi Miura
    • Journal Title

      Advanced Science Letters

      Volume: 12 Pages: 170-173

    • Related Report
      2013 Final Research Report
  • [Journal Article] Magnetic Micro Actuator Using Interactive Force between Magnetic Elements2012

    • Author(s)
      Kenji Hatama, Fu j io Tsumori, Yang Xu, Hyungoo Kang, Toshiko Osada, Hideshi Miura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51

    • NAID

      210000140833

    • Related Report
      2013 Final Research Report
  • [Journal Article] Magnetic Micro Actuator Using Interactive Force between Magnetic Elements2012

    • Author(s)
      Kenji Hatama, Fujio Tsumori, Yang Xu, Hyungoo Kang, Toshiko Osada, Hideshi Miura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 6S Pages: 06FL14-06FL14

    • DOI

      10.1143/jjap.51.06fl14

    • NAID

      210000140833

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Magnetic Micro Actuator using Interactive Force between Magnetic Elements2012

    • Author(s)
      K.Hatama, et al
    • Journal Title

      Japan Journal of Applied Physics

      Volume: (In press)

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabricatino of Micro Patterned Ceramic Structure by Imprinting Process2011

    • Author(s)
      Yang Xu, Fu j io Tsumori, Hung-Goo Kang, Hideshi Miura
    • Journal Title

      Journal of the Japan Society of Powder and Powder Metallurgy

      Volume: 58, 11 Pages: 673-678

    • Related Report
      2013 Final Research Report
  • [Presentation] ヤモリを模擬したミクロ曲り梁配列構造の動力学2014

    • Author(s)
      赤峯彰, 口哲生, 沈立然, 津守不二夫, 澤江義則
    • Organizer
      日本機会学会九州学生会第45回卒業研究発表講演会
    • Year and Date
      2014-03-04
    • Related Report
      2013 Final Research Report
  • [Presentation] 磁性粒子分散エラストマーにおける粒子問の磁気的相互作用を用いた発電デバイスの開発2013

    • Author(s)
      越川卓, 津守不二夫, 平林祐次郎, 仲辻毅, XUYANG, 長田稔子, 三浦秀士
    • Organizer
      粉体粉末冶金協会平成25年度秋季大会
    • Year and Date
      2013-11-29
    • Related Report
      2013 Final Research Report
  • [Presentation] Actuation of magnetic particles on array of magnetic elements2013

    • Author(s)
      Fujio TSUMORI, Takuma Abe, Syuhei Seki, Koichi Nagasawa
    • Organizer
      26th International Microprocesses and Nanotechnology Conference
    • Year and Date
      2013-11-08
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of improved SOFC electrolyte sheet by micro imprinting proess for layered material2013

    • Author(s)
      Yuki Tanaka, Fujio TSUMORI, XU YANG, Toshiko Osada, Hideshi Miura
    • Organizer
      26th International Microprocesses and Nanotechnology Conference
    • Year and Date
      2013-11-07
    • Related Report
      2013 Final Research Report
  • [Presentation] SIMULATION OF DEFORMATION OF LAYERED SHEET DURING MICRO POWDER IMPRINTING PROCESS2013

    • Author(s)
      Fujio TSUMORI, XU YANG, HYUNGOO KANG, Toshiko Osada, Hideshi Miura
    • Organizer
      XII International Conference on Computational Plasticity
    • Year and Date
      2013-09-05
    • Related Report
      2013 Final Research Report
  • [Presentation] 多段階積層インプリントプロセスによるセラミックス微細薄膜構造体の作製2013

    • Author(s)
      津守不二夫, XU YANG, 高橋昌史, 橋本聖矢, KANG HYUNGOO, 長田稔子, 三浦秀士
    • Organizer
      粉体粉末冶金協会春季大会
    • Year and Date
      2013-05-28
    • Related Report
      2013 Final Research Report
  • [Presentation] 磁性小要素に誘起されるトルクを駆動源としたマイクロアクチュエータの開発2013

