| Budget Amount *help |
¥26,780,000 (Direct Cost: ¥20,600,000、Indirect Cost: ¥6,180,000)
Fiscal Year 2014: ¥6,500,000 (Direct Cost: ¥5,000,000、Indirect Cost: ¥1,500,000)
Fiscal Year 2013: ¥6,760,000 (Direct Cost: ¥5,200,000、Indirect Cost: ¥1,560,000)
Fiscal Year 2012: ¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
|
|---|
| Outline of Final Research Achievements |
This work aims a development of SiC-based transistors with novel operating principle utilizing transparency of SiC against visible and infrared light. For this purpose, control of Schottky barrier height (SBH) at metal/SiC interface and improvement of MOS interface properties are the technological challenges. Device simulation revealed that SBH smaller than 0.3 eV is required for normal operation of SiC MOSFET with metal source/drain. To obtain such small SBH, we examined Ba electrode which has very low vacuum work function (2-3 eV) compared with electron affinity of SiC (3.6 eV), but instability of Ba layer due to its high reactivity against atmosphere was a serious roadblock. We found that bilayer electrode consisting of thin Ba layer with thick Al capping demonstrated a stable effective work function of 3.1 eV.
|
