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Research and development of DC power supply integrated in LSI package with embedded planar power inductor

Research Project

Project/Area Number 24560328
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionShinshu University

Principal Investigator

SATO Toshiro  信州大学, 学術研究院工学系, 教授 (50283239)

Co-Investigator(Renkei-kenkyūsha) SAKURAI Takayasu  東京大学, 生産技術研究所, 教授 (90282590)
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2012: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Keywordsパワーエレクトロニクス / LSIパッケージ / パッケージレベルDCパワーグリッド / DC-DCコンバータ / パワーインダクタ / 金属磁性微粒子 / 複合材料磁心
Outline of Final Research Achievements

In this study, in order to realize the DC power supply to CMOS logic LSI, power inductors embedded in an organic interposer using two types of magnetic cores (Zn-Fe ferrite thick film and carbonyl-iron/epoxy composite thick film) have been developed, and the CMOS switch buck DC-DC converter has been developed and evaluated. The developed 180 nm-CMOS switch buck DC-DC converter with embedded Zn-Fe ferrite core inductor has typical specifications as follows; switching frequency; 50 MHz, main circuit conversion efficiency; 74% at 2 V input/0.855V-1A output condition. The interposer-embedded power inductor and interposer-integrated CMOS switch DC-DC converter technologies will enable to realize the package-level DC power grid contributing to save electric energy in various electronic systems.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (35 results)

All 2015 2014 2013 2012 Other

All Journal Article (7 results) (of which Peer Reviewed: 6 results,  Open Access: 2 results,  Acknowledgement Compliant: 2 results) Presentation (22 results) (of which Invited: 2 results) Book (1 results) Remarks (3 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] CMOS Switch Buck DC-DC Converter Fabricated in Organic Interposer with Embedded Zn-Fe Ferrite Core Inductor2015

    • Author(s)
      Kazuhiro Hagita, Yuichiro Yazaki, Yuta Kondo, Makoto Sonehara, Toshiro Sato, Tomohiro Fujii, Kazutaka Kobayashi, Shinji Nakazawa, Hiroshi Shimizu, Tetsuro Watanabe, Yuto Seino, Nobuhiro Matsushita, Yuki Yanagihara, Takao Someya, Hiroshi Fuketa, Makoto Takamiya, Takayasu Sakurai
    • Journal Title

      Journal of the Magnetics Society of Japan

      Volume: 39 Issue: 2 Pages: 71-79

    • DOI

      10.3379/msjmag.1501R002

    • NAID

      130004951235

    • ISSN
      1882-2924, 1882-2932
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Efficiency Increase in On-Chip Buck Converter by Introduction of High Permeability Material to Inductor on Interposer2014

    • Author(s)
      H. Fuketa, Y. Shinozuka, K. Ishida, M. Takamiya, T. Fujii, H. Shimizu, K. Kobayashi, T. Sato, T. Sakurai
    • Journal Title

      Journal of the Japan Society of Powder and Powder Metallurgy

      Volume: 61 Issue: S1 Pages: S340-S342

    • DOI

      10.2497/jjspm.61.S340

    • NAID

      130004482708

    • ISSN
      0532-8799, 1880-9014
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Embedded Planar Power Inductor in an Organic Interposer for Package-Level DC Power Grid2014

    • Author(s)
      Yuichiro Yazaki, Kazuma Ishidate, Kazuhiro Hagita, Yuta Kondo, Saki Hattori, Makoto Sonehara, Toshiro Sato, Tetsuro Watanabe, Yuto Seino, Nobuhiro Matsushita
    • Journal Title

      IEEE Transactions on Magnetics

      Volume: 50 Issue: 11 Pages: 1-4

    • DOI

      10.1109/tmag.2014.2327965

    • NAID

      120007101504

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Carbonyl-Iron/Epoxy Composite Magnetic Core for Planar Power Inductor Used in Package-Level Power Grid2013

    • Author(s)
      Yuichiro Sugawa, Kazuma Ishidate, Makoto Sonehara, Toshiro Sato
    • Journal Title

      IEEE Transactions on Magnetics

      Volume: 49(7) Issue: 7 Pages: 4172-4175

    • DOI

      10.1109/tmag.2013.2250925

    • NAID

      120007113727

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] A Study of Zn-Ferrite Core Planar Power Inductor Embedded in Organic Interposer for Power Supply integrated in LSI Package2013

