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Development of high-sensitivity nm-scale 3D X-ray microscope using a laboratory X-ray source

Research Project

Project/Area Number 24310087
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Nanomaterials/Nanobioscience
Research InstitutionTohoku University

Principal Investigator

YASHIRO Wataru  東北大学, 多元物質科学研究所, 准教授 (10401233)

Co-Investigator(Renkei-kenkyūsha) HATTORI Tadashi  兵庫県立大学, 高度産業科学技術研究所, 教授 (70326297)
MIKI Kazushi  物質, 材料研究機構・高分子材料ユニット, グループリーダー (30354335)
MIZUTANI Haruo  東京大学, 大学院新領域創成科学研究科, 客員共同研究員 (40444103)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥21,320,000 (Direct Cost: ¥16,400,000、Indirect Cost: ¥4,920,000)
Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥17,290,000 (Direct Cost: ¥13,300,000、Indirect Cost: ¥3,990,000)
KeywordsX線 / 顕微鏡 / 位相 / イメージング / 三次元 / ナノ材料 / 燃料電池 / 細胞・組織 / X線
Outline of Final Research Achievements

The final goal of this project is to realize three-dimensional and high-sensitive projection X-ray microscope using a compact laboratory source near future. We have established several elemental techniques to realize this microscope. We have successfully described X-ray propagation in the X-ray microscope system by a wave-optics theory and developed a simulator that allows us to predict the X-ray propagation and design the X-ray microscope. We have constructed an X-ray projection microscope using a compact laboratory with a μm-size X-ray source and demonstrated that three independent images (absorption, fringe-phase, and visibility-contrast images) with Fresnel diffraction can be obtained by the X-ray microscope. We further developed elemental techniques including fabrications of structured X-ray target and flexible X-ray grating.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (53 results)

All 2015 2014 2013 2012 Other

All Journal Article (12 results) (of which Peer Reviewed: 10 results,  Open Access: 2 results) Presentation (36 results) (of which Invited: 12 results) Book (1 results) Remarks (4 results)

  • [Journal Article] X-ray Bragg magnifier microscope as a linear shift invariant imaging system: image formation and phase retrieval2014

    • Author(s)
      P. Vagovic, L. Sveda, A. Cecilia, E. Hamann, D. Pelliccia, E. N. Gimenez, D. Korytar, K. M. Pavlov, Z. Zaprazny, M. Zuber, T. Koenig, M. Olbinado, W. Yashiro, A. Momose, M. Fiederle, T. Baumbach
    • Journal Title

      Opt. Express

      Volume: 22 Issue: 18 Pages: 21508-21520

    • DOI

      10.1364/oe.22.021508

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] An improved phase shift reconstruction algorithm of fringe scanning technique for X-ray microscopy2014

    • Author(s)
      S. Lian, H. Yang, H. Kudo, A. Momose, and W. Yashiro
    • Journal Title

      Rev. Sci. Instrum.

      Volume: 86 Issue: 2 Pages: 023707-023707

    • DOI

      10.1063/1.4908139

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A metallic glass grating for X-ray grating interferometers fabricated by imprinting2014

    • Author(s)
      W. Yashiro, D. Noda, T. Hattori, K. Hayashi, A. Momose, and H. Kato
    • Journal Title

      Appl. Phys. Exp.

      Volume: 7 Issue: 3 Pages: 32501-32501

    • DOI

      10.7567/apex.7.032501

    • NAID

      210000137015

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] MEMSにおける異種材料間接合メカニズムの解明2014

    • Author(s)
      矢代航
    • Journal Title

      埋もれた界面のX線・中性子解析アウトルック2014

      Volume: 2014 Pages: 57-58

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 大強度X線の照射効果の研究2014

    • Author(s)
      矢代航
    • Journal Title

      埋もれた界面のX線・中性子解析アウトルック2014

      Volume: 2014 Pages: 55-56

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 半導体デバイス中の三次元ナノ構造・ひずみ制御・評価2014

    • Author(s)
      矢代航
    • Journal Title

      埋もれた界面のX線・中性子解析アウトルック2014

      Volume: 2014 Pages: 13-14

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Grazing-incidence ultrasmall-angle X-ray scattering imaging with X-ray transmission gratings: A feasibility studey2014

    • Author(s)
      W. Yashiro and A. Momose
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 53 Issue: 5S1 Pages: 05FH04-05FH04

    • DOI

      10.7567/jjap.53.05fh04

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 回折格子を利用した高感度X線結像顕微鏡2013

    • Author(s)
      矢代航、百生敦
    • Journal Title

      高圧力の科学と技術

      Volume: 23 Pages: 227-236

    • NAID

      10031201661

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical aspect of x-ray phase microscopy with transmission gratings2012

    • Author(s)
      矢代航, 百生敦
    • Journal Title

      AIP Conf. Proc.

