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Formation of 3-dimensional (3D) Si quantum dot arrays using block copolymer self-assembly and its application to 3D quantum dot solar cell

Research Project

Project/Area Number 24656435
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Material processing/treatments
Research InstitutionGunma University

Principal Investigator

HOSAKA Sumio  群馬大学, 理工学研究院, 教授 (10334129)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords自己組織化 / 量子ドット / 太陽電池
Research Abstract

We studied a formation of multi-tunnel junction PIN type solar cell substrate and masking and etching of very fine cylinder structure of the substrate for three-dimensional (3D) quantum dot solar cell. In the former, we proposed structure of 3D quantum dot solar cell and process for its fabrication using LP-CVD (Low pressure chemical vapor deposition), thermal oxidation and impurity diffusion. After the fabrications, we evaluated the solar cell properties and obtained adaptive structure with 1nm-thickness in LP-CVD SiO2 layer for tunneling current. Furthermore, we obtained the substrate with 3-PIN-multi-layers structure for 3D solar cell. In the latter, we developed very fine dot pattern formation using self-assembly with PS-PDMS block copolymer, multi-resist method with thin Si layer and carbon layer to transfer it to carbon dot pattern for etching mask, and reactive-ion-etching (RIE) of the Si substrate as very fine cylinders with multi-tunnel junction PIN type solar cell.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (26 results)

All 2014 2013 2012 2011 Other

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (15 results) (of which Invited: 2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Fabrication of carbon nanodot arrays with a pitch of 20 nm for pattern-transfer of PDMS self-assembled nanodots2014

    • Author(s)
      J. Liu, M. Huda, Z. Mohamad, H. Zhang, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 596 Pages: 88-91

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of carbon nanodot arrays with a pitch of 20 nm for pattern-transfer of PDMS self-assembled nanodots, Key Engineering Materials2014

    • Author(s)
      J. Liu, M. Huda, Z. Mohamad, H. Zhang, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 596 Pages: 88-91

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Pattern transfer of 23-nm-diameter block copolymer self-assembled nanodots using CF_4 etching with carbon hard mask (CHM) as mask2013

    • Author(s)
      M. Huda, J. Liu, Z. Mohamad, Y. Yin, and S. Hosaka
    • Journal Title

      Materials Science Forum

      Volume: 737 Pages: 133-136

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Pattern transfer of 23-nm-diameter block copolymer self-assembled nanodots using CF4 etching with carbon hard mask (CHM) as mask2013

    • Author(s)
      M. Huda, J. Liu, Z. Mohamad, Y. Yin, and S. Hosaka
    • Journal Title

      Materials Science Forum

      Volume: 737, Pages: 133-136

    • Related Report
      2013 Annual Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Improved observation contrast of block-copolymer nanodot pattern using carbon hard mask (CHM)2013

    • Author(s)
      T. Akahane, T. Komori, J. Liu, M. Huda, Z. Mohamad, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 534 Pages: 126-130

    • Related Report
      2013 Annual Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Fabrication of 5-nm-sized nanodots using self-assemble of polystyrene-poly(dimethyl siloxane)2012

    • Author(s)
      M. Huda, J. Liu, Y. Yin, and S. Hosaka
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51, 06FF10 Pages: 1-5

    • NAID

      210000140775

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Formation of 12-nm nanodotpattern by block copolymerself-assembly technique2012

    • Author(s)
      M. Huda, T. Tamura, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 497 Pages: 122-126

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of 5-nm-sized nanodots using self-assemble of polystyrene-poly(dimethyl siloxane)2012

    • Author(s)
      M. Huda, J. Liu, Y. Yin, and S. Hosaka
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 6S Pages: 06FF10-06FF10

    • DOI

      10.1143/jjap.51.06ff10

    • NAID

      210000140775

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Formation of 12-nm nanodot pattern by block copolymer self-assembly technique2012

    • Author(s)
      M. Huda, T. Tamura, Y. Yin, and S. Hosaka
    • Journal Title

      Key Engineering Materials

      Volume: 497 Pages: 122-126

    • DOI

      10.4028/www.scientific.net/kem.534.126

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Long Range Ordering of Nanodots with Sub-10-nm-Pitch and 5-nm-dot Size using EB-drawn Guide Line and Self-assembly of Polystyrene-Poly(dimethyl siloxane)2013

    • Author(s)
      H. Zhang, M. Huda, J. Liu, Y. Zhang, Y. Yin, and S. Hosaka
    • Organizer
      5th International Conference onAdvanced Micro-Device Engineering(AMDE)
    • Place of Presentation
      Gunma, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] Fabrication of Ultrahigh Density 10-nm-Order Sized Si Nanodot Array by Pattern-Transfer of Block Copolymer Self-Assembled Nanodot Array2013

    • Author(s)
      M. Huda, H. Zhang, J. Liu, Y. Yin, and S. Hosaka
    • Organizer
      5th International Conferenceon Advanced Micro-Device Engineering(AMDE)
    • Place of Presentation
      Gunma, Japan
    • Related Report
      2013 Final Research Report
  • [Presentation] Single-nanodot Arrays and Single-nanohalf-pitch Lines Formed using PS-PDMS Self-assembly and Electron Beam Drawing2013