    • Author(s)
      小林洸貴、佐藤史宏、萩田和洋、武田理恵、曽根原誠、佐藤敏郎、松下伸広、小林和貴、清水浩、藤井朋治、石田光一、桜井貴康
    • Journal Title

      Journal of the Magnetics Society of Japan

      Volume: 37 Issue: 4 Pages: 314-319

    • DOI

      10.3379/msjmag.1305R012

    • NAID

      130003369175

    • ISSN
      1882-2924, 1882-2932
    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a Zn ferrite thick film planar power inductor for DC-DC converter LSI package2013

    • Author(s)
      Shinya Okazaki, Asako Takeuchi, Akihiro Takeshima, Makoto Sonehara, Toshiro Sato, Nobuhiro Matsushita
    • Journal Title

      ELECTRONICS AND COMMUNICATIONS IN JAPAN

      Volume: 96(4) Pages: 53-60

    • NAID

      210000172143

    • Related Report
      2013 Research-status Report
  • [Journal Article] 90% High Efficiency and 100-W/cm3 High Power Density Integrated DC-DC Converter for Cellular Phones2013

    • Author(s)
      Satoshi Sugahara, Kouhei Yamada, Masaharu Edo, Toshiro Sato, and Kiyohito Yamasawa
    • Journal Title

      IEEE Transactions on Power Electronics

      Volume: 28(4) Issue: 4 Pages: 1994-2004

    • DOI

      10.1109/tpel.2012.2197762

    • Related Report
      2013 Research-status Report
    • Peer Reviewed
  • [Presentation] 鉄系メタルコンポジット材料磁心平面スパイラル積層型インダクタの特性解析2015

    • Author(s)
      近藤 雄太,矢崎 裕一朗,佐藤 敏郎,曽根原 誠
    • Organizer
      平成27年電気学会全国大会
    • Place of Presentation
      東京都市大学(東京)
    • Year and Date
      2015-03-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Embedded Zn-Fe Ferrite Core Inductor in an Organic Interposer and Its Application to a CMOS Switch Buck DC-DC Converter2014

    • Author(s)
      萩田和洋,矢崎裕一朗,近藤雄太,曽根原誠,佐藤敏郎,藤井朋治,小林和貴,中澤信司,清水浩,渡辺哲朗,清野裕斗,松下伸広,柳原裕貴,染谷晃基,更田裕司,高宮真,桜井貴康
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      浜名湖ロイヤルホテル(浜松市)
    • Year and Date
      2014-12-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] LSIパッケージレベルDCパワーグリッドにおけるDC-DCコンバータ用薄型インダクタの開発2014

    • Author(s)
      矢崎裕一朗,近藤雄太,渡辺哲朗,清野裕斗,曽根原誠,佐藤敏郎,松下伸広
    • Organizer
      電子情報通信学会 電子部品・材料研究会
    • Place of Presentation
      信州大学工学部(長野市)
    • Year and Date
      2014-10-25
    • Related Report
      2014 Annual Research Report
  • [Presentation] 有機インターポーザー内蔵フェライトインダクタを用いたCMOSスイッチ降圧DC-DCコンバータ2014

    • Author(s)
      萩田和洋,矢崎裕一朗,近藤雄太,曽根原誠,佐藤敏郎,藤井朋治,小林和貴,中澤信司,清水浩,渡辺哲朗,清野裕斗,松下伸広,柳原裕貴,染谷晃基,更田裕司, 桜井貴康
    • Organizer
      第38回 日本磁気学会学術講演会
    • Place of Presentation
      慶應義塾大学日吉キャンパス(横浜市)
    • Year and Date
      2014-09-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] Zn-Feフェライトめっき膜と鉄系微粒子複合材料を用いたLSI電源用ハイブリッド磁心インダクタの開発2014

    • Author(s)
      近藤雄太,矢崎裕一朗,渡辺哲朗,清野裕斗,曽根原誠,佐藤敏郎,松下伸広
    • Organizer
      応用物理学会北陸・信越支部 第2回有機・無機エレクトロニクスシンポジウム
    • Place of Presentation
      信州大学工学部(長野市)
    • Year and Date
      2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] グリーンLSI電源用ハイブリッド磁心プレーナパワーインダクタの開発2014

    • Author(s)
      矢崎裕一朗,近藤雄太,石立一馬,萩田和洋,渡辺哲朗,清野裕斗,曽根原誠,佐藤敏郎,松下伸広
    • Organizer
      2014アカデミックプラザ、エレクトロニクス実装学会
    • Place of Presentation
      東京ビッグサイト(東京都)
    • Year and Date
      2014-06-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Embedded planar power inductor in organic interposer for package-level DC power gird2014