      Volume: 1466 Pages: 144-149

    • DOI

      10.1063/1.4742283

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Evaluation of gratings for x-ray and neutron phase imaging techniques by using x-ray projection microscope2012

    • Author(s)
      南勝利, 他
    • Journal Title

      AIP Conf. Proc.

      Volume: 1466 Pages: 193-198

    • DOI

      10.1063/1.4742268

    • Related Report
      2012 Annual Research Report
  • [Journal Article] Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry2012

    • Author(s)
      S. Matsuyama
    • Journal Title

      Optics Express

      Volume: 9 Issue: 22 Pages: 24977-24986

    • DOI

      10.1364/oe.20.024977

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Coherent Nanobeam and Imaging2012

    • Author(s)
      矢代航
    • Journal Title

      KEK Report

      Volume: 2012-4 Pages: 12-14

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] 回折格子を用いたX線顕微法の開発2015

    • Author(s)
      矢代航
    • Organizer
      第62回応用物理学春季学術講演会
    • Place of Presentation
      平塚
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] GIUSAXS実空間イメージング法の開発と今後の展望2015

    • Author(s)
      矢代航
    • Organizer
      物質・材料研究機構第59回先端計測オープンセミナー
    • Place of Presentation
      つくば
    • Year and Date
      2015-02-18
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 回折格子を用いたX線・中性子位相イメージング2015

    • Author(s)
      矢代航
    • Organizer
      第14回マイクロシステム融合研究会
    • Place of Presentation
      仙台
    • Year and Date
      2015-02-10
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] X線の位相を利用した計測技術の開発2015

    • Author(s)
      矢代航
    • Organizer
      多元物質科学研究所若手交流講演会
    • Place of Presentation
      仙台
    • Year and Date
      2015-01-23
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] X線の位相計測を利用した顕微イメージング2014

    • Author(s)
      矢代航
    • Organizer
      光量子融合連携研究開発プログラム「量子ビーム連携によるソフトマテリアルのグリーンイノベーション」ミニシンポジウムⅡ
    • Place of Presentation
      春日
    • Year and Date
      2014-11-27
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 回折格子を利用した高感度硬X線顕微イメージング ― 高分子の階層構造観察への応用可能性(依頼講演)2014

    • Author(s)
      矢代航
    • Organizer
      第63回高分子討論会
    • Place of Presentation
      長崎
    • Year and Date
      2014-09-24 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] X線回折格子干渉計による逆空間位相計測とイメージングの可能性2014

    • Author(s)
      矢代航
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Grating-Based Ultra-Small-Angle X-ray Scattering Imaging in Grazing-Incidence Geometry2014

    • Author(s)
      Wataru Yashiro, Atsushi Momose
    • Organizer
      International Union of Materials Research Societies – The IUMRS International Conference in Asia 2014 (IUMRS-ICA 2014)
    • Place of Presentation
      福岡
    • Year and Date
      2014-08-24 – 2014-08-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] 回折格子を利用した高感度X線イメージングの現状2014

    • Author(s)
      矢代航
    • Organizer
      理研セミナー
    • Place of Presentation
      和光
    • Year and Date
      2014-08-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 回折格子を用いた高感度硬X線顕微イメージング法の開発2014

    • Author(s)
      矢代航
    • Organizer
      学振141委員会第156回研究会
    • Place of Presentation
      仙台
    • Year and Date
      2014-05-26 – 2014-05-27
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] X線位相イメージング2014

    • Author(s)
      矢代航
    • Organizer
      日本顕微鏡学会 様々な極微イメージング技術研究部会 第2回研究会
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] X線の多重散乱現象を利用したSi酸化膜/Si界面下の微小ひずみの研究2014

