Development of Spherical Aberration Correction Technique for Electron Optical Systems using an Annular Objective Pupil and an Auxiliary Proximity Electrode
| Project/Area Number |
24360020
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Osaka Electro-Communication University |
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Principal Investigator |
IKUTA TAKASHI 大阪電気通信大学, 工学部, 教授 (20103343)
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| Co-Investigator(Kenkyū-buntansha) |
HISAKA Masaki 大阪電気通信大学, 医療福祉工学部, 准教授 (40340640)
KAWASAKI Tadahiro 名古屋大学, 工学研究科, 客員准教授 (10372533)
KODAMA Tetsuji 名城大学, 理工学部, 教授 (50262861)
MATSUTANI Takaomi 近畿大学, 理工学部, 准教授 (00411413)
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥18,850,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥4,350,000)
Fiscal Year 2014: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2013: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Fiscal Year 2012: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
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| Keywords | 電子顕微鏡 / 走査型透過電子顕微鏡 / 球面収差補正 / 静電型Csコレクター / 円環状対物瞳 / 3次元収束プロファイル / 電子ビーム露光 / 微細加工技術 / 走査型電子顕微鏡 / 電子光学系 / ３次元収束プロファイル |
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| Outline of Final Research Achievements |
In electron microscopes, correction of the spherical aberration is indispensable to achieve sub-angstrom resolution. Although some types of aberration correction devices (Cs-correctors) consist of multi-pole electron lenses had been utilized in this time, these are very expensive. In this study, a very simple and inexpensive Cs-corrector with axially-symmetric electrostatic field formed between an annular objective pupil and an auxiliary proximity circular electrode, was designed and evaluated using a 200kV scanning transmission electron microscope (STEM).
3.12A lattice image of CeO2 particles was clearly observed in case of Cs-corrector ON, which indicates the effect of the spherical aberration correction. This shows that the present simple low-cost electrostatic Cs-corrector is practical for the electron microscope.
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Report
(4 results)
Research Products
(37 results)