    • Author(s)
      Yuichiro Yazaki, Kazuma Ishidate, Kazuhiro Hagita, Yuta Kondo, Saki Hattori, Makoto Sonehara, Toshiro Sato, Nobuhiro Matsushita, Tetsuro Watanabe, Yuto Seino
    • Organizer
      IEEE International Magnetics Conference (INTERMAG) 2014
    • Place of Presentation
      ドレスデン国際会議場(ドイツ)
    • Year and Date
      2014-05-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] Magnetic Properties of Spin-sprayed Ferrite Film Deposited on Glass/Epoxy Build-up Layer in Organic Interposer Substrate2013

    • Author(s)
      Kazuhiro Hagita, Hiroki Kobayashi, Fumihiro Sato, Yuichiro Yazaki, Makoto Sonehara, Toshiro Sato, Tetsuro Watanabe, Nobuhiro Matsushita, Tomoharu Fujii, Hiroshi Shimizu, Kazutaka Kobayashi
    • Organizer
      The 11th International Conference on Ferrites (ICF11)
    • Place of Presentation
      沖縄コンベンションセンター(沖縄県)
    • Related Report
      2013 Research-status Report
  • [Presentation] LSIパッケージ内蔵用ハイブリッド磁心装荷インダクタの試作2013

    • Author(s)
      石立一馬、萩田和洋、矢崎裕一朗、曽根原誠、佐藤敏郎、渡辺哲朗、松下伸広
    • Organizer
      第37回日本磁気学会学術講演会
    • Place of Presentation
      北海道大学(札幌市)
    • Related Report
      2013 Research-status Report
  • [Presentation] LSI有機インターポーザ内蔵型フェライト磁心装荷プレーナパワーインダクタの特性改善に向けた検討2013

    • Author(s)
      萩田和洋、矢崎裕一朗、渡辺哲朗、佐藤敏郎、曽根原誠、松下伸広、藤井朋治、清水浩、小林和貴
    • Organizer
      第37回日本磁気学会学術講演会
    • Place of Presentation
      北海道大学(札幌市)
    • Related Report
      2013 Research-status Report
  • [Presentation] LSIパッケージ集積化電源用ハイブリッド磁心パワーインダクタの特性解析2013

    • Author(s)
      矢崎裕一朗、萩田和洋、曽根原誠、佐藤敏郎、松下伸広、小林和貴、清水浩、藤井朋治
    • Organizer
      電気学会基礎・材料・共通部門大会
    • Place of Presentation
      横浜国立大学(横浜市)
    • Related Report
      2013 Research-status Report
  • [Presentation] ビルドアップ層平坦化プロセスを導入したZn-Feフェライト磁心パワーインダクタのLSI有機インターポーザ内蔵に関する検討2013

    • Author(s)
      萩田和洋、矢崎裕一朗、渡辺哲朗、佐藤敏郎、曽根原誠、松下伸広、藤井朋治、清水浩、小林和貴
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      金沢大学(金沢市)
    • Related Report
      2013 Research-status Report
  • [Presentation] パッケージレベルパワーグリッドの実現に向けたハイブリッド磁心プレーナパワーインダクタの試作と評価2013

    • Author(s)
      石立一馬、矢崎裕一朗、萩田和洋、曽根原誠、佐藤敏郎、渡辺哲朗、松下伸広
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      金沢大学(金沢市)
    • Related Report
      2013 Research-status Report
  • [Presentation] LSIの次世代パワーデリバリーの研究動向2013

    • Author(s)
      佐藤敏郎
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      金沢大学(金沢市)
    • Related Report
      2013 Research-status Report
  • [Presentation] Magnetic core power inductor embedded in plastic interposer toward power supply integrated in LSI Package2012

    • Author(s)
      Toshiro Sato, Makoto Sonehara, Hiroki Kobayashi, Fumihiro Sato, Kazuhiro Hagita, Rie Takeda, Nobuhiro Matsushita, Tomohiro Fujii, and others
    • Organizer
      International Workshop on Power Supply on Chip 2012 (PowerSoC'12), IEEE Power Electronics Society
    • Place of Presentation
      Palace Hotel, San Francisco, CA, USA
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] LSIパッケージ集積化電源用プレーナパワーインダクタのインターポーザ内蔵に関する検討2012