    • Author(s)
      矢代航
    • Organizer
      鉄鋼協会表面界面分野フォーラム ミニシンポジウム「放射光を用いたナノ・ミクロの表面・バルク解析~ソフト・ハードX線による極限的評価~」
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] X線位相顕微イメージングとソフトマテリアル三次元可視化への応用2014

    • Author(s)
      矢代航
    • Organizer
      高分子学会九州支部 九州有機材料研究グループ研究会「光・量子ビームを利用した階層構造の可視化」
    • Place of Presentation
      北九州
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] X線 Talbot 干渉計におけるビジビリティコントラストイメージング ― 急峻なエッジの効果2014

    • Author(s)
      78) 矢代航、Margie Olbinado1、Patrik Vagovic、名越健誠、佐藤友子、船守展正、兵藤一行、百生敦
    • Organizer
      第27回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      広島
    • Related Report
      2013 Annual Research Report
  • [Presentation] X線回折格子干渉計におけるビジビリティコントラストの起源2014

    • Author(s)
      矢代航、百生敦
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      相模原
    • Related Report
      2013 Annual Research Report
  • [Presentation] X線回折格子干渉計によるGIUSAXSイメージング2014

    • Author(s)
      矢代航、百生敦
    • Organizer
      日本物理学会第69回年次大会
    • Place of Presentation
      平塚
    • Related Report
      2013 Annual Research Report
  • [Presentation] X線Talbot干渉計のための透過型金属ガラス回折格子の作製2014

    • Author(s)
      矢代航、百生敦、野田大二、服部正、林好一、加藤秀実
    • Organizer
      日本金属学会2014春期講演大会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] General Concept of Visibility Contrast in X-ray Grating Interferometry2014

    • Author(s)
      Wataru Yashiro, Margie P. Olbinado, Patrik Vagovic, and Atsushi Momose
    • Organizer
      International Workshop on X-ray and Neutron Phase Imaging with Gratings (XNPIG2014)
    • Place of Presentation
      Garmisch-Partenkirchen, Germany
    • Related Report
      2013 Annual Research Report
  • [Presentation] 実験室X線源と一枚の位相型回折格子による投影型X線顕微鏡の開発2013

    • Author(s)
      矢代航, 他
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      東広島
    • Year and Date
      2013-03-28
    • Related Report
      2012 Annual Research Report
  • [Presentation] x-ray phase microscopy with gratings2013

    • Author(s)
      矢代航
    • Organizer
      SATELLITE MEETING Real and reciprocal space X-rayimaging (The Royal Society)
    • Place of Presentation
      Chicheley, イギリス(招待講演)
    • Year and Date
      2013-02-13
    • Related Report
      2012 Annual Research Report
  • [Presentation] A multiple-wavex-ray diffraction phenomenon and its application to surface crystallography2013

    • Author(s)
      矢代航
    • Organizer
      Symposium on Surface and Nano Science 2013(SSNS' 13)
    • Place of Presentation
      山形(招待講演)
    • Year and Date
      2013-01-17
    • Related Report
      2012 Annual Research Report
  • [Presentation] X線多波回折現象を利用した位相計測-放射光照射効果のその場観察2013

    • Author(s)
      矢代航, 他
    • Organizer
      第26回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2013-01-12
    • Related Report
      2012 Annual Research Report
  • [Presentation] X-ray projection and imaging microscopes with a phase grating2013

    • Author(s)
      Wataru Yashiro, Katsunori Minami, and Atsushi Momose
    • Organizer
      The 12th Symposium on X-ray Imaging Optics
    • Place of Presentation
      Osaka, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] はじめに ― X線・中性子光学素子と微細加工技術2013

    • Author(s)
      矢代航
    • Organizer
      第4回ナノマイクロシステム融合研究会
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] X線顕微鏡の現状と将来展望 ― 化学研究への応用可能性について2013

    • Author(s)
      矢代航
    • Organizer
      第三回光科学分野横断萌芽研究会
    • Place of Presentation
      箱根
    • Related Report
      2013 Annual Research Report
  • [Presentation] X線Talbot干渉計のための金属ガラス回折格子の作製2013

    • Author(s)
      矢代航,野田大二,服部正,林好一,百生敦,加藤秀実
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京田辺
    • Related Report
      2013 Annual Research Report
  • [Presentation] X線Talbot干渉計におけるビジビリティコントラストの理論 試料による吸収を考慮した場合2013

