Development of virtual sensing technology handling changes in feed and process characteristics and uncertainties

• Project/Area Number: 24560940
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Reaction engineering/Process system
• Research Institution: Kyoto University
• Principal Investigator: KANO MANABU 京都大学, 情報学研究科, 教授 (30263114)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2012: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: 仮想計測技術 / ソフトセンサー / プロセスデータ解析 / グレーボックスモデル / 統計モデル / 局所PLS / 不確定性 / 産業応用 / 入力変数選択 / グレイボックスモデル / モデル化 / ブートストラップフィルター

Outline of Final Research Achievements

To realize feedback control of product quality, which is difficult to measure in real time, and also to enhance the productivity, it is crucial to develop virtual sensing technology or soft-sensors that can estimate the product quality from process operating conditions. In this research, high-performance virtual sensing technology was developed and applied to various industrial processes such as petrochemical, semiconductor, pharmaceutical, and steel. The usefulness of the proposed methods was confirmed through these applications.

Research Products

• [Journal Article] Adaptive Virtual Metrology Design for Semiconductor Dry Etching Process through Locally Weighted Partial Least Squares (2015)
  • Author(s): Toshiya Hirai, Manabu Kano
  • Journal Title: IEEE Transaction on Semiconductor Manufacturing Volume: 28 Issue: 2 Pages: 137-144
  • DOI: 10.1109/tsm.2015.2409299
  • NAID: 120005669316
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Prediction of Molten Steel Temperature in Steel Making Process with Uncertainty by Integrating Gray-Box Model and Bootstrap Filter (2014)
  • Author(s): Iftikhar Ahmad, Manabu Kano, Shinji Hasebe, Hiroshi Kitada, Noboru Murata
  • Journal Title: JOURNAL OF CHEMICAL ENGINEERING OF JAPAN Volume: 47 Issue: 11 Pages: 827-834
  • DOI: 10.1252/jcej.14we067
  • NAID: 130004703868
  • ISSN: 0021-9592, 1881-1299
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Gray-box modeling for prediction and control of molten steel temperature in tundish (2014)
  • Author(s): Iftikhar Ahmad, Manabu Kano, Shinji Hasebe, Hiroshi Kitada, Noboru Murata
  • Journal Title: Journal of Process Control Volume: 24 Issue: 4 Pages: 375-382
  • DOI: 10.1016/j.jprocont.2014.01.018
  • NAID: 120005466672
  • Peer Reviewed
• [Journal Article] Soft-sensor Using Locally Weighted PLS with Adaptive Similarity Measure (2013)
  • Author(s): Sanghong Kim, Ryota Okajima, Manabu Kano, Shinji Hasebe
  • Journal Title: Chemometrics and Intelligent Laboratory Systems Volume: 124 Pages: 43-49
  • DOI: 10.1016/j.chemolab.2013.03.008
  • Peer Reviewed
• [Journal Article] Long-Term Industrial Applications of Inferential Control Based on Just-In-Time Soft-Sensors: Economical Impact and Challenges (2013)
  • Author(s): Sanghong Kim, Manabu Kano, Shinji Hasebe, Akitoshi Takinami, Takeshi Seki
  • Journal Title: Industrial & Engineering Chemistry Research Volume: 未定 Issue: 35 Pages: 12346-12356
  • DOI: 10.1021/ie303488m
  • Peer Reviewed
• [Presentation] Process Parameter Optimization based on LW-PLS in Pharmaceutical Granulation Process (2015)
  • Author(s): Ryosuke Yoshizaki, Manabu Kano, Shuichi Tanabe, Takuya Miyano
  • Organizer: International Symposium on Advanced Control of Chemical Processes (ADCHEM)
  • Place of Presentation: Whistler, Canada
  • Year and Date: 2015-06-07 – 2015-06-10
• [Presentation] Nearest Correlation Louvain Method for Fast and Good Selection of Input Variables of Statistical Model (2015)