    • Author(s)
      S. Hosaka, M. Huda, H. Zhang, T. Komori,and Y. Yin
    • Organizer
      26th International Microprocesses andNanotechnology Conference (MNC 2013)
    • Place of Presentation
      Sapporo, Hokkaido, Japan
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Fabrication of Ultrahigh Density 10-nm-order Sized C Nanodot Array as a Pattern-transfer Mask2013

    • Author(s)
      M. Huda, J. Liu, Y. Yin, and S. Hosaka
    • Organizer
      26th International Microprocesses and Nanotechnology Conference (MNC 2013)
    • Place of Presentation
      Sapporo, Hokkaido, Japan
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Large Area Ultrahigh Density 10-nm-Order Sized C Nanodot Array as a Pattern-Transfer Mask2013

    • Author(s)
      M. Huda, J. Liu, Y. Yin, S. Hosaka
    • Organizer
      the 39th International Micro & Nano Engineering Conference (MNE 2013)
    • Place of Presentation
      London, UK
    • Related Report
      2013 Final Research Report
  • [Presentation] Long-range-ordering of 6-nm-sized nanodot arrays using self-assemble and EB-drawing2013

    • Author(s)
      Sumio Hosaka, You Yin, Takuya Komori, Miftakful Huda, Hui Zhang
    • Organizer
      7th Int. Conf. Mat. Adv. Technol. (ICMAT2013)
    • Place of Presentation
      Singapore
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Single-nanodot Arrays and Single-nanohalf-pitch Lines Formed using PS-PDMS Self-assembly and Electron Beam Drawing2013

    • Author(s)
      S. Hosaka, M. Huda, H. Zhang, T. Komori, and Y. Yin
    • Organizer
      26th International Microprocesses and Nanotechnology Conference (MNC 2013)
    • Place of Presentation
      Sapporo, Hokkaido, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Fabrication of Ultrahigh Density 10-nm-Order Sized Si Nanodot Array by Pattern-Transfer of Block Copolymer Self-Assembled Nanodots2013

    • Author(s)
      M. Huda, J. Liu, Y. Yin, S. Hosaka
    • Organizer
      8th NANOSMAT
    • Place of Presentation
      Granada, SPAIN
    • Related Report
      2013 Annual Research Report
  • [Presentation] Large Area Ultrahigh Density 10-nm-Order Sized C Nanodot Array as a Pattern-Transfer2013

    • Author(s)
      M. Huda, J. Liu, Y. Yin, S. Hosaka
    • Organizer
      the 39th International Micro & Nano Engineering Conference (MNE 2013)
    • Place of Presentation
      London, UK
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ordering of 12 nm-pitched nanodot arrays using block copolymers self-assemble and EB drawn guide line template for 5 Tbit/in2 magnetic recording2012

    • Author(s)
      S. Hosaka, T. Akahane, M. Huda, J. Liu,Y. Yin, N. Kihara, Y. Kamata, and A.Kikitsu
    • Organizer
      the 38th International Micro & Nano Engineering Conference (MNE 2012)
    • Place of Presentation
      Toulouse, France
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] Long Range Ordering of Nanodots with Sub-10-nm-Pitch and 5-nm-dot Size using EB-drawn Guide Line and Self-assembly of Polystyrene-Poly(dimethyl siloxane)

    • Author(s)
      H. Zhang, M. Huda, J. Liu, Y. Zhang, Y. Yin, and S. Hosaka
    • Organizer
      5th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication of Ultrahigh Density 10-nm-Order Sized Si Nanodot Array by Pattern-Transfer of Block Copolymer Self-Assembled Nanodot Array

    • Author(s)
      M. Huda, H. Zhang, J. Liu, Y. Yin, and S. Hosaka
    • Organizer
      5th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication of Carbon Nanodot Arrays with a Pitch of 20 nm for Pattern-Transfer of PDMS Self-Assembled nanodots

    • Author(s)
      J. Liu, M. Huda, H. Zhang, Y. Yin, and S. Hosaka
    • Organizer
      4th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Fabrication of CoPt Nanodot Array with a Pitch of 33 nm Using Pattern-Transfer Technique of PS-PDMS Self-Assembly

    • Author(s)
      M. Huda, Z. Mohamad, T. Komori, Y. Yin, and S. Hosaka
    • Organizer
      4th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Fusion of top-down and bottom-up technologies for single nano-patterning

    • Author(s)
      S. Hosaka, T. Akahane, T. Komori, M. Huda, Y. Yin, N. Kihara, Y. Kamata, and A. Kikitsu
    • Organizer
      4th International Conference on Advanced Micro-Device Engineering (AMDE)
    • Place of Presentation
      Kiryu, Japan
    • Related Report
      2012 Research-status Report
  • [Remarks]

    • URL

      http://www.ps.eng.gunma-u.ac.jp/~hosaka-lab/

    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] 光電変換素子およびその製造方法2011

    • Inventor(s)
      酒井武信、保坂純男、インユウ、田村拓郎
    • Industrial Property Rights Holder
      請求なし
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2011-184581
    • Filing Date
      2011-08-26
    • Related Report
      2013 Final Research Report

URL: 

Published: 2013-05-31   Modified: 2019-07-29  

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