| Project/Area Number |
24656112
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Design engineering/Machine functional elements/Tribology
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| Research Institution | Nagoya University |
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Principal Investigator |
FUKUZAWA Kenji 名古屋大学, 工学(系)研究科(研究院), 教授 (60324448)
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| Co-Investigator(Kenkyū-buntansha) |
ITOH Shintaro 名古屋大学, 大学院工学研究科, 講師 (50377826)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Keywords | トライボロジー / 摺動すきま / エリプソメトリー / 顕微鏡 |
|---|
| Research Abstract |
With the progress of the smoothing technique of sliding surfaces, lubrication technology at small sliding gaps is required. However, the lubrication phenomenon at small sliding gaps has not been fully clarified due to the difficulty of measurement. For clarifying the lubrication phenomena, the relationship between the sliding gap and forces that separate the sliding surfaces is needed. In this study, we aimed at proposal of a method for measuring the distribution of nanometer sliding gaps. We considered the method that can provide high lateral resolution and high thickness resolution for application to micro machines. We tried a new method that is based on ellipsometry and showed its feasibility.
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