    • Author(s)
      西條明憲, 津守不二夫, XUYANG,KANGHYUNGOO, 長田稔子, 三浦秀士
    • Organizer
      粉体粉末冶金協会春季大会
    • Year and Date
      2013-05-27
    • Related Report
      2013 Final Research Report
  • [Presentation] Magneto-FEM analysis for Micro Actuator using Array of Magnetic Elements2013

    • Author(s)
      TSUMORI Fujio, HATAMA Kenji, KANG HYUNGOO, Osada Toshiko, Miura Hideshi
    • Organizer
      IEEE-NEMS
    • Year and Date
      2013-04-09
    • Related Report
      2013 Final Research Report
  • [Presentation] Improvement of Solid Oxide Fuel Cell by Imprinted Patterns on Electrolyte2013

    • Author(s)
      XU YANG, TSUM0RI Fujio, HASHIM0T0 Seiya, TAKAHASHI Masashi, KANG HYUNGOO, Osada Toshiko, Miura Hideshi
    • Organizer
      IEEE-NEMS2013
    • Year and Date
      2013-04-08
    • Related Report
      2013 Final Research Report
  • [Presentation] 微細インプリントプロセスを用いた波型形状を有する高性能SOFC電解質層の開発2013

    • Author(s)
      橋本聖矢, 津守不二夫, 徐楊, 高橋昌史, 姜賢求, 長田稔子, 三浦秀士
    • Organizer
      機械学会九州支部講演会
    • Year and Date
      2013-03-13
    • Related Report
      2013 Final Research Report
  • [Presentation] 多段階インプリントプロセスによるセラミックシート表面上への多階層微細パターニング2013

    • Author(s)
      高橋昌史, 津守不二夫, 徐楊, 橋本聖矢, 姜賢求, 長田稔子, 三浦秀士
    • Organizer
      日本機械学会九州支部講演会
    • Year and Date
      2013-03-13
    • Related Report
      2013 Final Research Report
  • [Presentation] Magneto-FEM Analysis for Micro Actuator using Array of Magnetic Elements2013

    • Author(s)
      Fujio Tsumori, Kenji, Hatama, Hyungoo Kang, Toshiko Osada, Hideshi Miura
    • Organizer
      IEEE-NEMS2013
    • Place of Presentation
      SuZhou
    • Related Report
      2012 Annual Research Report
  • [Presentation] 粉末マイクロインプリント(μPI)法による高アスペクト円錐孔アレイ表面を有するセラミックシートの作製2012

    • Author(s)
      徐楊, 津守不二夫, 姜賢求, 長田稔子, 三浦秀士
    • Organizer
      第63回塑性加工連合講演会
    • Year and Date
      2012-11-05
    • Related Report
      2013 Final Research Report
  • [Presentation] Micro Imprinting Process for Surface Patterning of Ceramic Sheet2012

    • Author(s)
      F. Tsumori, S. Hashimoto, M. Takahashi, Y. Xu, H. Kang, T. Osada, H. Miura
    • Organizer
      Powder Metallurgy World Congress & Exhibition PM2012
    • Year and Date
      2012-10-16
    • Related Report
      2013 Final Research Report
  • [Presentation] Improved Process for Fabrication of Solid Oxide Fuel Cell Based on the Micro Powder Imprinting Technology2012

    • Author(s)
      Yang Xu, Fu j io Tsumori, Hyungoo Kang, Toshiko Osada, Hideshi Miura
    • Organizer
      International Conference on Materials Processsing Tehcnology 2012
    • Year and Date
      2012-06-28
    • Related Report
      2013 Final Research Report
  • [Presentation] 有限要素磁場解析による磁性要素・エラストマー型微細アクチュエータの挙動解析2012

    • Author(s)
      津守不二夫, 姜賢求, 田稔子, 三浦秀士
    • Organizer
      粉体粉末冶金協会平成24年度春季大会
    • Year and Date
      2012-05-23
    • Related Report
      2013 Final Research Report
  • [Presentation] 有限要素磁場解析による磁性要素・エラストマー型微細アクチュエータの挙動解析2012

