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Studies on THz sampling and signal generation technologies based on MEMS/resonant tunneling diode integration

Research Project

Project/Area Number 25249042
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionUniversity of Toyama

Principal Investigator

Maezawa Koichi  富山大学, 大学院理工学研究部(工学), 教授 (90301217)

Co-Investigator(Kenkyū-buntansha) 石井 仁  豊橋技術科学大学, その他部局等, その他 (20506175)
安藤 浩哉  豊田工業高等専門学校, その他部局等, 教授 (30212674)
Co-Investigator(Renkei-kenkyūsha) MORI Masayuki  富山大学, 大学院理工学研究部, 准教授 (90303213)
Project Period (FY) 2013-05-31 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥46,410,000 (Direct Cost: ¥35,700,000、Indirect Cost: ¥10,710,000)
Fiscal Year 2016: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2015: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2014: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Fiscal Year 2013: ¥28,340,000 (Direct Cost: ¥21,800,000、Indirect Cost: ¥6,540,000)
Keywords共鳴トンネル / テラヘルツ / MEMS / サンプリング / 異種材料集積 / InP / パルス / 発振器 / マイクロ・ナノデバイス / 異種材料デバイス集積技術
Outline of Final Research Achievements

The purpose of this research is to develop all-electronic THz spectroscopy system on a chip based on a resonant tunneling diode (RTD), Micro electro mechanical system (MEMS) and heterogeneous integration technology. Various device and circuit technologies, such as RTD pulse generators, MEMS phase shifters, wide-range variable-frequency oscillators, and super regenerative detectors, have been investigated. A prototype circuit of the samplers for the THz spectroscopy was also fabricated and demonstrated the basic operation.

Report

(5 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (39 results)

All 2017 2016 2015 2014 2013

All Journal Article (6 results) (of which Peer Reviewed: 5 results,  Acknowledgement Compliant: 2 results) Presentation (31 results) (of which Int'l Joint Research: 6 results,  Invited: 5 results) Book (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Experimental demonstration of strain detection using resonant tunneling delta-sigma modulation sensors2017

    • Author(s)
      Takumi Tajika, Yuichiro Kakutani, Masayuki Mori and Koichi Maezawa
    • Journal Title

      Phys. Status Solidi A

      Volume: 214 Issue: 3 Pages: 1600548-1600548

    • DOI

      10.1002/pssa.201600548

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Resonant Tunneling Super Regenerative Detectors Detecting Higher Frequency Signals than Their Free-Running Oscillation Frequency2015

    • Author(s)
      J. Pan, Y. Kakutani, T. Nakayama, M. Mori, K. Maezawa
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E98.C Issue: 3 Pages: 260-266

    • DOI

      10.1587/transele.E98.C.260

    • NAID

      130004841713

    • ISSN
      0916-8524, 1745-1353
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 溶融Gaバンプを用いたFluidic Self-Assemblyで配置された微小デバイスの熱的信頼性2014

    • Author(s)
      中野純、柴田知明、森田弘樹、坂本宙、森雅之、前澤宏一
    • Journal Title

      電子情報通信学会論文誌 C

      Volume: J97-C Pages: 124-125

    • NAID

      110009798392

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Possibility of THz detection with resonant tunneling super regenerative detectors based on extremely high order harmonics2013

    • Author(s)
      K. Maezawa, J. Pan, D. Wu, Y. Kakutani, J. Nakano, M. Mori
    • Journal Title

      IEICE Electronics Express

      Volume: 10 Issue: 20 Pages: 20130676-20130676

    • DOI

      10.1587/elex.10.20130676

    • NAID

      130003383464

    • ISSN
      1349-2543
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fluidic Self-Assembly Using Molten Ga Bumps and Its Application to Resonant Tunneling Diodes2013

    • Author(s)
      J. Nakano, T. Shibata, H. Morita, H. Sakamoto, M. Mori, K. Maezawa
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Issue: 11R Pages: 116501-116501