  • Author(s): Taku Uchimaru, Koji Hazama, Koichi Fujiwara, Manabu Kano
  • Organizer: International Symposium on Advanced Control of Chemical Processes (ADCHEM)
  • Place of Presentation: Whistler, Canada
  • Year and Date: 2015-06-07 – 2015-06-10
• [Presentation] Optimization of Nonlinear Multi-Stage Process with Characteristic Changes through Locally-Weighted Partial Least Squares (2015)
  • Author(s): Ryosuke Yoshizaki, Sanghong Kim, Manabu Kano
  • Organizer: The 10th Asian Control Conference (ASCC)
  • Place of Presentation: Kota Kinabalu, Malaysia
  • Year and Date: 2015-05-31 – 2015-06-03
• [Presentation] Efficient Wavenumber Selection Based on Nearest Correlation Louvain Method for NIR Calibration Modeling (2015)
  • Author(s): Taku Uchimaru, Koji Hazama, Koichi Fujiwara, Manabu Kano
  • Organizer: The 10th Asian Control Conference (ASCC)
  • Place of Presentation: Kota Kinabalu, Malaysia
  • Year and Date: 2015-05-31 – 2015-06-03
• [Presentation] Wavenumber Selection for NIR Calibration Modeling: Application to Water and Drug Content Estimation (2014)
  • Author(s): Taku Uchimaru, Takuya Miyano, Koichi Fujiwara, Manabu Kano, Hideaki Tanabe, Hiroshi Nakagawa, Tomoyuki Watanabe, Naoki Wakiyama
  • Organizer: AIChE Annual Meeting
  • Place of Presentation: Atlanta, US
  • Year and Date: 2014-11-16 – 2014-11-21
• [Presentation] Application of Locally Weighted Partial Least Squares to Design of Semiconductor Virtual Metrology (2014)
  • Author(s): Toshiya Hirai, Koji Hazama, Manabu Kano
  • Organizer: IEEE Multi-conference on Systems and Control (MSC)
  • Place of Presentation: Antibes, France
  • Year and Date: 2014-10-08 – 2014-10-10
• [Presentation] Design of Inner and Outer Gray-Box Models to Predict Molten Steel Temperature in Tundish (2013)
  • Author(s): Iftikhar Ahmad, Manabu Kano, Shinji Hasebe, Hiroshi Kitada, Noboru Murata
  • Organizer: The 10th IFAC International Symposium on Dynamics and Control of Process Systems (DYCOPS)
  • Place of Presentation: Mumbai, India
• [Presentation] Soft-sensor Using Locally Weighted PLS with Adaptive Similarity Measure and Its Application to Pharmaceutical Process (2013)
  • Author(s): Sanghong Kim, Manabu Kano, Shinji Hasebe
  • Organizer: The 9th World Congress of Chemical Engineering (WCCE9)
  • Place of Presentation: Seoul, Korea
• [Presentation] State-of-the-art Practice of Virtual Sensing Technology in Process Industries (2013)
  • Author(s): Manabu Kano
  • Organizer: The 9th World Congress of Chemical Engineering (WCCE9)
  • Place of Presentation: Seoul, Korea
  • Invited
• [Presentation] 局所PLSを利用した推定制御システムの開発と長期間の運用結果 (2013)
  • Author(s): 金尚弘，加納学，長谷部伸治，滝波明敏，關雄至
  • Organizer: 計測自動制御学会制御部門大会
  • Place of Presentation: 福岡
• [Presentation] 溶鋼温度推定を目的としたグレイボックスモデルの比較 (2013)
  • Author(s): Iftikhar Ahmad，加納学，長谷部伸治，北田宏，村田昇
  • Organizer: 日本鉄鋼協会春季講演大会
  • Place of Presentation: 東京
• [Presentation] Industrial Applications of Locally Weighted PLS to Realize Maintenance-Free High-Performance Virtual Sensing (2012)
  • Author(s): Manabu Kano, Sanghong Kim, Ryota Okajima, Shinji Hasebe
  • Organizer: The 12th International Conference on Control, Automation and Systems (ICCAS)
  • Place of Presentation: Jeju Island, Korea
• [Presentation] Quality Control for Dry Process through APC/EES (2012)
  • Author(s): Toshiya Hirai, Manabu Kano, T. Tatsumi
  • Organizer: The 34th International Symposium on Dry Process (DPS)
  • Place of Presentation: Tokyo, Japan
  • Invited
• [Presentation] 適応的な類似度を利用した局所PLSの開発およびその医薬品プロセスへの適用 (2012)
  • Author(s): 金尚弘，岡島亮太，長谷部伸治，加納学，中川弘司
  • Organizer: 化学工学会秋季大会
  • Place of Presentation: 仙台