    • Author(s)
      矢代航,マージー・オルビナード,百生敦
    • Organizer
      日本物理学会2013年秋季大会
    • Place of Presentation
      徳島
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ultra Small Angle X-ray Scattering Imaging using Gratings - Possibility of GIUSAXS Imaging2013

    • Author(s)
      Wataru Yashiro and Atsushi Momose
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyotanabe, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Possibility of Grazing-Incidence Ultra-Small-Angle X-ray Scattering Imaging2013

    • Author(s)
      Wataru Yashiro and Atsushi Momose
    • Organizer
      12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN12)
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] High-Sensitive Hard-x-Ray Imaging Microscopy with Gratings and its Future Applications to Nano-Micro Materials2012

    • Author(s)
      矢代航, 他
    • Organizer
      The 13th RIES-Hokudai International Symposium(Joined with The 1st International Symposium of Nano-Macro Materials, Devices, and System Research Alliance Project)
    • Place of Presentation
      札幌
    • Year and Date
      2012-12-13
    • Related Report
      2012 Annual Research Report
  • [Presentation] 回折格子を利用した投影型および結像型硬X線顕微鏡の開発2012

    • Author(s)
      矢代航, 他
    • Organizer
      第12回多元物質科学研究所研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2012-12-10
    • Related Report
      2012 Annual Research Report
  • [Presentation] X線多波回折現象を利用した位相計測とその応用一放射光照射効果のその場観察2012

    • Author(s)
      矢代航, 他
    • Organizer
      第32回表面科学学術講演会
    • Place of Presentation
      仙台
    • Year and Date
      2012-11-21
    • Related Report
      2012 Annual Research Report
  • [Presentation] 回折格子を利用した高感度X線顕微鏡の現状と将来展望2012

    • Author(s)
      矢代航, 百生敦
    • Organizer
      第53回高圧討論会
    • Place of Presentation
      豊中(招待講演)
    • Year and Date
      2012-11-07
    • Related Report
      2012 Annual Research Report
  • [Presentation] In situ Phase Retrieval of X-ray Amplitude Reflectivity by Using Multiple x-ray Diffraction Phenomenon2012

    • Author(s)
      矢代航, 他
    • Organizer
      International workshop on 3D atomic imaging at nano-scale active sites in materials (3D-AINAS)
    • Place of Presentation
      柏
    • Year and Date
      2012-08-07
    • Related Report
      2012 Annual Research Report
  • [Presentation] Talbot効果を利用した高感度X線位相差分顕微鏡2012

    • Author(s)
      矢代航, 他
    • Organizer
      多元物質とシンクロトロン放射光が紡ぎ出すイノベーション
    • Place of Presentation
      仙台
    • Year and Date
      2012-07-30
    • Related Report
      2012 Annual Research Report
  • [Presentation] x-ray Phase Measurements for Analyzing Buried Interfaces - Recent Progress and Future Prospects2012

    • Author(s)
      矢代航
    • Organizer
      薄膜・多層膜の埋もれた界面の解析-高度な量子ビーム源による新しい研究の方向性
    • Place of Presentation
      つくば
    • Year and Date
      2012-06-27
    • Related Report
      2012 Annual Research Report
  • [Book] X線物理学の基礎2012

    • Author(s)
      篠原佑也, 他
    • Total Pages
      460
    • Publisher
      講談社サイエンティフィック
    • Related Report
      2012 Annual Research Report
  • [Remarks] http://mml.tagen.tohoku.ac.jp/yashiro/

    • Related Report
      2014 Annual Research Report
  • [Remarks] 縞状X線格子を過冷却液体金属でインプリント成形

    • URL

      http://www.tohoku.ac.jp/japanese/2014/03/press20140307-03.html

    • Related Report
      2013 Annual Research Report
  • [Remarks] 矢代 航|東北大学多元物質科学研究所

    • URL

      http://mml.tagen.tohoku.ac.jp/yashiro/index.html

    • Related Report
      2013 Annual Research Report
  • [Remarks]

    • URL

      http://mm1.tagen.tohoku.ac.jp/

    • Related Report
      2012 Annual Research Report

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Published: 2012-04-24   Modified: 2019-07-29  

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