    • DOI

      10.7567/jjap.52.116501

    • NAID

      210000143078

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 半導体の新しいアプリケーションを拓く異種材料デバイス集積化のための  Fluidic Self-Assembly技術2013

    • Author(s)
      前澤宏一
    • Journal Title

      日立国際電気技報

      Volume: 14 Pages: 1-6

    • NAID

      40020009891

    • Related Report
      2013 Annual Research Report
  • [Presentation] 共鳴トンネル素子を装荷した伝送線路発振器の高調波生成に関する線形モデル解析2017

    • Author(s)
      前澤宏一、岸 拓郎、森 雅之
    • Organizer
      電子情報通信学会、電子デバイス研究会
    • Place of Presentation
      札幌
    • Related Report
      2016 Annual Research Report
  • [Presentation] 周波数ΔΣ変調方式を用いた共鳴トンネル歪センサ2016

    • Author(s)
      前澤 宏一,角谷 祐一郎,田近 拓巳,森 雅之
    • Organizer
      集積化 MEMSシンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] 共鳴トンネル素子装荷伝送線路を用いた高次高調波発振器の設計指針と注入同期2016

    • Author(s)
      前澤宏一、岸拓郎、森雅之
    • Organizer
      2016年電子情報通信学会ソサイエティ大会
    • Place of Presentation
      札幌
    • Year and Date
      2016-09-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] 周波数ΔΣ変調器のデジタル出力センサへの応用2016

    • Author(s)
      前澤宏一、藤野舜也、山岡昂博、山川雅暉、島田知輝、角谷祐一郎、田近拓巳、森 雅之
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      機械振興会館
    • Year and Date
      2016-08-09
    • Related Report
      2016 Annual Research Report
  • [Presentation] Experimental Demonstration of Strain Detection Using Resonant Tunneling Delta-Sigma Modulation Sensors2016

    • Author(s)
      Takumi Tajika, Yuichiro Kakutani, Masayuki Mori and Koichi Maezawa
    • Organizer
      43rd International Symposium on Compound Semiconductors (ISCS)
    • Place of Presentation
      Toyama, Japan
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Injection Locking and High Order Harmonic Generation in Transmission Line Oscillators Loaded with Resonant Tunneling Diodes2016

    • Author(s)
      Koichi Maezawa, Takuro Kishi and Masayuki Mori
    • Organizer
      40th Workshop on Compound Semiconductor Devices and Integrated Circuits held in Europe(WOCSDICE)
    • Place of Presentation
      Aveiro, Portugal
    • Year and Date
      2016-06-06
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Impulse sensitivity function study of the phase noise in resonant tunneling diode oscillators2016

    • Author(s)
      K. Maezawa and M. Mori
    • Organizer
      2016 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD2016)
    • Place of Presentation
      Hakodate, Japan
    • Year and Date
      2016-06-04
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 共鳴トンネル素子を用いた超高周波回路とその集積技術2016

    • Author(s)
      前澤宏一
    • Organizer
      有機・無機エレクトロニクスシンポジウム
    • Place of Presentation
      金沢
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Fluidic Self-Assembly高効率化実験のためのダミーブロック作製2016

    • Author(s)
      高山一希、中野友寛、水戸俊宏、森雅之、前澤宏一
    • Organizer
      平成28年応用物理学会北陸・信越支部学術講演会
    • Place of Presentation
      富山
    • Related Report
      2016 Annual Research Report
  • [Presentation] A Resonant Tunneling Super Regenerative Detector with Input/Output Isolation and Improved Sensitivity2015

    • Author(s)
      K. Hu, J. Pan, M. Mori, K. Maezawa
    • Organizer
      International Conference on Solid State Devices and Materials(SSDM 2015)
    • Place of Presentation
      Sapporo, Hokkaido
    • Year and Date
      2015-09-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Proposal of a Simple MEMS Phase Shifter Based on Effective Dielectric Constant Modulation2015