    • Author(s)
      津守不二夫,姜賢求,長田稔子,三浦秀士
    • Organizer
      粉体粉末冶金協会平成24年度春季大会
    • Place of Presentation
      京都
    • Related Report
      2012 Annual Research Report
  • [Presentation] Micro Thermal Imprinting on Powder-polymer Multilayer Substrate2011

    • Author(s)
      Y. Xu, F. Tsumori, K. Hatama, H. Kang and H. Miura
    • Organizer
      24th International Microprocesses and Nanotechnology Conference
    • Year and Date
      2011-10-27
    • Related Report
      2013 Final Research Report
  • [Presentation] Magnetic Micro Actuator using Interactive Force between Magnetic Elements2011

    • Author(s)
      K. Hatama, F. Tsumori, Y. XU, H. Kang and H. Miura
    • Organizer
      24th International Microprocesses and Nanotechnology Conference
    • Year and Date
      2011-10-26
    • Related Report
      2013 Final Research Report
  • [Presentation] Fabrication of Micro Patterned Ceramic Structure by Imprinting Process (the 2nd Report)-3D Structures on Multilayer Ceramic Sheet2011

    • Author(s)
      Yang Xu, Fujio Tsumori, Hyung-goo Kang, Hideshi Miura
    • Organizer
      粉体粉末冶金協会平成23年度秋季大会
    • Year and Date
      2011-10-26
    • Related Report
      2013 Final Research Report
  • [Presentation] Magnetic Micro Actuator using Interactive Force between Magnetic Elements2011

    • Author(s)
      K.Hatama, et al
    • Organizer
      24^<th> Int.Microprocesses and Nanotechnology
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-10-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 磁性粒子分散エラストマーの磁場中粘弾性評価2011

    • Author(s)
      畑問健司, 姜賢求, 津守不二夫, 三浦秀士
    • Organizer
      日本鉄鋼協会
    • Year and Date
      2011-09-20
    • Related Report
      2013 Final Research Report
  • [Presentation] Effects of Sintering Parameters on Morphology of the Single/Multi Layer Ceramic Sheet with Micro Pattern for Solid Oxide Fuel Cell2011

    • Author(s)
      Yang Xu, Fujio Tsumori, Takuro Nishida, Hyun-Goo Kang, Hideshi Miura
    • Organizer
      International Conference on Sintering 2011
    • Year and Date
      2011-09-01
    • Related Report
      2013 Final Research Report
  • [Presentation] ヤモリを模擬したミクロ曲り梁配列構造の動力学

    • Author(s)
      赤峯彰, 山口 哲生, 沈立然, 津守 不二夫, 澤江 義則
    • Organizer
      日本機会学会九州学生会第45回卒業研究発表講演会
    • Place of Presentation
      福岡
    • Related Report
      2013 Annual Research Report
  • [Presentation] 磁性粒子分散エラストマーにおける粒子間の磁気的相互作用を用いた発電デバイスの開発

    • Author(s)
      越川卓, 津守 不二夫, 平林祐次郎, 仲辻毅, XU YANG, 長田 稔子, 三浦 秀士
    • Organizer
      粉体粉末冶金協会平成25年度秋季大会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] Actuation of magnetic particles on array of magnetic elements

    • Author(s)
      Fujio TSUMORI, Takuma Abe, Syuhei Seki, Koichi Nagasawa
    • Organizer
      26th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] 磁性小要素に誘起されるトルクを駆動源としたマイクロアクチュエータの開発

    • Author(s)
      西條 明憲, 津守 不二夫, XU YANG, KANG HYUNGOO, 長田 稔子, 三浦 秀士
    • Organizer
      粉体粉末冶金協会平成25年度春季大会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] Magneto-FEM analysis for Micro Actuator using Array of Magnetic Elements

    • Author(s)
      TSUMORI Fujio, HATAMA Kenji, KANG HYUNGOO, Osada Toshiko, Miura Hideshi
    • Organizer
      IEEE-NEMS2013
    • Place of Presentation
      Suzhou, China
    • Related Report
      2013 Annual Research Report

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Published: 2011-04-06   Modified: 2019-07-29  

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