    • Author(s)
      小林洸貴,佐藤史宏,萩田和洋,武田理恵,曽根原誠,佐藤敏郎,松下伸広,小林和貴,清水浩,藤井朋治,石田光一,桜井貴康
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      信州大学工学部
    • Related Report
      2012 Research-status Report
  • [Presentation] A study of Zn-ferrite film planar power inductor embedded in LSI interposer for integrated power supply

    • Author(s)
      Hiroki Kobayashi, Fumihiro Sato, Kazuhiro Hagita, Rie Takeda, Makoto Sonehara, Toshiro Sato, Nobuhiro Matsushita, Kazutaka Kobayashi, and others
    • Organizer
      International Conference of the Asian Union of Magnetic Societies (ICAUMS) 2012
    • Place of Presentation
      Nara Prefectural New Public Hall, Nara, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Development of Micro Magnetic Devices for High-Frequency Power Conversion and RF Applications

    • Author(s)
      Toshiro Sato, Makoto Sonehara, Kenji Ikeda, Hidetoshi Nakayama, Kazutaka Takizawa
    • Organizer
      International Conference of the Asian Union of Magnetic Societies (ICAUMS) 2012
    • Place of Presentation
      Nara Prefectural New Public Hall, Nara, Japan
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] インターポーザ上インダクタの高透磁率材導入による オンチップBuckコンバータ回路の高効率化の検討

    • Author(s)
      篠塚康大,更田裕司,石田光一,高宮真,佐藤敏郎,桜井貴康
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      大阪市立大学
    • Related Report
      2012 Research-status Report
  • [Presentation] 溶液プロセスによるパワーインダクタ用軟磁性Zn-Co置換フェライト膜の作製

    • Author(s)
      渡辺哲朗,勝又健一,丑田公規,岡田清,松下伸広,萩田和洋,曽根原誠,佐藤敏郎
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      大阪市立大学
    • Related Report
      2012 Research-status Report
  • [Presentation] LSIパッケージレベルパワーグリッド用CMOSスイッチDC-DCコンバータに向けたプレーナパワーインダクタの検討

    • Author(s)
      佐藤史宏,萩田和洋,小林洸貴,渡辺哲朗,杉本直樹,曽根原誠,佐藤敏郎,松下伸広,小林和貴,清水浩,中澤信司,藤井朋治,桜井貴康
    • Organizer
      電気学会マグネティックス研究会
    • Place of Presentation
      大阪市立大学
    • Related Report
      2012 Research-status Report
  • [Presentation] Carbonyl-iron/epoxy composite magnetic core for planar power inductor used in POL DC-DC converter for package-level power grid

    • Author(s)
      Yuichiro Sugawa, Kazuma Ishidate, Makoto Sonehara, Toshiro Sato
    • Organizer
      12th Joint MMM/Intermag Conference, IEEE Magnetics Society, American Institute of Physics
    • Place of Presentation
      Hyatt Regency Chicago, Chicago, IL, USA
    • Related Report
      2012 Research-status Report
  • [Book] 電気学会技術報告「高周波マイクロ磁気応用技術の最新動向」2014

    • Author(s)
      佐藤敏郎(編者、分担執筆)、他
    • Publisher
      電気学会
    • Related Report
      2014 Annual Research Report
  • [Remarks] 信州大学先端磁気デバイス研究室ホームページ

    • URL

      http://amdl.shinshu-u.ac.jp/

    • Related Report
      2014 Annual Research Report
  • [Remarks] 信州大学先端磁気デバイス研究室ホームページ

    • URL

      http://amdl.shinshu-u.ac.jp/

    • Related Report
      2013 Research-status Report
  • [Remarks] 信州大学先端磁気デバイス研究室ホームページ

    • URL

      http://amdl.shinshu-u.ac.jp/

    • Related Report
      2012 Research-status Report
  • [Patent(Industrial Property Rights)] インダクタ2014

    • Inventor(s)
      佐藤敏郎、曽根原誠
    • Industrial Property Rights Holder
      信州大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2014-116465
    • Filing Date
      2014-06-05
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] ハイブリッド磁心装荷パワーインダクタ2013

    • Inventor(s)
      佐藤敏郎、曽根原誠
    • Industrial Property Rights Holder
      信州大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-180326
    • Filing Date
      2013-08-30
    • Related Report
      2013 Research-status Report

URL: 

Published: 2013-05-31   Modified: 2019-07-29  

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