    • Author(s)
      D. Nakano, M. Mori, K. Maezawa, H. Ishii, H. Andoh
    • Organizer
      International Conference on Solid State Devices and Materials(SSDM 2015)
    • Place of Presentation
      Sapporo, Hokkaido
    • Year and Date
      2015-09-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] ΔΣ型歪センサのためのRTD装荷カンチレバーの検討2015

    • Author(s)
      角谷祐一郎、森雅之、前澤宏一
    • Organizer
      2015年電子情報通信学会ソサイエティ大会
    • Place of Presentation
      東北大学川内北キャンパス
    • Year and Date
      2015-09-08
    • Related Report
      2015 Annual Research Report
  • [Presentation] Ga溶融バンプを用いたFluidic Self Assemblyによる異種材料集積化技術2015

    • Author(s)
      前澤宏一、中野 純、柴田知明、森田弘樹、坂本宙、山田悟史、森雅之
    • Organizer
      電子情報通信学会信頼性(R)研究会
    • Place of Presentation
      青森
    • Year and Date
      2015-08-27
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] InP HEMT micro blocks transplanted on Si substrates using Ga micro bumps2015

    • Author(s)
      Satoshi Yamada, Hiroshi Sakamoto, Jun Nakano, Masayuki Mori and Koichi Maezawa
    • Organizer
      Topical Workshop on Heterostructure Microelectronics 2015 (TWHM 2015)
    • Place of Presentation
      Takayama, Gifu
    • Year and Date
      2015-08-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ultrahigh frequency circuits and a novel integration technology for resonant tunneling diodes2015

    • Author(s)
      Koichi Maezawa
    • Organizer
      The 6th International Conference on Integrated Circuits, Design, and Verification (ICDV 2015)/2015 Vietnam Japan MicroWave (VJMW 2015)
    • Place of Presentation
      Ho Chi Minh City, Vietnam
    • Year and Date
      2015-08-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 共鳴トンネル素子を用いたΔΣ型歪みセンサ2015

    • Author(s)
      前澤宏一、角谷祐一郎、中山大周、田近拓巳、森雅之
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      金沢市
    • Year and Date
      2015-07-25
    • Related Report
      2015 Annual Research Report
  • [Presentation] ナノデバイスの強い非線形性とその超高周波集積回路への応用2015

    • Author(s)
      前澤宏一
    • Organizer
      第2回可視化情報学会・可視化共感型防災教育研究会
    • Place of Presentation
      富山大学
    • Year and Date
      2015-03-25
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] THz帯域を目指した新構造可変位相シフタ2015

    • Author(s)
      中野大輔、森雅之、前澤宏一、石井仁、安藤浩哉
    • Organizer
      2015年電子情報通信学会総合大会
    • Place of Presentation
      立命館大学びわこ・くさつキャンパス
    • Year and Date
      2015-03-10 – 2015-03-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] 共鳴トンネル超再生検波回路における基本波を超える高周波信号の検波2015

    • Author(s)
      前澤宏一、潘杰、角谷祐一郎、中山大周、森雅之
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      北海道大学
    • Year and Date
      2015-02-05 – 2015-02-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] 共鳴トンネルダイオードを用いたサンプリング回路の作製と評価2014

    • Author(s)
      中山大周、呉東坡、角谷祐一郎、潘杰、森雅之、前澤宏一
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2014-09-23 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] RTD装荷微小カンチレバーを用いたΔΣ型歪みセンサーのための発振回路の検討2014

    • Author(s)
      角谷祐一郎、中山大周、潘杰、森雅之、前澤宏一
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2014-09-23 – 2014-09-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] 溶融Gaバンプを用いたFluidic Self-Assemblyで配置された微小デバイスの熱的信頼性2014

    • Author(s)
      中野純、 柴田知明、森田弘樹、坂本宙、 森 雅之、 前澤 宏一
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      徳島大学
    • Year and Date
      2014-09-23 – 2014-09-26
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Experimental Demonstration of Resonant Tunneling Super Regenerative Detectors Detecting High Order Harmonic Signals on Si substrate2014

    • Author(s)
      J. Pan, Y. Kakutani, T. Nakayama, M. Mori and K. Maezawa
    • Organizer
      2014 International Conference on Solid State Devices and Materials (SSDM 2014)
    • Place of Presentation
      つくば
    • Year and Date
      2014-09-08 – 2014-09-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Thermal Reliability of Transplanted Devices by Fluidic Self-Assembly Using Molten Ga Bumps2014

    • Author(s)
      K. Maezawa, J. Nakano, T. Shibata, H. Morita, H. Sakamoto, M. Mori
    • Organizer
      2014 Workshop on Compound Semiconductor Devices and Integrated Circuits (WOCSDICE 2014)
    • Place of Presentation
      Delphi, Greece
    • Year and Date
      2014-06-18 – 2014-06-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ultra short pulse generators using a resonant tunneling diode transplanted on Si substrate2014

    • Author(s)
      H. Sakamoto, S. Yamada, J. Nakano, H. Morita, M. Mori and K. Maezawa
    • Organizer
      2014 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices (AWAD 2014)
    • Place of Presentation
      金沢
    • Year and Date
      2014-06-01 – 2014-06-03
    • Related Report
      2014 Annual Research Report
  • [Presentation] 共鳴トンネル発振器のセンサー応用2014

    • Author(s)
      前澤宏一、潘 杰、角谷祐一郎、中野 純、森 雅之
    • Organizer
      電子情報通信学会 電子デバイス研究会
    • Place of Presentation
      北海道大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 異種材料デバイス集積化のための低融点金属バンプの信頼性2013

    • Author(s)
      坂本宙、中野純、柴田知明、森田弘樹、森雅之、前澤宏一
    • Organizer
      応用物理学会北陸・信越支部学術講演会
    • Place of Presentation
      金沢工業大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 共鳴トンネルダイオードを用いた極短パルス生成器の高出力化2013

    • Author(s)
      呉東坡、水牧勝太郎、潘杰、森雅之、前澤宏一
    • Organizer
      電子情報通信学会、電子デバイス研究会
    • Place of Presentation
      富山大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高性能共鳴トンネルダイオードのための溶融ガリウムバンプを用いたFluidic Self-Assembly2013

    • Author(s)
      中野純、柴田知明、森田弘樹、坂本宙、森雅之、前澤宏一
    • Organizer
      電子情報通信学会、電子デバイス研究会
    • Place of Presentation
      富山大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] RF large signal characterization of active transmission lines loaded with InGaAs/AlAs resonant tunneling diode pairs2013

    • Author(s)
      J. Pan, D. Wu, M. Mori, K. Maezawa
    • Organizer
      Topical Workshop on Heterostructure Microelectronics
    • Place of Presentation
      Hakodate
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication and characterization of micromachined cantilever loaded with a resonant tunneling diode for delta-sigma type strain sensor applications2013

    • Author(s)
      Y. Kakutani, Dongpo Wu, J. Pan, J. Nakano, M. Mori, K. Maezawa
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Fukuoka
    • Related Report
      2013 Annual Research Report
  • [Book] Encyclopedia of Electrical and Electronics Engineering, "Resonant Tunneling Diodes"2014

    • Author(s)
      K. Maezawa
    • Total Pages
      14
    • Publisher
      Wiley
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 位相シフタ2015

    • Inventor(s)
      前澤宏一
    • Industrial Property Rights Holder
      前澤宏一
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-033217
    • Filing Date
      2015-02-23
    • Related Report
      2014 Annual Research Report

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Published: 2013-06-20   Modified: 2019-07-29  

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